Integrated circuit production device with dust removal function

Abstract

This invention discloses an integrated circuit manufacturing equipment with dust removal function, belonging to the field of integrated circuit manufacturing technology. It includes a base plate with a vertical plate connected to its upper end. Two rotating shafts are symmetrically rotatably connected to one side wall of the vertical plate, and a conveyor belt is mounted on both shafts. A rotating assembly for driving the rotating shafts is mounted on the vertical plate, as well as an etching assembly for circuit board processing. A mounting frame is connected to one side wall of the vertical plate, and a rotating tube is rotatably mounted on the mounting frame. The rotating tube is connected to the rotating shafts via a pulley drive. This invention overcomes the shortcomings of existing technologies. By setting up a structure with a conveyor belt, rotating tube, sponge sleeve, fixed cylinder, water pipe, spring, piston, pulley, and cam, the equipment can automatically clean the etching solution remaining on the circuit board after etching, preventing the etching solution from solidifying and adhering to the circuit board, thereby improving the applicability of the device.

Description

Technical Field

[0001] This invention relates to the field of integrated circuit manufacturing, and in particular to an integrated circuit manufacturing equipment with a dust removal function. Background Technology

[0002] Integrated circuits (ICs) are a method of miniaturizing circuits (mainly including semiconductor devices, but also passive components). Using specific processes, transistors, resistors, capacitors, inductors, and other components required for a circuit, along with interconnecting wiring, are fabricated on one or several small pieces of semiconductor wafers or dielectric substrates, and then packaged in a casing to form a miniature structure with the required circuit function. All components are structurally integrated into a whole, representing a significant step forward in the miniaturization, low power consumption, intelligence, and high reliability of electronic components.

[0003] During integrated circuit manufacturing, manufacturers need to etch the surface of the circuit board. To save costs, manufacturers usually use chemical etching machines for etching. However, after etching is completed, the surface of the circuit board usually has etching solution remaining. When the etching solution solidifies, it will adhere to the surface of the circuit board, which can easily affect the normal use of the circuit board and has poor applicability. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides an integrated circuit manufacturing equipment with dust removal function, thus overcoming the deficiencies of existing technologies.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an integrated circuit manufacturing equipment with dust removal function, comprising a base plate, a vertical plate connected to the upper end of the base plate, two rotating shafts symmetrically rotatably connected to one side wall of the vertical plate, a conveyor belt being mounted on both rotating shafts, a rotating assembly for driving the rotating shafts to rotate mounted on the vertical plate, an etching assembly for circuit board processing mounted on the vertical plate, a mounting bracket connected to one side wall of the vertical plate, a rotating tube rotatably mounted on the mounting bracket, the rotating tube being connected to the rotating shafts via a pulley drive, and the tube wall of the rotating tube having... A sponge sleeve is fixedly fitted and located at the upper end of the conveyor belt. Several water outlet holes are evenly spaced on the wall of the rotating tube. A placement platform is connected to the upper end of the base plate, and a storage box is installed on the upper end of the placement platform. A fixed cylinder is connected to the upper end of the base plate, and the fixed cylinder and the storage box are connected through a connecting pipe. A water supply pipe is connected to one side wall of the fixed cylinder, and the other end of the water supply pipe passes through the side wall of the placement platform and is rotatably connected to the rotating tube. A squeezing component for draining cleaning water into the rotating tube is installed on the fixed cylinder, and a scraping component for cleaning the conveyor belt is installed in the storage box.

[0006] By adopting the above technical solution, firstly, the rinsing liquid is poured into the storage tank, and then the connecting pipe is opened. At this time, the rinsing liquid will enter the fixed cylinder through the connecting pipe. Then the connecting pipe is closed. During operation, the rotating component is used to rotate the rotating shaft, which in turn drives the conveyor belt to transport the circuit board. When the circuit board moves to the designated position, the etching component performs etching on the circuit board. After the etching is completed, the conveyor belt continues to transport the circuit board. The rotation of the rotating shaft drives the rotating pipe to rotate through the pulley. The rotation of the rotating pipe drives the sponge sleeve to rotate. At the same time, the squeezing component discharges the rinsing liquid in the fixed cylinder into the rotating pipe. The rotating pipe then discharges the rinsing liquid into the sponge sleeve through the water outlet. When the conveyor belt moves to the position of the sponge sleeve, the sponge sleeve automatically cleans the etching liquid remaining on the surface of the circuit board. Through the above structure, the etching liquid remaining on the circuit board can be automatically cleaned after etching, preventing the etching liquid from solidifying and adhering to the circuit board, thereby improving the applicability of the device.

