Retaining device for an open-top substrate container

Abstract

The present application provides a holding device for an open-top substrate container, comprising a holding assembly for pushing a substrate moving member, which is arranged on the outer side of the substrate. The holding assembly comprises a holding body and a pushing member, the pushing member comprising a first guide slope for abutting against a second guide slope on the inner surface of the container door, the first guide slope being displaced relative to the second guide slope according to the abutting force of the container door; a pushing portion connected to the first guide slope and capable of pushing the substrate moving member according to the displacement degree of the first guide slope, so as to displace the substrate moving member and position the substrates one on top of another. The holding device is suitable for an open-top substrate container and the semiconductor workpieces carried and stored therein.

Description

Technical Field

[0001] The present invention provides a holding device, particularly a holding device for an openable substrate container that stably holds a substrate inside the container to prevent damage and allows for adjustment of the number of substrates to be supported. Background Technology

[0002] Industrial electronic component-related sheet products, such as circuit boards, wafers, glass and other sheet semiconductor workpieces, often need to be contained in containers for protection, carrying or transportation. The containers that carry these electronic component-related products or semiconductor process-related components need to be designed with good protective measures and holding devices to avoid damage to the substrates or semiconductor workpieces stored inside.

[0003] Common factors that cause damage to substrates or semiconductor workpieces include wear, scratches, and particulate dust contamination caused by vibration or friction, or unstable containers or internal structures that cause the substrate to shake, jump, or detach, resulting in impact or breakage. All of these factors can lead to a decrease in the quality and yield of the substrate during storage, handling, and transportation in the substrate container, as well as damage to the substrate or semiconductor workpiece products. Therefore, how to stably hold multilayer substrates and avoid problems such as vibration, collision, displacement, or friction between substrates is an urgent issue that the industry needs to address.

[0004] Furthermore, the existing substrate container's carrying space design specifications can only limit the stacking of a certain number of substrates. Its function and size are limited, and the substrate container must be re-molded to accommodate different numbers of substrates. This not only results in high costs and poor utilization, but also lacks the function of holding and fixing the substrates.

[0005] For example, if the existing substrate container carries a large number of substrates, resulting in a heavy overall weight, the door used to cover the substrate container is prone to weight concentration and sag during transportation due to gravity, causing the door to deform and affecting airtightness. Therefore, how to maintain airtightness under the condition of carrying a heavy substrate container is a very challenging solution. Summary of the Invention

[0006] In view of this, the holding device for the top-opening substrate container provided by the present invention has many functions, such as being able to stably hold and fix multi-layer substrates, maintain airtightness, and be a shared container that can accommodate different numbers of substrates, as well as providing a solution to avoid problems such as vibration, collision, displacement or friction between substrates.

[0007] An embodiment of the present invention provides a holding device for an upper-opening substrate container. The upper-opening substrate container includes a container body and a container door. The container door is configured to connect with the container body to define a storage space for storing multiple substrates. The holding device includes: a substrate movable member disposed on the outer side of the substrate; and a holding assembly disposed within the storage space. The holding assembly is used to push against the substrate movable member to actuate. The holding assembly includes: a holding body disposed on the inner side of the container body; and a pushing movable member. The component, disposed on the holding body, includes: a first guide slope for abutting the inner surface of the container door and a second guide slope, wherein the first guide slope is displaced accordingly by the holding force of the container door; and a pushing part connected to the first guide slope, the pushing part corresponding to the position of the substrate movable component, the pushing part actuating according to the degree of pushing displacement of the first guide slope, thereby displacing the substrate movable component until multiple substrates are stacked and positioned on each other.

[0008] In one embodiment, the holding body includes an inclined guide groove, and the pushing movable member includes a guide portion connected to the pushing portion. The guide portion protrudes into the inclined guide groove and moves accordingly in the inclined guide groove based on the holding force of the container door, so that the pushing movable member moves closer to or away from the holding body.

[0009] In one embodiment, the retaining component further includes an elastic member disposed between the retaining body and the pushing movable member. The elastic member is configured to provide an elastic change in the displacement of the guide portion away from the retaining body along the inclined guide groove or towards the retaining body, depending on the holding force of the container door.

[0010] In one embodiment, the movable component of the substrate includes: a connecting portion fixedly connected to the outer side of the substrate; an elastically deformable portion connected to the connecting portion, the elastically deformable portion corresponding to the position of the pushing portion, the elastically deformable portion providing elastic deformation and displacement of the pushing substrate according to the degree of pushing displacement of the pushing portion; and a first fixing portion disposed on one side of the elastically deformable portion, the first fixing portion being used to fix a second fixing portion of an adjacent substrate.

[0011] In one embodiment, the bottom of the inner surface of the container body further includes a bottom positioning member, and the substrate has a substrate positioning member corresponding to the bottom positioning member. The bottom positioning member is used to position the substrate located in the storage space that is closest to the bottom of the inner surface.

[0012] In one embodiment, the bottom of the inner surface of the container body further includes a bottom engaging member for engaging and fixing the substrate located in the storage space closest to the bottom of the inner surface and the substrate movable member disposed thereon.

[0013] In one embodiment, each substrate has a matching stacking fixing part on its upper and lower surfaces, and adjacent substrates are stacked and fixed to each other via the stacking fixing part.

[0014] In one embodiment, it further includes at least one elastic support member disposed on the bottom side of the substrate for elastically supporting a semiconductor workpiece on the substrate.

[0015] In one embodiment, the elastic abutment includes a fixed end and an elastic abutment arm. The fixed end is detachably disposed on the bottom side of the substrate, one end of the elastic abutment arm is connected to the fixed end, and the other end of the elastic abutment arm elastically abuts against the edge surface of the semiconductor workpiece.

[0016] In one embodiment, the inner wall of the container body is provided with an error proofing element to restrict the orientation of the substrates stored in the storage space.

