De-coherence device and light source system

Abstract

The application discloses a decoherence device and a light source system, and belongs to the light source field. The decoherence device comprises a shell, the shell is provided with a light inlet and a light outlet, and the light inlet and the light outlet are used for passing a light beam. The shell is used for being connected with a gas suction device to form a single-atom gas with random concentration in the shell, and the light beam passes through the single-atom gas with random concentration. The single-atom gas in the shell is equivalent to a lens. Due to the random change of the concentration of the single-atom gas, the refractive index of each region in the range distributed by the single-atom gas is randomly changed. When the light beam passes through the single-atom gas with different concentrations, an optical path difference is formed, so that the decoherence of the light beam is realized, and the light beam emitted from the light outlet is non-coherent light.

Description

Technical Field

[0001] This application relates to the field of light sources, and in particular to a decoherence device and a light source system. Background Technology

[0002] A light source system provides a laser beam that meets certain requirements for various devices. A light source system typically includes a coherent light source and a decoherence device.

[0003] Because the beams provided by coherent light sources have good coherence, they will produce interference phenomena and speckle during imaging. Therefore, the beams emitted by coherent light sources need to be shaped by a decoherence device to make the beams incoherent.

[0004] Decoherence devices typically employ reflection to achieve decoherence, involving multiple mirrors. Coherent light is incident obliquely onto the mirror surface and, through reflection by the mirrors, becomes incoherent light. These mirrors require high-precision optical fabrication, which is challenging and costly. Furthermore, this reflection method results in significant energy loss in the light beam. Summary of the Invention

[0005] This application provides a decoherence device and a light source system that can reduce costs and decrease the energy loss of the light beam. The technical solution is as follows:

[0006] In a first aspect, a decoherence device is provided, comprising a housing having a light inlet and a light outlet, both for allowing a light beam to pass through, the housing being connected to a gas jet device for forming a monatomic gas with randomly varying concentration within the housing, the light beam passing through the randomly varying concentration monatomic gas.

[0007] Based on the above characteristics, the monatomic gas inside the shell is equivalent to a lens. Since the concentration of the monatomic gas varies randomly, the refractive index of each region within the range of the monatomic gas distribution varies randomly. When the light beam passes through monatomic gas of different concentrations, an optical path difference is formed, thereby achieving decoherence of the light beam and making the light beam emitted from the light outlet incoherent.

[0008] In some examples, the decoherence device includes a housing and a gas jet / suction device. The gas jet / suction device has an exhaust port and an intake port, located on or inside the housing. The exhaust port is used to inject a randomly varying flow rate of monatomic gas into the housing, and the intake port is used to draw in the monatomic gas.

[0009] Based on the above characteristics, the gas injection device ejects monatomic gas, and the gas absorption device recovers the monatomic gas to prevent its diffusion. Under the action of the gas injection device and the gas absorption device, a monatomic gas flow is formed at the gap. As the flow rate of the monatomic gas ejected by the gas injection device changes randomly, the distribution of the monatomic gas in the gap also changes continuously, and the concentration of monatomic gas in different regions of the gap is also different. Different concentrations of monatomic gas result in different refractive indices; that is, the refractive index of each region of the gas lens is constantly changing randomly. When a light beam passes through different regions of the gas lens at the same time, and also passes through the same region of the gas lens at different times, an optical path difference is formed, thereby achieving decoherence of the light beam and making the light beam emitted from the light outlet incoherent.

[0010] Optionally, the gas jetting device has n jet ports and n suction ports, where n ≥ 1 and is an integer, and the n jet ports and the n suction ports are arranged one-to-one opposite each other to form a monatomic gas flow with randomly varying flow rate between the n jet ports and the n suction ports, and the light beam is adapted to pass through the monatomic gas flow formed between the n jet ports and the n suction ports.

[0011] Based on the above features, by arranging the air jets and air intakes opposite each other, an airflow is formed between the air jets and air intakes, preventing the gas ejected from the air jets from spreading. This ensures that the area inside the housing, except for the area between the n air jets and the n air intakes, is always maintained in a vacuum or near-vacuum environment.

[0012] Optionally, n ≥ 2, the n jet nozzles and n inlet nozzles are arranged in pairs, with the lines connecting each pair of nozzles intersecting at a single point. The light beam is adapted to pass through the intersection of these lines. A higher gas concentration is observed at the intersection, while the gas concentration is lower further away. When the light beam passes through the intersection, the effect of the monatomic gas flow on the beam is more pronounced, which is beneficial for converting coherent light into incoherent light.

[0013] Optionally, the gas injection and suction device includes a gas injection device and a gas suction device. The gas injection device has the jet nozzle and is used to inject a randomly varying flow rate of monatomic gas into the housing through the jet nozzle. The gas suction device has the suction port and is used to draw gas from the housing through the suction port. Since the jet nozzle and the suction port are located on different devices, their relative positions can be easily adjusted during arrangement.

[0014] In some examples, the gas injection device includes a gas nozzle located inside the housing, or with one end inside the housing and the other end outside the housing. The gas nozzle is arranged inside the housing or inserted into the housing, with the arrangement of the gas nozzle better matching the size of the housing.

[0015] In some examples, the gas jetting device has an interface for receiving electrical signals. These signals, whose frequency and / or intensity vary randomly, cause the flow rate of the monatomic gas stream to vary randomly, including voltage or current magnitudes. Controlling the gas jetting device using randomly varying electrical signals is a simple and easy-to-implement method.

[0016] In some examples, the decoherence device further includes a controller connected to the interface for providing the electrical signal. By configuring the controller to provide the electrical signal, it is not necessary to connect other external devices, such as computers, to provide the control signals.

[0017] As an example, the gas nozzle includes a nozzle body, a valve stem, and a reset member. The air outlet is located at one end of the nozzle body, the valve stem is located in the nozzle body and one end matches the air outlet, and the reset member is located between the valve stem and the inner wall of the nozzle body. The valve stem is used to reciprocate axially relative to the air outlet under the action of the air pressure in the nozzle body and the reset member to change the degree of opening of the air outlet.

[0018] Based on the above characteristics, the gap between the valve stem and the jet nozzle changes continuously due to the reciprocating movement of the valve stem, which in turn changes the degree to which the jet nozzle is opened, and thus the flow rate of the gas ejected from the jet nozzle changes continuously.

[0019] Optionally, the nozzle body has a high-pressure chamber, a transition chamber, a low-pressure chamber, and a pressure relief hole. The high-pressure chamber is connected to the jet outlet, and the pressure relief hole connects the transition chamber and the low-pressure chamber. One end of the valve stem is located in the high-pressure chamber, and the other end is located in the transition chamber. The gas nozzle also includes a control element for controlling the opening and closing of the pressure relief hole.

[0020] Based on the above characteristics, when the pressure relief hole is open, the transition chamber is connected to the low-pressure chamber, and the air pressure in the transition chamber decreases; when the pressure relief hole is closed, the air pressure in the transition chamber increases. The two ends of the valve stem are respectively located in the high-pressure chamber and the transition chamber, and the pressure difference between the high-pressure chamber and the transition chamber on the valve stem serves as the driving force for the valve stem's movement.

[0021] Optionally, the control element is located in the low-pressure chamber, and the control element includes a rod and a controllable telescopic part. One end of the rod is connected to the controllable telescopic part, and the other end is matched with the pressure relief hole. The controllable telescopic part is used to deform under the action of an electrical signal, driving the rod to move relative to the pressure relief hole, thereby opening or closing the pressure relief hole.