[0007] As a preferred embodiment of the present invention, the rotating assembly includes a motor fixedly mounted on one side wall of the vertical plate, and the output end of the motor is connected to the corresponding rotating shaft through a coupling.

[0008] By adopting the above technical solution, when the motor is started, the motor will drive the corresponding rotating shaft to connect.

[0009] As a preferred embodiment of the present invention, a support plate is installed on the side wall of one side of the vertical plate, and the motor is mounted on the support plate.

[0010] By adopting the above technical solution, the motor is prevented from falling off the vertical plate.

[0011] As a preferred embodiment of the present invention, the dewatering assembly includes two springs symmetrically connected to the top of the fixed cylinder. The other ends of the two springs are connected to a piston. The piston is slidably connected inside the fixed cylinder and is matched with the fixed cylinder. A rack is connected to the upper end of the piston. The upper end of the rack passes through the top of the fixed cylinder and extends upward and is fitted with a pulley. A cam is fixedly sleeved on the wall of the rotating tube, and the cam abuts against the pulley.

[0012] By adopting the above technical solution, when the rotating tube rotates, it will drive the cam to rotate. The rotation of the cam will apply a force to the pulley. The pulley, under the force, will drive the rack to move downward. The movement of the rack will drive the piston to move downward. The downward movement of the piston will compress the air in the fixed cylinder. At this time, the flushing fluid in the fixed cylinder will be forced into the rotating tube through the water supply pipe. In addition, when the piston moves downward, it will also stretch the spring. The spring will deform under the force. When the force of the cam is removed from the pulley, the spring will reset. The spring will then cause the piston to reset, and so on.

[0013] As a preferred embodiment of the present invention, the scraping assembly includes a rotating rod rotatably connected to the side wall of the storage bin. One end of the rotating rod passes through the side wall of the storage bin. Several cleaning brushes are evenly and equidistantly connected on the rod wall of the rotating rod located inside the storage bin, and the corresponding cleaning brushes are attached to the lower end of the conveyor belt. A drive assembly for driving the rotating rod to rotate is installed on the base plate.

[0014] By adopting the above technical solution, the rotating rod is rotated by the driving component. The rotation of the rotating rod will drive the cleaning brush to rotate. When the cleaning brush comes into contact with the conveyor belt, it will clean the conveyor belt and prevent some etching solution from adhering to the conveyor belt, thereby improving the cleanliness of the conveyor belt.

[0015] As a preferred embodiment of the present invention, the driving assembly includes a gear fixedly connected to one end of the rotating rod, the gear meshing with a rack.

[0016] By adopting the above technical solution, when the rack moves in the vertical direction, the rack will apply a force to the gear, and the gear will drive the rotating rod to rotate due to the force applied to it.

[0017] As a preferred embodiment of the present invention, the etching assembly includes a cylinder fixedly installed on one side wall of the vertical plate, the piston end of the cylinder is connected to an etching machine, and the etching machine is located above the conveyor belt.

[0018] By adopting the above technical solution, when etching the circuit board, the cylinder is started, which will drive the etching machine to move vertically. When the etching machine moves to the designated position, the etching machine is started, and the etching machine will perform etching processing on the circuit board.

[0019] As a preferred embodiment of the present invention, a vacuum cleaner is installed on the side wall of one side of the vertical plate, a vacuum pipe is installed at the lower end of the vacuum cleaner, a vacuum head is connected to the lower end of the vacuum pipe, and the vacuum head is located above the conveyor belt.

[0020] By adopting the above technical solution, when the circuit board is moved to the position below the vacuum head, the vacuum cleaner is started. The vacuum cleaner will remove dust from the surface of the circuit board through the vacuum tube and the vacuum head to prevent dust from affecting the circuit board processing, thereby improving the practicality of the device.