[0017] An embodiment of the present invention provides a holding device for an upper-opening substrate container. The upper-opening substrate container includes a container body and a container door. The container door is configured to connect with the container body to define a storage space for storing multiple substrates. The holding device includes: a frame body disposed in the storage space for supporting the substrates; multiple quick-release members disposed on the outer side of the frame body, each quick-release member including a stop member and a pair of shoulders, the shoulders being connected to both sides of the stop member; multiple snap fasteners provided on the inner sidewall of the container body, the stop member abutting against the inner sidewall, each snap fastener snapping onto the shoulders to fix the frame body; and multiple clearance portions providing clearance space for a holding component disposed in the storage space.

[0018] In one embodiment, when the abutment is forced away from the inner wall by a certain distance, the shoulder disengages from the fastener, making the frame body detachable.

[0019] In one embodiment, the bottom of the inner surface of the container body further includes a bottom positioning member, and the frame body has a frame positioning member corresponding to the bottom positioning member. The bottom positioning member is used to position the frame positioning member to define a height distance between the bottom of the inner surface of the frame body and the container body. The bottom positioning member and the buckle member are at the same horizontal height.

[0020] In one embodiment, the inner wall of the container body is provided with an error proofing element to restrict the orientation of the frame body in the storage space.

[0021] An embodiment of the present invention provides a holding device for an upper-opening substrate container. The upper-opening substrate container includes a container body and a container door. The container door is configured to engage with the container body and has a receiving space for accommodating a latching mechanism. The holding device includes at least one leveling element disposed within the receiving space. The leveling element extends integrally to abut against two opposing inner walls of the container door, and the leveling element and the latching mechanism are arranged in parallel.

[0022] In one embodiment, the leveling element is a carbon rod, the overall height of which is less than the total depth of the accommodating space.

[0023] By means of the holding device for the top-opening substrate container of the present invention, the push-moving member and the inclined guide groove are provided to provide a holding force for the push-moving member during the process of the container door closing to the container body, so that the push-moving member moves along the direction of the inclined guide groove, thereby causing the pushing part of the push-moving member to move towards the substrate to hold the substrate moving member and fix the substrate, thereby achieving the effect of holding and fixing the transported substrate. Attached Figure Description

[0024] Figure 1 This is a three-dimensional view of the top-opening substrate container according to an embodiment of the present invention;

[0025] Figure 2A This is an exploded view of an upper-opening substrate container according to an embodiment of the present invention;

[0026] Figure 2B This is another exploded view of an upper-opening substrate container according to an embodiment of the present invention;

[0027] Figure 3A This is a schematic diagram of the installation method of the retaining component in one embodiment of the present invention;

[0028] Figure 3B This is a side view of the retaining component in one embodiment of the present invention;

[0029] Figure 3C This is a perspective view of the container door and the retaining component in one embodiment of the present invention;

[0030] Figure 4A This is a three-dimensional schematic diagram of the substrate and the movable component of the substrate in one embodiment of the present invention;

[0031] Figure 4B This is a partially enlarged top view of the substrate and the movable component of the substrate in one embodiment of the present invention;

[0032] Figure 4C This is an exploded view of the substrate, the substrate movable member, and the holding assembly in one embodiment of the present invention;

[0033] Figure 4DThis is a schematic diagram of the elastically deformable portion of the substrate movable member in an undeformed state according to an embodiment of the present invention;

[0034] Figure 4E This is a schematic diagram of the retaining component before it is pushed in one embodiment of the present invention;

[0035] Figure 4F This is a schematic diagram of the retaining component after being pushed in one embodiment of the present invention;

[0036] Figure 5A This is a partially enlarged perspective view of the stacking and fixing portion of the substrate in one embodiment of the present invention;

[0037] Figure 5B This is a partially enlarged three-dimensional schematic diagram of the container body in one embodiment of the present invention;

[0038] Figure 5C This is an enlarged three-dimensional schematic diagram of another part of the container body in one embodiment of the present invention;

[0039] Figure 6A This is a schematic diagram of the assembly method of the elastic support member in one embodiment of the present invention;

[0040] Figure 6B This is a perspective view of an elastic support member according to an embodiment of the present invention;

[0041] Figure 6C This is a perspective view of the elastic support member in one embodiment of the present invention from another angle;

[0042] Figure 7A This is an exploded view of an upper-opening substrate container according to an embodiment of the present invention;

[0043] Figure 7B This is a schematic diagram of the installation of the frame body in one embodiment of the present invention;

[0044] Figure 8A This is a top view of the frame body and quick-release components in one embodiment of the present invention;

[0045] Figure 8B This is a partially enlarged schematic diagram of the frame body in one embodiment of the present invention;

[0046] Figure 8C This is a cross-sectional schematic diagram of the frame body in one embodiment of the present invention;

[0047] Figure 8D This is a cross-sectional schematic diagram of a variant of the frame body in one embodiment of the present invention;

[0048] Figure 8E This is a cross-sectional schematic diagram of another variant of the frame body in one embodiment of the present invention;

[0049] Figure 9 This is an exploded view of the container door in one embodiment of the present invention.

[0050] Figure Labels

[0051] 10 Top-opening substrate container

[0052] 100 container body

[0053] 110 bottom clip

[0054] 120 Inner Mounting Part

[0055] 130 bottom positioning parts

[0056] 140 support components

[0057] 150 pressure fastener

[0058] 160 support auxiliary parts

[0059] 170 foolproof parts

[0060] 180 storage space

[0061] 190 Inner Surface Bottom

[0062] 200 container door

[0063] 210 inner surface

[0064] 211 Second Guide Incline

[0065] 220 door panel

[0066] 230 latching mechanism

[0067] 231 control element

[0068] 232 latch arm

[0069] 240 leveling components

[0070] 250 door shell

[0071] 251 storage space

[0072] 252 Ears

[0073] 300 fixed-position modules

[0074] 310 holding body

[0075] 311 Inclined Guide Groove

[0076] 320 push-off activity items

[0077] 321 Guidance Department

[0078] 322 First Guide Incline

[0079] 323 Pushing Department

[0080] 330 elastic element

[0081] 400 substrate moving parts

[0082] 410 First Fixing Part

[0083] 420 Elastic Deformation Section

[0084] 430 Connecting Part

[0085] 500 flexible support

[0086] 510 fixed end

[0087] 520 Flexible Support Arm

[0088] 600 frame body

[0089] 610 quick-release parts

[0090] 611 Reliable Items

[0091] 612 pairs of shoulders

[0092] 620 Yield Department

[0093] 631 frame positioning component

[0094] 640 stacked alignment section

[0095] 650 raised bearing surface

[0096] 660 recessed bearing surface

[0097] 700 substrate

[0098] 710 Stacking Fixing Part

[0099] 720 Second Fixing Part

[0100] 800 semiconductor components Detailed Implementation

[0101] To illustrate the technical content of this invention in detail, the following description, in conjunction with embodiments and accompanying drawings, provides further explanation. It should be noted that, throughout this document, terms such as "first," "second," and "third" are used to distinguish between elements, rather than to limit the elements themselves or indicate a specific order of elements. Furthermore, throughout this document, unless a specific quantity is specifically indicated, the article "a" refers to one element or more than one element.