[0022] Based on the above features, one end of the rod is connected to the controllable telescopic part, and when the controllable telescopic part deforms, it will drive the rod to move. The other end of the rod extends into the pressure relief hole, and when the rod is in contact with the wall of the pressure relief hole, the pressure relief hole closes. When the rod moves under the drive of the controllable telescopic part and forms a gap with the wall of the pressure relief hole, the pressure relief hole opens, and the pressure relief hole connects the transition cavity and the low-pressure cavity.

[0023] One end of the valve stem is located in the high-pressure chamber, where it is subjected to the pressure of the gas. This gas pressure pushes the valve stem towards the transition chamber. The other end of the valve stem is located in the transition chamber, where it is subjected to the pressure of the gas. This gas pressure pushes the valve stem towards the high-pressure chamber. During the opening and closing of the pressure relief orifice, the pushing force of the gas in the high-pressure chamber on the valve stem remains essentially constant, while the pushing force of the transition chamber on the valve stem varies with the opening and closing of the pressure relief orifice. When the pressure relief orifice is closed, the transition chamber is under high pressure. Under the thrust of the transition chamber and the action of the reset member, the valve stem moves towards the high-pressure chamber, the gap between the valve stem and the jet nozzle decreases, and the gas flow rate ejected from the jet nozzle decreases. When the pressure relief orifice is open, the transition chamber is under low pressure, the thrust on the valve stem decreases, causing the valve stem to move towards the transition chamber under the thrust of the high-pressure chamber, the gap between the valve stem and the jet nozzle increases, and the gas flow rate ejected from the jet nozzle increases, thereby achieving control of the flow rate of the monatomic gas stream.

[0024] Optionally, the controllable telescopic part is made of a composite piezoelectric material or a rare-earth super magnetostrictive material. When an electrical signal is applied to the composite piezoelectric material and the rare-earth super magnetostrictive material, both will deform, and the amount of deformation is related to the strength of the electrical signal, thereby enabling the movement of the rod to be controlled by the electrical signal.

[0025] In some examples, the decoherence device further includes an inlet pipe and an intake pipe. One end of the inlet pipe is located outside the housing, and the other end is connected to the high-pressure chamber of the gas nozzle;

[0026] One end of the suction pipe is located outside the outer casing, and the other end is connected to the low-pressure chamber of the gas nozzle and the gas nozzle, respectively.

[0027] Based on the above features, the end of the air intake pipe located outside the housing facilitates connection of the decoherence device to a high-pressure source. Similarly, the end of the air intake pipe located outside the housing facilitates connection of the decoherence device to a low-pressure source. Since both the air intake pipe and the air intake pipe extend to the outside of the housing, both the high-pressure and low-pressure sources can be arranged outside the housing, which helps reduce the size of the housing and facilitates the arrangement and maintenance of the high-pressure and low-pressure sources.

[0028] Optionally, the gas suction nozzle has an air intake at one end opposite to the gas nozzle. The air intake is conical, with the larger diameter end close to the gas nozzle.

[0029] Based on the above features, the air intake is set in a conical shape, with the end of the air intake with a larger diameter facing the gas nozzle, which is beneficial for the gas intake to collect the airflow ejected from the gas nozzle.

[0030] On the other hand, a light source system is provided, comprising a coherent light source and any of the decoherence devices described in the preceding aspect. The coherent light source is aligned with the light inlet of the housing of the decoherence device, i.e., the light beam emitted from the coherent light source is incident on the light inlet of the housing of the decoherence device.

[0031] Based on the above characteristics, the coherent light output by the coherent light source enters the decoherence device through the light inlet, passes through the gap between the gas injection device and the gas absorption device, and is then emitted from the light outlet as the converted incoherent light.

[0032] Optionally, the light source system further includes a gas source and a gas pump, wherein the gas source is connected to the air inlet of the gas pump, and the air outlet of the gas pump is connected to the gas jet suction device.

[0033] Optionally, the light source system further includes a filter, and the gas jetting device is connected to the air inlet of the air pump through the filter.

[0034] Based on the above features, by connecting the gas extraction device to the air inlet of the gas pump, the monatomic gas recovered by the gas extraction device can be recycled, reducing the consumption of monatomic gas. The filter filters the recovered monatomic gas to prevent impurities mixed in the monatomic gas from having adverse effects.

[0035] Optionally, the light source system further includes a differential pump connected between the coherent light source and the light inlet of the housing. The differential pump acts as an isolation device, preventing monatomic gas from diffusing into the coherent light source from the decoherent device. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of a decoherence device provided in an embodiment of this application;

[0037] Figure 2 This is a schematic diagram of the structure of a shell provided in an embodiment of this application;

[0038] Figure 3 This is a schematic diagram of a decoherence device provided in an embodiment of this application;

[0039] Figure 4 This is a schematic diagram of the structure of a gas jet suction device provided in an embodiment of this application;

[0040] Figure 5 This is a schematic diagram of the gas jetting process of a gas nozzle provided in an embodiment of this application;

[0041] Figure 6 This is a schematic diagram showing the distribution of the gas nozzle and gas suction nozzle provided in the embodiments of this application;

[0042] Figure 7 This is a schematic diagram of the structure of a gas nozzle provided in an embodiment of this application;

[0043] Figure 8 This is a schematic diagram of the structure of a valve stem provided in an embodiment of this application;

[0044] Figure 9 This is a schematic diagram of the structure of a gas nozzle provided in an embodiment of this application;

[0045] Figure 10 This is a schematic diagram of a decoherence device provided in an embodiment of this application;

[0046] Figure 11 This is a schematic diagram of the structure of a light source system provided in an embodiment of this application. Detailed Implementation

[0047] Figure 1 This is a schematic diagram of a decoherence device provided in an embodiment of this application. Figure 1 As shown, the decoherence device includes a housing 10. The housing 10 has a light inlet 10a and a light outlet 10b, and is used to allow a light beam to pass through. The light beam enters the housing 10 from the light inlet 10a and exits from the light outlet 10b. The housing 10 is used to connect to a gas jet aspiration device to form a monatomic gas with a randomly varying concentration within the housing 10.

[0048] A light beam entering the outer casing 10 through the light inlet 10a passes through a monatomic gas with randomly varying concentration. Random concentration variation means that the gas concentration in each region within the space where the monatomic gas is distributed changes randomly. Each region refers to a subspace into which the space where the monatomic gas is distributed can be divided; each subspace is a region. The gas concentration within a single region is constantly changing, and this change is random. At any given moment, the gas concentration within a region may have changed compared to the previous moment; this change could be an increase or a decrease.

[0049] The monatomic gas inside the outer shell 10 acts as a lens. Since the concentration of the monatomic gas varies randomly, the refractive index of each region within the distribution range of the monatomic gas varies randomly. When the light beam passes through monatomic gas of different concentrations, an optical path difference is formed, thereby achieving decoherence of the light beam and making the light beam emitted from the light outlet 10b incoherent.

[0050] The outer casing 10 can be of any shape; in this application, a cuboid shape is used as an example only. In other examples, it can also be cylindrical. The light inlet 10a and the light outlet 10b can be two light-transmitting areas on the outer casing 10, or two light-transmitting holes on the outer casing 10.

