An ultrasonic vibration cutting tool

Abstract

The application discloses an ultrasonic vibration cutting tool and belongs to the technical field of ultrasonic vibration machining. The tool comprises a first clamping flange, a second clamping flange, a cutting tool and an ultrasonic vibrator. The two clamping flanges and the cutting tool are fixed and form an ultrasonic vibrator mounting part for accommodating the ultrasonic vibrator. An electrically conductive layer and an insulating layer exist between the ultrasonic vibrator and the two clamping flanges. After the tool is tightly fixed on a tool holder by a fixing nut, the ultrasonic vibrator grounding end circuit is formed in cooperation with the electrically conductive layer, and the other side of the ultrasonic vibrator is pressed against a power supply thimble. A cylindrical mounting part is arranged on the first clamping flange and has a tapered matching hole matched with a tapered mounting part of the tool holder. A plurality of Z-shaped elastic connection groups are formed between the cylindrical mounting part and the tapered matching hole. The through hole with a special appearance has obvious buffering and vibration isolation effects. During work, the tool is divided into a mounting part and a vibration part. During assembly, the fixing nut only contacts the mounting part. Therefore, the inhibiting effect of the mounting factor on the amplitude of the ultrasonic cutting tool is greatly weakened, and the cutting efficiency and quality are improved.

Description

Technical Field

[0001] This invention relates to the field of ultrasonic vibration machining technology, specifically to an ultrasonic vibration cutting tool, and more particularly to an ultrasonic vibration cutting tool for cutting workpieces such as semiconductor wafers or optical device wafers. Background Technology

[0002] In recent years, with the booming development of industries such as new energy vehicles, consumer electronics, high-speed trains, and the Internet, the market demand for high-performance, high-power, and high-efficiency chips has been increasing day by day. As a result, the requirements for miniaturization and cost reduction of core equipment for semiconductor packaging, such as dicing machines, are also increasing at the same time.

[0003] As a core process in chip packaging, the efficiency and quality of the dicing process directly determine the manufacturing cost and production capacity of the chip. In recent years, with the development of chip stacking technology, in order to obtain more stacked layers within a limited volume, the thickness of individual chips has become increasingly thinner. This reduction in wafer thickness brings many challenges to the dicing process. Traditional abrasive wheel dicing is based on high-speed grinding mechanisms, which suffers from defects such as large edge chipping, wide kerfs, poor surface quality, low processing efficiency, and reduced material mechanical strength after dicing. Furthermore, with the innovative development of engineering materials technology, third-generation semiconductor materials, represented by silicon carbide and gallium arsenide, are widely used in chip manufacturing. However, the high Mohs hardness of materials such as silicon carbide undoubtedly further increases the difficulty of cutting with cutting tools.

[0004] To address the aforementioned problems, ultrasonic vibration cutting tools have been proposed in this field. Specifically, an ultrasonic transducer and a cutting tool are combined. An AC voltage is applied to the ultrasonic transducer to generate a vibration signal, thereby simultaneously imparting ultrasonic vibration to the cutting tool and performing cutting. For example, Chinese Patent CN 101318359 B discloses a cutting device including a tool clamping flange, a tool holder, and a cutting tool. The tool holder is mounted on a spindle and is equipped with a first ultrasonic transducer that imparts ultrasonic vibration to the cutting tool. The tool clamping flange is disposed on the tool holder and together with it clamps the cutting tool. A second ultrasonic transducer that imparts ultrasonic vibration to the cutting tool is disposed on the tool clamping flange. To solve the problem that traditional ultrasonic vibration cutting tools struggle to transmit the ultrasonic vibration generated by the ultrasonic transducer to the cutting tool with sufficient amplitude, this patent forms multiple through holes in the flange portion of the tool holder and multiple through holes in the tool clamping flange. This reduces the radial rigidity of the tool holder and the tool clamping flange, thus efficiently transmitting the ultrasonic vibration generated by the ultrasonic transducer without suppressing its amplitude. Although the cutting tool disclosed in this patent experiences large-amplitude ultrasonic vibration in the radial direction, when it is assembled onto a rotating spindle and locked at the end with a fastening nut, the relatively arranged tool clamping flange and the center of the tool holder still generate considerable vibration during operation. This causes vibration at the point where the fastening nut contacts the tool, significantly suppressing the amplitude of the ultrasonic cutting tool and thus weakening its amplitude, affecting the cutting effect. This may be because although through holes are designed in the flange of the tool holder and the tool clamping flange to reduce radial rigidity, such relatively simple through holes do not provide very good buffering and vibration isolation.

