A method of blasting for protecting disc body products

Abstract

The application relates to the technical field of semiconductor processing, and particularly discloses a sand blasting method for protecting a disc product, which comprises the following steps: processing a to-be-sand-blasted surface of a to-be-sand-blasted piece to a required size in a drawing, then processing a non-sand-blasted surface opposite to the to-be-sand-blasted surface and reserving a certain processing allowance, then sand blasting the to-be-sand-blasted surface according to roughness requirements of the drawing, reprocessing the to-be-sand-blasted piece after the sand blasting, ensuring that the flatness of the to-be-sand-blasted piece meets the drawing requirements, protecting the reprocessed to-be-sand-blasted surface, processing the non-sand-blasted surface to the required size in the drawing, finally sand blasting two to-be-sand-blasted side surfaces of the to-be-sand-blasted piece, and repairing the sand-blasted to-be-sand-blasted surface. The application can adapt to the situation that the to-be-sand-blasted surface is deformed after sand blasting, can ensure that the flatness of the to-be-sand-blasted piece meets the drawing requirements, can effectively ensure the shape and position tolerances of the finished state of the protective disc product, and can meet the use requirements of users.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing technology, and in particular to a sandblasting method for protecting disk products. Background Technology

[0002] Currently, in the semiconductor equipment industry, various process components require high dimensional accuracy, and the requirements for processing technology are gradually increasing, making it difficult to guarantee dimensional accuracy through machining. Existing technologies for protective disk-type products typically involve sandblasting after machining to the finished product size. Because the sand particles continuously impact the product surface under certain pressure, this method leads to significant product deformation. However, since the product has already reached the finished size, remapping is not possible. Reshaping, on the other hand, damages the sandblasted surface. This cycle repeats itself, making effective sandblasting impossible and resulting in unstable product quality. Summary of the Invention

[0003] The purpose of this invention is to provide a sandblasting method for protecting disc products, so as to solve the problem that the sandblasting method in the prior art causes large product deformation and unstable product quality.

[0004] On one hand, the present invention provides a sandblasting method for protecting a disc product. The sandblasting method for protecting a disc product includes: S1: machining the sandblasting surface of the part to be sandblasted to the dimensions required by the drawing, and retaining a certain machining allowance on the un-sandblasted surface of the part to be sandblasted opposite to the sandblasting surface; S2: sandblasting the sandblasting surface according to the roughness requirements of the drawing; S3: re-machining the sandblasting part to ensure that the flatness of the sandblasting part meets the drawing requirements; S4: protecting the re-machined sandblasting surface, and machining the un-sandblasted surface to the dimensions required by the drawing; S5: sandblasting the two sandblasting sides of the part to be sandblasted, and repairing the sandblasted surface.

[0005] As a preferred technical solution for sandblasting methods used to protect disc products, retaining a certain machining allowance on the un-sandblasted surface of the part to be sandblasted, opposite to the surface to be sandblasted, includes:

[0006] The machining allowance for the unblasted surface is 0.5mm-2mm, based on the thickness of the part to be sandblasted.

[0007] As a preferred technical solution for the sandblasting method used to protect the disc body product, S1 further includes:

[0008] The flatness of both the surface to be sandblasted and the surface not to be sandblasted is processed to 0.1mm-0.2mm.

[0009] As a preferred technical solution for the sandblasting method used to protect the disc body product, S2 includes:

[0010] Select the corresponding grit size according to the roughness requirements of the drawing, and the sandblasting pressure for the sandblasting treatment is 20psi-60psi.

[0011] As a preferred technical solution for sandblasting methods used to protect disc-shaped products, the appropriate grit number is selected based on the roughness requirements of the drawings, including:

[0012] When the drawing requires a roughness of 6 μm, the selected sand mesh number is 24.

[0013] When the drawing requires a roughness of 7µm, the selected sand mesh number is 26.

[0014] When the drawing requires a roughness of 8µm, the selected sand mesh is 28 mesh.

[0015] As a preferred technical solution for the sandblasting method used to protect the disc body product, S3 includes:

[0016] The flatness of both the surface to be sandblasted and the surface not to be sandblasted is processed to 0.1mm-0.2mm using a hydraulic press.