[0051] As an example, the housing 10 is rectangular in shape. The light inlet 10a and the light outlet 10b can be located on opposite side walls of the housing 10. When a light beam shines into the housing 10 from the light inlet 10a, it can exit from the light outlet 10b. The light beam entering the housing 10 from the light inlet 10a can travel in a straight line towards the light outlet 10b, or it can be refracted and reflected by other optical devices, changing its direction before reaching the light outlet 10b. In this example, the light inlet 10a and the light outlet 10b face each other. The light beam enters the housing 10 from the light inlet 10a and propagates along the line connecting the center of the light inlet 10a and the center of the light outlet 10b.

[0052] Figure 2 This is a schematic diagram of the structure of a shell provided in an embodiment of this application. For example... Figure 2 As shown, the outer wall of the housing 10 may also have a first interface 11 and a second interface 12, both of which are tubular. The first interface 11 is arranged around the light inlet 10a, and the second interface 12 is arranged around the light outlet 10b. The first interface 11 is used to connect upstream devices such as coherent light sources, and the second interface 12 is used to connect downstream devices. More sophisticated optical systems typically operate in a vacuum or near-vacuum environment. The first interface 11 and the second interface 12 are used to connect upstream and downstream devices in the optical system, respectively, enabling the light beam to propagate in a vacuum or near-vacuum environment.

[0053] Figure 3This is a schematic diagram of a decoherence device provided in an embodiment of this application. Figure 3 As shown, the decoherence device includes a housing 10 and a gas injection device 20. Figure 3 A portion of the outer casing 10 was removed to expose the structure located inside the outer casing 10.

[0054] Figure 4 This is a schematic diagram of the structure of a gas jet suction device provided in an embodiment of this application. Figure 4 As shown, the gas injection and suction device 20 has an injection port 211d and an intake port 221a, which are located inside the housing 10. The injection port 211d is used to inject a monatomic gas with a randomly varying flow rate into the housing 10, and the intake port 221a is used to draw in the monatomic gas.

[0055] Gas is injected and drawn in through the gas injection and suction device 20 via the jet nozzle 211d and the suction port 221a. The jet nozzle 211d ejects a monatomic gas with a randomly varying flow rate, while the suction port 221a absorbs the monatomic gas ejected from the jet nozzle 211d, forming a monatomic gas flow. This creates a monatomic gas flow with a continuously varying concentration between the jet nozzle 211d and the suction port 221a. The monatomic gas flow refers to the gas flow formed by monatomic gases, such as helium, argon, or krypton. Furthermore, the suction port 221a absorbs the monatomic gas to prevent the jet nozzle 211d from continuously ejecting gas, thus preventing the overall gas concentration inside the casing 10 from continuously increasing over time. This maintains a dynamic equilibrium of the overall gas concentration inside the casing 10, i.e., it remains stable or fluctuates between an upper and lower limit. For a decoherent device with a defined structure, the upper and lower limits can be controlled by the jet rate and intake rate of the gas jet device 20, where the jet rate corresponds to the flow rate of the jet port 211d and the intake rate corresponds to the flow rate of the intake port 221a.

[0056] The gas injection and suction device 20 may include two parts: a gas injection device 21 and a gas suction device 22. The gas injection device 21 has a jet nozzle 211d, which is used to inject a randomly varying flow rate of monatomic gas into the housing 10. The gas suction device 22 has a suction port 221a, which is used to draw gas from the housing 10. Since the jet nozzle 211d and the suction port 221a are located on the gas injection device 21 and the gas suction device 22 respectively, their relative positions can be easily adjusted during arrangement.

[0057] Optionally, the gas jet / suction device 20 has n jet nozzles 211d and n suction nozzles 221a, where n ≥ 1 and is an integer. The n jet nozzles 211d and n suction nozzles 221a are arranged one-to-one opposite each other to form a monatomic gas flow with randomly varying flow rate between the n jet nozzles 211d and n suction nozzles 221a. The light beam is adapted to pass through the monatomic gas flow formed between the n jet nozzles 211d and n suction nozzles 221a.

[0058] The jet nozzles 211d and the intake ports 221a are arranged opposite each other, so that airflow is formed in the gap between the jet nozzles 211d and the intake ports 221a, thus preventing the gas ejected from the jet nozzles 211d from spreading. The airflows ejected from the n jet nozzles 211d can converge with each other, which can further prevent the gas from spreading.

[0059] In some examples, n ≥ 2, n jet nozzles 211d and n air inlets 221a are arranged in pairs, and the lines connecting each pair of jet nozzles 211d and air inlets 221a intersect at a single point, allowing the light beam to pass through the intersection point O. The line connecting the jet nozzles 211d and air inlets 221a referred to here can be the line connecting the center of the jet nozzle 211d and the center of the air inlet 221a. Figure 4 Two such lines are shown by arrows. The direction from the jet nozzle 211d along this line towards the intake port 221a is the jet direction of the jet nozzle 211d, which is... Figure 4 The direction indicated by the middle arrow. The airflow ejected from the jet nozzle 211d is columnar, and the jet direction 211d is the axis of the columnar airflow.

[0060] exist Figure 4 In the example shown, only n=2 is used for illustration. The jet directions of all gas nozzles 211 intersect at the same point, O. This results in a higher gas concentration at point O and a lower gas concentration further away from point O. When the light beam passes through the intersection point, the effect of the monatomic gas flow on the light beam is more pronounced, which is beneficial for converting coherent light into incoherent light.

[0061] Optionally, the gas jet suction device 20 has an interface for receiving electrical signals. The gas jet suction device 20 is used to randomly vary the flow rate of the monatomic gas stream under the influence of an electrical signal with randomly varying frequency and / or intensity, the intensity of which includes voltage or current magnitude. Thus, by utilizing the randomly varying electrical signal, the random variation in the flow rate of the monatomic gas stream can be achieved, facilitating the control of the gas jet suction device 20.

[0062] In some examples, randomly varying electrical signals can be provided by a computer, and the gas jet device 20 can operate under the influence of electrical signals provided by the computer by connecting the interface for receiving electrical signals to the computer.

[0063] In other examples, the decoherence device may also include a controller connected to an interface of the gas injection device 20 for receiving electrical signals, the controller being used to provide the electrical signals.

[0064] As an example, the decoherence device includes a housing 10, a gas jetting device 20, and a controller 30 (see [link]). Figure 7 The housing 10 has a chamber in which the gas jet suction device 20 is located, for example... Figure 3 As shown.

[0065] like Figure 4 As shown, the gas injection and suction device 20 includes a gas injection device 21 and a gas suction device 22. The gas injection device 21 includes a gas nozzle 211, which is located inside the housing 10. The gas suction device 22 includes a gas suction nozzle 221, which is located inside the housing 10. The gas nozzle 211 has an air outlet 211d, and the gas suction nozzle 221 has an air inlet 221a. The gas nozzle 211 and the gas suction nozzle 221 are arranged opposite to each other.

[0066] There is a gap 20a between the jet nozzle 211d and the suction port 221a for the light beam to pass through. That is, the light beam is emitted from the light inlet 10a to the light outlet 10b, and with the light path of the light beam as a reference, the gas nozzle 211 and the gas suction nozzle 221 are located on both sides of the light path.

[0067] The gas injection device 20 is used to form a monoatomic gas flow from the jet port 211d to the suction port 221a in the gap 20a. The controller 30 is connected to the gas injection device 21. The controller is used to randomly vary the flow rate of the monoatomic gas ejected by the gas injection device 21.

