A double cylinder filter device for a plug machine

Abstract

The application relates to the technical field of semiconductor industrial production, in particular to a double-cylinder type filtering device of a plug-in sheet machine, which comprises a connecting sleeve and a hollow filter cylinder, the connecting sleeve is internally provided with a communication hole, a circulating hole, a water inlet and outlet hole, a reversing valve seat, a valve core and a top cover, the valve core is provided with a toothed disc, the hollow filter cylinder is internally provided with a filtering mechanism, the filtering mechanism comprises a C-shaped filter plate and a bearing, the C-shaped filter plate is provided with a filter cylinder top seal, and the filter cylinder top seal is provided with a bottom-side bevel gear; the circulating hole is internally provided with a switching valve. The application changes the direction of water flow through the reversing valve seat, the circulating water enters the hollow filter cylinder on one side of the connecting sleeve, and is in contact with the C-shaped filter plate at the bottom side of the hollow filter cylinder to enter the circulating hole, then flows into the hollow filter cylinder on the other side through the recess at the bottom side of the switching valve to be filtered again, and the water level in the hollow filter cylinder rises to the position of the communication hole to enter the other side inlet hole of the reversing valve seat, so that the utilization rate of the two hollow filter cylinders is improved, and the cleanliness of the circulating water can be improved through twice filtering.

Description

Technical Field

[0001] This invention relates to a filtration device, and more particularly to a dual-cylinder filtration device for a chip inserter, belonging to the field of semiconductor industrial production technology. Background Technology

[0002] A wafer inserter is a piece of equipment used in the semiconductor industry. It is used to process silicon wafers and insert them into appropriate carriers for subsequent processing and manufacturing. Cleaning during silicon wafer processing is a very important part of semiconductor manufacturing. It ensures that the surface of the silicon wafer is clean, free of impurities, and meets the requirements of the manufacturing process. The circulating water used for cleaning needs to be filtered to remove silicon powder from its interior to improve the cleanliness of the silicon wafer.

[0003] According to Chinese patent document CN207871654U, a dual-cylinder filter device for a chip inserter is disclosed. It adopts a dual-filter circulation filtration system and a corresponding pipeline arrangement. The two filter barrels can be switched between each other. The filter device can be cleaned without stopping the machine, ensuring continuous production, improving production efficiency, increasing production capacity, and saving labor costs.

[0004] Based on the search of the aforementioned patents and the findings of existing equipment, silicon wafer cleaning involves not only removing solid impurities such as silicon powder and dust from its surface, but also cleaning away organic solvents, acidic or alkaline solutions, and cleaning agents that dissolve grease or oxides on its surface. Therefore, the circulating water contains a small amount of water-soluble organic matter or impurity ions, requiring multiple filtrations. However, the aforementioned patents only allow one filter cartridge to be used for filtration by switching between the two tanks via a pneumatic valve, leaving the other idle. This results in a waste of resources, and the fact that only solid filtration can be performed reduces the cleanliness of the circulating water.

[0005] Therefore, it is urgent to improve the dual-cylinder filter device of the inserter to solve the above-mentioned problems. Summary of the Invention

[0006] The purpose of this invention is to provide a dual-cylinder filter device for a chip inserter. By changing the direction of water flow through a diversion valve seat, circulating water enters the hollow filter cylinder on one side of the connecting sleeve and contacts the C-shaped filter plate at the bottom of the hollow filter cylinder before entering the circulation hole. After passing through the recess at the bottom of the diversion valve, it flows into the hollow filter cylinder on the other side for filtration again. The water level in the hollow filter cylinder rises to the position of the connecting hole and enters the inlet hole on the other side of the diversion valve seat. Therefore, the utilization rate of the two hollow filter cylinders is improved, and the cleanliness of the circulating water can also be improved through two filtrations.

[0007] To achieve the above objectives, the main technical solutions adopted by the present invention include:

[0008] A dual-cylinder filter device for a chip inserter includes a connecting sleeve and hollow filter cylinders fixedly disposed at both ends of the connecting sleeve. The connecting sleeve has a connecting hole and a circulation hole inside. The hollow filter cylinders on both sides of the connecting sleeve are connected through the connecting hole and the circulation hole. The connecting sleeve has a water inlet and outlet hole at the position corresponding to the connecting hole. The water inlet and outlet hole passes through both sides of the connecting sleeve and is connected to the connecting hole. A diversion valve seat is fixedly disposed at the position where the connecting hole and the water inlet and outlet hole intersect. A valve core is rotatably disposed inside the diversion valve seat. The valve core passes through the diversion valve seat and the connecting sleeve and extends to the top of the connecting sleeve.