[0021] Compared with the prior art, the beneficial effects of the present invention are:

[0022] (1) This invention comprises a base plate, a vertical plate, a rotating shaft, a conveyor belt, a mounting frame, a rotating tube, a sponge sleeve, a placement platform, a storage box, a fixed cylinder, a water supply pipe, a motor, a support plate, a spring, a piston, a pulley, and a cam. The motor and rotating shaft power the conveyor belt to transport the circuit board. The rotation of the rotating shaft drives the rotating tube and the sponge sleeve to rotate via a pulley. When the rotating tube rotates, it drives the cam to rotate. The rotation of the cam drives the piston to move downward via the pulley. The downward movement of the piston compresses the air in the fixed cylinder, thus forcing the rinsing fluid in the fixed cylinder into the rotating tube through the water supply pipe. Furthermore, when the piston moves downward, it also stretches the spring. The spring deforms under the force. When the force of the cam is removed from the pulley, the spring resets, causing the piston to reset as well. This process repeats. When the flushing fluid in the fixed cylinder is discharged into the rotating tube, the rotating tube then discharges the flushing fluid into the sponge sleeve through the water outlet. When the conveyor belt moves to the position of the sponge sleeve, the sponge sleeve automatically cleans the etching solution remaining on the circuit board surface. Through the above structure, the etching solution remaining on the circuit board after etching can be automatically cleaned, preventing the etching solution from solidifying and adhering to the circuit board, thereby improving the applicability of the device.

[0023] (2) By setting up a structure such as a rack, pulley, cam, rotating rod, cleaning brush and gear, when the rack moves in the vertical direction, the rack will apply a force to the gear. The gear will be driven to rotate by the force, and the rotation of the rotating rod will drive the cleaning brush to rotate. When the cleaning brush comes into contact with the conveyor belt, the cleaning brush will clean the conveyor belt and prevent some etching liquid from adhering to the conveyor belt, thereby improving the cleanliness of the conveyor belt.

[0024] (3) By setting up a vacuum cleaner, a vacuum pipe and a vacuum head, the present invention can start the vacuum cleaner when the circuit board moves to the position below the vacuum head. The vacuum cleaner will remove dust from the surface of the circuit board through the vacuum pipe and the vacuum head to prevent dust from affecting the circuit board processing, thereby improving the practicality of the device. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2This is a schematic diagram of the working structure of the cam and pulley in this invention;

[0027] Figure 3 for Figure 2 Enlarged view of section A;

[0028] Figure 4 This is a right view of the present invention;

[0029] Figure 5 This is a schematic diagram of the internal structure of the fixed cylinder in this invention;

[0030] Figure 6 This is a schematic diagram of the scraping component structure in the present invention;

[0031] Figure 7 This is a schematic diagram of the rotating tube structure in this invention.

[0032] Explanation of reference numerals in the attached figures:

[0033] 1. Base plate; 2. Vertical plate; 3. Rotating shaft; 4. Conveyor belt; 5. Mounting frame; 6. Rotating tube; 7. Sponge sleeve; 8. Placement platform; 9. Storage bin; 10. Fixed cylinder; 11. Water supply pipe; 12. Motor; 13. Support plate; 14. Spring; 15. Piston; 16. Rack; 17. Pulley; 18. Cam; 19. Rotating rod; 20. Cleaning brush; 21. Gear; 22. Cylinder; 23. Etching machine; 24. Vacuum cleaner; 25. Vacuum suction pipe; 26. Vacuum suction head. Detailed Implementation

[0034] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0035] Please see Figure 1 and Figure 4 An integrated circuit manufacturing equipment with dust removal function includes a base plate 1, a vertical plate 2 fixedly connected to the upper end of the base plate 1, two rotating shafts 3 symmetrically rotatably connected to one side wall of the vertical plate 2, a conveyor belt 4 being installed on both rotating shafts 3, a rotating assembly for driving the rotating shafts 3 to rotate on the vertical plate 2, the rotating assembly including a motor 12 fixedly installed on one side wall of the vertical plate 2, the output end of the motor 12 being connected to the corresponding rotating shaft 3 through a coupling, when the motor 12 is started, the motor 12 will drive the corresponding rotating shaft 3 to connect, a support plate 13 is installed on one side wall of the vertical plate 2, the motor 12 is set on the support plate 13 to prevent the motor 12 from falling off the vertical plate 2.