[0005] Therefore, it is necessary to design the buffer and vibration isolation structures on the clamping structure of the cutting tool in a more detailed manner to solve the problem of the suppression of ultrasonic cutting tool amplitude by installation factors. Summary of the Invention

[0006] The purpose of this invention is to solve the problems existing in the prior art and provide an ultrasonic vibration cutting tool that combines an ultrasonic transducer with a cutting tool. By designing a Z-shaped elastic connection group with vibration reduction and buffering functions, the tool can obtain sufficient ultrasonic amplitude, which greatly reduces the inhibitory effect of installation factors on the amplitude of ultrasonic vibration cutting tool, and ensures cutting quality and efficiency.

[0007] To achieve the above-mentioned technical objectives, the present invention is implemented through the following technical solution: an ultrasonic vibration cutting tool, which is mounted on a tool holder by a fixing nut and is equipped with an ultrasonic transducer that imparts ultrasonic vibration to the cutting tool; the tool holder is mounted on the end of a rotating spindle, and the rotating spindle is rotatably supported on a spindle housing; characterized in that the ultrasonic vibration cutting tool includes a first clamping flange, a second clamping flange, a cutting tool, and an ultrasonic transducer; the first and second clamping flanges are arranged opposite to each other and form a cutting tool fixing mounting part for accommodating the cutting tool on the outer periphery and an ultrasonic transducer mounting part for accommodating the ultrasonic transducer in the center; the first clamping flange is fitted with the tool holder and has an ultrasonic transducer mounting part on it. The device includes a flange portion, from which a conical boss and a cylindrical mounting portion protrude from the center to both sides; a conical mating hole is opened in the center of the cylindrical mounting portion, and several Z-shaped elastic connection groups are formed between the cylindrical mounting portion and the conical mating hole through the opening; each Z-shaped elastic connection group consists of two Z-shaped elastic connectors arranged opposite each other; a second clamping flange has a cylindrical mating hole opened in the center, and the cylindrical mating hole and the cylindrical mounting portion enclose an ultrasonic transducer mounting portion; the ultrasonic transducer has an axial polarization direction, and electrodes are provided on its first and second polarization surfaces, and insulators are provided on both its first and second mating surfaces, with the second polarization surface connected to the first clamping flange through a conductive layer.

[0008] Furthermore, the first clamping flange, the second clamping flange, and the cutting tool are integrated into one unit.

[0009] Furthermore, after the ultrasonic vibration cutting tool is assembled on the tool holder, the first polarization surface is in close contact with the side of the tool holder, and the power supply pin rests on the electrode of the first polarization surface.

[0010] Preferably, there are six Z-shaped elastic connection groups, which divide the ultrasonic vibration cutting tool into a vibration part and a mounting part.

[0011] Furthermore, the tapered mating hole is adapted to the shape of the tapered mounting portion on the surface of the tool holder, and the first clamping flange is installed in conjunction with the tool holder through the tapered mating hole.

[0012] Furthermore, after the ultrasonic vibration cutting tool is assembled on the tool holder, the side of the cylindrical mounting part fits tightly against the side of the tool holder.

[0013] Furthermore, the outer periphery of the flange portion is recessed inward to form a first tool mounting portion and a first clamping surface that contacts the clamped cutting tool; the second clamping flange is fixed to the flange portion of the first clamping flange through its flange surface which is arranged opposite to the first clamping flange, and a second tool mounting portion and a second clamping surface for clamping the cutting tool are formed on the outer periphery side of the flange surface.

[0014] Furthermore, the non-contact coupler transmits the high-frequency electrical excitation signal generated by the ultrasonic power supply to the ultrasonic transducer of the ultrasonic vibration cutting tool. The power supply wire led out from the power supply coil of the non-contact coupler is connected to the power supply pin, and the grounding wire is connected to the tool holder. The conductive layer, the first clamping flange, and the tool holder together form the grounding terminal circuit of the ultrasonic transducer.