[0102] To fully understand the purpose, features and effects of the present invention, the present invention will be described in detail below through specific embodiments and in conjunction with the accompanying drawings.

[0103] Figure 1 This is a three-dimensional view of the top-opening substrate container according to an embodiment of the present invention; Figure 2A This is an exploded view of an upper-opening substrate container according to an embodiment of the present invention; Figure 2B This is another exploded view of an upper-opening substrate container according to an embodiment of the present invention, with the component angles adjusted to aid in the illustration.

[0104] Please also refer to the following: Figure 1 , Figure 2A and Figure 2B As shown, the top-opening substrate container holding device of an embodiment of the present invention is applicable to the top-opening substrate container 10, which includes a container body 100 and a container door 200. The container door 200 is adapted to be combined with the container body 100 to define a storage space 180. The storage space 180 of the container body 100 is used to store multiple substrates 700. The substrates 700 can be trays used to carry semiconductor workpieces (such as wafers or PCBs). Of course, the container body 100 is also suitable for storing various forms of sheet substrates, and is suitable for storing sheet products related to industrial electronic components, including but not limited to sheet semiconductor workpieces such as circuit boards, wafers, substrates, and glass. In one embodiment of the present invention, the container door 200 is located at the upper opening of the container body 100 to close the upper opening of the container body 100. The internal space formed by the container door 200 and the container body 100 is the storage space 180, which can be used to store multiple stacked sheet substrates 700.

[0105] like Figure 2A and Figure 2B As shown, the container body 100 of the top-opening substrate container 10 can accommodate a substrate 700. In this embodiment, the substrate 700 is described using a tray as an example. The substrate 700 is used to support and hold sheet-shaped semiconductor workpieces. Each semiconductor workpiece can be supported by a single substrate 700. There can be one or more substrates 700, and multiple substrates 700 can be stacked and aligned with each other, so that the supported semiconductor workpieces are kept at a certain distance from each other and stored in the top-opening substrate container 10. It should be noted that the shape of the substrate 700 shown is only an example, and any device for supporting semiconductor workpieces of any shape and structure can be a variation of the substrate 700.

[0106] like Figure 2A and Figure 2BAs shown, the holding device is applicable to the top-opening substrate container 10. The holding device includes a holding assembly 300 disposed on the container body 100 and a substrate movable member 400. The substrate movable member 400 is disposed on the outer side of the substrate 700, and the holding assembly 300 is disposed within the storage space 180. The holding assembly 300 is used to push the substrate movable member 400 to actuate and hold the substrate 700. The holding assembly 300 includes a holding body 310 and a pushing movable member 320. The holding body 310 is disposed on the inner side of the container body 100, and the pushing movable member 320 is disposed on the holding body 310. The pushing movable member 320 includes a first guide slope 322 and a pushing portion 323. The first guide slope 322 is used to abut against the second guide slope 211 of the inner surface 210 of the container door 200. (Refer to Figure 3C). The first guide slope 322, based on the holding force of the container door 200, causes a corresponding pushing displacement between the first guide slope 322 and the second guide slope 211. The pushing portion 323 is connected to the first guide slope 322 and corresponds to the position of the substrate movable member 400. The pushing portion 323 pushes against the substrate movable member 400 according to the degree of pushing displacement of the first guide slope 322, causing the substrate movable member 400 to displace the substrate 700 until multiple substrates 700 are stacked and positioned on top of each other. In one embodiment of the present invention, the holding assembly 300 further includes an elastic member 330, which will be described in detail below.

[0107] In one embodiment of the present invention, there are multiple holding components 300, such as eight, which are respectively arranged around the side of the container body 100 facing the storage space 180 to provide stable clamping of the periphery of the substrate 700 and ensure that the substrate 700 does not vibrate, shake or collide with each other; the number of holding components 300 can be adjusted according to the needs and is not limited here.

[0108] Please also refer to Figures 3A to 3C . Figure 3A This is a schematic diagram of the installation method of the retaining component 300 in one embodiment of the present invention; Figure 3B This is a side view of the retaining component 300 in one embodiment of the present invention; Figure 3C This is a perspective view of the container door and the retaining component in one embodiment of the present invention.

[0109] The retaining component 300 is provided in the inner mounting portion 120 on the inner side of the container body 100 facing the receiving substrate 700. The inner mounting portion 120 may be, for example, a groove or a slot, and has a snap-fit ​​structure to snap-fit ​​and fix it to the retaining body 310 of the retaining component 300, so as to stably fix the retaining component 300 and make the retaining component 300 elastically detachable and adjustable.

[0110] The operation of the holding assembly 300 will be explained first. The holding body 310 includes an inclined guide groove 311, and the pushing movable member 320 includes a guide part 321 connected to the pushing part 323. The guide part 321 protrudes into the inclined guide groove 311, so that the guide part 321 can only move along the axis of the inclined guide groove 311. Please also... Figure 4C The elastic element 330 is disposed between the holding body 310 and the pushing movable element 320, and protrudes from the inclined guide groove 311 through the guide part 321, so that the pushing movable element 320 can be installed on the holding body 310 without falling off. When the container door 200 closes to the container body 100, the inner surface 210 of the container door 200 faces the pushing movable element 320, so that the second guide slope 211 abuts against the first guide slope 322 of the pushing movable element 320. The first guide slope 322 is pushed and displaced accordingly between the first guide slope 322 and the second guide slope 211 according to the holding force of the container door 200. At the same time, the pushing part 323 is connected to the first guide slope 322, so the pushing part 323 will move accordingly according to the pushing stroke of the first guide slope 322. In this design, the first guide slope 322 only contacts the second guide slope 211 at its endpoint. This not only increases the concentration of force application points but also reduces the contact area, thus avoiding dust problems caused by friction.

