Rotating mirror device and optical apparatus

Abstract

The application relates to the technical field of optical equipment, and discloses a rotating mirror device and optical equipment. The rotating mirror device comprises a vacuum cavity, a mirror, a lens fixing seat, a fixing shaft, a transmission shaft, a heat dissipation assembly and a motor. One end of the transmission shaft extends into the vacuum cavity, and the other end is located outside the vacuum cavity and is in transmission connection with the motor outside the vacuum cavity. The fixing shaft and the mirror are located in the vacuum cavity, the fixing shaft is in transmission connection with the transmission shaft, and the mirror is fixed to the fixing shaft. The lens fixing seat is fixedly arranged in the vacuum cavity. The heat dissipation assembly comprises a first heat dissipation part, the first heat dissipation part comprises a cooling flow channel and a cooling medium filled in the cooling flow channel, one end of the cooling flow channel is located in the fixing shaft, and the other end extends to the part of the transmission shaft located outside the vacuum cavity. The rotating mirror device can dissipate heat from the mirror.

Description

Technical Field

[0001] This application relates to the field of optical equipment technology, and in particular to a rotating reflector device and optical equipment. Background Technology

[0002] Precision optical equipment requires an ultra-high vacuum environment inside, with a vacuum level requirement of up to 10. -6 This places numerous demands on the internal optical component mounting structure, such as sealing and isolation, and the absence of non-metallic materials within the equipment. When the equipment is connected to a high-power light source, the intense beam inputs high energy to the surface of the optical components, reaching millions of kilometres per square centimeter. Under these conditions, the optical components generate a significant amount of heat, and if this heat cannot be dissipated in time, it will affect the lifespan of the optical components. Summary of the Invention

[0003] This application provides a rotating reflector device and optical equipment for heat dissipation of the reflector.

[0004] On one hand, this application provides a rotating reflector device, which may include a vacuum chamber, a reflector, a lens holder, a fixed shaft, a drive shaft, a heat dissipation assembly, and a motor. The vacuum chamber wall may have a through hole. One end of the drive shaft passes through the through hole and extends into the vacuum chamber, while the other end is located outside the vacuum chamber and is connected to a motor located outside the vacuum chamber. The fixed shaft and the reflector are located within the vacuum chamber, and the fixed shaft is connected to the drive shaft. The reflector is fixedly connected to the end of the fixed shaft opposite to the drive shaft. The lens holder is fixedly disposed within the vacuum chamber and is arranged around the periphery of the fixed shaft. The heat dissipation assembly may include a first heat dissipation section, which may include a cooling channel and a cooling medium. One end of the cooling channel is located inside the fixed shaft, and the other end extends to the portion of the drive shaft outside the vacuum chamber. The cooling medium fills the cooling channel.

[0005] The rotating reflector device provided in this application uses a heat dissipation component installed inside a vacuum chamber. The heat generated by the reflector is transferred through a cooling channel to the part of the drive shaft located outside the vacuum chamber by a cooling medium. Since part of the drive shaft is located in the atmospheric environment, the heat can be dissipated into the air, thereby completing the heat dissipation of the reflector.

[0006] In some possible implementations, the heat dissipation assembly may further enclose a second heat dissipation section, which may include a water-cooled mounting base and a liquid-cooled impeller. The water-cooled mounting base may be fitted onto the portion of the drive shaft located outside the vacuum chamber. The water-cooled mounting base contains a liquid-cooled cavity, which may be annular and fitted onto the surface of the drive shaft. The liquid-cooled impeller may be located within the liquid-cooled cavity, fitted onto the drive shaft, and fixed relative to it. This liquid-cooled cavity may be connected to an external cold source, allowing it to be filled with coolant. When the drive shaft rotates, it drives the liquid-cooled impeller to rotate, thereby carrying away the coolant that has absorbed heat from the cooling medium, thus completing the heat dissipation process.

[0007] In some possible implementations, a sealed cavity is provided between the water-cooled mounting base and the drive shaft. This sealed cavity may be located on the side of the liquid-cooled impeller facing the sealed cavity. The rotating reflector device may also include a sealing assembly, which may be located within the sealed cavity. The sealing assembly may include a first sealing ring, a sealing friction material, and a second sealing ring. The first sealing ring is fixedly connected to the drive shaft, the sealing ring is fixedly connected to the water-cooled mounting base, and the sealing friction material is located between the first and second sealing rings. The first sealing ring, through the cooperation of the sealing friction material with the second sealing ring, achieves a dynamic seal between the second sealing ring and the water-cooled mounting base.

[0008] In some possible implementations, there can be two sealing components and two corresponding sealing cavities. The two sealing cavities are located on both sides of the liquid cooling cavity, and the sealing components are located in the two sealing cavities respectively. This not only prevents coolant from entering the vacuum cavity, but also prevents coolant from entering the motor.

[0009] In some possible implementations, the sealing assembly may further include two sealing rings, one of which is located between the first sealing ring and the drive shaft, and the other is located between the second sealing ring and the water-cooled mounting base. By providing the sealing rings, a static seal can be achieved between the water-cooled mounting base and the second sealing ring, as well as a static seal between the first sealing ring and the drive shaft.

