Zero calibration method and system for fast steering mirror

Abstract

The invention discloses a zero calibration method and system for a fast steering mirror. The method comprises the following steps: executing initialization operation of a fast reflecting mirror and an autocollimator; after the fast reflecting mirror is read to rotate by 180 degrees and the initialization operation of the fast reflecting mirror is executed, the reading of the autocollimator is a first position; continuously adjusting the orientation of the fast reflecting mirror and the given value of a pitch angle closed loop until the condition that a preset position condition is met is judged according to the adjustment position currently read by the autocollimator and the first position, and recording the given value of the fast reflecting mirror at the moment as a target given value; the fast reflecting mirror is read and rotated by 180 degrees in the same direction, initialization operation of the fast reflecting mirror is executed, and after a target given value is given to the fast reflecting mirror, the reading of the autocollimator is a second position; and judging whether a preset threshold condition is met or not according to the first position and the second position, and if yes, taking the target given value as a zero value. The technical problem that due to the existence of measurement errors and manual measurement errors, the zero precision of calibration is relatively low is solved.

Description

Technical Field

[0001] This application relates to the field of optical metrology and measurement technology, and more specifically, to a zero-point calibration method and system for a fast-reflecting mirror. Background Technology

[0002] A fast reflector is a servo control device used to quickly and accurately adjust the direction of a light beam between a light source and a target. Its main components are the fast reflector body (reflector, support mechanism, position feedback measurement device) and the drive control device.

[0003] The position feedback measurement device of the fast-reflecting mirror primarily detects the position information of the reflector. The fast-reflecting mirror has high pointing accuracy and resolution near zero position. Since the fast-reflecting mirror operates based on its structural mounting surface, it is necessary to calibrate the parallelism between the mounting surface and the reflector surface to determine its zero position. This ensures high pointing accuracy and resolution while guaranteeing sufficient travel on both sides of the mirror.

[0004] In existing technologies, zero-point calibration is mainly performed by measuring with a coordinate measuring machine (CMM). However, this method results in relatively low zero-point accuracy due to measurement errors in the CMM and human error. In addition, this method increases equipment costs.

[0005] There is currently no effective solution to the problem of relatively low zero-point accuracy in calibration caused by measurement errors and human measurement errors in related technologies. Summary of the Invention

[0006] The main objective of this application is to provide a method and system for zero-point calibration of a fast-reflecting mirror, so as to solve the problem of relatively low zero-point accuracy caused by measurement errors and human measurement errors.

[0007] To achieve the above objectives, according to one aspect of this application, a method for zero-position calibration of a fast-reflecting mirror is provided.

[0008] According to the zero-position calibration method of the fast-reflecting mirror of this application, zero-position calibration is performed using a fast-reflecting mirror zero-position calibration system. The system includes: a platform, an autocollimator, a fast-reflecting mirror, and a processing component mounted on the platform. The autocollimator is aligned with the fast-reflecting mirror, and the processing component is electrically connected to the fast-reflecting mirror. The method includes: step S01, performing initialization operations on the fast-reflecting mirror and the autocollimator; step S02, after the fast-reflecting mirror rotates 180 degrees and the initialization operation is performed, the reading of the autocollimator is the first position; step S03, continuously adjusting the azimuth and pitch angle of the fast-reflecting mirror. The setpoint value of the closed loop is recorded as the target setpoint value until the preset position condition is met based on the adjustment position currently read by the autocollimator and the first position. Then, the setpoint value of the closed loop of the fast-reflecting mirror azimuth and pitch angle that meets the preset position condition is recorded. Step S04: Read the fast-reflecting mirror and rotate it 180 degrees in the same direction and perform the fast-reflecting mirror initialization operation. Then, after assigning the target setpoint value to the fast-reflecting mirror, the reading of the autocollimator is the second position. Step S05: Determine whether the preset threshold condition is met based on the first position and the second position. If so, the target setpoint value is taken as the zero position value.

[0009] Furthermore, perform initialization operations on the fast-reflecting mirror and autocollimator, including: after the fast-reflecting mirror starts and performs a self-check, its azimuth and pitch are locked in a closed-loop zero state; adjust the autocollimator so that its readings are zeroed.

[0010] Furthermore, after determining whether the preset threshold condition is met based on the first position and the second position, the process further includes: if not, then repeatedly executing steps S02-S05 until the preset threshold condition is met based on the first position and the second position.