[0009] A top cover is fixedly installed on the top of the connecting sleeve by bolts. The valve core extends above the top cover, and a gear plate is fixedly installed on the valve core. The gear plate is rotatably mounted on the bottom side of the top cover. The gear plate is rotatably mounted on the connecting sleeve via the gear plate. A filtration mechanism is rotatably installed inside the hollow filter cartridge. The filtration mechanism includes two C-shaped filter plates distributed vertically and a bearing fixedly installed between the two C-shaped filter plates. A filter cartridge top seal is fixedly connected to the upper end of the C-shaped filter plate. The bottom side of the filter cartridge top seal is rotatably connected to the upper end of the hollow filter cartridge. The C-shaped filter plates correspond to the connecting hole and the circulation hole respectively. A bevel gear is fixedly installed on the bottom side of the filter cartridge top seal, and the bevel gear meshes with the gear plate.

[0010] A switching valve is rotatably installed inside the circulation hole. A recess is provided on the bottom side of the switching valve. The two ends of the circulation hole are connected through the recess. A valve stem is fixedly installed on the switching valve and extends to the outside of the connecting sleeve.

[0011] Preferably, during the rotation of the valve core, the rotation directions of the filtration mechanisms inside the hollow filter cartridges on both sides are opposite, the C-shaped filter plates on both sides of the connecting sleeve are arranged in the same direction, and during the rotation of the filter cartridge top seal, the filtration mechanism is rotatably disposed inside the hollow filter cartridge through the bearing.

[0012] Preferably, the connecting sleeve has a water outlet pipe corresponding to the position of the switching valve. The water outlet pipe is located below the water inlet / outlet hole. The switching valve has an L-shaped drainage hole that extends into the interior of the water outlet pipe. A rubber ring is fixedly installed at the end of the valve stem away from the water outlet pipe. When the concave side faces downward, the rubber ring abuts against the inner wall of the circulation hole.

[0013] Preferably, a flange is fixedly installed on the connecting sleeve at the position corresponding to the water inlet / outlet hole. The flange is distributed on both sides of the connecting sleeve, and a plurality of evenly distributed screw holes are fixedly provided on the flange.

[0014] Preferably, a second handle is fixedly connected to the end of the recess away from the water outlet pipe, and the second handle is rotatably disposed below the flange.

[0015] Preferably, the bottom side of the hollow filter cartridge is connected to a filter cartridge bottom seal by a threaded connection, and a vertical rod is fixedly installed on the filter cartridge bottom seal. The vertical rod extends to the bottom side of the filter cartridge top seal, and a plurality of evenly distributed filter elements are fixedly installed on the vertical rod. The filter elements are disposed inside the C-shaped filter plate.

[0016] Preferably, an ultrafiltration membrane is fixedly installed on both the upper and lower sides of the filter element, and an ion exchange resin is fixedly disposed inside the ultrafiltration membrane.

[0017] Preferably, the interior of the diversion valve seat is provided with a cross-shaped four-way groove, the ports of which are respectively connected to the connecting hole and the water inlet / outlet hole. An elliptical baffle is fixedly connected to the bottom end of the valve core. The elliptical baffle is rotatably disposed inside the cross-shaped four-way groove. During the rotation of the elliptical baffle, its edge abuts against the corner of the cross-shaped four-way groove.

[0018] Preferably, a damping plate is fixedly installed on the top cover, the valve core extends above the damping plate, a first handle is fixedly connected to the upper end of the valve core, the first handle extends above the hollow filter cartridge, and a directional indicator is fixedly installed on the top cover, with the arrow of the directional indicator aligned with the outlet direction of the water outlet pipe.

[0019] Preferably, the hollow filter cartridge is provided with limit pin holes on both sides, and the top seal of the filter cartridge is provided with a limit groove corresponding to the position of the limit pin holes. The limit pin holes and the limit groove are used to limit the position of the filtration mechanism.

[0020] The present invention has at least the following beneficial effects:

[0021] 1. This invention changes the direction of water flow by using a diversion valve seat. Circulating water enters the hollow filter cartridge on one side of the connecting sleeve and contacts the C-shaped filter plate at the bottom of the hollow filter cartridge before entering the circulation hole. After passing through the recess at the bottom of the diversion valve, it flows into the hollow filter cartridge on the other side for filtration again. The water level in the hollow filter cartridge rises to the position of the connecting hole and enters the inlet hole on the other side of the diversion valve seat. Therefore, the utilization rate of the two hollow filter cartridges is improved, and the cleanliness of the circulating water can also be improved by filtering twice.