[0068] When the decoherent device is in use, the light beam emitted by the coherent light source is coherent light. This light beam enters the housing 10 from the light inlet 10a, passes through the gap 20a between the exhaust port 211d and the intake port 221a, and then exits the housing 10 from the light outlet 10b. The light beam is affected by the monatomic gas flow in the gap 20a, thus transforming into incoherent light.

[0069] The housing 10 provides a lower atmospheric pressure environment, placing the gas jet suction device 20 in a lower atmospheric pressure environment, such as a vacuum or near-vacuum environment. This prevents air from affecting the light beam, ensuring that the light beam is only affected by the monatomic gas flow.

[0070] Gas ejection device 21 ejects monatomic gas, and gas absorption device 22 recovers the ejected monatomic gas to prevent its diffusion. Under the action of gas ejection device 21 and gas absorption device 22, a monatomic gas flow is formed at gap 20a. Since other areas inside the outer casing 10 are vacuum or near-vacuum, the gas distribution at gap 20a acts as a lens. As the flow rate of the monatomic gas ejected by gas ejection device 21 changes randomly, the distribution of the monatomic gas in gap 20a also changes continuously, i.e., the concentration changes, and the concentration of monatomic gas varies in different regions of gap 20a. Different concentrations of monatomic gas result in different refractive indices. When a light beam passes through monatomic gas of different concentrations, an optical path difference is formed, thereby achieving decoherence of the light beam and making the light beam emitted from light outlet 10b incoherent.

[0071] The gas injection device 21 may include n gas nozzles 211, where n ≥ 2 and is an integer. The jetting directions of the n gas nozzles 211 intersect at a point, and the intersection point O is located within the gap 20a. As an example, such as Figure 4 As shown, the gas injection device 21 may include two gas nozzles 211.

[0072] Figure 5 This is a schematic diagram of the gas jetting process of a gas nozzle according to an embodiment of this application. The figure shows a cross-section of the gas flow, that is, a section perpendicular to the jetting direction, and the black dots represent atoms in the gas flow. Figure 5 As shown, the concentration of the gas stream ejected from gas nozzle 211 is not uniform throughout the flow. The gas concentration referred to in this application refers to the number of monatomic gas atoms per unit volume. It can also be expressed as the average distance between atoms; the smaller the average distance between atoms, the greater the gas concentration. On the cross-section of the gas stream formed by gas nozzle 211, the gas concentration is higher closer to the center. The jet directions of all gas nozzles 211 intersect at the same point, resulting in a higher gas concentration at intersection point O and a lower gas concentration further away from intersection point O.

[0073] The gas suction device 22 includes n gas suction nozzles 221 that correspond one-to-one with the n gas nozzles 211. The gas suction nozzles 221 are located in the jet direction of the corresponding gas nozzles 211 and are arranged opposite to the gas nozzles 211.

[0074] For example, Figure 4In the example shown, the intersection of the jet directions of the two gas nozzles 211 is located in the gap 20a. The two gas suction nozzles 221 are arranged opposite to the two gas nozzles 211, so that the gas ejected from the two gas nozzles 211 can be absorbed by the gas suction nozzles 221 more quickly, preventing the gas from diffusing in the housing 10, and keeping the area inside the housing 10 outside the gap 20a in a vacuum or near-vacuum environment.

[0075] like Figure 4 As shown, the intersection point O of the jetting directions of the n gas nozzles 211 is located on the line m connecting the center of the light inlet 10a and the center of the light outlet 10b. That is, the n jet nozzles 211d and the n air inlets 221a are arranged in pairs, and the lines connecting each pair of jet nozzles 211d and air inlets 221a intersect at a single point.

[0076] When the decoherent device is connected to the coherent light source, the coherent light source needs to be aligned with the light inlet 10a so that the beam can propagate in the required direction. To reduce the error between the beam propagation direction and the required direction, the beam enters from the center of the light inlet 10a and exits from the center of the light outlet 10b. The beam propagates within the housing 10 along the line connecting the center of the light inlet 10a and the center of the light outlet 10b. Since the intersection point O is located on this line, the gas concentration at the intersection point O is higher than at other locations in the gap 20a, and its effect on the beam is more pronounced.

[0077] Figure 6 This is a schematic diagram showing the distribution of the gas nozzle and gas suction nozzle provided in an embodiment of this application. For example... Figure 6 As shown, the jet direction of the gas nozzle 211 is perpendicular to the line m connecting the center of the light inlet 10a and the center of the light outlet 10b.

[0078] from Figure 5 The gas concentration distribution shown indicates that, across the cross-section of the airflow formed by gas nozzle 211, the gas concentration is higher closer to the center and lower closer to the edges. By aligning the jet direction of gas nozzle 211 perpendicular to the line m, the gas concentration in gap 20a can be distributed as high in the center and low at the edges. Specifically, the gas concentration is highest at the very center of the gas lens, which is the intersection of the jet directions of multiple gas nozzles 211, and decreases further away from the intersection.

[0079] The multiple gas nozzles 211 can be rotationally symmetrical about the intersection point O, and the rotation angles of adjacent gas nozzles 211 are the same. That is, among the multiple gas nozzles 211, the included angles between the injection directions of any adjacent gas nozzles 211 are equal.

[0080] In this embodiment of the application, the jetting directions of the two gas nozzles 211 are perpendicular to each other, that is, the line connecting one jet nozzle 211d and its opposite intake port 221a, and the line connecting the other jet nozzle 211d and its opposite intake port 221a, are perpendicular.

[0081] Airflow from different directions causes the beam to diverge in different directions, changing the divergence angle of the beam. By arranging the two gas nozzles 211 perpendicularly, the circular beam, after passing through the gap 20a, will diverge in two mutually perpendicular directions under the action of the monatomic gas flow, so that the final beam is still a circular beam.

[0082] Figure 7 This is a schematic diagram of the structure of a gas nozzle provided in an embodiment of this application. Figure 7 As shown, the gas nozzle 211 includes a nozzle body 2111, a valve stem 2112, and a reset member 2113. The air outlet 211d is located at one end of the nozzle body 2111, and the valve stem 2112 is located within the nozzle body 2111, with one end matching the air outlet 211d. The reset member 2113 is located between the valve stem 2112 and the inner wall of the nozzle body 2111. The valve stem 2112 is used to reciprocate axially relative to the air outlet 211d under the pressure of the air within the nozzle body 2111 and the action of the reset member 2113, thereby changing the degree of opening of the air outlet 211d.

[0083] As the valve stem 2112 moves axially relative to the jet port 211d, the gap between the valve stem 2112 and the jet port 211d changes continuously, which in turn causes the degree of opening of the jet port 211d to change continuously, and the flow rate of the gas ejected from the jet port 211d to change continuously.

[0084] The nozzle body 2111 has a high-pressure chamber 211a, a transition chamber 211b, a low-pressure chamber 211c, and a pressure relief port 211h. The high-pressure chamber 211a is connected to the jet port 211d, and the pressure relief port 211h connects the transition chamber 211b and the low-pressure chamber 211c. One end of the valve stem 2112 is located in the high-pressure chamber 211a, and the other end is located in the transition chamber 211b. The gas nozzle 211 also includes a control element 2114 for controlling the opening and closing of the pressure relief port 211h.