[0010] In some possible implementations, the water-cooled mounting base may also be provided with a flushing port, one end of which communicates with the sealing cavity and the other end with the outside. The flushing port can deliver flushing fluid to the sealing assembly and flush the sealing assembly, washing away debris generated by the sealing friction material, thereby ensuring the frictional fit between the first sealing ring and the sealing friction material.

[0011] In some possible implementations, the rotating mirror assembly may also include a magnetic levitation positioning component, which may be disposed between the fixed axis and the lens mounting base. The magnetic levitation positioning component may include an axial magnetic levitation positioning device and a radial magnetic levitation positioning device, thereby being used for positioning the fixed axis in the axial and radial directions.

[0012] In some possible implementations, the magnetic levitation positioning assembly may include an axial magnetic levitation positioning device, which may include an axial magnetic levitation rotor and an axial magnetic levitation stator. The axial magnetic levitation rotor is sleeved on a fixed shaft, and the axial magnetic levitation stator is fixedly mounted on a lens mounting base. The axial magnetic levitation stator and the axial magnetic levitation rotor are coaxially arranged, with a gap between them along the axial direction. Due to the magnetic levitation force between the axial magnetic levitation rotor and the axial magnetic levitation stator, and the axial magnetic levitation positioning remaining fixed, when the fixed shaft rotates, the magnetic levitation force can provide axial positioning for the fixed shaft.

[0013] In some possible implementations, the fixed shaft may include a first side and a second side that are axially opposite each other. Both the first side and the second side may be provided with axial magnetic levitation positioning devices, and the two axial magnetic levitation positioning devices may be symmetrically arranged so that the axial magnetic levitation positioning devices on both sides exert opposite forces on the fixed shaft, thereby further enabling precise positioning of the fixed shaft.

[0014] In some possible implementations, the magnetic levitation positioning assembly may include a radial magnetic levitation positioning device, which may include a radial magnetic levitation rotor and a radial magnetic levitation stator. The radial magnetic levitation rotor is sleeved on a fixed shaft, and the radial magnetic levitation stator is fixedly mounted on a lens mounting base. The radial magnetic levitation stator is sleeved on the surface of the radial magnetic levitation rotor and spaced apart from it. Due to the magnetic levitation force between the radial magnetic levitation rotor and the radial magnetic levitation stator, and the radial magnetic levitation positioning remaining fixed, when the fixed shaft rotates, the magnetic levitation force can provide radial positioning for the fixed shaft.

[0015] In some possible implementations, radial magnetic levitation positioning devices can be set on both sides of the fixed shaft along the axial direction. By setting two sets of radial magnetic levitation positioning devices, the fixed shaft can be further precisely positioned.

[0016] In some possible implementations, the drive shaft may include a first shaft segment and a second shaft segment. The first shaft segment is located within the vacuum chamber, and one end of the first shaft segment is drive-connected to a fixed shaft. One end of the second shaft segment extends into the vacuum chamber and is connected to the first shaft segment via a flexible coupling. The other end of the second shaft segment is drive-connected to a motor. By using a flexible coupling to connect the first and second shaft segments, when the second shaft segment vibrates and transmits power to the first shaft segment, the flexible coupling absorbs the vibration, thus preventing vibration when the first shaft segment transmits power to the fixed shaft.

[0017] In some possible implementations, the flexible coupling incorporates an elastic damping structure. The axial elastic damping force of this structure is less than the magnetic levitation force of the axial magnetic levitation positioning device, and the radial elastic damping force is less than the magnetic levitation force of the radial magnetic levitation positioning device. When the second shaft segment transmits power to the first shaft segment, both the axial and radial vibrations of the second shaft segment are absorbed by the metallic elastic damping structure, without affecting the positioning function of the radial and axial magnetic levitation positioning devices on the reflector, thus ensuring the stability of the reflector during rotation.

[0018] In some possible implementations, the rotating reflector device may further include a magnetohydrodynamic (MHD) sealing assembly located between the through-hole in the cavity wall and the drive shaft. The MHD sealing assembly may include a sealing housing, a sealing base, and a magnetohydrodynamic fluid. The sealing housing is fitted onto the second shaft segment and fixed to the inner wall of the through-hole by screws. A receiving cavity is formed between the sealing housing and the second shaft segment, and the magnetohydrodynamic fluid is located within the receiving cavity. The sealing base is located on the side of the cavity wall away from the reflector, fitted onto the surface of the drive shaft, and fixedly connected to the cavity wall. This MHD sealing assembly forms a double seal through the sealing base and the magnetohydrodynamic fluid, ensuring that there is no non-metallic outgassing or friction within the vacuum cavity, thus guaranteeing a clean environment within the vacuum cavity.

[0019] On the other hand, this application may provide an optical device that may include a device body and a rotating reflector device as described in any of the above embodiments, wherein the rotating reflector is located within the device body. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of an optical device in an embodiment of this application;

[0021] Figure 2 for Figure 1 Axonometric drawing of the main body of the central drive shaft;

[0022] Figure 3 for Figure 1 A cross-sectional structural diagram of a rotating reflector device;

[0023] Figure 4 for Figure 3 A cross-sectional structural schematic diagram of a magnetofluid sealing assembly;

[0024] Figure 5 for Figure 3 Enlarged view of the structure at the water-cooled mounting base.