[0036] An etching assembly for circuit board processing is installed on the vertical plate 2. The etching assembly includes a cylinder 22 fixedly installed on one side wall of the vertical plate 2. The piston end of the cylinder 22 is connected to an etching machine 23, and the etching machine 23 is located above the conveyor belt 4. The etching machine 23 is existing technology and is not described in detail in this invention. The specific structure and working principle can be referred to the existing technology. When etching the circuit board, the cylinder 22 is started, and the cylinder 22 will drive the etching machine 23 to move vertically. When the etching machine 23 moves to the designated position, the etching machine 23 is started, and the etching machine 23 will perform etching processing on the circuit board.

[0037] For details, please refer to Figure 1-2 , Figure 5 and Figure 7 A mounting bracket 5 is connected to one side wall of the vertical plate 2. A rotating pipe 6 is rotatably mounted on the mounting bracket 5. The rotating pipe 6 is connected to the rotating shaft 3 via a belt pulley. A sponge sleeve 7 is fixedly fitted on the pipe wall of the rotating pipe 6. The sponge sleeve 7 is located at the upper end of the conveyor belt 4. Several water outlet holes are evenly spaced on the pipe wall of the rotating pipe 6. A placement platform 8 is fixedly connected to the upper end of the bottom plate 1. A storage box 9 is installed on the upper end of the placement platform 8. A fixed cylinder 10 is connected to the upper end of the bottom plate 1. The fixed cylinder 10 and the storage box 9 are connected through a connecting pipe. A water supply pipe 11 is connected to one side wall of the fixed cylinder 10. The other end of the water supply pipe 11 passes through the side wall of the placement platform 8 and is rotatably connected to the rotating pipe 6. A water squeezing component for draining clean water into the rotating pipe 6 is installed on the fixed cylinder 10.

[0038] The dewatering assembly includes two springs 14 symmetrically connected to the top of the fixed cylinder 10. The other ends of the two springs 14 are connected to a piston 15, which is slidably connected inside the fixed cylinder 10 and matches the fixed cylinder 10. A rack 16 is connected to the upper end of the piston 15. The upper end of the rack 16 passes through the top of the fixed cylinder 10 and extends upwards, where a pulley 17 is installed. A cam 18 is fixedly sleeved on the wall of the rotating pipe 6, and the cam 18 abuts against the pulley 17. First, the flushing liquid is poured into the storage tank 9, and then the connecting pipe is opened. At this time, the rinsing fluid will enter the fixed cylinder 10 through the connecting pipe, and then the connecting pipe will be closed. During operation, the motor 12 will rotate the rotating shaft 3 to make the conveyor belt 4 operate and transport the circuit board. When the circuit board moves to the designated position, the etching component will etch the circuit board. After the etching is completed, the conveyor belt 4 will continue to transport the circuit board. The rotation of the rotating shaft 3 will drive the rotating tube 6 to rotate through the pulley, and the rotation of the rotating tube 6 will drive the sponge sleeve 7 to rotate.

[0039] When the rotating tube 6 rotates, it drives the cam 18 to rotate. The rotation of the cam 18 applies a force to the pulley 17. The pulley 17, under this force, drives the rack 16 to move downward. The movement of the rack 16 drives the piston 15 to move downward. The downward movement of the piston 15 compresses the air in the fixed cylinder 10. At this time, the flushing fluid in the fixed cylinder 10 is forced into the rotating tube 6 through the water supply pipe 11. Furthermore, when the piston 15 moves downward, it also stretches the spring 14. The spring 14 deforms under the force. When the force of the cam 18 is removed from the pulley 17, the spring 14 returns to its original position. The spring 14 then causes the piston 15 to return to its original position, and this process repeats.

