LDI机仿生柔顺飞行曝光机构及曝光方法
By employing a dual focusing method based on the biomimetic compliant flight exposure mechanism of the LDI camera, and utilizing the synergistic effect of the rangefinder and piezoelectric actuator, focusing accuracy is improved, solving the problem of low focusing accuracy in existing technologies and enhancing exposure efficiency and quality.
CN119200349BActive Publication Date: 2026-07-17GUANGDONG UNIV OF TECH
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- GUANGDONG UNIV OF TECH
- Filing Date
- 2024-10-25
- Publication Date
- 2026-07-17
Smart Images
Figure CN119200349B_ABST
Abstract
本发明涉及无掩膜数字光刻设备的技术领域，更具体地，涉及LDI机仿生柔顺飞行曝光机构及曝光方法，飞行曝光机构包括机台以及装设于机台的数字曝光系统和用于驱动基板在三维空间运动的对位系统；还包括测距仪、控制系统、安装于机台的压电驱动器和仿生柔顺机构，测距仪连接于数字曝光系统，压电驱动器通过仿生柔顺机构与数字曝光系统连接，测距仪、对位系统和压电驱动器分别与控制系统通信连接。本发明通过测距仪实时监控待曝光区域与数字曝光系统的距离，通过对位系统控制基板运动进行宏观对位，并控制基板升降进行粗对焦，同时，由压电驱动器通过仿生柔顺机构控制数字曝光系统升降进行精对焦，提高对焦精度，有效提高曝光精度及良率。
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