[0022] 2. When the valve core of this invention rotates, the gear disc rotates on the connecting sleeve and drives the top seal of the filter cartridge to rotate through the bevel gear. At this time, the C-shaped filter plate rotates with the top seal of the filter cartridge, so that the circulating water will not be blocked by the C-shaped filter plate when it flows into the hollow filter cartridge. However, the circulating water needs to be filtered by the C-shaped filter plate when it flows out of the hollow filter cartridge. Therefore, the C-shaped filter plate can selectively block both ends of the connecting hole and the circulation hole as the direction of the circulating water flow changes. This not only prevents impurities from remaining in the connecting hole and the circulation hole and causing blockage, but also allows impurities and suspended particles to remain inside the hollow filter cartridge, making it easy to clean.

[0023] 3. When replacing the filter device in the left hollow filter cartridge, the circulating water is introduced into the right hollow filter cartridge by rotating the valve core. At the same time, the second handle is rotated clockwise to drive the L-shaped drain hole so that it is aligned with the right hollow filter cartridge. After being filtered by the filter device on the right, the circulating water flows into the circulation hole, and then enters the outlet pipe through the L-shaped drain hole and flows into the outlet chamber of the inserter. At this time, the filter device on the left can be replaced. To replace the filter device on the right, the operation is reversed. This realizes the operation of replacing the filter device in the dual-tube filter without stopping the machine, thereby improving production efficiency.

[0024] 4. The bottom seal of the filter cartridge of this invention is used to seal the hollow filter cartridge, and can also be used to install and support the uprights and filter elements. The filter element is set inside the C-shaped filter plate. When the filter device needs to be replaced or cleaned, the flow direction of the circulating water is changed by the valve core and the switching valve. At the same time, the bottom seal of the filter cartridge is removed from the bottom side of the hollow filter cartridge. At this time, the filter element and filter device can be cleaned, which is simple and quick.

[0025] 5. The filter element of this invention has an ultrafiltration membrane fixedly installed on both the upper and lower sides. An ion exchange resin is fixedly arranged inside the ultrafiltration membrane. The ultrafiltration membrane is used to remove tiny particulate matter, organic matter, and microorganisms such as bacteria from the water. The ion exchange resin can remove impurity ions from the water through ion exchange. Through ion exchange, cations or anions in the water are fixed on the resin, while the released hydrogen ions or hydroxide ions combine with OH- ions in the water to generate water, thereby completing the water purification.

[0026] 6. The arrow of the directional indicator of this invention is consistent with the outlet direction of the water pipe, which prevents the staff from confusing the input direction when connecting the flange. The first handle is convenient for the staff to operate and also has a directional function. When the first handle is rotated 180 degrees, the elliptical baffle abuts against the other side of the cross four-way groove, so that the first handle can point to the hollow filter cartridge into which the circulating water flows, which is convenient for the replacement of the filter mechanism, thereby improving the installation efficiency and the replacement efficiency of the filter element. Attached Figure Description

[0027] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0028] Figure 1 The overall elevation view provided for this invention;

[0029] Figure 2 This is a longitudinal sectional view diagram provided for the present invention;

[0030] Figure 3 A longitudinal sectional elevation view provided for this invention;

[0031] Figure 4 A transverse sectional elevation view provided for this invention;

[0032] Figure 5 This is a schematic diagram of the filtration mechanism provided by the present invention;

[0033] Figure 6 This is a cross-sectional elevation view of the redirection valve seat provided by the present invention;

[0034] Figure 7 This is a schematic diagram of the valve core operation provided by the present invention;

[0035] Figure 8 A cross-sectional elevation view of the switching valve provided by the present invention;

[0036] Figure 9 This is a schematic diagram of the operation of the switching valve provided by the present invention;

[0037] Figure 10 This is a schematic diagram of the filter element structure provided by the present invention.