[0011] Furthermore, the preset position condition is that the adjustment position currently read by the autocollimator is (X1 / 2±γ, Y1 / 2±γ), where (X1, Y1) is the first position and γ is within 1 arcsecond.

[0012] Furthermore, the setpoints for the azimuth and pitch angle closed loops of the fast-reflecting mirror are continuously adjusted until the preset position conditions are met based on the adjustment position currently read by the autocollimator and the first position. This includes: using a preset attenuation and increment algorithm to continuously determine the setpoints for the azimuth and pitch angle closed loops of the fast-reflecting mirror based on the setpoints of the previous round, until the preset position conditions are met based on the adjustment position currently read by the autocollimator and the first position; or, continuously receiving the setpoints for the azimuth and pitch angle closed loops of the fast-reflecting mirror input by the user through the interactive panel, until the preset position conditions are met based on the adjustment position currently read by the autocollimator and the first position.

[0013] Furthermore, based on the first position and the second position, it is determined whether the preset threshold condition is met. If so, the target given value is taken as the zero value. This includes: determining whether the azimuth readings |X2-X1| of the first position and the second position and the pitch readings |Y2-Y1| of the first position and the second position are less than the set threshold θ. If so, the target given value is taken as the zero value. Wherein, θ is within 20 arcseconds.

[0014] To achieve the above objectives, according to another aspect of this application, a zero-position calibration system for a fast-reflecting mirror is provided.

[0015] The zero-position calibration system for a fast-reflecting mirror according to this application includes: a platform, an autocollimator, a fast-reflecting mirror, and a processing component disposed on the platform, wherein the autocollimator is aligned with the fast-reflecting mirror, and the processing component is electrically connected to the fast-reflecting mirror; the processing component is used to, after performing initialization operations on the fast-reflecting mirror and the autocollimator, read the autocollimator reading as a first position after the fast-reflecting mirror rotates 180 degrees and performs initialization operations on the fast-reflecting mirror; continuously adjust the setpoint values ​​of the azimuth and pitch angle closed loop of the fast-reflecting mirror until a preset position condition is determined based on the current adjustment position read by the autocollimator and the first position, and record the setpoint value of the azimuth and pitch angle closed loop of the fast-reflecting mirror that meets the preset position condition as a target setpoint value; read the fast-reflecting mirror rotates another 180 degrees in the same direction and performs initialization operations on the fast-reflecting mirror, and then assign the target setpoint value to the fast-reflecting mirror, with the autocollimator reading being a second position; determine whether a preset threshold condition is met based on the first position and the second position, and if so, use the target setpoint value as the zero-position value.

[0016] Furthermore, after determining whether the preset threshold condition is met based on the first position and the second position, the process further includes: if not, then repeatedly executing steps S02-S05 until the preset threshold condition is met based on the first position and the second position.

[0017] Furthermore, the preset position condition is that the adjustment position currently read by the autocollimator is (X1 / 2±γ, Y1 / 2±γ), where (X1, Y1) is the first position and γ is within 1 arcsecond.

[0018] Furthermore, based on the first position and the second position, it is determined whether the preset threshold condition is met. If so, the target given value is taken as the zero value. This includes: determining whether the azimuth readings |X2-X1| of the first position and the second position and the pitch readings |Y2-Y1| of the first position and the second position are less than the set threshold θ. If so, the target given value is taken as the zero value. Wherein, θ is within 20 arcseconds.

[0019] In this embodiment, a zero-point calibration system for a fast-reflecting mirror is used to calibrate the fast-reflecting mirror. After initializing the fast-reflecting mirror and autocollimator, the autocollimator reading is taken as the first position after the fast-reflecting mirror rotates 180 degrees and undergoes its initialization. The given values ​​of the fast-reflecting mirror's azimuth and pitch closed-loop are continuously adjusted until a preset position condition is met based on the current adjustment position read by the autocollimator and the first position. The given values ​​of the fast-reflecting mirror's azimuth and pitch closed-loop that meet the preset position condition are recorded as the target given value. The fast-reflecting mirror is then rotated another 180 degrees in the same direction and its initialization is performed. After assigning the target given value to the fast-reflecting mirror, the autocollimator reading is taken as the second position. A preset threshold condition is determined based on the first and second positions. If met, the target given value is used as the zero-point value. This method avoids measurement errors and human error, thereby improving the zero-point accuracy of the calibration and solving the problem of relatively low zero-point accuracy caused by measurement and human error. Attached Figure Description