[0015] The beneficial effects of this invention are as follows:

[0016] 1. The ultrasonic cutting tool disclosed in this application consists of a first and a second clamping flange, a grinding wheel, and an ultrasonic transducer. The cylindrical mounting part of the first clamping flange and the tapered mating hole form several Z-shaped elastic connection groups through the opening. The special morphology of the through hole design has obvious buffering and vibration isolation effects, so that when the ultrasonic cutting tool is working, the tool is clearly divided into a mounting part located in the center and a vibration part located on the outer periphery. The vibration of the mounting part is very small. Therefore, when the ultrasonic vibrating cutting tool is assembled onto the tool holder using a fixing nut, since the fixing nut only contacts the mounting part, the fixing nut will not vibrate significantly. This can greatly weaken the suppression effect of the installation factor on the amplitude of the ultrasonic cutting tool, ensuring that the cutting tool can obtain a sufficiently large amplitude as much as possible, reducing the cutting resistance generated by the cutting tool during operation. With this ultrasonic cutting tool, some high-hardness, difficult-to-cut thin materials can be easily cut.

[0017] 2. In this application, the first and second clamping flanges that make up the ultrasonic cutting tool and the grinding wheel are fixedly connected as a whole. Compared with the traditional tool that uses the clamping force of the clamping member to clamp and limit the position of the grinding wheel, this fixed connection can avoid the situation where the grinding wheel and the clamping member slide relative to each other due to the large amplitude during the operation, thereby ensuring that the ultrasonic vibration energy acting on the first / second clamping flange is effectively transmitted to the grinding wheel.

[0018] 3. The ultrasonic vibration cutting tool and tool holder are selected for assembly using a tapered mating surface. That is, the tapered mating hole of the first clamping flange is fitted with the tapered mounting part of the tool holder, so that the tool and the rotating spindle have good coaxiality and are easy to disassemble. Attached Figure Description

[0019] Figure 1 This is an exploded view of an ultrasonic vibration cutting tool;

[0020] Figure 2 This is an isometric view of the first clamping flange;

[0021] Figure 3 This is a cross-sectional view of the ultrasonic vibration cutting tool mounting mechanism, showing the state of the separated components.

[0022] Figure 4This is a structural cross-sectional view of the ultrasonic vibration cutting tool mounting mechanism, representing its combined state.

[0023] Figure 5 It is the radial vibration mode diagram of an ultrasonic vibration cutting tool;

[0024] Figure 6 These are modal shape diagrams of a conventional ultrasonic scalpel (left) and an ultrasonic vibration cutting tool disclosed in Example 1 (right);

[0025] Figure 7 This shows the deformation of the Z-shaped elastic connection group on the ultrasonic vibration cutting tool prepared in Example 1 at different times during a single cycle of electrical excitation.

[0026] Figure 8 The deformation of the Z-shaped elastic connection group on the ultrasonic vibration cutting tool prepared in Comparative Example 1 at different times during a single cycle of electrical excitation is shown.

[0027] Figure 9 The radial vibration mode diagram is shown for the ultrasonic vibration cutting tool prepared in Comparative Example 1.

[0028] Among them, 1-fixed nut, 2-ultrasonic vibration cutting tool, 3-tool holder, 6-ultrasonic power supply, 7-non-contact coupler, 8-bolt, 9-spindle housing, 10-rotating spindle, 12-grinding wheel, 13-first clamping flange, 14-conductive layer, 16-second clamping flange, 17-outer insulator, 18-ultrasonic transducer, 19-inner insulator, 21-threaded part, 23-conical mounting part, 24-first iron core, 25-power supply pin, 26-second induction coil, 27-first wire, 28-second iron core, 29-wire one, 30-first induction coil, 31-wire two, 34-tool holder side, 35-second wire;

[0029] 121 - Mating hole;

[0030] 131-Conical boss, 132-Flange, 133-First clamping surface, 134-First tool mounting part, 135-Conical mating hole, 136-Cylindrical mounting part, 137-Z-shaped elastic connection group, 137a-Z-shaped elastic connection part one, 137b-Z-shaped elastic connection part two, 138-Side of mounting part;

[0031] 161-Flange surface, 162-Second tool mounting part, 163-Second clamping surface, 164-Cylindrical mating hole;

[0032] 181 - First polarization surface, 182 - First mating surface, 183 - Second polarization surface, 184 - Second mating surface. Detailed Implementation

[0033] The following embodiments further illustrate the content of the present invention, but should not be construed as limiting the present invention. Any modifications and substitutions made to the methods, steps, or conditions of the present invention without departing from the essence of the invention are within the scope of the present invention.