[0038] In the diagram: 1. Connecting sleeve; 2. Hollow filter cartridge; 21. Limiting pin hole; 3. Connecting hole; 4. Circulation hole; 5. Water inlet / outlet hole; 6. Diverter valve seat; 61. Cross four-way groove; 7. Valve core; 71. Gear plate; 72. Elliptical baffle; 73. First handle; 8. Top cover; 81. Damping plate; 82. Directional indicator; 9. Filtration mechanism; 91. C-type filter plate; 92. Bearing; 93. Filter cartridge top seal; 94. Bevel gear; 95. Limiting groove; 10. Diverter valve; 101. Recess; 102. Valve stem; 103. L-shaped drain hole; 104. Rubber ring; 105. Second handle; 11. Water outlet pipe; 12. Filter cartridge bottom seal; 121. Vertical rod; 122. Filter element; 123. Ultrafiltration membrane; 124. Ion exchange resin; 13. Flange; 131. Screw hole. Detailed Implementation

[0039] The following will describe in detail the implementation of this application with reference to the accompanying drawings and embodiments, so that the implementation process of how this application uses technical means to solve technical problems and achieve technical effects can be fully understood and implemented accordingly.

[0040] like Figures 1-10 As shown, the dual-cylinder filter device for inserting chips provided in this embodiment includes a connecting sleeve 1 and hollow filter cylinders 2 fixedly disposed at both ends of the connecting sleeve 1. The connecting sleeve 1 is used to fix the two hollow filter cylinders 2. The connecting sleeve 1 has a connecting hole 3 and a circulation hole 4 inside. The hollow filter cylinders 2 on both sides of the connecting sleeve 1 are connected through the connecting hole 3 and the circulation hole 4. The connecting sleeve 1 is provided with a water inlet / outlet hole 5 at the position corresponding to the connecting hole 3. The water inlet / outlet hole 5 passes through both sides of the connecting sleeve 1 and is connected to the connecting hole 3. The water inlet / outlet hole 5 is used to guide the inlet and outlet of circulating water. A diversion valve seat 6 is fixedly disposed at the position where the connecting hole 3 and the water inlet / outlet hole 5 intersect. A valve core 7 is rotatably disposed inside the diversion valve seat 6. The valve core 7 passes through the diversion valve seat 6 and the connecting sleeve 1 and extends to the top of the connecting sleeve 1. The valve core 7 and the diversion valve seat 6 are used to change the flow direction of the circulating water.

[0041] A top cover 8 is fixedly installed on the top of the connecting sleeve 1 by bolts. The valve core 7 extends above the top cover 8, and a gear disc 71 is fixedly installed on the valve core 7. The gear disc 71 is rotatably mounted on the bottom side of the top cover 8. The gear disc 71 is rotatably mounted on the connecting sleeve 1. A filter mechanism 9 is rotatably mounted inside the hollow filter cartridge 2. The filter mechanism 9 includes two C-shaped filter plates 91 distributed vertically and a bearing 92 fixedly mounted between the two C-shaped filter plates 91. The top seal of the filter cartridge is fixedly connected to the upper end of the C-shaped filter plates 91. 93, the bottom side of the filter cartridge top seal 93 is rotatably connected to the upper end of the hollow filter cartridge 2, the C-shaped filter plate 91 corresponds to the connecting hole 3 and the circulation hole 4 respectively, a bevel gear 94 is fixedly installed on the bottom side of the filter cartridge top seal 93, and the bevel gear 94 meshes with the gear plate 71; a switching valve 10 is rotatably installed inside the circulation hole 4, a recess 101 is opened on the bottom side of the switching valve 10, the two ends of the circulation hole 4 are connected through the recess 101, a valve stem 102 is fixedly installed on the switching valve 10, and the valve stem 102 extends to the outside of the connecting sleeve 1;

[0042] In this process, circulating water enters the diversion valve seat 6 through the water inlet / outlet hole 5 on one side of the connecting sleeve 1. Rotating the valve core 7 can change the direction of water flow through the diversion valve seat 6, guiding the circulating water into one of the hollow filter cartridges 2. The water then enters the circulation hole 4 after contacting the C-shaped filter plate 91 on the bottom side of the hollow filter cartridge 2. After passing through the recess 101 on the bottom side of the switching valve 10, the water flows into the other hollow filter cartridge 2 for filtration again. The water level in the hollow filter cartridge 2 rises to the position of the connecting hole 3 and enters the inlet hole on the other side of the diversion valve seat 6. The water then flows into the outlet of the water inlet / outlet hole 5 through the inlet hole on the other side of the diversion valve seat 6, thus achieving the purpose of circulating cleaning of the two hollow filter cartridges 2. This improves the utilization rate of the two hollow filter cartridges 2, and the cleanliness of the circulating water can also be improved after two filtrations.