[0040] When the rinsing fluid in the fixed cylinder 10 is discharged into the rotating tube 6, the rotating tube 6 then discharges the rinsing fluid into the sponge sleeve 7 through the water outlet. When the conveyor belt 4 moves to the position of the sponge sleeve 7, the sponge sleeve 7 will automatically clean the etching fluid left on the surface of the circuit board. Through the above structure, the etching fluid left on the circuit board can be automatically cleaned after etching, preventing the etching fluid from solidifying and adhering to the circuit board, thereby improving the applicability of the device.

[0041] For details, please refer to Figure 1 , Figure 3 and Figure 6 The storage bin 9 is equipped with a scraping assembly for cleaning the conveyor belt 4. The scraping assembly includes a rotating rod 19 rotatably connected to the side wall of the storage bin 9. One end of the rotating rod 19 passes through the side wall of the storage bin 9. Several cleaning brushes 20 are evenly and equidistantly connected to the rod wall of the rotating rod 19 located inside the storage bin 9, and the corresponding cleaning brushes 20 are attached to the lower end of the conveyor belt 4. A drive assembly for driving the rotating rod 19 to rotate is installed on the bottom plate 1. The drive assembly includes a gear 21 fixedly connected to one end of the rotating rod 19. The gear 21 meshes with a rack 16. When the rack 16 moves vertically, the rack 16 will apply a force to the gear 21. The gear 21 will be driven to rotate the rotating rod 19 due to the force. The rotation of the rotating rod 19 will drive the cleaning brushes 20 to rotate. When the cleaning brushes 20 come into contact with the conveyor belt 4, the cleaning brushes 20 will clean the conveyor belt 4 to prevent some etching solution from adhering to the conveyor belt 4, thereby improving the cleanliness of the conveyor belt 4.

[0042] For details, please refer to Figure 1 A vacuum cleaner 24 is installed on the side wall of one side of the vertical plate 2. A vacuum cleaner pipe 25 is installed at the lower end of the vacuum cleaner 24. A vacuum cleaner head 26 is connected to the lower end of the vacuum cleaner pipe 25 and is located above the conveyor belt 4. When the circuit board moves to the position below the vacuum cleaner head 26, the vacuum cleaner 24 is activated. The vacuum cleaner 24 will remove dust from the surface of the circuit board through the vacuum cleaner pipe 25 and the vacuum cleaner head 26 to prevent dust from affecting the circuit board processing, thereby improving the practicality of the device.

[0043] Working principle: First, the rinsing fluid is poured into the storage tank 9, then the connecting pipe is opened. At this time, the rinsing fluid will enter the fixed cylinder 10 through the connecting pipe. Then the connecting pipe is closed. During operation, the motor 12 drives the rotating shaft 3 to rotate, which in turn drives the conveyor belt 4 to transport the circuit board. When the circuit board moves to the designated position, the etching component etches the circuit board. After the etching is completed, the conveyor belt 4 continues to transport the circuit board. The rotation of the rotating shaft 3 drives the rotating pipe 6 to rotate through the pulley. The rotation of the rotating pipe 6 drives the sponge sleeve 7 to rotate. When the rotating pipe 6 rotates, it drives the cam 18 to rotate. The rotation of the cam 18 applies a force to the pulley 17. The pulley 17 is subjected to the force and... The rack 16 moves downward, which in turn moves the piston 15 downward. The downward movement of the piston 15 compresses the air inside the fixed cylinder 10. At this time, the flushing fluid inside the fixed cylinder 10 is forced into the rotating pipe 6 through the water supply pipe 11. Furthermore, the downward movement of the piston 15 also stretches the spring 14. The spring 14 deforms under the force. When the force of the cam 18 is removed from the pulley 17, the spring 14 resets, which in turn resets the piston 15. This process repeats until the flushing fluid in the fixed cylinder 10 is discharged into the rotating pipe 6. The rotating pipe 6 then discharges the flushing fluid into the sponge sleeve 7 through the water outlet. When the conveyor belt 4 moves to the position of the sponge sleeve 7, the sponge sleeve 7 automatically cleans the etching solution remaining on the surface of the circuit board.