[0025] Figure label:

[0026] 1-Equipment body; 2-Rotating reflector device; 3-Light source; 10-Reflector; 20-Motor; 30-Drive shaft; 31-First shaft section; 32-Second shaft section; 321-First step structure; 322-Second step structure; 40-Lens fixing seat; 41-First fixing part; 42-Second fixing part; 50-Fixed shaft; 60-Radial magnetic levitation positioning device; 61-Radial magnetic levitation rotor; 62-Radial magnetic levitation stator; 70-Axial magnetic levitation positioning device; 71-Axial magnetic levitation rotor; 72-Axial magnetic levitation stator; 80-Vacuum cavity; 81-Cavity wall; 90-Magnetic fluid sealing assembly; 91-Sealer Casing; 92-Sealed base; 93-Bearing; 931-Inner ring; 932-Outer ring; 94-Magnetofluid; 100-Flexible coupling; 101-Flexible damping structure; 110-First heat dissipation unit; 111-Flow channel; 1111-First sub-flow channel; 1112-Second sub-flow channel; 120-Second heat dissipation unit; 121-Water-cooled mounting base; 1211-Liquid-cooled cavity; 1212-Flush port; 122-Liquid-cooled impeller; 1221-Blade; 123-Sealing assembly; 1231-First sealing ring; 1232-Sealing friction material; 1233-Second sealing ring; 1234-Sealing ring; 112-Phase change metal. Detailed Implementation

[0027] The terminology used in the following embodiments is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. As used in the specification and appended claims of this application, the singular expressions “a,” “an,” “the,” “the,” “the,” and “this” are intended to also include expressions such as “one or more” unless the context clearly indicates otherwise.

[0028] References to "one embodiment" or "some embodiments" as described in this specification mean that one or more embodiments of this application include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized.

[0029] Precision optical equipment requires an ultra-high vacuum environment, with a vacuum level requirement of up to 10. -6This high pressure (Pa) places numerous demands on the internal optical component mounting structure, such as requiring airtight sealing and prohibiting the presence of non-metallic materials inside the equipment. Furthermore, the high-vacuum clean environment imposes significant limitations on the molecular content of water molecules and hydrocarbons. When optical equipment is connected to high-power light sources, the intense beam inputs high energy to the surface of the optical components—up to megawatts per square centimeter. To handle such high-power beams, the receiving area of ​​the optical components needs to be increased; therefore, large-sized optical lenses typically have diameters exceeding 100 mm, and some can even reach 4 μm. Due to the high surface precision of optical components, they are highly sensitive to temperature changes. Under such intense beam illumination, failure to promptly dissipate heat will cause changes in the surface shape of the optical components.

[0030] In beam shaping, rotating optical elements are typically used. With the rotation axis perpendicular to the optical surface, the surface structure of the optical element can be used to modulate the light emitted from the light source. To adapt to increasingly higher repetition rates of light sources and increasingly shorter beam exposure times, the rotational speed of the optical element needs to reach over 1000 rpm, which places high demands on the vibration and precise positioning of the optical equipment.

[0031] In summary, current optical equipment cannot be adapted to high-vacuum environments due to its inability to achieve complete sealing and isolation, and it also cannot meet the requirements for internal vacuum cleanliness. Furthermore, the ineffective heat dissipation of the reflectors makes them prone to damage such as surface deformation. Additionally, the low positioning accuracy of the reflectors results in large-amplitude vibrations during high-speed rotation of large-sized lenses, making it difficult to control positioning accuracy.

[0032] Based on this, embodiments of this application provide a rotating mirror device and optical equipment that simultaneously meet requirements such as sealing and isolation, vacuum cleanliness, heat dissipation, and precise positioning. The rotating mirror device and optical equipment will be described below with reference to specific embodiments.

[0033] refer to Figure 1 , Figure 1 This is a schematic diagram of an optical device according to an embodiment of this application. The optical device may include a device body 1, a rotating reflector device 2, and a light source 3, wherein both the rotating reflector device 2 and the light source 3 are located within the device body 1. The rotating reflector device 2 may include a reflector 10, a motor 20, and a drive shaft 30. The reflector 10 is connected to the drive shaft 30, and the drive shaft 30 is connected to the motor 20, so that the power output by the motor 20 can be transmitted to the reflector 10 through the drive shaft 30, thereby driving the reflector 10 to rotate. The light source 3 is located on the side of the reflector 10 facing away from the motor 20 and is used to provide light to the reflector 10.

[0034] refer to Figure 2 and Figure 3 , Figure 2 for Figure 1 Axonometric drawing of the main body of the central drive shaft. Figure 3 for Figure 1 A cross-sectional structural schematic diagram of a rotating reflector device. In addition to the reflector 10, drive shaft 30, and motor mentioned above, the rotating reflector device in this embodiment may also include a vacuum chamber 80, a lens holder 40, a fixed shaft 50, and a magnetic levitation positioning assembly (see reference). Figure 3 (60 and 70 in the text), magnetohydrodynamic sealing assembly 90, and heat dissipation assembly (see reference) Figure 3 (110 and 120 in the middle).