[0017] As a preferred technical solution for the sandblasting method used to protect the disc body product, S3 also includes:

[0018] The workpiece to be sandblasted is wrapped with a non-adhesive diaphragm after sandblasting.

[0019] As a preferred technical solution for the sandblasting method used to protect the disc-shaped product, protecting the sandblasted surface after the reprocessing includes:

[0020] Wrap the surface to be sandblasted with tape.

[0021] As a preferred technical solution for sandblasting methods used to protect disc products, repairing the sandblasted surface includes:

[0022] The surface to be sandblasted after sandblasting is subjected to low-pressure sandblasting again.

[0023] As a preferred technical solution for sandblasting methods used to protect disc products, re-sandblasting the already sandblasted surface includes:

[0024] The sandblasting pressure for the low-pressure sandblasting treatment is 20psi-30psi.

[0025] The beneficial effects of this invention are as follows:

[0026] This invention provides a sandblasting method for protecting disc products. The sandblasting method for protecting disc products includes: firstly, machining the surface to be sandblasted of the part to be sandblasted to the dimensions required by the drawing; then machining the surface opposite to the surface to be sandblasted, while retaining a certain machining allowance; subsequently, according to the roughness requirements of the drawing, sandblasting is performed on the surface to be sandblasted; since the surface to be sandblasted will deform after sandblasting, the part to be sandblasted is re-machined to ensure that the flatness of the part to be sandblasted meets the requirements of the drawing; then, the re-machined surface to be sandblasted is protected, and the surface without sandblasting is machined to the dimensions required by the drawing; finally, the two sides to be sandblasted of the part to be sandblasted are sandblasted, and the sandblasted surface is repaired. The sandblasting method for protecting disc products provided by this invention can adapt to the deformation of the surface to be sandblasted after sandblasting, so that the flatness of the sandblasted part meets the requirements of the drawing, effectively ensuring the form and position tolerance of the finished product of the protective disc, meeting the user's needs, and solving the problem of large product deformation and unstable product quality caused by sandblasting methods in the prior art. Attached Figure Description

[0027] Figure 1 This is a flowchart of a sandblasting method for protecting a disc product in an embodiment of the present invention;

[0028] Figure 2 This is a schematic diagram of a sandblasting method for protecting a disc product in an embodiment of the present invention.

[0029] In the picture:

[0030] 1. Parts to be sandblasted;

[0031] 11. Surface to be sandblasted; 12. Surface not sandblasted; 13. Side surface to be sandblasted. Detailed Implementation

[0032] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0033] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Furthermore, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0034] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0035] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0036] like Figures 1 to 2 As shown, this embodiment provides a sandblasting method for protecting disc products, the sandblasting method for protecting disc products includes:

[0037] S1: The sandblasting surface 11 of the part to be sandblasted 1 is processed to the size required by the drawing, and a certain processing allowance is retained on the non-sandblasting surface 12 of the part to be sandblasted 1 that is opposite to the sandblasting surface 11.

[0038] S2: According to the roughness requirements of the drawing, the surface to be sandblasted 11 is sandblasted.

[0039] S3: The sandblasted part 1 is processed again after sandblasting to ensure that the flatness of the sandblasted part 1 meets the requirements of the drawing.

[0040] S4: Protect the sandblasted surface 11 after reprocessing, and process the un-sandblasted surface 12 to the dimensions required by the drawing;

[0041] S5: Sandblast the two sides 13 of the part to be sandblasted 1, and repair the sandblasted surface 11 that has been sandblasted.

[0042] First, the sandblasting surface 11 of the part to be sandblasted 1 is machined to the dimensions required by the drawing. Then, the non-sandblasted surface 12 opposite to the sandblasting surface 11 is machined, and a certain machining allowance needs to be retained. Subsequently, according to the roughness requirements of the drawing, the sandblasting surface 11 is sandblasted. Since the sandblasting surface 11 will deform after sandblasting, the sandblasting part 1 is machined again to ensure that the flatness of the sandblasting part 1 meets the requirements of the drawing. Then, the sandblasting surface 11 after re-machined is protected, and the non-sandblasted surface 12 is machined to the dimensions required by the drawing. Finally, the two sandblasting sides 13 of the part to be sandblasted are sandblasted, and the sandblasted surface 11 is repaired. The sandblasting method for protecting disc products provided by this invention can adapt to the deformation of the surface 11 to be sandblasted after sandblasting, so that the flatness of the part 1 to be sandblasted meets the requirements of the drawing, effectively ensuring the form and position tolerance of the finished product of the protective disc, meeting the user's needs, and solving the problem of large product deformation and unstable product quality caused by sandblasting methods in the prior art.