[0034] Example 1

[0035] This embodiment provides an ultrasonic vibration cutting tool 2, including a first clamping flange 13, a second clamping flange 16, a grinding wheel 12, and an ultrasonic transducer 18. The first clamping flange 13, the second clamping flange 16, and the grinding wheel 12 are fixed as a whole. The first clamping flange 13 and the second clamping flange 16 are arranged opposite to each other and form an annular grinding wheel fixing and mounting part around their outer periphery. The grinding wheel 12 is fixed in the grinding wheel fixing and mounting part between the first / second clamping flanges 13 and 16. After the first / second clamping flanges 13 and 16 are fixed, an ultrasonic transducer mounting part is left in the center of the first / second clamping flanges 13 and 16. The ultrasonic transducer 18 is adapted and installed in the ultrasonic transducer mounting part. The ultrasonic transducer 18 imparts ultrasonic vibration to the grinding wheel 12.

[0036] The first clamping flange 13 mates with the tool holder 3, which is mounted on the end of the rotating spindle 10, which is rotatably supported on the spindle housing 9. The first clamping flange 13 consists of the following parts: an annular flange portion 132 is provided thereon, and a tapered boss 131 and a cylindrical mounting portion 136 are formed by protruding from the center of the flange portion 132 along the axial direction of the flange portion 132; the outer periphery of the flange portion 132 is recessed inward to form a first tool mounting portion 134 and an annular first clamping surface 133 that contacts the clamped grinding wheel tool 12; a tapered mating hole 135 is provided in the center of the cylindrical mounting portion 136, and the tapered mating hole 135 is adapted to the shape of the tapered mounting portion 23 on the surface of the tool holder 3, and the first clamping flange 13 is installed with the tool holder 3 through the tapered mating hole 135.

[0037] Several Z-shaped elastic connection groups 137 are formed between the cylindrical mounting portion 136 and the tapered mating hole 135 through openings. Specifically, this is achieved by drilling 12 T-shaped irregular holes at equal intervals around the cylindrical mounting portion 136, penetrating both sides of it. As shown in the figure, this is equivalent to a Z-shaped elastic connection group 137 being formed by Z-shaped elastic connector 137a and Z-shaped elastic connector 137b. Therefore, in this embodiment, a total of 6 Z-shaped elastic connection groups 137 are formed on the cylindrical mounting portion 136. The purpose of setting the Z-shaped elastic connection groups 137 on the cylindrical mounting portion 136 is to divide the ultrasonic cutting tool into two parts: a vibrating part located on the outer periphery and a mounting part located in the center. This ensures that the mounting part can only contact the mounting part without affecting the vibration of the vibrating part, thereby minimizing the suppressive effect of the mounting factor on the ultrasonic vibration cutting tool. This ensures that the ultrasonic cutting tool can obtain the maximum amplitude and can more easily complete the cutting of difficult-to-cut materials under the same power supply.

[0038] Furthermore, when the ultrasonic cutting tool is mounted on the tool holder 3, the mounting side 138 of the cylindrical mounting part 136 fits tightly against the side 34 of the tool holder.

[0039] The second clamping flange 16 is fitted and fixed to the first clamping flange 13. The second clamping flange 16 is annular and has a cylindrical mating hole 164 in its center. After the first / second clamping flanges 13 and 16 are fitted and fixed, the cylindrical mating hole 164 and the cylindrical mounting part 136 are enclosed to form an ultrasonic transducer mounting part that accommodates the ultrasonic transducer 18. The second clamping flange 16 is fixed to the flange part 132 of the first clamping flange 13 through its flange surface 161 which is opposite to the first clamping flange 13. A second tool mounting part 162 and a second clamping surface 163 for clamping the grinding wheel cutter 12 are formed on the outer peripheral side of the flange surface 161.