[0043] To address the issue of impurity residue at the inlet of the hollow filter cartridge 2, during the rotation of the valve core 7, the internal filtration mechanisms 9 of the two hollow filter cartridges 2 rotate in opposite directions. The upper and lower C-shaped filter plates 91 within the filtration mechanism 9 are symmetrically distributed horizontally, while the C-shaped filter plates 91 on both sides of the connecting sleeve 1 are arranged in the same direction. During the rotation of the filter cartridge top seal 93, the filtration mechanism 9 is rotatably mounted inside the hollow filter cartridge 2 via the bearing 92. When the valve core 7 rotates, the gear disc 71 rotates on the connecting sleeve 1, and drives the filter cartridge top seal 93 to rotate via the bevel gear 94. The C-type filter plate 91 rotates with the top seal 93 of the filter cartridge, ensuring that the circulating water is not blocked when it flows into the hollow filter cartridge 2. However, the circulating water needs to be filtered by the C-type filter plate 91 when it flows out of the hollow filter cartridge 2. Therefore, the C-type filter plate 91 can selectively block both ends of the connecting hole 3 and the circulation hole 4 as the direction of the circulating water flow changes. This not only prevents impurities from remaining inside the connecting hole 3 and the circulation hole 4 and causing blockage, but also allows impurities and suspended particles to remain inside the hollow filter cartridge 2 for easy cleaning.

[0044] Furthermore, such as Figures 1-10As shown, a water outlet pipe 11 is provided at the position of the connecting sleeve 1 corresponding to the position of the switching valve 10. The water outlet pipe 11 is used to handle the problem of non-stop drainage during the replacement of the filter mechanism 9. The water outlet pipe 11 is located below the water inlet / outlet port 5. An L-shaped drainage hole 103 is provided on the switching valve 10, which extends into the interior of the water outlet pipe 11. During the rotation of the switching valve 10 by the valve stem 102, the L-shaped drainage hole 103 is used to guide the water from the circulation hole 4 into the water outlet pipe 11. A rubber ring 104 is fixedly provided at the end of the L-shaped drainage hole 103 away from the water outlet pipe 11. When the recess 101 faces downward, the rubber ring 104 abuts against the inner wall of the circulation hole 4. The rubber ring 104 is used to raise the L-shaped drainage hole 103. The sealing of the inlet of the type drain hole 103 is ensured. A flange 13 is fixedly installed on the connecting sleeve 1 at the position corresponding to the water inlet and outlet hole 5. The flange 13 is distributed on both sides of the connecting sleeve 1. The flange 13 is used for connecting the water pump pipe. The outlet pipe 11 and the flange 13 on the upper side of the outlet pipe 11 can be connected to the water inlet chamber or the water inlet pipe of the inserter. Several evenly distributed screw holes 131 are fixedly provided on the flange 13, which can improve the sealing of the double-cylinder filter device. A second handle 105 is fixedly connected to the end of the valve stem 102 away from the outlet pipe 11. The second handle 105 is rotatably located below the flange 13. The second handle 105 is used to drive the switching valve 10 to rotate through the valve stem 102.

[0045] When replacing the filter mechanism 9 in the left hollow filter cartridge 2, circulating water is introduced into the right hollow filter cartridge 2 by rotating the valve core 7. At the same time, the second handle 105 is rotated 90 degrees clockwise to drive the L-shaped drain hole 103 to face the right hollow filter cartridge 2. After being filtered by the right filter mechanism 9, the circulating water flows into the circulation hole 4, and then enters the outlet pipe 11 through the L-shaped drain hole 103 and flows into the outlet chamber of the inserter. At this time, the left filter mechanism 9 can be replaced. Replacing the right filter mechanism 9 is done in reverse. This allows the replacement of the filter mechanism 9 in the dual-cylinder filter device to be done without stopping the machine, thereby improving production efficiency.

[0046] Furthermore, such as Figures 1-10 As shown, the bottom side of the hollow filter cartridge 2 is connected to the bottom seal 12 by a threaded connection. A vertical rod 121 is fixedly installed on the bottom seal 12, extending to the bottom side of the top seal 93. Several evenly distributed filter elements 122 are fixedly installed on the vertical rod 121. The bottom seal 12 is used to seal the hollow filter cartridge 2, and can also install and support the vertical rod 121 and the filter elements 122. The filter elements 122 are located inside the C-shaped filter plate 91. When the filter mechanism 9 needs to be replaced or cleaned, the flow direction of the circulating water is changed by the valve core 7 and the switching valve 10. At the same time, the bottom seal 12 is removed from the bottom side of the hollow filter cartridge 2. At this time, the filter elements 122 and the filter mechanism 9 can be cleaned. The operation is simple and quick.