[0035] A fixed shaft 50 is located inside a vacuum chamber 80, and a reflector 10 is fixedly mounted on one end of the fixed shaft 50. A through hole may be provided in the wall 81 of the vacuum chamber 80, through which one end of a drive shaft 30 can pass and extend into the vacuum chamber 80, and be drively connected to the end of the fixed shaft 50 away from the reflector 10. The axis of the fixed shaft 50 can be aligned with the axis of the drive shaft 30 to improve the smoothness of power transmission between the drive shaft 30 and the fixed shaft 50. The other end of the drive shaft 30 is located outside the vacuum chamber 80 and is drively connected to a motor. Thus, the power output from the motor is transmitted to the drive shaft 30, and further transmitted to the fixed shaft 50 through the drive shaft 30, causing the fixed shaft 50 and the reflector 10 mounted on the fixed shaft to rotate under the drive of the drive shaft 30.

[0036] The drive shaft 30 may include a first shaft segment 31 and a second shaft segment 32. The first shaft segment 31 may be located inside the vacuum chamber 80 and is connected to the fixed shaft 50. One end of the second shaft segment 32 is located outside the vacuum chamber 80 and is connected to the motor drive. The other end passes through the chamber wall 81 and extends into the vacuum chamber 80, and is connected to the first shaft segment 31 through an elastic coupling 100. When the output power of the motor is transmitted to the second shaft segment 32, it can be transmitted from the second shaft segment 32 to the first shaft segment 31 through the elastic coupling 100, and then to the fixed shaft 50. The elastic coupling 100 is provided with an elastic damping structure 101. The material of the elastic damping structure may be metal, silicone, rubber, etc. When the second shaft segment 32 vibrates during rotation, the vibration can be absorbed by the elastic damping structure 101, so that the vibration is not transmitted to the first shaft segment 31, thereby reducing the risk of vibration of the reflector 10 during rotation.

[0037] A magnetohydrodynamic (MHD) sealing assembly 90 is disposed within a through-hole in the cavity wall 81 to isolate the vacuum cavity 80 from the outside, thereby ensuring the airtightness of the vacuum cavity 80. The MHD sealing assembly 90 may include a sealing housing 91, a sealing base 92, and a magnetohydrodynamic (MHD) fluid 94. In the radial direction, the sealing housing 91 may be fitted onto the surface of the second shaft segment 32 and fixed to the inner wall of the through-hole in the cavity wall 81 by screws. The sealing housing 91 and the second shaft segment 32 may be spaced apart, forming an annular receiving cavity between them, within which both the sealing base 92 and the MHD fluid 94 are located.

[0038] The sealing base 92 is located on the side of the sealing housing 91 away from the reflector 10. The sealing base 92 is sleeved on the surface of the second shaft segment 32 and can be fixedly connected to the sealing housing 91 by screws to form a seal between the vacuum cavity 80 and the outside. In addition, a bearing assembly can be provided, which may include two bearings 93. The two bearings 93 can be arranged along the axial direction of the second shaft segment 32. In specific implementation, combined with... Figure 3 and Figure 4 The bearing 93 can be a cylindrical roller bearing. The inner ring 931 of the bearing can be fixed to the second shaft section 32, and the outer ring 932 can be fixedly connected to the sealing housing 91. The portion of the second shaft section 32 located between the two bearings 93 can have a protruding structure. This protruding structure can extend between the two bearings 93, and there can be a certain gap between the protruding structure and the sealing housing 91. In this case, the two bearings 93, the sealing housing 91, and the protruding structure can form a relatively closed space, and the magnetohydrodynamic fluid 94 is located in this space, thereby forming a dynamic seal with the second shaft section 32. In this embodiment, the magnetic fluid sealing assembly 90 can form a double seal through the sealing base 92 and the magnetic fluid 94. Compared with traditional sealing structures such as sealing rings, when the sealing ring is inside the vacuum chamber 80, there will be a gas release phenomenon, which will destroy the clean environment inside the vacuum chamber 80. In this embodiment, by setting the magnetic fluid sealing assembly 90, there is no non-metallic gas release inside the vacuum chamber 80. At the same time, it can also avoid friction between the sealing ring and the drive shaft 30, thus ensuring the clean environment inside the vacuum chamber 80.

[0039] The lens holder 40 is fixedly installed inside the vacuum chamber 80 and can be arranged around the periphery of the fixed shaft 50. There can be a certain space between the surface of the lens holder 40 and the fixed shaft 50, and the magnetic levitation positioning assembly can be located in this space. The magnetic levitation positioning assembly can include a radial magnetic levitation positioning device 60 and an axial magnetic levitation positioning device 70, which can be used to position the fixed shaft 50.

[0040] The lens holder 40 can be a split structure. The fixing shaft 50 includes a first side and a second side that are axially opposite each other. The first side can also be understood as the near-light side, which is the side closer to the light source. The second side can be understood as the far-light side, which is the side farther away from the light source. The lens holder 40 may include a first fixing part 41 disposed on the near-light side and a second fixing part 42 disposed on the far-light side. The two are arranged along the axial direction of the fixing shaft 50. A certain space can be formed between the first fixing part 41 and the fixing shaft 50, and a certain space can also be formed between the second fixing part 42 and the fixing shaft 50. In this case, an axial magnetic levitation positioning device 70 and a radial magnetic levitation positioning device 60 can be respectively disposed between the first fixing part 41 and the fixing shaft 50 and between the second fixing part 42 and the fixing shaft 50 to improve the positioning accuracy of the fixing shaft 50.