[0040] After the first / second clamping flanges 13 and 16 are fixed, the opposing first clamping surface 133, the first tool mounting part 134, the second clamping surface 163 and the second tool mounting part 162 cooperate to form an ultrasonic transducer mounting part for fixing the ultrasonic transducer to the first / second clamping flanges 13 and 16.

[0041] The grinding wheel cutter 12 is ring-shaped, formed by sintering abrasive grains made of materials such as diamond mixed with a binder. Depending on the binder and process, the abrasive grains can be mixed with a resin binder material and formed into a ring-shaped resin-bonded tool under high temperature and pressure; or the abrasive grains can be mixed with a metal binder and sintered at high temperature to form a ring-shaped metal-bonded tool; or the abrasive grains can be electroplated onto the side of a base made of materials such as aluminum using metal plating such as nickel to form an electroformed tool. The diameter of the mating hole 121 of the grinding wheel cutter 12 is adapted to the diameter of the first tool mounting part 134 of the first clamping flange 13 and the diameter of the second tool mounting part 162 of the second clamping flange 16 to achieve the consolidation of the three.

[0042] In this embodiment, an important point is that since the first / second clamping flanges 13 and 16 and the grinding wheel cutter 12 are fixed as a whole, no relative sliding will occur between the grinding wheel cutter 12 and the clamping flanges during the cutting process. This ensures that the ultrasonic vibration energy acting on the first / second clamping flanges 13 and 16 is effectively transmitted to the grinding wheel cutter 12.

[0043] The ultrasonic transducer 18 has a ring-shaped structure with axial polarization and is made of piezoelectric ceramics such as barium titanate, lead zirconate titanate, and lithium tantalate. Ring-shaped electrodes are electroplated on the two polarization surfaces of the ultrasonic transducer 18, namely the first polarization surface 181 and the second polarization surface 183. An outer insulator 17 and an inner insulator 19 cover the outer and inner cylindrical mating surfaces of the ultrasonic transducer 18, namely the first mating surface 182 and the second mating surface 184. The second polarization surface 184 is connected to the flange portion 132 of the first clamping flange 13 via a conductive layer 14. After the ultrasonic cutting tool is assembled on the tool holder 3, the first polarization surface 181 is in close contact with the side surface 34 of the tool holder. The power supply pin 25 abuts against the electrode of the first polarization surface 181, forming the power supply terminal of the ultrasonic transducer.

[0044] In this embodiment, a non-contact coupler 7 is used to transmit the high-frequency electrical excitation signal generated by the ultrasonic power supply 6 to the ultrasonic transducer 18 of the ultrasonic vibration cutting tool. Specifically, the structure of the non-contact coupler 7 is as follows: it includes a first iron core 24, a second iron core 28, and a second induction coil 26. The second induction coil 26 is wound around the second iron core 28, and the second iron core 28 is fixed to the spindle housing 9 by bolts 8. The two wires of the ultrasonic power supply 6, namely the first wire 27 and the second wire 35, are connected to the second induction coil 26. The first induction coil 30 is wound around the first iron core 24 and installed at the rear end of the tool holder 3. Two wires are led out from the two ends of the first induction coil 30, namely wire 1 29 and wire 2 31. Wire 1 29 is connected to the power supply pin 25 as a voltage terminal, and wire 2 31 is connected to the tool holder 3 as a ground terminal.

[0045] After the ultrasonic cutting tool is installed on the tool holder 3, the tapered mating hole 135 of the first clamping flange 13 engages with the tapered mounting part 23 of the tool holder 3. Then, the fixing nut 1 is threadedly engaged with the threaded part 21 at the end of the tool holder 3. Tightening the fixing nut 1 ensures that the ultrasonic cutting tool is tightly fixed on the tool holder 3. At this time, the first polarization surface 181 of the ultrasonic transducer is pressed against the power supply pin 25. The conductive layer 14, the first clamping flange 13, and the tool holder 3 together form the grounding circuit of the ultrasonic transducer. The ultrasonic power supply 6 generates an AC signal of a predetermined frequency, which is transmitted to the second induction coil 26 through the non-contact coupler 7. The rotating first induction coil 30, the first wire 29, and the power supply pin 25 apply an AC voltage of a predetermined frequency to the ultrasonic transducer 18 to perform ultrasonic vibration. The ultrasonic transducer 18 generates a radial vibration signal, which is transmitted to the grinding wheel 12, causing the grinding wheel 12 to perform ultrasonic vibration in the radial direction, ultimately achieving effective cutting of the object to be cut.