[0111] Specifically, the pushing part 323 corresponds to the position of the movable member 400 on the substrate. When the pushing part 323 is pushed and displaced according to the first guide slope 322, the guide part 321 is displaced along the central axis of the inclined guide groove 311 until the guide part 321 is limited to the closed end 312 of the inclined guide groove 311. Figure 3B As indicated by the arrow, the pushing movable member 320 is moved away from the holding body 310. The elastic member 330 is configured to provide an elastic change (elastic stretching) in the direction of displacement of the guide portion 321 along the inclined guide groove 311 away from the holding body 310, based on the holding force of the container door 200. In other words, the guide portion 321 of the pushing movable member 320 makes a downward guiding displacement stroke in the inclined guide groove 311 of the holding body 310, causing the elastic member 330 to be gradually stretched, and the pushing movable member 320 to move slightly away from the holding body 310. At this time, the pushing movable member 320 moves towards the substrate movable member 400 of the clamping substrate 700.

[0112] Conversely, during the opening of the container door 200 towards the container body 100, the elastic member 330 provides an elastic change (elastic reset) in which the guide portion 321 moves away from the closed end 312 and closer to the holding body 310, based on the holding force of the container door 200. In other words, when the container door 200 is removed, the elastic member 330 releases its elastic potential energy, and the guide portion 321 of the push-moving member 320 moves upward along the inclined guide groove 311 of the holding body 310. The push-moving member 320 moves closer to the holding body 310, thus moving away from the substrate moving member 400 and removing its holding force on the substrate moving member 400. At the same time, the force applied to the substrate movable member 400 is released, and the elastic deformation part 420 is also released from deformation, thereby freeing the first fixing part 410 and the second fixing part 720 from interference. The stacked substrates 700 are no longer fixed to each other, and the first fixing part 410 of the substrate movable member 400 installed at the bottom substrate 700 no longer interferes with the bottom engaging member 110 at the bottom of the container body 100. This makes it convenient for the machine or robotic arm or manual means to freely remove multiple substrates 700 one by one or in a whole stack.

[0113] Therefore, through the elastic locking and releasing mechanism of the substrate 700, the top-opening substrate container 10 with the holding device of the present invention has many advantages such as simple operation, intuitiveness, and foolproofness. Operators or automated machines can perform a stable and effective locking and fixing of the substrate 700 simply by closing the container door 200 without any additional operation procedures; and by simply removing the container door 200, the substrate 700 can be naturally restored to a non-interference state.

[0114] Among them, the elastic member 330 is provided on the other side of the push-moving member 320 relative to the holding body 310, with one end of the elastic member 330 fixed to the holding body 310 and the other end fixed to the push-moving member 320.

[0115] The normal vector of the first guide slope 322 is parallel to the normal vector of the second guide slope 211, meaning they have the same slope angle. The angle and size of the second guide slope 211 are adapted to the first guide slope 322. The slope length of the first guide slope 322 is the same as the displacement stroke length of the inclined guide groove 311. Therefore, by providing the second guide slope 211 on the container door 200, it can be ensured that when the container door 200 vertically abuts against the pushing movable member 320, the first guide slope 322 can move synchronously as the pushing movable member 320 moves along the inclined guide groove 311, thus ensuring that the pushing movable member 320 provides a stable downward force.

[0116] The first guide slope 322 of the push-moving member 320 and the second guide slope 211 of the container door 200 can be other structural forms. As long as they can slide together and abut against each other with a small contact area, they are all within the scope of protection of this invention patent.

[0117] The following section explains the operational relationship between the retaining component 300 and the substrate movable component 400, as well as the detailed structure of the substrate movable component 400. Please also refer to... Figures 4A to 4F . Figure 4A This is a three-dimensional schematic diagram of the substrate and the movable component of the substrate in one embodiment of the present invention; Figure 4B This is a partially enlarged top view of the substrate and the movable component of the substrate in one embodiment of the present invention; Figure 4C This is an exploded view of the substrate, the substrate movable member, and the holding assembly in one embodiment of the present invention; Figure 4D This is a schematic diagram of the elastically deformable portion of the substrate movable member in an undeformed state according to an embodiment of the present invention. Figure 4E This is a schematic diagram of the retaining component before it is pushed in one embodiment of the present invention; Figure 4F This is a schematic diagram of the retaining component after being pushed in one embodiment of the present invention, and, Figures 4E to 4F Tie Figure 1 A cross-sectional view along line segment A-A'.

[0118] The substrate movable member 400 is adapted to serve as a buffer elastic element for buffering, clamping, and fixing between the pushing movable member 320 and the substrate 700. The substrate movable member 400 includes a connecting portion 430, an elastically deformable portion 420, and a first fixing portion 410. The connecting portion 430 is fixedly connected to the outer side of the substrate 700, such as the edge. The connecting portion 430 is located at both ends of the elastically deformable portion 420 and is fixedly connected to the outer side of the substrate 700 in a clamping manner. The elastically deformable portion 420 is connected to the connecting portion 430 and is configured to correspond to the position of the pushing portion 323. The first fixing portion 410 is provided on one side of the elastically deformable portion 420, as shown below, and is used to fix a second fixing portion 720 of an adjacent substrate 700.