[0020] The accompanying drawings, which form part of this application, are used to provide a further understanding of the application and to make other features, objects, and advantages of the application more apparent. The illustrative embodiments and descriptions of this application are used to explain the application and do not constitute an undue limitation of the application. In the drawings: Figure 1 This is a flowchart of a zero-position calibration method for a fast-reflecting mirror according to an embodiment of this application; Figure 2 This is one of the state diagrams of the zero-position calibration system of the fast-reflecting mirror according to an embodiment of this application; Figure 3 This is a second schematic diagram of the state of the zero-position calibration system of the fast-reflecting mirror according to an embodiment of this application; Figure 4 This is a flowchart of a zero-position calibration method for a fast-reflecting mirror according to a preferred embodiment of this application.

[0021] Figure Labels 1. Test table; 2. Autocollimator; 3. Test fixture; 4. Fast reflector; 5. Regulated power supply; 6. Test computer; 7. Simulator; 8. Processing components. Detailed Implementation

[0022] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0023] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this application described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0024] In this application, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing the invention and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0025] Furthermore, in addition to indicating direction or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in certain situations to indicate a dependency or connection. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0026] Furthermore, the terms "installation," "setup," "equipped with," "connection," "linking," and "socketing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0027] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0028] According to an embodiment of the present invention, a method for zero-position calibration of a fast-reflection mirror 4 is provided, such as... Figure 1-4 As shown, zero-point calibration is performed using the zero-point calibration system of the fast-reflecting mirror 4. The system includes: a platform 1, an autocollimator 2, the fast-reflecting mirror 4, and a processing component 8 mounted on the platform 1. The autocollimator 2 is aligned with the fast-reflecting mirror 4, and the processing component 8 is electrically connected to the fast-reflecting mirror 4. According to... Figure 2 The structure shown is assembled to form a zero-point calibration system for the fast-reflecting mirror 4. Specifically, a platform 1 is set up, which is a vibration isolation platform. On this platform 1, an autocollimator 2, a test fixture 3, the fast-reflecting mirror 4, and a processing component 8 (including a regulated power supply 5, a test computer 6, and a simulator 7) are set up. The autocollimator 2 is located at the leftmost end of the platform 1. The fast-reflecting mirror 4 is set on the test fixture 3 and located to the right of the autocollimator 2. The regulated power supply 5 is located to the right of the test fixture 3, the simulator 7 is located to the right of the regulated power supply 5, and the test computer 6 is located to the right of the simulator 7. After assembly, zero-point calibration can be performed.

[0029] It is important to understand that the test fixture 3 is equipped with a clamping mechanism for fixing the fast-reflecting mirror 4, which can effectively fix the fast-reflecting mirror 4.

[0030] The method includes: Step S01: Perform the initialization operation of the fast-reflection mirror 4 and the autocollimator 2; Specifically, the operation performs the initialization of the fast-reflecting mirror 4 and the autocollimator 2, including: after the fast-reflecting mirror 4 starts and performs a self-check, its azimuth and elevation are in a closed-loop zero-locked state; the autocollimator 2 is adjusted so that its reading is zeroed.

[0031] Step S02: After the fast-reflecting mirror 4 is rotated 180 degrees and the initialization operation of the fast-reflecting mirror 4 is performed, the reading of the autocollimator 2 is the first position; After the fast-reflecting mirror 4 is rotated 180 degrees, started and self-checked, and its azimuth and pitch are in a closed-loop zero-locked state, the autocollimator 2 is controlled to align with the fast-reflecting mirror 4. The autocollimator 2 measures a data point, which is the first position; this data is then read for subsequent use.

[0032] In this embodiment, the rotation can be done manually by rotating the device by 180 degrees, or a rotating mechanism can be set on the lower side of the clamping mechanism. The processing component 8 sends a control signal to control the motor to rotate, which in turn drives the quick-reflecting mirror 4 on the rotating mechanism to rotate by 180 degrees.

[0033] Furthermore, the reading of the autocollimator 2 as the first position can be read manually, recorded, and then input into the processing component 8 for calculation; or it can be obtained by directly connecting the processing component 8 to the autocollimator 2 and reading the position information from it.