[0046] The radial vibration characteristics of the ultrasonic vibrating cutting tool were analyzed using the finite element analysis software COMSOL Multiphysics. The ultrasonic transducer 18 was made of lead zirconate titanate, and the first and second clamping flanges 13 and 16 were made of aluminum alloy with an outer diameter of 52 mm. Six sets of Z-shaped elastic connection groups 137 were installed on the cylindrical mounting part 136 of the first clamping flange 13. Modal analysis was performed to obtain the vibration mode of the ultrasonic vibrating cutting tool (see...). Figure 5 As can be seen from the vibration mode diagram of the ultrasonic vibration cutting tool, due to the presence of the Z-shaped elastic connection group 137, the ultrasonic vibration cutting tool is divided into two parts: the outer periphery vibration part and the central mounting part. During installation, since the fixing nut 1 can only contact the mounting part at the center of the tool, the suppression effect of installation factors on the ultrasonic vibration cutting tool can be minimized, and the cutting tool can thus obtain a sufficiently large amplitude.

[0047] The modal shape diagrams of a conventional ultrasonic scalpel (which does not have through-hole structures for buffering and vibration isolation) and the ultrasonic vibration cutting tool disclosed in this embodiment are compared. Figure 6It can be observed that for a conventional ultrasonic scalpel structure, during vibration, because there is no vibration isolation and buffering structure to provide cushioning and vibration isolation, the entire tool vibrates when electrically excited, with the maximum vibration displacement located at the central mating hole. Therefore, when it is mounted on a shaft component, the contact between the fixing component (such as the fixing nut mentioned in this embodiment) and the ultrasonic scalpel will generate severe mechanical coupling, thereby suppressing the tool's amplitude response. However, after setting a Z-shaped elastic connection group on it, the ultrasonic vibrating cutting tool is clearly divided into two parts, the vibrating part and the mounting part, thanks to the decoupling capability of the Z-shaped elastic connection structure. When electrically excited, only the vibrating part vibrates, while the mounting part has no vibration signal. At this time, when the ultrasonic scalpel is clamped and fixed on the shaft component, the mechanical coupling between the fixing nut and the ultrasonic scalpel is greatly reduced, thus the ultrasonic scalpel can obtain a better amplitude response.

[0048] Comparative Example 1

[0049] The only difference between this comparative example and Example 1 is that the hole between the cylindrical mounting part 136 and the tapered mating hole 135 is a conventional arc-shaped hole. Specifically, six arc-shaped through holes are drilled at equal intervals around the circumference of the cylindrical mounting part 136.

[0050] Figure 7 The figure shows the deformation of the Z-shaped elastic connection group on the ultrasonic vibrating cutting tool disclosed in Example 1 at different times during a single cycle of electrical excitation. As can be seen from the figure, when the ultrasonic vibrating cutting tool is electrically excited, the vibrating part contracts and expands radially, causing the Z-shaped elastic connection group to undergo elastic bending deformation. The inwardly transmitted mechanical vibration is converted into the elastic potential energy of the elastic connecting beam by the Z-shaped elastic connection structure. Therefore, when the ultrasonic cutter is electrically excited, only the vibrating part vibrates, while the mounting part remains stationary.

[0051] The deformation of the arc-shaped through-hole in the ultrasonic scalpel, as shown in the comparative analysis, at different times within a single cycle of electrical excitation, is as follows: Figure 8 As shown, combined with Figure 7 and Figure 8 It can be seen that although the arc-shaped through-hole structure effectively reduces the radial stiffness of the ultrasonic vibrating cutting tool, the ultrasonic tool will still transmit vibration signals to the installation position when it is excited. Therefore, when the ultrasonic tool is clamped and fixed to a shaft component, the ultrasonic vibration will still mechanically couple with the external environment, thereby losing ultrasonic energy. Furthermore, its modal vibration mode ( Figure 9 As can be seen, the radial expansion and contraction of an ultrasonic vibrating cutting tool with an arc-shaped through-hole structure is not uniform during vibration. This leads to shearing phenomena within the tool during vibration, and the resulting shear stress may cause the cutting edge to break. The Z-shaped elastic connection structure provides vibration isolation and buffering capabilities, perfectly solving this problem. It minimizes the mechanical coupling between the ultrasonic cutter vibration and the outer shell, enhances the ultrasonic energy transmitted to the tool, and effectively improves the amplitude response of the ultrasonic cutter.