[0119] When the pushing movable member 320 is resisted by the container door 200 and moves away from the holding body 310, and applies a resisting force towards the elastic deformation portion 420, the elastic deformation portion 420 is positioned corresponding to the pushing portion 323. The elastic deformation portion 420 provides elastic deformation and displacement of the pushing substrate 700 according to the degree of pushing displacement of the pushing portion 323. In other words, the pushing portion 323 of the pushing movable member 320 abuts against the elastic deformation portion 420, and the elastic deformation portion 420 moves the first fixing portion 410 toward the second fixing portion 720 of the adjacent substrate 700 until the container door 200 completely covers the container body 100. The elastic deformation portion 420 is subjected to the maximum resisting force and fixes the first fixing portion 410 to the second fixing portion 720 of the adjacent substrate 700. Since the storage space 180 is used to store multiple substrates, the first fixing part 410 can be sequentially locked onto the adjacent substrates 700 through the operation of the fixing component 300 and the substrate moving part 400, so as to achieve the effect of multiple substrates 700 being stacked and positioned on each other.

[0120] Based on the above operating principle, by applying force to the elastic deformation portion 420 of the substrate movable member 400 through the pushing movable member 320, multiple stacked substrates 700 can be aligned and positioned layer by layer through the mutual cooperation of the first fixing portion 410 and the second fixing portion 720, until the container door 200 closes the container body 100, at which point the pushing action of the pushing movable member 320 stops. The uppermost substrate 700 may not bear semiconductor components, thus reducing the risk of substrate damage.

[0121] The elastic deformation part 420, through elastic deformation, enables the substrate movable member 400 to have good deformation elasticity and buffering effect. When the pushing movable member 320 approaches the contact, the substrate movable member 400 can smoothly and firmly fix the substrate 700.

[0122] Therefore, by the abutting of the retaining component 300's pushing movable member 320, not only can the substrate 700 connected and fixed to the substrate movable member 400 be stably fixed, but adjacent substrates 700 can also be held and fixed, achieving the effect of stably locking and securing multiple stacked substrates 700. In addition, each substrate 700 has its corresponding substrate movable member 400, thereby enabling each substrate 700 to be interlocked and fixed, achieving the effect of stably clamping and fixing all substrates 700 in the entire set of top-opening substrate container 10, without being affected by friction or impact of the substrates 700 caused by the shaking and vibration of the container body 100.

[0123] The elastic deformation part 420 can achieve the engagement of the first fixing part 410 and the second fixing part 720 without excessive deformation. Furthermore, through the corresponding structural features of the engagement, in addition to providing horizontal support and fixation, the engagement structure itself can also provide vertical engagement and fixation to increase the strength of the support and fixation.

[0124] Please also refer to Figures 5A to 5C . Figure 5A This is a partially enlarged perspective view of the stacking and fixing portion 710 of the substrate 700 in one embodiment of the present invention; Figure 5B This is a partially enlarged three-dimensional schematic diagram of the container body 100 in one embodiment of the present invention; Figure 5C This is an enlarged three-dimensional schematic diagram of another part of the container body 100 in one embodiment of the present invention.

[0125] The bottom 190 of the inner surface of the container body 100 also includes a bottom positioning member 130 for engaging and fixing the substrate 700 located in the storage space 180 closest to the bottom 190 of the inner surface and the substrate movable member 400 disposed thereon. The bottom positioning member 130 is preferably located at the inner corner of the storage space 180 to stably fix the corners of the substrate 700; however, the location and number of the bottom positioning members 130 are not limited, as long as they conform to the shape of the substrate 700, they fall within the scope of this patent. Each substrate 700 has a matching stacking fixing part 710 on its upper and lower surfaces, and adjacent substrates 700 are stacked and fixed together via the stacking fixing part 710. The stacking fixing part 710 of the substrate 700 closest to the bottom 190 of the inner surface also fits the bottom positioning member 130, enabling the stacking fixing part 710 to be aligned and fixed to the position of the bottom positioning member 130.

[0126] Below the inner mounting portion 120 of the holding assembly 300, the container body 100 also has a bottom engaging member 110, which abuts against the first fixing portion 410 of the substrate movable member 400 corresponding to the bottom substrate 700 to stably hold the bottom substrate 700. The bottom engaging member 110 has a barb structure to engage and fix with the first fixing portion 410 corresponding to the bottom substrate 700, thereby enhancing the fixation of the entire substrate 700 to the container body 100.

[0127] The inner wall of the container body 100 is provided with an error proofing element 170 to restrict the orientation of the substrate 700 in the storage space 180. The error proofing element 170 is, for example, a protruding columnar structure that corresponds to the concave structure of the edge of the substrate 700 so that the substrate 700 can be placed in the container body 100 in the correct position.

[0128] The stacking fixing part 710 can be a structure with corresponding concave and convex surfaces, thereby achieving the effect of positioning and aligning the stack. It should be noted that the stacking fixing part 710 is not limited to a corresponding concave and convex stacking structure. Any other stackable structure for positioning is within the scope of this invention, including but not limited to other types of structures or principles other than mechanics, such as magnetic attraction to stack all substrates 700 together, so that multiple substrates 700 are aligned vertically and stacked together, and the lateral wobbling between the substrates 700 is reduced.

[0129] Please also refer to Figures 6A to 6C . Figure 6A This is a schematic diagram of the assembly method of the elastic support member 500 in one embodiment of the present invention; Figure 6B This is a perspective view of the elastic support member 500 in one embodiment of the present invention; Figure 6C This is a perspective view of the elastic support member 500 in one embodiment of the present invention from another angle.

[0130] The holding device also includes a resilient abutment 500 disposed on the bottom side of the substrate 700, such as the bottom side of the edge of the substrate 700. The resilient abutment 500 is used to resiliently abut against the semiconductor workpiece 800 supported on the substrate 700, for example, at a plane near the edge of the substrate 700, to resiliently abut against the edge surface of the semiconductor workpiece 800 supported on the adjacent substrate 700. The resilient abutment of the resilient abutment 500 presses down on the semiconductor workpiece 800 supported on the lower adjacent substrate 700 to prevent displacement of the semiconductor workpiece 800. The uppermost substrate 700 may not support the semiconductor workpiece 800; the resilient abutment of the resilient abutment 500 is sufficient to press and fix the semiconductor workpiece 800 supported on the lower adjacent substrate 700. Thus, when the substrates 700 are stacked, the resilient abutment 500 provides abutment and fixation of the semiconductor workpiece 800 on the substrate 700, reducing and preventing displacement, vibration, and friction between the substrates 700 or the semiconductor workpiece 800.