[0034] It is important to understand that the first position is the azimuth and pitch angle values ​​of the fast-reflecting mirror 4, which are represented by (X1, Y1).

[0035] Step S03: Continuously adjust the setpoint values ​​of the azimuth and pitch angle closed loop of the fast-reflecting mirror until the preset position conditions are met based on the adjustment position currently read by the autocollimator 2 and the first position. Record the setpoint value of the azimuth and pitch angle closed loop of the fast-reflecting mirror that meets the preset position conditions as the target setpoint value. By continuously adjusting the setpoints of the four-axis and pitch closed-loop of the fast-reflecting mirror, and by pre-setting a position condition, the setpoints of the four-axis and pitch closed-loop of the fast-reflecting mirror are recorded only when the position condition is met, and the action of adjusting the setpoints stops; if the condition is not met, a new setpoint is given and the condition is checked again; this process is repeated until the condition is met and then the action of adjusting the setpoints stops.

[0036] It is important to understand that the preset position condition is that the adjustment position currently read by the autocollimator 2 is (X1 / 2±γ, Y1 / 2±γ), where (X1, Y1) is the first position and γ is within 1 arcsecond. When the adjustment position currently read by the autocollimator 2 is (X1 / 2±γ, Y1 / 2±γ), it is determined that the preset position condition is met. Furthermore, after testing, it is found that when γ is within 1 arcsecond, the zero-position accuracy is high. Alternatively, the value of γ can be determined based on the actual test conditions.

[0037] Specifically, the setpoints for the azimuth and pitch angle closed loops of the fast-reflecting mirror are continuously adjusted until the preset position conditions are met based on the adjustment position currently read by the autocollimator 2 and the first position, including: Using a preset attenuation and increment algorithm, the setpoints for the next round of the fast-reflecting mirror's 4-azimuth and pitch angle closed loop are continuously determined based on the setpoints of the previous round, until the preset position conditions are met according to the adjustment position currently read by the autocollimator 2 and the first position. The processing component 8 can have a built-in program to automatically determine the setpoints for the fast-reflecting mirror's 4-azimuth and pitch angle closed loop for each round. This program also automatically determines whether the preset position conditions are met. Only when the conditions are met is the corresponding setpoint set as the target setpoint; otherwise, the above program is executed repeatedly until the conditions are met.

[0038] Alternatively, it can continuously receive the setpoints for the azimuth and pitch angle closed loop of the fast-reflecting mirror input by the user through the interactive panel until the preset position conditions are met based on the adjustment position currently read by the autocollimator 2 and the first position. Alternatively, the user can input the setpoints for the azimuth and pitch angle closed loop of the fast-reflecting mirror through the interactive panel of the processing component 8, manually determining the setpoints for each round of the fast-reflecting mirror azimuth and pitch angle closed loop. The processing component 8 then uses a built-in judgment program to automatically determine whether the preset position conditions are met. Only when the conditions are met is the corresponding setpoint set as the target setpoint; otherwise, the above steps are repeated until the conditions are met.

[0039] Step S04: Read the fast-reflecting mirror 4 and rotate it 180 degrees in the same direction and perform the initialization operation of the fast-reflecting mirror 4. Then, after assigning the target setpoint to the fast-reflecting mirror 4, the reading of the autocollimator 2 is the second position. like Figure 3 As shown, after the fast-reflecting mirror 4 is rotated 180 degrees in the same direction, and after starting and self-checking, the azimuth and pitch are in the closed-loop zero-lock state, the autocollimator 2 is controlled to align with the fast-reflecting mirror 4. The autocollimator 2 measures a data, which is the second position; read this data for subsequent use.

[0040] In this embodiment, the rotation can be done manually by rotating the device by 180 degrees, or a rotating mechanism can be set on the lower side of the clamping mechanism. The processing component 8 sends a control signal to control the motor to rotate, which in turn drives the quick-reflecting mirror 4 on the rotating mechanism to rotate by 180 degrees.

[0041] Furthermore, the reading of the autocollimator 2 as the second position can be read manually, recorded, and then input into the processing component 8 for calculation; or it can be obtained by directly connecting the processing component 8 to the autocollimator 2 and reading the position information from it.

[0042] It is important to understand that the second position is the azimuth and pitch angle values ​​of the fast-reflecting mirror 4, which are represented by (X2, Y2).

[0043] Step S05: Determine whether the preset threshold condition is met based on the first position and the second position. If so, take the target given value as the zero position value.