[0041] Taking the near-beam side as an example, along the axial direction, the radial magnetic levitation positioning device 60 can be located between the axial magnetic levitation positioning device 70 and the reflector 10, that is, the radial magnetic levitation positioning device 60 is closer to the reflector 10. The radial magnetic levitation positioning device 60 includes a radial magnetic levitation rotor 61 and a radial magnetic levitation stator 62. The radial magnetic levitation rotor 61 can be a ring-shaped structure, which is sleeved on the fixed shaft 50 and kept relatively fixed to the fixed shaft 50. In this way, when the fixed shaft 50 rotates, it can drive the radial magnetic levitation rotor 61 to rotate. The radial magnetic levitation stator 62 can be fixedly installed on the lens mounting base 40 by screws. The radial magnetic levitation stator 62 can also be a ring-shaped structure and sleeved on the surface of the radial magnetic levitation rotor 61. The two can be spaced apart. This can also be understood as follows: the radial magnetic levitation rotor 61 and the radial magnetic levitation stator 62 are concentrically arranged. The radial magnetic levitation rotor 61 exerts a repulsive force on the radial magnetic levitation stator 62, causing the radial magnetic levitation stator 62 to move away from the radial magnetic levitation rotor 61. Correspondingly, the radial magnetic levitation stator 62 also exerts a repulsive force on the radial magnetic levitation rotor 61, causing the radial magnetic levitation rotor 61 to move away from the radial magnetic levitation stator 62. It can be understood that the repulsive forces experienced by the radial magnetic levitation rotor 61 and the radial magnetic levitation stator 62 are equal in magnitude and opposite in direction. At this time, the repulsive force between the radial magnetic levitation rotor 61 and the radial magnetic levitation stator 62 is the magnetic levitation force of the radial magnetic levitation positioning device 60. Since the position of the radial magnetic levitation stator 62 remains fixed, when the radial magnetic levitation rotor 61 rotates with the fixed shaft 50, under the magnetic levitation force, a fixed radial gap can always be maintained between the radial magnetic levitation rotor 61 and the radial magnetic levitation stator 62, thereby achieving the radial positioning of the fixed shaft 50.

[0042] For the radial magnetic levitation positioning device 60 and the axial magnetic levitation positioning device 70 located between the second fixed part 42 and the fixed shaft 50, the radial magnetic levitation positioning device 60 can be located on the side of the axial magnetic levitation positioning device 70 away from the reflector 10. The specific structure of the radial magnetic levitation positioning device 60 on the far beam side is similar to that on the near beam side, and will not be described in detail here.

[0043] The axial magnetic levitation positioning device 70 may include an axial magnetic levitation rotor 71 and an axial magnetic levitation stator 72. The axial magnetic levitation rotor 71 may be a ring-shaped structure, which is sleeved on the fixed shaft 50 and kept relatively fixed to the fixed shaft 50. In this way, when the fixed shaft 50 rotates, it can drive the axial magnetic levitation rotor 71 to rotate. The axial magnetic levitation stator 72 can be fixedly installed on the lens mounting base 40 by screws. The axial magnetic levitation stator 72 may also be a ring-shaped structure and coaxially arranged with the axial magnetic levitation rotor 71. It can also be understood that the axial magnetic levitation rotor 71 and the axial magnetic levitation stator 72 are arranged along the axial direction of the fixed shaft 50. The axial magnetic levitation rotor 71 exerts a repulsive force on the axial magnetic levitation stator 72, causing the stator 72 to move away from the rotor 71. Correspondingly, the axial magnetic levitation stator 72 also exerts a repulsive force on the axial magnetic levitation rotor 71, causing the rotor 71 to move away from the stator 72. The repulsive forces on the rotor 71 and stator 72 are equal in magnitude and opposite in direction. Therefore, the repulsive force between the rotor 71 and stator 72 is the magnetic levitation force of the axial magnetic levitation positioning device 70. Under this magnetic levitation force, a fixed axial gap can always be maintained between the rotor 71 and stator 72.

[0044] For the axial magnetic levitation positioning device 70 on the near-beam side, the axial magnetic levitation rotor 71 can be located on the side of the axial magnetic levitation stator 72 away from the reflector 10. Since the axial magnetic levitation stator 72 is fixed on the lens mounting base 40, when the axial magnetic levitation rotor 71 on the near-beam side rotates with the fixed shaft 50, the axial magnetic levitation rotor 71 is subjected to an axial force from the axial magnetic levitation stator 72 and tends to move away from the reflector. For the axial magnetic levitation positioning device 70 on the far-beam side, the axial magnetic levitation rotor 71 can be located between the axial magnetic levitation stator 72 and the reflector 10. When the axial magnetic levitation rotor 71 on the far-beam side rotates, the axial magnetic levitation rotor 71 is subjected to an axial force from the axial magnetic levitation stator 72 and tends to move towards the reflector. The two axial magnetic levitation positioning devices 70 can be symmetrically arranged so that the magnetic levitation forces of the two pairs of axial magnetic levitation positioning devices 70 are opposite and equal in magnitude. In this way, under the combined action of the axial magnetic levitation positioning device 70 on the near beam side and the axial magnetic levitation positioning device 70 on the far beam side, the fixed shaft 50 can be positioned in the axial direction.