[0131] The elastic abutment member 500 includes a fixed end 510 and an elastic abutment arm 520. The fixed end 510 is detachably disposed adjacent to the bottom edge of the substrate 700. One end of the elastic abutment arm 520 is connected to the fixed end 510, and the other end of the elastic abutment arm 520 elastically abuts against the edge surface of the semiconductor workpiece 800. The elastic abutment arm 520 extends from the fixed end 510 to both ends and elastically abuts against the edge surface of the semiconductor workpiece 800. This horizontal point contact not only securely abuts against the substrate 700 but also reduces the friction area.

[0132] The following describes the structural design and operation of the holding device of the present invention, which allows for adjustment of the number of different support substrates. Please refer to the following: Figures 7A to 8E . Figure 7AThis is an exploded view of an upper-opening substrate container according to an embodiment of the present invention; Figure 7B This is a schematic diagram of the installation of the frame body in one embodiment of the present invention; Figure 8A This is a top view of the frame body and quick-release components in one embodiment of the present invention; Figure 8B This is a partially enlarged schematic diagram of the frame body in one embodiment of the present invention.

[0133] The holding device of the present invention is applicable to the top-opening substrate container 10. The present invention uses the same top-opening substrate container 10, substrate movable member 400 and holding assembly 300. The same structure, the same functionality and the same component symbols will not be repeated here, only the differences are described. In this embodiment, the present invention only describes how the holding device with a novel structure solves the problem of the lack of application flexibility of the top-opening substrate container 10 with a single functional size due to the limitation of the load-bearing weight and the number of loads. It solves the problem that when the number of loaded substrates 700 is less than the preset load-bearing capacity of the container, the space between the top of the container body 100 and the container opening is not filled, so that the substrates 700 cannot be effectively supported and are easy to shake, vibrate and jump in the container body 100 and break. It achieves the effect of solving the problem that the container body 100 can usually only hold exactly the preset number of substrates 700, and cannot hold more or fewer substrates 700.

[0134] The detailed structural design of the holding device is described below. The holding device includes a frame body 600, multiple quick-release parts 610, and multiple clearance parts 620. The frame body 600 is disposed in the storage space 180 to support the substrate 700. The frame body 600 includes a frame positioning member 631, and the container body 100 includes a support member 140. This support member 140 can be designed at different heights in the storage space 180, depending on the installation position of the frame body 600, to serve as the bottom positioning member of the frame body 600, thereby raising the frame body 600 a height above the bottom of the inner surface 190 of the storage space 180. The frame positioning member 631 cooperates with the support member 140 to provide weight support and limiting function. The support member 140 can be a protruding structure, and its shape is not limited here, to be used to snap onto the frame positioning member 631 to limit the frame body 600. The container body 100 has a support auxiliary 160 to cooperate with the frame body 600 to provide weight support and / or limit.

[0135] Multiple quick-release components 610 are respectively disposed on the outer side of the frame body 600, such as the edge. Each quick-release component 610 includes abutment 611 and a pair of shoulders 612. The shoulders 612 are connected to both sides of the abutment 611. The inner sidewall of the container body 100 is also provided with multiple snap fasteners 150. The abutment 611 abuts against the inner sidewall, and each snap fastener 150 snaps onto the shoulders 612 to fix the frame body 600. Multiple clearance portions 620 provide clearance space for the retaining components 300 disposed in the storage space 180, so that the structural features or construction of the original container body 100 do not need to be adjusted for the frame body 600.

[0136] The inner wall of the container body 100 is provided with a foolproof member 170 to restrict the orientation of the frame body 600 in the storage space 180. The foolproof member 170 is, for example, a protruding columnar structure that corresponds to the corresponding concave structure on the edge of the frame body 600, so that the frame body 600 can be placed in the container body 100 in the correct position.

[0137] The quick-release member 610 is located at the edge of the frame body 600 and has a clearance feature. The abutment member 611 is connected to the frame body 600 and forms an elastic abutment hook by bending downward and hooking at the end. The end of the abutment hook may have a flat surface to increase the abutment area with the container body 100. The shoulder 612 is located at the end of the abutment member 611 and has the feature of protruding at both ends relative to the flat surface of the end of the hook, so as to be confined within the fastener 150 of the container body 100. When the abutment member 611 is forced away from the inner wall by a certain distance, the shoulder 612 disengages from the fastener 150, making the frame body 600 detachable.

[0138] The shoulder portion 612 can be a ring-shaped or semi-ring-shaped structure to provide a deformation-buffered snap-fit ​​limiting structure, and can provide a tool for removing the snap-fit ​​fastener to apply force and disengage it from the clamping member 150. The abutment member 611 can be adjusted to a higher rigidity by means of structure or material to prevent human error from easily removing the frame body 600, which could lead to errors in the type and quantity of the carrier substrate 700 in subsequent processes. It should be noted that this embodiment is not limited to the structure or form of the quick-release member 610 and the clamping member 150. Any structure that can snap and fix the frame body 600 within the container body 100 is within the scope of protection of this invention.

[0139] The frame body 600 is disposed in the storage space 180 in different ways. For example, the frame body 600 includes a raised bearing surface 650 for bearing the substrate 700, so as to further increase the bearing plane of the supported substrate 700, that is, increase the height of the frame body 600 from the bottom 190 of the inner surface of the storage space 180, thereby reducing the number of supported substrates 700 and allowing the supported substrates 700 to be closer to the container door 200.

[0140] In another embodiment, the frame body 600 includes a recessed bearing surface 660 for supporting the substrate 700. This further reduces the bearing plane of the supported substrate 700 compared to the original bearing pad height, i.e., reduces the height of the frame body 600 from the bottom 190 of the inner surface of the storage space 180, thereby increasing the number of substrates 700 that can be supported. Thus, through the raised bearing surface 650 and the recessed bearing surface 660 of different variations of the frame body 600, the frame body 600 can be more flexibly and freely applied to substrates 700 of different types, sizes, and thicknesses, significantly expanding the versatility of the top-opening substrate container 10.