[0044] Specifically, the system determines whether a preset threshold condition is met based on the first and second positions. If so, the target given value is taken as the zero value. This includes determining whether the azimuth readings |X2-X1| and the pitch readings |Y2-Y1| of the first and second positions are less than a set threshold θ. If so, the target given value is taken as the zero value. Here, θ is within 20 arcseconds.

[0045] After the fast-reflection mirror 4 rotates back to its initial position and assigns a target value, the second position is read and judged by the threshold judgment program set on the processing component 8. Only when the value is judged to be less than the threshold θ is the target value taken as the zero position value; thus completing the zero position calibration.

[0046] After determining whether the preset threshold condition is met based on the first and second positions, the process further includes: if not, then repeatedly executing steps S02-S05 until the preset threshold condition is met based on the first and second positions. If it is determined that the value is not less than the threshold θ, then repeatedly executing steps S02-S05 through the loop program set on the processing component 8 until the preset threshold condition is met based on the first and second positions, thus completing the zero-position calibration.

[0047] As can be seen from the above description, the present invention achieves the following technical effects: In this embodiment, the fast-reflecting mirror 4 is zero-point calibrated using its own calibration system. After initializing the fast-reflecting mirror 4 and autocollimator 2, the autocollimator 2 reads the first position after the fast-reflecting mirror 4 has rotated 180 degrees and the initialization operation is performed again. The setpoints for the azimuth and pitch angle closed loops of the fast-reflecting mirror 4 are continuously adjusted until a preset position condition is met based on the current adjustment position read by the autocollimator 2 and the first position. The target is recorded as the setpoints for the azimuth and pitch angle closed loops of the fast-reflecting mirror 4 that meet the preset position condition. Given a value; read the value; rotate the fast reflector 4 180 degrees in the same direction and perform the initialization operation of the fast reflector 4, then assign the target given value to the fast reflector 4, and the reading of the autocollimator 2 is the second position; determine whether the preset threshold condition is met based on the first position and the second position, and if so, take the target given value as the zero position value; this achieves the purpose of avoiding measurement error and human measurement error, thereby realizing the technical effect of slightly improving the zero position accuracy of the calibration in the future, and thus solving the technical problem of relatively low zero position accuracy of the calibration caused by measurement error and human measurement error.

[0048] It should be noted that the steps shown in the flowchart in the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions, and although a logical order is shown in the flowchart, in some cases the steps shown or described may be executed in a different order than that shown here.

[0049] According to an embodiment of the present invention, a zero-position calibration system for a fast-reflection mirror 4 is also provided, such as... Figure 1-4 As shown, the system includes: a platform 1, an autocollimator 2, a fast-reflecting mirror 4, and a processing component 8 disposed on the platform 1. The autocollimator 2 is aligned with the fast-reflecting mirror 4, and the processing component 8 is electrically connected to the fast-reflecting mirror 4; according to... Figure 2The structure shown is assembled to form a zero-point calibration system for the fast-reflecting mirror 4. Specifically, a platform 1 is set up, which is a vibration isolation platform. On this platform 1, an autocollimator 2, a test fixture 3, the fast-reflecting mirror 4, and a processing component 8 (including a regulated power supply 5, a test computer 6, and a simulator 7) are set up. The autocollimator 2 is located at the leftmost end of the platform 1. The fast-reflecting mirror 4 is set on the test fixture 3 and located to the right of the autocollimator 2. The regulated power supply 5 is located to the right of the test fixture 3, the simulator 7 is located to the right of the regulated power supply 5, and the test computer 6 is located to the right of the simulator 7. After assembly, zero-point calibration can be performed.

[0050] The processing component 8 is used to read the first position of the autocollimator 2 after the fast-reflecting mirror 4 has rotated 180 degrees and the fast-reflecting mirror 4 has been initialized. Specifically, the operation performs the initialization of the fast-reflecting mirror 4 and the autocollimator 2, including: after the fast-reflecting mirror 4 starts and performs a self-check, its azimuth and elevation are in a closed-loop zero-locked state; the autocollimator 2 is adjusted so that its reading is zeroed.

[0051] After the fast-reflecting mirror 4 is rotated 180 degrees, started and self-checked, and its azimuth and pitch are in a closed-loop zero-locked state, the autocollimator 2 is controlled to align with the fast-reflecting mirror 4. The autocollimator 2 measures a data point, which is the first position; this data is then read for subsequent use.