[0045] Furthermore, after the first fixing part 41 and the second fixing part 42 are assembled, the radial magnetic levitation positioning devices 60 on both sides can also be in a symmetrical state. In this way, by setting two radial magnetic levitation positioning devices 60 and two axial magnetic levitation positioning devices 70, the fixed shaft 50 can only rotate around the axial direction, while the other five degrees of freedom of the fixed shaft 50 are constrained. This achieves high-precision positioning of the fixed shaft 50 and the reflector 10 set on the fixed shaft, reducing the risk of the reflector 10 cracking due to uneven force.

[0046] It should be noted that, for the flexible coupling 100, the axial elastic damping force of its internal elastic damping structure 101 is less than the magnetic levitation force of the axial magnetic levitation positioning device 70, and the radial elastic damping force is less than the magnetic levitation force of the radial magnetic levitation positioning device 60. Thus, when the second shaft segment 32 transmits power to the first shaft segment 31, both the axial and radial vibrations of the second shaft segment 32 are absorbed by the elastic damping structure 101, and do not affect the positioning function of the radial magnetic levitation positioning device 60 and the axial magnetic levitation positioning device 70 on the reflector 10, ensuring the stability of the reflector 10 during rotation.

[0047] Please continue to refer to this. Figure 2 and Figure 3 Since the reflector 10 generates heat when receiving a strong beam of light, the heat dissipation component can be used to transfer the heat generated by the reflector from the fixed shaft 50 to the part of the second shaft section 32 located outside the vacuum chamber 80. Since the part of the second shaft section 32 located outside the vacuum chamber 80 is in a normal atmospheric environment, the heat can be dissipated by means of the second shaft section 32.

[0048] In some embodiments, the heat dissipation assembly may include a first heat dissipation section 110, which may include a cooling channel 111 and a cooling medium. Exemplarily, the cooling medium may be a phase change metal 112. One end of the cooling channel 111 is located within the fixed shaft 50, and the other end extends to the portion of the second shaft segment 32 located outside the vacuum chamber 80. The phase change metal 112 fills the cooling channel 111. Since the phase change metal 112 is in a paste-like state at low temperatures, when the phase change metal 112 located in the fixed shaft 50 receives heat from the reflector 10, its temperature rises, its state changes to liquid, and it can flow from the fixed shaft 50 to the second shaft segment 32, whereby the heat is dissipated into the air. After heat dissipation, the temperature of the phase change metal 112 decreases, and it flows back to the fixed shaft 50 through the cooling channel 111 to continue absorbing heat from the reflector 10, thereby forming a heat dissipation cycle.

[0049] The portion of the cooling channel 111 located within the fixed shaft 50 can be composed of multiple first sub-channels 1111 and one second sub-channel 1112. The multiple first sub-channels 1111 can be arranged in parallel and extend axially along the fixed shaft 50, while the second sub-channel 1112 can extend radially along the fixed shaft 50. The second sub-channel 1112 is located on the side of the fixed shaft 50 away from the reflector 10 and communicates with the cooling channel 111 in the drive shaft 30. One end of each of the multiple first sub-channels 1111 can communicate with the second sub-channel 1112, and the other end extends towards the reflector 10. By providing multiple first sub-channels 1111 within the fixed shaft 50, the area of ​​the cooling channel 111 can be increased to accommodate more phase change metal 112, thereby improving the heat dissipation effect on the reflector 10.

[0050] In addition, the heat dissipation assembly may also include a second heat dissipation section 120, which may include a water-cooled mounting base 121 and a liquid-cooled impeller 122. The water-cooled mounting base 121 may be sleeved on the part of the second shaft segment 32 located outside the vacuum chamber 80, and may be fixed to the equipment body by a fixing support. The water-cooled mounting base 121 is provided with a liquid-cooled chamber 1211, which may be an annular structure. The liquid-cooled chamber 1211 may also be connected to an external cold source, which may be used to provide coolant to the liquid-cooled chamber 1211. The liquid-cooled impeller 122 may be located inside the liquid-cooled chamber 1211, and may be sleeved on the second shaft segment 32 and kept relatively fixed to the second shaft segment 32. It can also be understood that when the second shaft segment 32 rotates, it can drive the liquid-cooled impeller 122 to rotate together.

[0051] The liquid-cooled impeller 122 has multiple blades 1221, which are evenly distributed around the circumference of the second shaft section 32. Initially, the coolant near the second shaft section 32 in the liquid-cooled cavity 1211 absorbs heat from the phase change metal 112. Driven by the liquid-cooled impeller 122, the coolant near the second shaft section 32, after heating up, flows away from the second shaft section 32, while the coolant further away from the second shaft section 32 flows towards it. This cycle repeats continuously, continuously dissipating heat from the phase change metal 112. This embodiment forms a two-stage heat dissipation structure by combining the phase change metal 112 and the liquid-cooled impeller 122, achieving rapid and uniform heat transfer and rapid heat dissipation. Verification shows that the heat dissipation component provided in this embodiment can achieve a heat dissipation energy of millions per square centimeter for the reflector 10.