[0052] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. However, the above description is merely a specific embodiment of the present invention, and the technical features of the present invention are not limited thereto. Any other embodiments derived by those skilled in the art without departing from the technical solution of the present invention should be covered within the patent scope of the present invention.

Claims

1. An ultrasonic vibration cutting tool, which is mounted on a tool holder by a fixing nut and equipped with an ultrasonic transducer that imparts ultrasonic vibrations to the cutting tool, the tool holder being mounted on the end of a rotating spindle, the rotating spindle being rotatably supported on a spindle housing; characterized in that, The ultrasonic vibration cutting tool includes a first clamping flange, a second clamping flange, a cutting tool, and an ultrasonic transducer. The first and second clamping flanges are arranged opposite to each other and form a cutting tool fixing and mounting part on the outer periphery to accommodate the cutting tool, and an ultrasonic transducer mounting part on the center to accommodate the ultrasonic transducer. The first clamping flange is installed in conjunction with the tool holder. It has a flange portion, and a conical boss and a cylindrical mounting portion are formed protruding from the center of the flange portion to both sides. A conical mating hole is opened in the center of the cylindrical mounting portion. Several Z-shaped elastic connection groups are formed between the cylindrical mounting portion and the conical mating hole through the opening. The Z-shaped elastic connection group is formed by drilling 12 T-shaped irregular holes at equal intervals around the cylindrical mounting portion and penetrating its two sides. The Z-shaped elastic connection group is composed of Z-shaped elastic connector one and Z-shaped elastic connector two. The second clamping flange has a cylindrical mating hole in its center, which, together with the cylindrical mounting part, forms the ultrasonic transducer mounting part. An ultrasonic transducer has an axial polarization direction, electrodes are provided on its first and second polarization surfaces, and insulators are provided on its first and second mating surfaces. The second polarization surface is connected to the first clamping flange through a conductive layer. The first clamping flange, the second clamping flange, and the cutting tool are fixed together as one unit; After the ultrasonic vibration cutting tool is assembled on the tool holder, the first polarization surface is in close contact with the side of the tool holder, and the power supply pin rests on the electrode of the first polarization surface. There are six Z-shaped elastic connection groups, which divide the ultrasonic vibration cutting tool into a vibration part and a mounting part. The tapered mating hole is adapted to the shape of the tapered mounting part on the surface of the tool holder, and the first clamping flange is installed with the tool holder through the tapered mating hole; After the ultrasonic vibration cutting tool is assembled on the tool holder, the side of the cylindrical mounting part fits tightly against the side of the tool holder. The outer periphery of the flange portion is recessed inward to form a first tool mounting portion and a first clamping surface that contacts the clamped cutting tool; the second clamping flange is fixed to the flange portion of the first clamping flange by its flange surface which is arranged opposite to the first clamping flange, and a second tool mounting portion and a second clamping surface for clamping the cutting tool are formed on the outer periphery side of the flange surface. The non-contact coupler transmits the high-frequency electrical excitation signal generated by the ultrasonic power supply to the ultrasonic transducer of the ultrasonic vibration cutting tool. The power supply wires led out from the power supply coil of the non-contact coupler are connected to the power supply pins, and the grounding wires are connected to the tool holder. The conductive layer, the first clamping flange, and the tool holder together form the grounding terminal circuit of the ultrasonic transducer. A Z-shaped elastic connection group is provided on the cylindrical mounting part, and the ultrasonic cutting tool is divided into two parts: a vibrating part located on the outer periphery and a mounting part located in the center. The retaining nut can only contact the mounting part at the center of the tool.

2. The ultrasonic vibration cutting tool according to claim 1, characterized in that: When an ultrasonic vibration cutting tool is electrically excited, the vibrating part contracts and expands radially, causing the Z-shaped elastic connection group to undergo elastic bending deformation. The mechanical vibration transmitted inward is converted into the elastic potential energy of the elastic connection beam by the Z-shaped elastic connection structure.

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