[0085] The control component 2114 controls the opening and closing of the pressure relief port 211h. When the pressure relief port 211h is open, the transition chamber 211b is connected to the low-pressure chamber 211c, and the air pressure decreases. When the pressure relief port 211h is closed, the air pressure in the transition chamber 211b increases. The two ends of the valve stem 2112 are respectively located in the high-pressure chamber 211a and the transition chamber 211b. The air pressure difference between the two chambers acts on the valve stem 2112, providing the power for the movement of the valve stem 2112.

[0086] like Figure 7 As shown, the control element 2114 is located in the low-pressure chamber 211c. The control element 2114 includes a rod portion 21141 and a controllable telescopic portion 21142. One end of the rod portion 21141 is connected to the controllable telescopic portion 21142, and the other end is matched with the pressure relief hole 211h. The controllable telescopic portion 21142 is used to deform under the action of an electrical signal, driving the rod portion 21141 to move relative to the pressure relief hole 211h, thus opening or closing the pressure relief hole 211h. One end of the rod portion 21141 is connected to the controllable telescopic portion 21142; when the controllable telescopic portion 21142 deforms, it drives the rod portion 21141 to move. The other end of the rod portion 21141 extends into the pressure relief hole 211h; when the rod portion 21141 is in contact with the wall of the pressure relief hole 211h, the pressure relief hole 211h closes. When the rod 21141 moves under the controllable telescopic part 21142 and forms a gap with the wall of the pressure relief hole 211h, the pressure relief hole 211h opens and connects the transition chamber 211b and the low-pressure chamber 211c.

[0087] like Figure 7 As shown, the nozzle body 2111 contains a high-pressure chamber 211a, a transition chamber 211b, and a low-pressure chamber 211c. The nozzle body 2111 also has an air outlet 211d, an air inlet 211e, an air outlet 211f, a damping orifice 211g, and a pressure relief orifice 211h. The air outlet 211d and the air inlet 211e are both connected to the high-pressure chamber 211a and the outside; the air outlet 211f is connected to the low-pressure chamber 211c and the outside; the damping orifice 211g is connected to the high-pressure chamber 211a and the transition chamber 211b; and the pressure relief orifice 211h is connected to the transition chamber 211b and the low-pressure chamber 211c.

[0088] The nozzle body 2111 can be a split structure, comprising multiple detachably connected parts, which facilitates the assembly of the nozzle body 2111, valve stem 2112, reset component 2113, and control component 2114. In the embodiments of this application, "high pressure" and "low pressure" only indicate a magnitude relationship between pressures and do not refer to specific pressure values. For example, "high pressure chamber 211a" and "low pressure chamber 211c" indicate that when the decoherence device is working, the pressure in the high pressure chamber 211a is higher than the pressure in the low pressure chamber 211c.

[0089] like Figure 7As shown, valve stem 2112 is located within nozzle body 2111. One end of valve stem 2112 is located in high-pressure chamber 211a and matches jet nozzle 211d. The end of valve stem 2112 is located at jet nozzle 211d, allowing airflow to pass through the gap between valve stem 2112 and jet nozzle 211d. When valve stem 2112 extends into jet nozzle 211d, the gap between valve stem 2112 and jet nozzle 211d decreases, reducing the airflow rate ejected from jet nozzle 211d. When valve stem 2112 exits jet nozzle 211d, the gap between valve stem 2112 and jet nozzle 211d increases, increasing the airflow rate ejected from jet nozzle 211d.

[0090] The jet nozzle 211d can be a tapered orifice, and the end of the valve stem 2112 located at the jet nozzle 211d is also tapered, so that the valve stem 2112 and the jet nozzle 211d can be better matched.

[0091] The other end of the valve stem 2112 is located in the transition cavity 211b. The reset member 2113 is connected to the valve stem 2112 and the nozzle body 2111, and the reset member 2113 is used to provide an axial force to the valve stem 2112.

[0092] The valve stem 2112 is used to reciprocate axially relative to the nozzle body 2111 under the pressure difference between the high-pressure chamber 211a and the transition chamber 211b, and under the action of the reset member 2113. The control member 2114 is located in the low-pressure chamber 211c, and the control member 2114 is used to control the opening and closing of the pressure relief hole 211h.

[0093] When the decoherence device is in use, the inlet 211e of the nozzle body 2111 is connected to a high-pressure source, and the outlet 211f is connected to a low-pressure source. High-pressure gas enters through the inlet 211e of the nozzle body 2111, keeping the high-pressure chamber 211a at a constant high pressure. The low-pressure chamber 211c is connected to the low-pressure source through the outlet 211f and is kept at a constant low pressure. Since the transition chamber 211b is connected to the high-pressure chamber 211a through the damping orifice 211g and to the low-pressure chamber 211c through the pressure relief orifice 211h, the transition chamber 211b is in a high-pressure state when the pressure relief orifice 211h is closed, and in a low-pressure state when the pressure relief orifice 211h is open.

[0094] like Figure 7As shown, one end of the valve stem 2112 is located in the high-pressure chamber 211a, where it is subjected to the pressure of the gas. This gas pressure pushes the valve stem 2112 towards the transition chamber 211b. The other end of the valve stem 2112 is located in the transition chamber 211b, where it is subjected to the pressure of the gas. This gas pressure pushes the valve stem 2112 towards the high-pressure chamber 211a. During the opening and closing of the pressure relief orifice 211h, the pushing force F1 of the gas in the high-pressure chamber 211a on the valve stem 2112 remains essentially constant, while the pushing force F2 of the transition chamber 211b on the valve stem 2112 varies with the opening and closing of the pressure relief orifice 211h. When the pressure relief hole 211h is closed, the transition chamber 211b is under high pressure. Under the action of the thrust F2 and the reset member 2113, the valve stem 2112 moves towards the high-pressure chamber 211a, the gap between the valve stem 2112 and the jet port 211d decreases, and the air flow rate ejected from the jet port 211d decreases. When the pressure relief hole 211h is open, the transition chamber 211b is under low pressure, the thrust F2 on the valve stem 2112 decreases, causing the valve stem 2112 to move towards the transition chamber 211b under the action of the thrust F1, the gap between the valve stem 2112 and the jet port 211d increases, and the air flow rate ejected from the jet port 211d increases.

[0095] The control component 2114 is used to control the opening and closing of the pressure relief hole 211h. It can be seen that the frequency of the control component 2114 opening and closing the pressure relief hole 211h will affect the frequency of the valve stem 2112 movement.

[0096] When the valve stem 2112 reciprocates within the nozzle body 2111, there are two extreme states: the end of the valve stem 2112 is in contact with the inner wall of the jet port 211d, and the valve stem 2112 abuts against the inner wall of the transition chamber 211b. In other words, the displacement of the valve stem 2112 has a maximum value during its reciprocating motion. During the opening and closing of the pressure relief orifice 211h by the control element 2114, at a certain frequency, the following two situations may occur: the pressure relief orifice 211h reopens before the valve stem 2112 has reached contact with the inner wall of the jet port 211d; or the pressure relief orifice 211h closes again before the valve stem 2112 has reached abut against the inner wall of the transition chamber 211b. This results in the displacement of the valve stem 2112 being less than its maximum value.