[0052] In this embodiment, the rotation can be done manually by rotating the device by 180 degrees, or a rotating mechanism can be set on the lower side of the clamping mechanism. The processing component 8 sends a control signal to control the motor to rotate, which in turn drives the quick-reflecting mirror 4 on the rotating mechanism to rotate by 180 degrees.

[0053] Furthermore, the reading of the autocollimator 2 as the first position can be read manually, recorded, and then input into the processing component 8 for calculation; or it can be obtained by directly connecting the processing component 8 to the autocollimator 2 and reading the position information from it.

[0054] It is important to understand that the first position is the azimuth and pitch angle values ​​of the fast-reflecting mirror 4, which are represented by (X1, Y1).

[0055] Continuously adjust the setpoints of the azimuth and pitch angle closed loop of the fast-reflecting mirror until the preset position conditions are met based on the adjustment position currently read by the autocollimator 2 and the first position. Record the setpoints of the azimuth and pitch angle closed loop of the fast-reflecting mirror that meet the preset position conditions as the target setpoints. By continuously adjusting the setpoints of the four-axis and pitch closed-loop of the fast-reflecting mirror, and by pre-setting a position condition, the setpoints of the four-axis and pitch closed-loop of the fast-reflecting mirror are recorded only when the position condition is met, and the action of adjusting the setpoints stops; if the condition is not met, a new setpoint is given and the condition is checked again; this process is repeated until the condition is met and then the action of adjusting the setpoints stops.

[0056] It is important to understand that the preset position condition is that the adjustment position currently read by the autocollimator 2 is (X1 / 2±γ, Y1 / 2±γ), where (X1, Y1) is the first position and γ is within 1 arcsecond. When the adjustment position currently read by the autocollimator 2 is (X1 / 2±γ, Y1 / 2±γ), it is determined that the preset position condition is met. Furthermore, after testing, it is found that when γ is within 1 arcsecond, the zero-position accuracy is high. Alternatively, the value of γ can be determined based on the actual test conditions.

[0057] Specifically, the setpoints for the azimuth and pitch angle closed loops of the fast-reflecting mirror are continuously adjusted until the preset position conditions are met based on the adjustment position currently read by the autocollimator 2 and the first position, including: Using a preset attenuation and increment algorithm, the setpoints for the next round of the fast-reflecting mirror's 4-azimuth and pitch angle closed loop are continuously determined based on the setpoints of the previous round, until the preset position conditions are met according to the adjustment position currently read by the autocollimator 2 and the first position. The processing component 8 can have a built-in program to automatically determine the setpoints for the fast-reflecting mirror's 4-azimuth and pitch angle closed loop for each round. This program also automatically determines whether the preset position conditions are met. Only when the conditions are met is the corresponding setpoint set as the target setpoint; otherwise, the above program is executed repeatedly until the conditions are met.

[0058] Alternatively, it can continuously receive the setpoints for the azimuth and pitch angle closed loop of the fast-reflecting mirror input by the user through the interactive panel until the preset position conditions are met based on the adjustment position currently read by the autocollimator 2 and the first position. Alternatively, the user can input the setpoints for the azimuth and pitch angle closed loop of the fast-reflecting mirror through the interactive panel of the processing component 8, manually determining the setpoints for each round of the fast-reflecting mirror azimuth and pitch angle closed loop. The processing component 8 then uses a built-in judgment program to automatically determine whether the preset position conditions are met. Only when the conditions are met is the corresponding setpoint set as the target setpoint; otherwise, the above steps are repeated until the conditions are met.

[0059] Read the reading of the fast-reflecting mirror 4, rotate it 180 degrees in the same direction and perform the initialization operation of the fast-reflecting mirror 4. Then, after assigning the target setpoint to the fast-reflecting mirror 4, the reading of the autocollimator 2 is the second position. like Figure 3As shown, after the fast-reflecting mirror 4 is rotated 180 degrees in the same direction, and after starting and self-checking, the azimuth and pitch are in the closed-loop zero-lock state, the autocollimator 2 is controlled to align with the fast-reflecting mirror 4. The autocollimator 2 measures a data, which is the second position; read this data for subsequent use.