[0052] Along the axial direction of the second shaft section 32, sealing components 123 can be respectively provided on both sides of the liquid cooling cavity 1211. The sealing components 123 can be located in the water cooling mounting base 121 to achieve sealing between the second shaft section 32 and the liquid cooling impeller 122, prevent coolant leakage, and prevent coolant from entering the vacuum cavity 80 or the motor through the transmission of the drive shaft 30, thereby ensuring a high vacuum and clean environment in the vacuum cavity 80.

[0053] Taking the sealing assembly located between the liquid-cooled impeller 122 and the vacuum chamber 80 as an example, and combining it with... Figure 3 and Figure 5 A sealed cavity can be formed between the water-cooled mounting base 121 and the second shaft segment 32, and the sealing assembly 123 is disposed within this sealed cavity. The sealing assembly 123 may include a first sealing ring 1231, a sealing friction material 1232, a second sealing ring 1233, and a sealing ring 1234. The first sealing ring 1231 is sleeved on the second shaft segment 32 and can rotate with the rotation of the second shaft segment 32. The second sealing ring 1233 is located on the side of the first sealing ring 1231 away from the vacuum cavity 80, and can be sleeved on the surface of the second shaft segment 32 and fixed to the water-cooled mounting base 121. The sealing friction material 1232 is located between the first sealing ring 1231 and the second sealing ring 1233, and can be sleeved on the outside of the second shaft segment 32 with a certain gap between it and the second shaft segment 32. When the second shaft segment 32 rotates, it drives the first sealing ring 1231 to rotate. The first sealing ring 1231 rubs against the sealing friction material 1232, and the sealing friction material 1232 abuts against the second sealing ring 1233, thereby achieving a dynamic seal between the second shaft segment 32 and the water-cooled fixed seat 121, which can prevent the coolant in the liquid-cooled cavity 1211 from entering the vacuum cavity 80.

[0054] In some embodiments, the portion of the second shaft segment 32 located between the liquid-cooled impeller 122 and the vacuum chamber 80 has a first stepped structure 321, which may include a first stepped surface. The sealing assembly 123 may also be provided with a fixing part, which can be fixedly mounted to the first stepped surface by screws. The first sealing ring can be connected to the fixing part by an elastic member. In the initial state, the elastic member is in a compressed state. As the sealing friction material 1232 wears, the elastic member can push the first sealing ring 1231 toward the sealing friction material 1232, ensuring that the first sealing ring 1231 always remains in contact with the sealing friction material 1232, thereby guaranteeing a dynamic seal between the second shaft segment 32 and the water-cooled mounting base 121.

[0055] There can be two sealing rings 1234. One sealing ring 1234 can be sleeved on the second shaft segment 32 and located between the second shaft segment 32 and the first sealing ring 1231 to achieve a static seal between the second shaft segment 32 and the first sealing ring 1231. The other sealing ring 1234 can be sleeved on the second sealing ring 1233 and located between the second sealing ring 1233 and the water-cooled mounting base 121 to achieve a static seal between the second sealing ring 1233 and the water-cooled mounting base 121.

[0056] The second shaft segment 32, located on the side of the liquid-cooled impeller 122 away from the vacuum chamber 80, can form a second stepped structure 322, which may include a second stepped surface. The sealing assembly 123 located on the side of the liquid-cooled impeller 122 away from the vacuum chamber 80 can be assembled with the water-cooled mounting base 121 through the second stepped surface. The structure of the sealing assembly 123 here can be the same as that of the sealing assembly 123 connected to the first sidewall, and will not be described in detail here.

[0057] A flushing port 1212 may also be provided on the water-cooled mounting base 121. There may be one or more flushing ports 1212. When there are multiple flushing ports 1212, they may be arranged circumferentially on the water-cooled mounting base 121. One end of the flushing port 1212 is connected to the outside and the other end is connected to the sealing cavity. The external flushing fluid can enter the sealing cavity through the sealing flushing port 1212 and flush the sealing assembly 123 to wash away the debris generated by the sealing friction material 1232, so as to ensure the frictional fit between the sealing friction material 1232 and the first sealing ring 1231.

[0058] Compared to traditional rotating mirror devices, the rotating mirror device in this embodiment ensures the real-time position of the mirror by incorporating axial and radial magnetic levitation positioning devices, thus guaranteeing precise positioning of the mirror. The use of an elastic coupling prevents vibration of the drive shaft from being transmitted to the mirror, achieving vibration reduction and isolation. The inclusion of a magnetohydrodynamic sealing assembly isolates the vacuum chamber from the outside, ensuring a clean environment within the vacuum chamber. The two-stage heat dissipation structure, consisting of a phase change metal and a liquid-cooled impeller, enables rapid heat dissipation from the mirror.