[0097] It is evident that the frequency of opening and closing the pressure relief orifice 211h of the control component 2114 also affects the displacement of the valve stem 2112. The greater the displacement of the valve stem 2112 towards the transition chamber 211b, the larger the gap between the valve stem 2112 and the jet nozzle 211d, and the greater the gas flow rate ejected from the jet nozzle 211d; conversely, the smaller the gas flow rate, the less the gap. Therefore, by adjusting the frequency of opening and closing the pressure relief orifice 211h of the control component 2114, the gas flow rate ejected from the jet nozzle 211d can be adjusted, thereby changing the gas concentration at various points in the gap 20a. The continuous random opening and closing of the pressure relief orifice 211h causes random changes in the concentration of monatomic gas at various points in the gap 20a, thus converting coherent light into incoherent light.

[0098] like Figure 7 As shown, the low-pressure chamber 211c also includes a guide plate 2115, which is connected to the inner wall of the low-pressure chamber 211c. The guide plate 2115 has a guide hole 2115a, and the rod 21141 is inserted into the guide hole 2115a. The guide hole 2115a and the rod 21141 cooperate to make the reciprocating motion of the rod 21141 smoother. The guide plate 2115 does not block the low-pressure chamber 211c; for example, the guide plate 2115 may have multiple through holes to ensure the connectivity of the low-pressure chamber 211c.

[0099] The pressure relief hole 211h can be a tapered hole, meaning the hole wall of the pressure relief hole 211h is tapered. The end of the rod 21141 that matches the pressure relief hole 211h is also tapered, which allows the rod 21141 to better fit with the pressure relief hole 211h and close the pressure relief hole 211h.

[0100] Since the controllable telescopic part 21142 can deform under the action of an electrical signal, the deformation of the controllable telescopic part 21142 can be controlled by an electrical signal, thereby causing the pressure relief hole 211h to open and close continuously, and adjusting the flow rate of the monatomic gas ejected from the gas nozzle 211.

[0101] Optionally, the controllable telescopic part 21142 is made of composite piezoelectric material or rare earth super magnetostrictive material.

[0102] Both composite piezoelectric materials and rare-earth magnetostrictive materials deform when an electrical signal is applied, and the amount of deformation is related to the strength of the electrical signal. When the electrical signal is removed, the deformation is restored. The controllable telescopic part 21142 is made of composite piezoelectric material or rare-earth magnetostrictive material, so that the movement of the rod part 21141 can be controlled by an electrical signal.

[0103] like Figure 7As shown, the controller 30 is electrically connected to the controllable telescopic part 21142. The controller 30 is used to provide electrical signals with randomly varying frequency and / or intensity. The intensity includes voltage or current magnitude. The interface between the controllable telescopic part 21142 and the controller 30 is also the interface used by the aforementioned gas jet suction device 20 to receive electrical signals.

[0104] As before, by adjusting the frequency of opening and closing the pressure relief orifice 211h of the control component 2114, the flow rate of the gas ejected from the jet nozzle 211d can be adjusted, thereby changing the gas concentration at various points in the gap 20a. The frequency of opening and closing the pressure relief orifice 211h of the control component 2114 is the movement frequency of the rod 21141, which is also the deformation frequency of the controllable telescopic part 21142. Since the deformation frequency of the controllable telescopic part 21142 is related to the frequency of the electrical signal provided by the controller 30, the higher the frequency of the electrical signal, the higher the deformation frequency of the controllable telescopic part 21142. Therefore, by providing an electrical signal with a randomly changing frequency, the controller 30 can continuously and randomly change the gas concentration at various points in the gap 20a, converting coherent light into incoherent light.

[0105] For example, the frequency of the electrical signal varies randomly within the range of 100Hz-1MHz.

[0106] The degree of deformation of the controllable telescopic part 21142 is affected by the strength of the electrical signal. The stronger the electrical signal, the greater the degree of deformation of the controllable telescopic part 21142, and correspondingly, the greater the displacement of the rod 21141. Comparing the case where the rod 21141 moves at the same frequency, the greater the displacement of the rod 21141 relative to the pressure relief hole 211h, the larger the gap formed between the rod 21141 and the pressure relief hole 211h, and the faster the pressure in the transition chamber 211b drops. This results in a greater displacement of the valve stem 2112 towards the transition chamber 211b, which in turn leads to a larger gap between the valve stem 2112 and the jet nozzle 211d, and a greater flow rate of the monatomic gas ejected from the jet nozzle 211d. It is evident that the strength of the electrical signal also affects the gas flow rate ejected from the jet nozzle 211d. Therefore, by providing an electrical signal with randomly varying intensity, the controller 30 can also continuously change the gas concentration at various points in the gap 20a, converting coherent light into incoherent light.

[0107] In some examples, the controller 30 may provide an electrical signal with both frequency and intensity that vary randomly to further enhance the randomness of the airflow volume ejected from the nozzle 211d.

[0108] like Figure 7As shown, a receiving cavity 211i is also formed within the nozzle body 2111. The receiving cavity 211i is located between the high-pressure cavity 211a and the transition cavity 211b, and is connected to the low-pressure cavity 211c through the channel 211j. The valve stem 2112 passes through the receiving cavity 211i. The reset member 2113 is located within the receiving cavity 211i.

[0109] The channel 211j keeps the pressure between the receiving cavity 211i and the low-pressure cavity 211c balanced, so that when the valve stem 2112 moves, it will not cause pressure buildup in the receiving cavity 211i and affect the movement of the valve stem 2112.

[0110] Figure 8 This is a schematic diagram of a valve stem provided in an embodiment of this application. Figure 8 As shown, the valve stem 2112 includes a first stem body 21121, a second stem body 21122, and a columnar portion 21123. One end of the first stem body 21121 is connected to one end of the columnar portion 21123, and one end of the second stem body 21122 is connected to the other end of the columnar portion 21123. The end face area of ​​both the first stem body 21121 and the second stem body 21122 is smaller than the end face area of ​​the columnar portion 21123.

[0111] The first rod 21121 is located in the high-pressure chamber 211a, and the columnar portion 21123 is inserted into the wall at the junction of the high-pressure chamber 211a and the receiving chamber 211i, with one end in the high-pressure chamber 211a and the other end in the receiving chamber 211i. The second rod 21122 is inserted into the wall at the junction of the transition chamber 211b and the receiving chamber 211i, with one end in the transition chamber 211b and the other end in the receiving chamber 211i. The reset member 2113 is a spring, located in the receiving chamber 211i, and sleeved outside the second rod 21122, with one end abutting against the columnar portion 21123 and the other end abutting against the inner wall of the receiving chamber 211i.

[0112] Since the end face area of ​​the first rod 21121 is smaller than that of the columnar portion 21123, the air pressure in the high-pressure chamber 211a acts on the end face of the columnar portion 21123, generating a thrust F1. The air pressure in the transition chamber 211b acts on the end face of the second rod 21122, generating a thrust F2. In the receiving chamber 211i, the end face of the columnar portion 21123 is also subjected to a thrust from the air pressure, but the air pressure in the receiving chamber 211i is the same as that in the low-pressure chamber 211c, both are very small and can be ignored. Thus, the valve stem 2112 reciprocates under the thrust F1, thrust F2, and the elastic force of the reset member 2113.