[0044] Finally, it should be noted that in the description of this invention, the terms "vertical," "upper," "lower," "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0045] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0046] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An integrated circuit manufacturing equipment with dust removal function, comprising a base plate (1), wherein a vertical plate (2) is connected to the upper end of the base plate (1), characterized in that: Two rotating shafts (3) are symmetrically rotatably connected to one side wall of the vertical plate (2). A conveyor belt (4) is mounted on both rotating shafts (3). A rotating assembly for driving the rotating shafts (3) to rotate is mounted on the vertical plate (2). An etching assembly for circuit board processing is mounted on the vertical plate (2). A mounting bracket (5) is connected to one side wall of the vertical plate (2). A rotating tube (6) is rotatably mounted on the mounting bracket (5). The rotating tube (6) is connected to the rotating shaft (3) via a pulley drive. A sponge sleeve (7) is fixedly fitted onto the wall of the rotating tube (6). The sponge sleeve (7) is located at the upper end of the conveyor belt (4). The pipe wall is evenly and equidistantly provided with several water outlet holes. The upper end of the base plate (1) is connected to the placement platform (8). The upper end of the placement platform (8) is equipped with a storage box (9). The upper end of the base plate (1) is connected to the fixing cylinder (10). The fixing cylinder (10) and the storage box (9) are connected through a connecting pipe. A water supply pipe (11) is connected to one side wall of the fixing cylinder (10). The other end of the water supply pipe (11) passes through the side wall of the placement platform (8) and is rotatably connected to the rotating pipe (6). A water squeezing component for draining clean water into the rotating pipe (6) is installed on the fixing cylinder (10). A scraping component for cleaning the conveyor belt (4) is installed in the storage box (9). The dewatering assembly includes two springs (14) symmetrically connected to the top of the fixed cylinder (10). The other ends of the two springs (14) are connected to a piston (15). The piston (15) is slidably connected inside the fixed cylinder (10) and the piston (15) matches the fixed cylinder (10). The upper end of the piston (15) is connected to a rack (16). The upper end of the rack (16) passes through the top of the fixed cylinder (10) and extends upward and is equipped with a pulley (17). A cam (18) is fixedly sleeved on the wall of the rotating tube (6). The cam (18) abuts against the pulley (17). The scraping assembly includes a rotating rod (19) rotatably connected to the side wall of the storage box (9). One end of the rotating rod (19) passes through the side wall of the storage box (9). A number of cleaning brushes (20) are evenly and equidistantly connected on the rod wall of the rotating rod (19) located inside the storage box (9), and the corresponding cleaning brushes (20) are attached to the lower end of the conveyor belt (4). A drive assembly for driving the rotating rod (19) to rotate is installed on the bottom plate (1).

2. The integrated circuit manufacturing equipment with dust removal function according to claim 1, characterized in that: The rotating assembly includes a motor (12) fixedly installed on one side wall of the vertical plate (2), and the output end of the motor (12) is connected to the corresponding rotating shaft (3) through a coupling.

3. The integrated circuit manufacturing equipment with dust removal function according to claim 2, characterized in that: A support plate (13) is installed on one side wall of the vertical plate (2), and the motor (12) is mounted on the support plate (13).

4. An integrated circuit manufacturing equipment with dust removal function according to claim 1, characterized in that: The drive assembly includes a gear (21) fixedly connected to one end of the rotating rod (19), the gear (21) meshing with the rack (16).

5. An integrated circuit manufacturing equipment with dust removal function according to claim 1, characterized in that: The etching assembly includes a cylinder (22) fixedly installed on one side wall of the vertical plate (2), the piston end of the cylinder (22) is connected to an etching machine (23), and the etching machine (23) is located above the conveyor belt (4).

6. An integrated circuit manufacturing equipment with dust removal function according to claim 1, characterized in that: A vacuum cleaner (24) is installed on the side wall of one side of the vertical plate (2). A vacuum cleaner pipe (25) is installed at the lower end of the vacuum cleaner (24). A vacuum cleaner head (26) is connected to the lower end of the vacuum cleaner pipe (25), and the vacuum cleaner head (26) is located above the conveyor belt (4).

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