[0141] The frame body 600 of the holding device provided by one embodiment of the present invention not only allows the substrate 700 to be brought closer to the container opening and its overall center of gravity to increase the safety and stability of the substrate 700 from shaking inside when a small number of substrates 700 are loaded, but also achieves the effect that a container body 100 of one size can be effectively used to load substrates 700 of different types, sizes and thicknesses.

[0142] The frame body 600 includes a stacking alignment portion 640 for snapping and fixing the substrate 700, which is used to support the semiconductor workpiece 800. As previously described, the substrate 700 has stacking fixing portions 710 on its upper and lower surfaces. The stacking alignment portion 640 is adapted to the structural or functional features of the stacking fixing portion 710 to fix the substrate 700 within the frame body 600. The structural features of the frame body 600 are arranged on both its front and back sides, allowing it to be fixed to the container body 100 from any surface while maintaining its structural function, greatly increasing ease of use.

[0143] The frame body 600 of the present invention elevates the substrate 700, which not only solves the problem of easy wobbling when the container body 100 is loaded with a small number of substrates 700, but also further raises its overall center of gravity, enabling safe and efficient handling and transport of the top-opening substrate container 10 even when the substrate 700 is very heavy. Furthermore, the frame body 600 of the present invention also solves the problem that the top-opening substrate container 10 must be redesigned to accommodate different types, sizes, thicknesses, and density specifications of substrates 700. With the frame body 600 provided by the present invention, only the frame body 600 needs to be redesigned to allow the single-function top-opening substrate container 10 to be applied to substrates 700 of different types, sizes, thicknesses, and density specifications, achieving the effect of significantly reducing manufacturing costs and improving efficiency.

[0144] Figure 9 This is an exploded view of a container door to which the holding device is applicable in one embodiment of the present invention. The holding device of the present invention is applicable to an upper-opening substrate container 10. The present invention uses the same upper-opening substrate container 10, substrate movable member 400, and holding assembly 300. The same structure, the same functionality, and the same component symbols will not be repeated here; only the differences will be described. In this embodiment, only the novel holding device of the present invention is described to achieve the function of maintaining the airtightness of the container door 200 under the condition of bearing a heavy upper-opening substrate container 10.

[0145] The holding device of the present invention includes at least one leveling element 240. The container door 200 includes a door shell 250 and a door panel 220. The door panel 220 is used to connect with the door shell 250 to define an accommodating space 251, which accommodates a latching mechanism 230. The leveling element 240 is disposed within the accommodating space 251. The leveling element 240 extends integrally and abuts against the two opposing inner walls of the container door 200, i.e., the two opposing inner walls of the door shell 250, and the leveling element 240 and the latching mechanism 230 are arranged parallel to each other. The leveling element 240 is a carbon rod, and the overall height of the carbon rod is less than the total depth of the accommodating space 251. The leveling element 240 may also be other ductile material elements with high rigidity and light weight.

[0146] The leveling element 240 is used to provide structural support and force distribution for the door shell 250 by extending its length to support the two opposing inner walls of the door shell 250, thereby providing structural reinforcement and uniform force distribution for the door shell 250. The leveling element 240 is located near the handling position of the container door 200, for example... Figure 9 The two ends of the ear are shown as 252.

[0147] Therefore, by setting the leveling element 240 inside the container door 200, the leveling element 240 can distribute the large amount of force concentrated on the latch mechanism 230 and the locking part of the container body 100 and the two side ears of the container door 200 during transportation to the door shell 250 through the extension length of the leveling element 240. This solves the limitation of the load-bearing capacity of the top-opening substrate container 10. At the same time, it solves the problem that when the load-bearing capacity reaches the upper limit, the container door 200 of the top-opening substrate container 10 is easily twisted and deformed during complicated handling and transportation, which affects the airtightness or even causes the container door 200 to deform and separate, resulting in drop and damage.

[0148] Furthermore, since the leveling element 240 is much lighter than the latching structure 230, it also solves the problem of using multiple latching structures 230 distributed throughout the container door 200 for stable locking of the top-opening substrate container 10. Although this approach can distribute the upward load and improve the deformation of the door when the top-opening substrate container 10 is transferred, it requires the use of multiple sets of latching structures 230, which increases the overall weight of the top-opening substrate container 10, makes assembly more complex and increases manufacturing costs, and makes it difficult to design the container door 200 and multiple latching structures 230 to distribute the load. However, the leveling element 240 of the present invention is much lighter than the latching structure 230. Therefore, it is possible to solve the deformation problem of the container door 200 by using the leveling element 240 while maintaining a small number of latching structures 230, and enhance the airtightness of the door with a lightweight component.

[0149] In one embodiment of the present invention, there may still be multiple latching mechanisms 230 to provide a greater number of locking positions or different structural combinations, such as two latching mechanisms 230, to effectively achieve a balance between locking and weight distribution.

[0150] In one embodiment of the present invention, there are multiple leveling elements 240 to provide structural support and force distribution for the door shell 250 at multiple different locations and different stress hotspots. For example, two leveling elements 240 are fixedly disposed on both sides inside the door shell 250 to provide uniform force distribution at the edges of the door shell 250 and to strengthen the structural support and force distribution of the ear portion 252 of the door shell 250.

[0151] In one embodiment of the present invention, the extension length of the leveling element 240 extends from one end of the door shell 250 to the other end of the door shell 250 and extends to abut against the two opposite inner walls of the container door 200, so as to completely disperse the force on the long side of the entire door shell 250 and provide structural support for the long side of the entire door shell 250.

[0152] In one embodiment of the present invention, the leveling element 240 and the latching mechanism 230 are arranged in parallel to provide force distribution and structural support near the locking position of the latching mechanism 230. Arranging the leveling element 240 and the latching mechanism 230 in parallel allows for the uniform distribution of force on the ear and the locking force point of the latching mechanism 230, while also facilitating the space allocation design within the door shell 250. Furthermore, the leveling element 240 and the latching mechanism 230 are symmetrically arranged to ensure symmetrical support structure and force distribution, preventing tilting or deformation of the container door 200.