[0113] The magnitude of the thrust F1 satisfies the following relationship:

[0114] F1=(S0-S1)·P1·cosθ (1)

[0115] Where S0 is the end face area of ​​the columnar portion 21123, S1 is the area of ​​the end of the first rod 21121 connected to the columnar portion 21123, and S0-S1 represents... Figure 8 In the figure, the area of ​​the cone-shaped region at the end face of the columnar part 21123 is defined. P1 is the gas pressure in the high-pressure chamber 211a. That is, the thrust F1 is the axial component of the pressure exerted by the gas in the high-pressure chamber 211a on the columnar part 21123.

[0116] The magnitude of the thrust F2 satisfies the following relationship:

[0117] F2=S2·P2 (2)

[0118] Where S2 is the end face area of ​​the second rod 21122, and P2 is the air pressure in the transition cavity 211b.

[0119] It can be seen that when designing the gas nozzle 211, the force on the valve stem 2112 can be changed by adjusting the values ​​of S0, S1, S2, and θ, so that the valve stem 2112 can reciprocate smoothly in the nozzle body 2111, thereby controlling the gas flow rate ejected from the jet nozzle 211d.

[0120] The intake port 221a may be conical, with the larger diameter end close to the exhaust port 211d. Figure 9 This is a schematic diagram of the structure of a gas nozzle provided in an embodiment of this application. Combined with... Figure 6 and Figure 9 As shown, the gas nozzle 221 has an air intake 221a at one end opposite to the gas nozzle 211. The air intake 221a is conical, and the end with the larger diameter is close to the gas nozzle 211.

[0121] The gas suction nozzle 221 is tubular, with the end containing the suction port 221a facing the gas nozzle 211, sucking away the gas ejected from the gas nozzle 211 and preventing the gas from diffusing inside the housing 10. The suction port 221a is set in a conical shape, with the larger diameter end of the suction port 221a facing the gas nozzle 211, which is beneficial for the gas suction nozzle 221 to collect the airflow ejected from the gas nozzle 211.

[0122] like Figure 3 and Figure 4 As shown, the decoherence device also includes an inlet pipe 41 and an intake pipe 42. One end of the inlet pipe 41 is located outside the housing 10, and the other end is connected to the high-pressure chamber 211a of each of the n gas nozzles 211. One end of the intake pipe 42 is located outside the housing 10, and the other end is connected to the low-pressure chamber 211c of each of the n gas nozzles 211 and the n gas nozzles 211 respectively.

[0123] The end of the air inlet pipe 41 located outside the housing 10 facilitates connection of a decoherent device to a high-pressure source, such as the outlet of an air pump. The end of the air intake pipe 42 located outside the housing 10 facilitates connection of a decoherent device to a low-pressure source, such as the inlet of an air pump. Since both the air inlet pipe 41 and the air intake pipe 42 extend to the outside of the housing 10, both the high-pressure and low-pressure sources can be arranged outside the housing 10, which helps to reduce the size of the housing 10 and facilitates the arrangement of the high-pressure and low-pressure sources.

[0124] The air pumps connected to the intake pipe 41 and the suction pipe 42 can be the same pump or different pumps. When the air pumps connected to the intake pipe 41 and the suction pipe 42 are the same pump, it means that the gas recovered by the suction pipe 42 is recycled, reducing the consumption of monatomic gas.

[0125] The air inlet pipe 41 and the air suction pipe 42 can be rigid pipes, which can also serve to support the gas nozzle 211 and the gas suction nozzle 221.

[0126] Figure 10 This is a schematic diagram of a decoherence device provided in an embodiment of this application. Figure 10 As shown, in this decoherence device, one end of the gas nozzle 211 is located inside the housing 10, and the other end is located outside the housing 10. Similarly, one end of the gas suction nozzle 221 is located inside the housing 10, and the other end is located outside the housing 10. When the volume of the housing 10 is too small to accommodate the gas jet / suction device 20, by inserting the gas nozzle 211 and the gas suction nozzle 221 into the housing 10, it is also possible to form a monatomic gas with randomly varying concentration within the housing 10.

[0127] To further reduce the volume of the housing 10, the jet nozzle 211d and the suction port 221a can also be located on the housing 10. That is, the gas jet suction device 20 is located outside the housing 10 and does not extend into the housing 10.

[0128] Figure 11 This is a schematic diagram of a light source system provided in an embodiment of this application. Figure 11 As shown, the light source system includes a coherent light source 110 and a decoherence device 140. The decoherence device 140 can be... Figures 1-10 Any of the decoherence devices 140 shown.

[0129] The coherent light source 110 is aligned with the light inlet 10a of the housing 10 of the decoherent device 140, that is, the light beam emitted from the coherent light source 110 can be incident on the light inlet 10a of the housing 10 of the decoherent device 140.

[0130] The light source system may also include an air source 120 and an air pump 130. The air source 120 is connected to the air inlet of the air pump 130, and the air outlet of the air pump 130 is connected to the gas injection device 21.

[0131] The coherent light source 110 is used to emit a light beam, which is coherent light. The light beam emitted by the coherent light source 110 enters the decoherence device 140 through the light inlet 10a.

[0132] As an example, the application of coherent light source 110 in the field of ultra-high precision imaging can lead to interference phenomena, affecting imaging. By using the decoherence device in this application to shape the beam and form incoherent light, the application range of coherent light in different bands can be further expanded.

[0133] The coherent light source 110 is aligned with the light inlet 10a of the housing 10 of the decoherent device 140, meaning that the light beam emitted by the coherent light source 110 can enter the interior of the decoherent device 140 through the light inlet 10a.

[0134] Gas source 120 is used to provide monatomic gas. The gas source 120 can be different depending on the wavelength of the beam emitted by the coherent light source 110. For example, if the wavelength of the beam emitted by the coherent light source 110 is 13.5 nm, a krypton gas source can be used; if the wavelength of the beam emitted by the coherent light source 110 is 50 nm, a helium gas source can be used.

[0135] The air pump 130 is used to input gas from the gas source 120 into the gas injection device 21 to form a monoatomic gas flow in the gap 20a between the gas injection device 21 and the gas suction device 22.

[0136] For example, the output pressure of the gas pump 130 may not exceed 100 Pa. During the operation of the light source system, the light beam propagates in a near-vacuum environment. If the output pressure of the gas pump 130 is too high, the flow rate of the monatomic gas will be too high, resulting in an excessively high gas concentration in the gap 20a, causing excessive light loss as the beam passes through the gap 20a. Typically, the gas concentration in the gap 20a does not exceed 10 Pa. 22 atm / m 3 The gas concentration here refers to the gas concentration at the location with the highest gas concentration in gap 20a.

[0137] like Figure 11 As shown, the light source system also includes a filter 150. The gas extraction device 22 is connected to the air inlet of the air pump 130 through the filter 150.

[0138] By connecting the gas extraction device 22 to the air inlet of the air pump 130, the monatomic gas recovered by the gas extraction device 22 can be recycled, reducing the consumption of monatomic gas. The filter 150 can filter the recovered monatomic gas to prevent impurities mixed in with the monatomic gas from having adverse effects.

[0139] like Figure 11As shown, the light source system also includes a differential pump 160. The differential pump 160 is connected between the coherent light source 110 and the light inlet 10a of the housing 10.

[0140] Since air can affect the light beam, to avoid this effect, the light beam in the light source system should ideally be in a vacuum or near-vacuum environment. Therefore, the optical components inside the coherent light source 110 typically operate in a vacuum or near-vacuum environment. To prevent monatomic gas inside the decoherence device 140 from diffusing into the coherent light source 110 and affecting it, a differential pump 160 is installed between the coherent light source 110 and the decoherence device 140 to isolate them.