[0047] To address the issue of residual impurity ions in circulating water, ultrafiltration membranes 123 are fixedly installed on both the upper and lower sides of filter element 122. Ion exchange resin 124 is fixedly disposed inside ultrafiltration membrane 123. Ultrafiltration membrane 123 removes fine particulate matter, organic matter, and microorganisms such as bacteria from the water. Ion exchange resin 124 removes impurity ions from the water through ion exchange. The ion exchange resin 124 inside filter element 122 in the hollow filter cartridge 2 on the left is a cation exchange resin. The cation exchange resin removes some impurity ions through exchange using the carboxyl group (R-COOH). Taking calcium ion removal in circulating water as an example, the specific exchange reaction formula is as follows:

[0048] R-COOH + Ca^2+ -> R-Ca^2++H^+;

[0049] Among them, the ion exchange resin 124 inside the filter element 122 of the hollow filter cartridge 2 on the right is an anion exchange resin. The functional groups of the anion exchange resin are amine groups (-NH2), which exchange with some impurity ions to remove them. Taking the removal of chloride ions in circulating water as an example, the specific exchange reaction formula is as follows:

[0050] R-NH2+Cl^-+H^+->R-NH3^+Cl-;

[0051] Through this ion exchange process, cations or anions in the water are fixed on the resin, while the released hydrogen ions or hydroxide ions combine with OH- ions in the water to form water, thus completing the water purification.

[0052] Furthermore, such as Figures 1-10 As shown, the interior of the diversion valve seat 6 is provided with a cross-shaped four-way groove 61. The ports of the cross-shaped four-way groove 61 are respectively connected to the connecting hole 3 and the water inlet / outlet hole 5. An elliptical baffle 72 is fixedly connected to the bottom end of the valve core 7. The elliptical baffle 72 is rotatably disposed inside the cross-shaped four-way groove 61. During the rotation of the elliptical baffle 72, its edge abuts against the corner of the cross-shaped four-way groove 61. A damping plate 81 is fixedly installed on the top cover 8. The valve core 7 extends above the damping plate 81. The damping plate 81 restricts the rotation angle of the elliptical baffle 72 to 180 degrees in one rotation. A first handle 73 is fixedly connected to the upper end of the valve core 7. The first handle 73 extends above the hollow filter cartridge 2. A directional indicator 82 is fixedly installed on the top cover 8. The arrow of the directional indicator 82 is consistent with the outlet direction of the water outlet pipe 11 to prevent the staff from confusing the input direction when connecting the flange 13. The first handle 73 is convenient for the staff to operate and also has a directional function. When the first handle 73 is rotated 180 degrees, the elliptical baffle 72 abuts against the other side of the cross four-way groove 61, so that the first handle 73 can point to the hollow filter cartridge 2 where the circulating water flows in, which is convenient for the replacement of the filter mechanism 9, thereby improving the installation efficiency and the replacement efficiency of the filter element 122.

[0053] Furthermore, such as Figures 1-10 As shown, the hollow filter cartridge 2 is fixedly provided with limit pin holes 21 on both sides. The filter cartridge top seal 93 is provided with a limit groove 95 corresponding to the position of the limit pin holes 21. The limit pin holes 21 and the limit groove 95 are used to limit the filter mechanism 9. When the dual-cylinder filter device is working normally, pins can be inserted into the limit pin holes 21 and the limit groove 95 to improve the stability of the dual-cylinder filter device during use.

[0054] like Figures 1-10 As shown, the principle of the dual-cylinder filter device for the inserter provided in this embodiment is as follows:

[0055] Circulating water enters the diversion valve seat 6 through the water inlet / outlet hole 5 on one side of the connecting sleeve 1. Rotating the valve core 7 changes the direction of water flow through the diversion valve seat 6, guiding the circulating water into one of the hollow filter cartridges 2. The water then contacts the C-type filter plate 91 at the bottom of the hollow filter cartridge 2 and enters the circulation hole 4. After passing through the recess 101 on the bottom side of the switching valve 10, the water flows into the other hollow filter cartridge 2 for further filtration. The water level in the hollow filter cartridge 2 rises to the position of the connecting hole 3 and enters the inlet hole on the other side of the diversion valve seat 6. The water then flows through the inlet hole on the other side of the diversion valve seat 6 into the outlet of the water inlet / outlet hole 5, thus achieving the purpose of circulating cleaning of the two hollow filter cartridges 2. When the valve core 7 rotates, the gear disc 71 rotates on the connecting sleeve 1, and drives the filter cartridge top seal 93 to rotate via the bevel gear 94. At this time, the C-type filter plate 91 rotates with the filter cartridge top seal 93, ensuring that the circulating water is not blocked by the C-type filter plate 91 when entering or leaving the hollow filter cartridge 2. When the circulating water flows out of the hollow filter cartridge 2, it needs to pass through… The C-type filter plate 91 performs filtration. Therefore, the C-type filter plate 91 can selectively block both ends of the connecting hole 3 and the circulation hole 4 as the direction of the circulating water flow changes. This not only prevents impurities from remaining inside the connecting hole 3 and the circulation hole 4 and causing blockage, but also allows impurities and suspended particles to remain inside the hollow filter cartridge 2. When replacing the filter mechanism 9 in the left hollow filter cartridge 2, the circulating water is introduced into the right hollow filter cartridge 2 by rotating the valve core 7. At the same time, the second handle 105 is rotated 90 degrees clockwise to drive the L-shaped drainage hole 103 to face the right hollow filter cartridge 2. After the circulating water is filtered by the filter mechanism 9 on the right, it flows into the circulation hole 4, and then enters the outlet pipe 11 through the L-shaped drainage hole 103 and flows into the outlet chamber of the inserter. At this time, the filter mechanism 9 on the left can be replaced. To replace the filter mechanism 9 on the right, the operation is reversed, thus realizing the non-stop operation of replacing the filter mechanism 9 in the dual-cylinder filter device.

[0056] If certain terms are used in the specification and claims to refer to specific components, those skilled in the art will understand that hardware manufacturers may use different names to refer to the same component. This specification and claims do not distinguish components based on differences in name, but rather on differences in function. The term "comprising" as used throughout the specification and claims is an open-ended term and should be interpreted as "comprising but not limited to." "Approximately" means that within an acceptable margin of error, those skilled in the art can solve the technical problem and substantially achieve the technical effect within a certain margin of error.

[0057] It should be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a product or system comprising a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a product or system. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the product or system that includes that element.

[0058] The foregoing description illustrates and describes several preferred embodiments of the present invention. However, as previously stated, it should be understood that the present invention is not limited to the forms disclosed herein and should not be construed as excluding other embodiments. It can be used in various other combinations, modifications, and environments, and can be altered within the scope of the inventive concept described herein through the foregoing teachings or techniques or knowledge in related fields. Any modifications and variations made by those skilled in the art that do not depart from the spirit and scope of the present invention should be within the protection scope of the appended claims.

Claims

1. A double-cylinder filter device for a chip inserter, comprising a connecting sleeve (1) and hollow filter cylinders (2) fixedly disposed at both ends of the connecting sleeve (1), characterized in that: The connecting sleeve (1) has a connecting hole (3) and a circulation hole (4) inside. The hollow filter cylinders (2) on both sides of the connecting sleeve (1) are connected through the connecting hole (3) and the circulation hole (4). The connecting sleeve (1) is provided with a water inlet / outlet hole (5) corresponding to the position of the connecting hole (3). The water inlet / outlet hole (5) passes through both sides of the connecting sleeve (1) and is connected to the connecting hole (3). A diversion valve seat (6) is fixedly provided at the position where the connecting hole (3) and the water inlet / outlet hole (5) intersect. A valve core (7) is rotatably provided inside the diversion valve seat (6). The valve core (7) passes through the diversion valve seat (6) and the connecting sleeve (1) and extends to the top of the connecting sleeve (1). The top of the connecting sleeve (1) is fixedly mounted with a top cover (8) by bolts. The valve core (7) extends above the top cover (8). A gear disc (71) is fixedly mounted on the valve core (7). The gear disc (71) is rotatably mounted on the bottom side of the top cover (8). The gear disc (71) is rotatably mounted on the connecting sleeve (1) via the gear disc (71). A filter mechanism (9) is rotatably mounted inside the hollow filter cartridge (2). The filter mechanism (9) includes two C-shaped filter plates distributed vertically. 91) and a bearing (92) fixedly disposed between the two C-type filter plates (91), the upper end of the C-type filter plate (91) is fixedly connected to a filter cylinder top seal (93), the bottom side of the filter cylinder top seal (93) is rotatably connected to the upper end of the hollow filter cylinder (2), the C-type filter plate (91) is respectively corresponding to the connecting hole (3) and the circulation hole (4), the bottom side of the filter cylinder top seal (93) is fixedly disposed with a bevel gear (94), the bevel gear (94) meshes with the gear plate (71); A switching valve (10) is rotatably installed inside the circulation hole (4). A recess (101) is provided on the bottom side of the switching valve (10). The two ends of the circulation hole (4) are connected through the recess (101). A valve stem (102) is fixedly installed on the switching valve (10). The valve stem (102) extends to the outside of the connecting sleeve (1). During the rotation of the valve core (7), the rotation directions of the filter mechanism (9) inside the hollow filter cylinder (2) on both sides are opposite, the C-shaped filter plates (91) on both sides of the connecting sleeve (1) are arranged in the same direction, and during the rotation of the filter cylinder top seal (93), the filter mechanism (9) is rotatably set inside the hollow filter cylinder (2) through the bearing (92).