[0060] In this embodiment, the rotation can be done manually by rotating the device by 180 degrees, or a rotating mechanism can be set on the lower side of the clamping mechanism. The processing component 8 sends a control signal to control the motor to rotate, which in turn drives the quick-reflecting mirror 4 on the rotating mechanism to rotate by 180 degrees.

[0061] Furthermore, the reading of the autocollimator 2 as the second position can be read manually, recorded, and then input into the processing component 8 for calculation; or it can be obtained by directly connecting the processing component 8 to the autocollimator 2 and reading the position information from it.

[0062] It is important to understand that the second position is the azimuth and pitch angle values ​​of the fast-reflecting mirror 4, which are represented by (X2, Y2).

[0063] Determine whether the preset threshold condition is met based on the first and second positions. If so, the target given value is taken as the zero value.

[0064] Specifically, the system determines whether a preset threshold condition is met based on the first and second positions. If so, the target given value is taken as the zero value. This includes determining whether the azimuth readings |X2-X1| and the pitch readings |Y2-Y1| of the first and second positions are less than a set threshold θ. If so, the target given value is taken as the zero value. Here, θ is within 20 arcseconds.

[0065] After the fast-reflection mirror 4 rotates back to its initial position and assigns a target value, the second position is read and judged by the threshold judgment program set on the processing component 8. Only when the value is judged to be less than the threshold θ is the target value taken as the zero position value; thus completing the zero position calibration.

[0066] After determining whether the preset threshold condition is met based on the first and second positions, the process further includes: if not, then repeatedly executing steps S02-S05 until the preset threshold condition is met based on the first and second positions. If it is determined that the value is not less than the threshold θ, then repeatedly executing steps S02-S05 through the loop program set on the processing component 8 until the preset threshold condition is met based on the first and second positions, thus completing the zero-position calibration.

[0067] As can be seen from the above description, the present invention achieves the following technical effects: In this embodiment, the fast-reflecting mirror 4 is zero-point calibrated using its own calibration system. After initializing the fast-reflecting mirror 4 and autocollimator 2, the autocollimator 2 reads the first position after the fast-reflecting mirror 4 has rotated 180 degrees and the initialization operation is performed again. The setpoints for the azimuth and pitch angle closed loops of the fast-reflecting mirror 4 are continuously adjusted until a preset position condition is met based on the current adjustment position read by the autocollimator 2 and the first position. The target is recorded as the setpoints for the azimuth and pitch angle closed loops of the fast-reflecting mirror 4 that meet the preset position condition. Given a value; read the value; rotate the fast reflector 4 180 degrees in the same direction and perform the initialization operation of the fast reflector 4, then assign the target given value to the fast reflector 4, and the reading of the autocollimator 2 is the second position; determine whether the preset threshold condition is met based on the first position and the second position, and if so, take the target given value as the zero position value; this achieves the purpose of avoiding measurement error and human measurement error, thereby realizing the technical effect of slightly improving the zero position accuracy of the calibration in the future, and thus solving the technical problem of relatively low zero position accuracy of the calibration caused by measurement error and human measurement error.

[0068] Obviously, those skilled in the art will understand that the modules or steps of the present invention described above can be implemented using general-purpose computing devices. They can be centralized on a single computing device or distributed across a network of multiple computing devices. Optionally, they can be implemented using computer-executable program code, thereby storing them in a storage device for execution by a computing device, or fabricating them separately as individual integrated circuit modules, or fabricating multiple modules or steps as a single integrated circuit module. Thus, the present invention is not limited to any particular hardware and software combination.

[0069] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A method for zero-position calibration of a fast-reflection mirror, using a zero-position calibration system of a fast-reflection mirror for zero-position calibration, characterized in that: The system comprises: a table, an autocollimator, a quick-reflection mirror and a processing component arranged on the table, the autocollimator is aligned with the quick-reflection mirror, and the processing component is electrically connected to the quick-reflection mirror; The method comprises: Step S01, performing initialization operation of the fast reflection mirror and the autocollimator; Step S02, reading the first position of the autocollimator after the fast mirror rotates 180 degrees and performs the initialization operation of the fast mirror; Step S03, continuously adjusting the given values ​​of the closed loop of the azimuth and pitch angle of the fast reflex mirror until it is determined that a preset position condition is met according to the adjustment position currently read by the autocollimator and the first position, and recording the given values ​​of the closed loop of the azimuth and pitch angle of the fast reflex mirror that meet the preset position condition as target given values; Step S04, read the quick-reflection mirror and rotate it 180 degrees in the same direction and perform the quick-reflection mirror initialization operation, then assign the target given value to the quick-reflection mirror, and the reading of the autocollimator is the second position; Step S05: judging whether a preset threshold condition is satisfied according to the first position and the second position; if so, taking the target given value as the zero position value.