[0153] In one embodiment of the present invention, the latching mechanism 230 includes a control element 231 and a latching arm 232. The control element 231 controls the latching arm 232 to selectively extend beyond the door housing 250 to lock the container door 200 to the container body 100, or controls the latching arm 232 to retract to release the locking between the container door 200 and the container body 100. The control element 231 is, for example, a cam, which, by rotating the cam, drives the latching arm 232 connected to the cam to extend or retract. In this embodiment, the leveling element 240 and the latching arm 232 of the latching mechanism 230 are arranged in parallel, providing force distribution and structural support close to the locking position of the latching arm 232 and the container door 200. This also allows for the even distribution of force on the force points of the lug 252 and the locking force points of the latching arm 232, while facilitating space allocation within the door housing 250. This reduces the overlap between the leveling element 240 and the latching arm 232, maintaining the extension length of the leveling element 240 and achieving effective structural support and force distribution. It should be noted that the number and position of the leveling element 240 and the latching mechanism 230 are not limited to the example in this embodiment.

[0154] The leveling element 240 of the holding device provided in one embodiment of the present invention can distribute the overall load of the container door 200, enhance the flatness of the door shell 250 to prevent the airtight sealing strip between the container door 200 and the container body 100 from being exposed, and at the same time improve the strength of the container door 200 to achieve the effects of flatness and airtightness. In addition, the leveling element 240 can replace a portion of the latching mechanisms 230, thereby minimizing the number of latching mechanisms 230. In addition to reducing the overall weight of the container door 200, it can also save on parts consumption and reduce manufacturing costs.

[0155] Therefore, the holding device of the present invention can not only tightly and stably fix the substrate carried by the top-opening substrate container to avoid the substrate shaking and impact, but also maintain its stability when loading different numbers of substrates to avoid the danger of shaking and low center of gravity, and maintain the structural strength and airtightness of the container door to protect the cleanliness of the substrate inside and reduce the risk of falling, thereby achieving the effect of protecting the substrate container.

[0156] The present invention has been disclosed above with reference to preferred embodiments. However, those skilled in the art should understand that these embodiments are merely illustrative of the invention and should not be construed as limiting its scope. It should be noted that all variations and substitutions equivalent to these embodiments should be considered within the scope of the present invention. Therefore, the scope of protection of the present invention should be determined by the claims, and the scope of the appended claims should be interpreted in the broadest sense to include all modifications, similar arrangements, and processes.

Claims

1. A holding device for an upward-opening substrate container, characterized in that, The top-opening substrate container includes a container body and a container door. The container door is configured to engage with the container body to define a storage space for storing multiple substrates. The holding device includes: A substrate movable component is disposed on the outer side of the substrate; as well as A retaining component is disposed within the storage space. The retaining component is used to push against the movable part of the substrate to actuate. The retaining component includes: A retaining body is disposed on the inner side of the container body; and A push-off movable member is disposed on the retaining body, the push-off movable member comprising: A first guide ramp for abutting against a second guide ramp on the inner surface of the container door, wherein the first guide ramp is displaced relative to the second guide ramp according to the abutting force of the container door; and A pusher is connected to the first guide slope. The pusher corresponds to the position of the substrate movable member. The pusher pushes the substrate movable member to move according to the degree of pusher displacement of the first guide slope, so that the substrate movable member moves the substrate until multiple substrates are stacked and positioned on each other.

2. The holding device according to claim 1, characterized in that, The holding body includes an inclined guide groove, and the pushing movable member includes a guide part connected to the pushing part. The guide part protrudes in the inclined guide groove and moves in the inclined guide groove according to the holding force of the container door, so that the pushing movable member moves closer to or away from the holding body.

3. The holding device according to claim 2, characterized in that, The retaining component also includes: An elastic member is disposed between the holding body and the pushing movable member. The elastic member is configured to provide an elastic change in the displacement of the guide part away from the holding body along the inclined guide groove or towards the holding body, depending on the holding force of the container door.

4. The holding device according to claim 1, characterized in that, The movable components of the substrate include: A connecting portion is fixedly connected to the outer side of the substrate; An elastically deformable portion is connected to the connecting portion, the elastically deformable portion corresponding to the position of the pushing portion, and the elastically deformable portion provides elastic deformation and a displacement amount against the substrate according to the pushing displacement degree of the pushing portion; and A first fixing part is disposed on one side of the elastic deformation part, and the first fixing part is used to fix a second fixing part of the adjacent substrate.

5. The holding device according to claim 1, characterized in that, The bottom of the inner surface of the container body also includes a bottom positioning member, and the substrate has a substrate positioning member corresponding to the bottom positioning member. The bottom positioning member is used to position the substrate located in the storage space that is closest to the bottom of the inner surface.

6. The holding device according to claim 1, characterized in that, The bottom of the inner surface of the container body also includes a bottom engaging member for engaging and fixing the substrate located in the storage space closest to the bottom of the inner surface and the movable part of the substrate disposed on it.

7. The holding device according to claim 1, characterized in that, Each substrate has a matching stacking fixing part on its upper and lower surfaces, and adjacent substrates are stacked and fixed to each other through the stacking fixing part.

8. The holding device according to claim 1, characterized in that, It also includes at least one elastic support member disposed on the bottom side of the substrate for elastically supporting a semiconductor workpiece on the substrate.

9. The holding device according to claim 8, characterized in that, The elastic support member includes a fixed end and an elastic support arm. The fixed end is detachably disposed on the bottom side of the substrate. One end of the elastic support arm is connected to the fixed end, and the other end of the elastic support arm elastically abuts against the edge surface of the semiconductor workpiece.

10. The holding device according to claim 1, characterized in that, The inner wall of the container body is provided with a foolproof element to restrict the orientation of the substrates stored in the storage space.

11. The holding device according to claim 1, characterized in that, The container door has a receiving space for a latching mechanism, and the holding device includes: At least one leveling element is disposed within the accommodating space. The leveling element extends integrally to abut against the two opposing inner walls of the container door, and the leveling element is disposed parallel to the latching mechanism.

12. The holding device according to claim 11, characterized in that, The leveling element is a carbon rod, the overall height of which is less than the total depth of the accommodating space.

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