2. The double-cylinder filter device for a chip inserter according to claim 1, characterized in that: The connecting sleeve (1) is provided with a water outlet pipe (11) corresponding to the position of the switching valve (10). The water outlet pipe (11) is located below the water inlet / outlet hole (5). The switching valve (10) is provided with an L-shaped drainage hole (103). The L-shaped drainage hole (103) extends into the interior of the water outlet pipe (11). A rubber ring (104) is fixedly provided at the end of the valve stem (102) away from the water outlet pipe (11). When the recess (101) faces downward, the rubber ring (104) abuts against the inner wall of the circulation hole (4).

3. The double-cylinder filter device for a chip inserter according to claim 2, characterized in that: The connecting sleeve (1) is fixedly installed with a flange (13) at the position corresponding to the water inlet / outlet hole (5). The flange (13) is distributed on both sides of the connecting sleeve (1), and a number of evenly distributed screw holes (131) are fixedly provided on the flange (13).

4. The double-cylinder filter device for a chip inserter according to claim 3, characterized in that: A second handle (105) is fixedly connected to one end of the recess (101) away from the water outlet pipe (11), and the second handle (105) is rotatably positioned below the flange (13).

5. The double-cylinder filter device for a chip inserter according to claim 1, characterized in that: The bottom side of the hollow filter cartridge (2) is connected to the bottom seal (12) by a threaded connection. A vertical rod (121) is fixedly installed on the bottom seal (12). The vertical rod (121) extends to the bottom side of the top seal (93) of the filter cartridge. Several uniformly distributed filter elements (122) are fixedly installed on the vertical rod (121). The filter elements (122) are located inside the C-shaped filter plate (91).

6. The double-cylinder filter device for a chip inserter according to claim 5, characterized in that: The filter element (122) is fixedly installed with an ultrafiltration membrane (123) on both the upper and lower sides, and an ion exchange resin (124) is fixedly disposed inside the ultrafiltration membrane (123).

7. The double-cylinder filter device for a chip inserter according to claim 2, characterized in that: The interior of the diversion valve seat (6) is provided with a cross four-way groove (61). The port of the cross four-way groove (61) is connected to the connecting hole (3) and the water inlet / outlet hole (5) respectively. The bottom end of the valve core (7) is fixedly connected with an elliptical baffle (72). The elliptical baffle (72) is rotatably disposed inside the cross four-way groove (61). During the rotation of the elliptical baffle (72), its edge abuts against the corner of the cross four-way groove (61).

8. A double-cylinder filter device for a chip inserter according to claim 2, characterized in that: A damping plate (81) is fixedly installed on the top cover (8). The valve core (7) extends above the damping plate (81). A first handle (73) is fixedly connected to the upper end of the valve core (7). The first handle (73) extends above the hollow filter cartridge (2). A directional mark (82) is fixedly installed on the top cover (8). The arrow of the directional mark (82) is consistent with the outlet direction of the water outlet pipe (11).

9. A double-cylinder filter device for a wafer inserter according to claim 1, characterized in that: The hollow filter cartridge (2) is fixedly provided with limit pin holes (21) on both sides. The filter cartridge top seal (93) is provided with a limit groove (95) corresponding to the position of the limit pin hole (21). The limit pin hole (21) and the limit groove (95) are used to limit the filter mechanism (9).

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