[0059] The above are merely specific embodiments of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A rotating reflector device, characterized in that, It includes a vacuum chamber, a reflector, a lens holder, a fixed shaft, a drive shaft, a heat dissipation assembly, and a motor, among which: The fixed shaft, the reflector, and the lens holder are located inside the vacuum cavity. The reflector is fixed to one end of the fixed shaft, and the lens holder is arranged around the periphery of the fixed shaft. The wall of the vacuum chamber is provided with a through hole. One end of the drive shaft passes through the through hole and extends into the vacuum chamber, and is connected to the fixed shaft for transmission. The other end of the drive shaft is located outside the vacuum chamber and is connected to the motor located outside the vacuum chamber for transmission. The heat dissipation assembly includes a first heat dissipation part, which includes a cooling channel and a cooling medium. One end of the cooling channel is located inside the fixed shaft, and the other end extends to the part of the drive shaft located outside the vacuum chamber. The cooling medium fills the cooling channel. The heat dissipation assembly further includes a second heat dissipation section, which includes a water-cooled mounting base and a liquid-cooled impeller, wherein: The water-cooled mounting base is sleeved on the part of the drive shaft located outside the vacuum cavity, and the water-cooled mounting base is provided with a liquid-cooled cavity, which is annular and filled with coolant. The liquid-cooled impeller is located inside the liquid-cooled cavity and is sleeved on the drive shaft.

2. The rotating reflector device according to claim 1, characterized in that, It also includes a sealing assembly, wherein the water-cooled mounting base and the surface of the drive shaft are spaced apart to form an annular sealing cavity, the sealing cavity being located on the side of the liquid-cooled impeller facing the vacuum cavity, and the sealing assembly being disposed within the sealing cavity; the sealing assembly includes a first sealing ring, a sealing friction material, and a second sealing ring, wherein: The first sealing ring is fixedly connected to the drive shaft, and the second sealing ring is fixedly connected to the water-cooled mounting base; The sealing friction material is disposed between the first sealing ring and the second sealing ring.

3. The rotating reflector device according to claim 2, characterized in that, The number of sealing components is two; The number of sealed cavities is two, and the two sealed cavities are respectively located on both sides of the liquid cooling cavity, and the two sealing components are respectively disposed in the two sealed cavities.

4. The rotating reflector device according to claim 2 or 3, characterized in that, The sealing assembly further includes two sealing rings, one of which is disposed between the first sealing ring and the drive shaft, and the other of which is disposed between the second sealing ring and the water-cooled mounting base.

5. The rotating reflector device according to claim 2 or 3, characterized in that, The water-cooled mounting base is provided with a rinsing port, one end of which is connected to the sealed cavity and the other end is connected to the outside.

6. The rotating reflector device according to any one of claims 1-3, characterized in that, It also includes a magnetic levitation positioning component, which is disposed between the fixed axis and the lens fixing seat. The magnetic levitation positioning component includes an axial magnetic levitation positioning device and a radial magnetic levitation positioning device.

7. The rotating reflector device according to claim 6, characterized in that, The axial magnetic levitation positioning device includes an axial magnetic levitation rotor and an axial magnetic levitation stator. The axial magnetic levitation rotor is sleeved on the fixed shaft, and the axial magnetic levitation stator is fixedly installed on the lens mounting base. The axial magnetic levitation stator and the axial magnetic levitation rotor are coaxially arranged along the axial direction of the fixed shaft, and the axial magnetic levitation stator and the axial magnetic levitation rotor are spaced apart.

8. The rotating reflector device according to claim 7, characterized in that, The number of axial magnetic levitation positioning devices is two. The two axial magnetic levitation positioning devices are respectively arranged on opposite sides of the fixed shaft along the axial direction, and the two axial magnetic levitation positioning devices are symmetrical to each other.

9. The rotating reflector device according to claim 6, characterized in that, The radial magnetic levitation positioning device includes a radial magnetic levitation rotor and a radial magnetic levitation stator. The radial magnetic levitation rotor is sleeved on the fixed shaft, and the radial magnetic levitation stator is fixedly installed on the lens mounting base. The radial magnetic levitation stator is arranged around the periphery of the radial magnetic levitation rotor and is spaced apart from the radial magnetic levitation rotor.

10. The rotating reflector device according to claim 9, characterized in that, The radial magnetic levitation positioning device is of two types, and the two radial magnetic levitation positioning devices are respectively arranged on opposite sides of the fixed shaft along the axial direction.

11. The rotating reflector device according to any one of claims 1-3 and 7-10, characterized in that, The drive shaft includes a first shaft section and a second shaft section, wherein: The first shaft segment is located inside the vacuum cavity, and one end of the first shaft segment is connected to the fixed shaft for transmission. One end of the second shaft segment is connected to the motor drive, and the other end extends into the vacuum cavity and is connected to the other end of the first shaft segment via a flexible coupling.

12. The rotating reflector device according to any one of claims 1-3 and 7-10, characterized in that, It also includes a magnetic fluid sealing assembly, which comprises a sealing housing, a sealing base, and a magnetic fluid, wherein: The sealing housing is sleeved on the drive shaft, and the sealing housing is fixedly connected to the inner wall of the through hole. The sealing housing is spaced apart from the surface of the drive shaft and forms a receiving cavity with the drive shaft. The sealing base is sleeved on the drive shaft, and the sealing base is located on the side of the sealing shell away from the interior of the vacuum cavity, thereby sealing the receiving cavity; The magnetofluid is located within the receiving cavity.

13. An optical device, characterized in that, It includes a device body and a rotating reflector device as described in any one of claims 1-12, wherein the rotating reflector device is located inside the device body.

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