[0141] In the light source system, multiple differential pumps 160 can be connected in series between the coherent light source 110 and the decoherent device 140 to improve the isolation effect.

[0142] For example, the differential pump 160 can be connected to the housing 10 via the first interface 11 on the housing 10. The second interface 12 on the housing 10 can serve as the output port of the light source system, outputting incoherent light. The second interface 12 is used to connect to downstream devices. At least one differential pump can also be connected between the second interface 12 and the downstream devices to provide isolation.

[0143] The coherent light source 110 can also be connected to the controller 30 of the decoherence device 140, which is also used to control the operation of the coherent light source 110. For example, after controlling the gas jet device 20 to start working, the coherent light source 110 is controlled to emit light; after controlling the coherent light source 110 to stop emitting light, the gas jet device 20 is controlled to stop working.

[0144] The air pump 130 can also be connected to the controller 30, which controls the start and stop of the air pump 130 and the output pressure.

[0145] The terminology used in the embodiments section of this application is for illustrative purposes only and is not intended to limit the application. Unless otherwise defined, the technical or scientific terms used in the embodiments of this application should have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," "third," and similar terms used in the patent application specification and claims of this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms "a" or "one," and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms "comprising" or "including," and similar terms mean that the elements or objects preceding "comprising" or "including" encompass the elements or objects listed following "comprising" or "including" and their equivalents, and do not exclude other elements or objects. The terms "connected," "linked," and similar terms are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up," "down," "left," "right," etc., are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0146] The above description is merely one embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A decoherence device, characterized in that, Includes a housing (10) and a gas jet suction device (20); The housing (10) has a light inlet (10a) and a light outlet (10b), both for allowing light beams to pass through; The outer casing (10) is used to connect to the gas jet suction device (20), the gas jet suction device (20) is used to form a monatomic gas with randomly varying concentration in the outer casing (10), and the light beam passes through the monatomic gas with randomly varying concentration; The gas injection device (20) includes a gas injection device (21) having a gas nozzle (211d). The gas injection device (21) includes a gas nozzle (211), the gas nozzle (211) includes a nozzle body (2111) and a valve stem (2112), the air outlet (211d) is located at one end of the nozzle body (2111), the valve stem (2112) is located in the nozzle body (2111), and one end is matched with the air outlet (211d); The nozzle body (2111) has a high-pressure chamber (211a), a transition chamber (211b), a low-pressure chamber (211c), and a pressure relief hole (211h). The high-pressure chamber (211a) is connected to the jet outlet (211d), and the pressure relief hole (211h) connects the transition chamber (211b) and the low-pressure chamber (211c). One end of the valve stem (2112) is located in the high-pressure chamber (211a), and the other end is located in the transition chamber (211b); The gas nozzle (211) also includes a control element (2114) for controlling the opening and closing of the pressure relief hole (211h).

2. The decoherence apparatus according to claim 1, characterized in that, The gas injection and suction device (20) has an intake port (221a), the jet port (211d) and the intake port (221a) are located on the housing (10) or inside the housing (10), the jet port (211d) is used to inject a monatomic gas with a randomly varying flow rate into the housing (10), and the intake port (221a) is used to absorb the monatomic gas.

3. The decoherence apparatus according to claim 2, characterized in that, The gas jetting device (20) has n jet nozzles (211d) and n suction nozzles (221a), n≥1 and is an integer, and the n jet nozzles (211d) and the n suction nozzles (221a) are arranged one-to-one opposite to form a monatomic gas flow with randomly varying flow rate between the n jet nozzles (211d) and the n suction nozzles (221a), and the light beam is adapted to pass through the monatomic gas flow formed between the n jet nozzles (211d) and the n suction nozzles (221a).

4. The decoherence apparatus according to claim 3, characterized in that, n≥2, the n jet nozzles (211d) and the n air inlets (221a) are arranged in pairs, and the line connecting each pair of jet nozzles (211d) and air inlets (221a) intersects at a point, and the beam is adapted to pass through the intersection of the lines.

5. The decoherence apparatus according to any one of claims 2 to 4, characterized in that, The gas injection device (20) further includes a gas extraction device (22), the gas injection device (21) is used to inject a randomly varying flow rate of monatomic gas into the housing (10) through the injection port (211d), the gas extraction device (22) has the intake port (221a), the gas extraction device (22) is used to extract gas from the housing (10) through the intake port (221a).

6. The decoherence apparatus according to claim 5, characterized in that, The gas nozzle (211) is located inside the housing (10), or one end is located inside the housing (10) and the other end is located outside the housing (10).

7. The decoherence apparatus according to any one of claims 3 to 4, characterized in that, The gas jetting device (20) has an interface for receiving electrical signals. The gas jetting device (20) is used to randomly change the flow rate of the monoatomic gas stream under the action of the electrical signals, which vary in frequency and / or intensity, including voltage or current magnitude.

8. The decoherence apparatus according to claim 6, characterized in that, The gas nozzle (211) also includes a reset member (2113), which is located between the valve stem (2112) and the inner wall of the nozzle body (2111). The valve stem (2112) is used to reciprocate axially relative to the jet port (211d) under the action of the gas pressure in the nozzle body (2111) and the reset member (2113) to change the degree of opening of the jet port (211d).

9. The decoherence apparatus according to claim 8, characterized in that, The control element (2114) is located in the low-pressure chamber (211c) and includes a rod (21141) and a controllable telescopic part (21142). One end of the rod (21141) is connected to the controllable telescopic part (21142), and the other end is matched with the pressure relief hole (211h). The controllable telescopic part (21142) is used to deform under the action of an electrical signal, thereby driving the rod (21141) to move relative to the pressure relief hole (211h) so that the pressure relief hole (211h) is opened or closed.

10. The decoherence apparatus according to claim 9, characterized in that, The controllable telescopic part (21142) is made of composite piezoelectric material or rare earth super magnetostrictive material.

11. The decoherence apparatus according to any one of claims 9 to 10, characterized in that, The decoherence device also includes an air inlet pipe (41) and an air intake pipe (42). One end of the air inlet pipe (41) is located outside the outer casing (10), and the other end is connected to the high-pressure chamber (211a) of the gas nozzle (211); One end of the intake pipe (42) is located outside the outer shell (10), and the other end is connected to the low-pressure chamber (211c) of the gas nozzle (211).

12. The decoherence apparatus according to any one of claims 2-4, 6, 8-10, characterized in that, The air intake (221a) is conical, with the larger diameter end close to the air outlet (211d).

13. A light source system, characterized in that, It includes a coherent light source (110) and a decoherent device (140) as described in any one of claims 1 to 12. The light beam emitted from the coherent light source (110) is incident on the light inlet (10a) of the housing (10) of the decoherent device (140).

14. The light source system according to claim 13, characterized in that, It also includes an air source (120) and an air pump (130), wherein the air source (120) is connected to the air inlet of the air pump (130), and the air outlet of the air pump (130) is connected to the gas spraying device (20).

15. The light source system according to claim 14, characterized in that, It also includes a filter (150), through which the gas jet suction device (20) is connected to the air inlet of the air pump (130).

16. The light source system according to any one of claims 13 to 15, characterized in that, It also includes a differential pump (160) connected between the coherent light source (110) and the light inlet (10a) of the housing (10).

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