2. The method according to claim 1, characterized in that Perform initialization operations for the fast mirror and autocollimator, including: After the fast-reflection mirror is started and self-checked, the azimuth and pitch are in a closed-loop zero lock state; adjust the autocollimator so that the reading of the autocollimator is reset to zero.

3. The method according to claim 1, characterized in that After determining whether a preset threshold condition is met according to the first position and the second position, the method further includes: If not, step S02 to step S05 are executed in a loop until it is determined that the preset threshold condition is met according to the first position and the second position.

4. The method according to claim 1, characterized in that: The preset position condition is that the adjustment position currently read by the autocollimator is (X1 / 2±γ, Y1 / 2±γ), where (X1, Y1) is the first position and γ is within 1 arc second.

5. The method according to claim 1, characterized in that Continuously adjusting the given values ​​of the closed loop of the azimuth and elevation angle of the fast-reflecting mirror until the preset position condition is determined to be met according to the adjustment position currently read by the autocollimator and the first position, including: Using a preset attenuation and increment algorithm, the given values ​​of the quick-reflection mirror azimuth and the pitch angle closed loop of the next round are continuously determined based on the given values ​​of the quick-reflection mirror azimuth and the pitch angle closed loop of the previous round, until it is determined that the preset position condition is met according to the adjustment position currently read by the autocollimator and the first position; Or, the given values ​​of the fast mirror azimuth and pitch angle closed loop input by the user through the interactive panel are continuously received until it is determined that the preset position condition is met according to the adjustment position currently read by the autocollimator and the first position.

6. The method according to claim 1, characterized in that The method comprises: determining whether a preset threshold condition is met according to the first position and the second position, and if so, taking the target given value as the zero position value, including: Determine whether the azimuth reading |X2-X1| of the first position and the second position and the pitch reading |Y2-Y1| of the first position and the second position are less than a set threshold value θ. If so, take the target given value as the zero position value; wherein θ is within 20 arc seconds.

7. A zero position calibration system for a fast-reflection mirror, characterized in that: It comprises: a table, an autocollimator, a quick-reflection mirror and a processing component arranged on the table, the autocollimator is aligned with the quick-reflection mirror, and the processing component is electrically connected with the quick-reflection mirror; The processing component is used to read the reading of the autocollimator as the first position after the fast mirror is rotated 180 degrees and the initialization operation of the fast mirror is performed after the initialization operation of the fast mirror is performed; Continuously adjusting the given values ​​of the closed loop of the azimuth and elevation angle of the fast reflex mirror until it is determined that a preset position condition is met according to the adjustment position currently read by the autocollimator and the first position, and recording the given values ​​of the closed loop of the azimuth and elevation angle of the fast reflex mirror that meet the preset position condition as target given values; Read the fast-reflection mirror and rotate it 180 degrees in the same direction and perform the initialization operation of the fast-reflection mirror. Then, after assigning the target given value to the fast-reflection mirror, the reading of the autocollimator is the second position; It is determined whether a preset threshold condition is met according to the first position and the second position. If so, the target given value is used as the zero position value.

8. The zero position calibration system of the fast reflection mirror according to claim 7, characterized in that: After determining whether a preset threshold condition is met according to the first position and the second position, the method further includes: If not, step S02 to step S05 are executed in a loop until it is determined that the preset threshold condition is met according to the first position and the second position.

9. The zero position calibration system of the fast reflection mirror according to claim 7, characterized in that: The preset position condition is that the adjustment position currently read by the autocollimator is (X1 / 2±γ, Y1 / 2±γ), where (X1, Y1) is the first position and γ is within 1 arc second.

10. The zero position calibration system of the fast reflection mirror according to claim 7, characterized in that: The method comprises: determining whether a preset threshold condition is met according to the first position and the second position, and if so, taking the target given value as the zero position value, including: Determine whether the azimuth reading |X2-X1| of the first position and the second position and the pitch reading |Y2-Y1| of the first position and the second position are less than a set threshold value θ. If so, take the target given value as the zero position value; wherein θ is within 20 arc seconds.

Images