[0043] It should be noted that the part to be sandblasted 1 has four interconnected surfaces: the surface to be sandblasted 11 is opposite to the surface not sandblasted 12, and the two side surfaces to be sandblasted 13 are opposite to each other. The shape of the part to be sandblasted 1 can be processed according to the shape in the drawing.

[0044] Sandblasting: refers to the use of high-speed jetting of fine abrasives (such as micro powder or nano-sized abrasive) to treat the surface of semiconductor materials in order to achieve specific surface textures, cleanliness, or to provide an ideal adhesion surface for subsequent processes.

[0045] Specifically, in this solution, retaining a certain machining allowance on the un-blasted surface 12 of the part to be sandblasted 1, which is opposite to the sandblasted surface 11, includes: a machining allowance of 0.5mm-2mm on the thickness of the part to be sandblasted 1. This way, when the part to be sandblasted 1 deforms after sandblasting, the flatness of its sandblasted surface 11 and un-blasted surface 12 becomes 0.5-1mm. At this point, the part to be sandblasted 1 can be re-processed by retaining the machining allowance, avoiding the situation where the dimensions do not meet the drawing requirements after re-processing. The machining allowance retained on the un-blasted surface 12 can be set according to actual needs, and can be selected as 0.5mm, 1mm, 1.5mm, or 2mm, etc.

[0046] In this embodiment, S1 further includes: machining the flatness of both the surface to be sandblasted 11 and the surface without sandblasting 12 to 0.1mm-0.2mm. This ensures that the flatness of the surface to be sandblasted 11 and the surface without sandblasting 12 are within a suitable range before sandblasting, thereby improving the product quality of the protective disc. The flatness of the surface to be sandblasted 11 and the surface without sandblasting 12 can be selected according to the specific requirements of the drawings, and can be 0.1mm, 0.15mm, or 0.2mm, etc.

[0047] In this embodiment, S2 includes: selecting the corresponding grit size according to the roughness requirements of the drawing, and setting the sandblasting pressure to 20psi-60psi. This setting limits the sandblasting pressure within the aforementioned range, ensuring the roughness requirements of the drawing are met while preventing significant deformation of the surface 11 to be sandblasted. The sandblasting pressure can be adjusted according to the specific roughness requirements of the drawing, and can be 20psi, 30psi, 40psi, 50psi, or 60psi.

[0048] In some embodiments, the appropriate grit size is selected based on the roughness requirements of the drawing, including: 24 mesh when the drawing requires a roughness of 6 μm; 26 mesh when the drawing requires a roughness of 7 μm; and 28 mesh when the drawing requires a roughness of 8 μm. This satisfies the roughness requirements of the drawing.

[0049] In this solution, step S3 includes: using a hydraulic press to process the flatness of both the surface to be sandblasted 11 and the un-sandblasted surface 12 to 0.1mm-0.2mm. After the sandblasted part 1 is processed again, the flatness of both the surface to be sandblasted 11 and the un-sandblasted surface 12 is between 0.1mm and 0.2mm, thus meeting the dimensional and positional tolerances of the finished product and satisfying the user's requirements. The flatness values ​​of the surface to be sandblasted 11 and the un-sandblasted surface 12 can be adjusted according to actual needs; the flatness of the surface to be sandblasted 11 and the un-sandblasted surface 12 can be selected as 0.1mm, 0.15mm, or 0.2mm, etc.

[0050] Specifically, S3 also includes: wrapping the sandblasted part 1 with a non-adhesive diaphragm after sandblasting. This can prevent damage to the sandblasted part 1 when it is processed again; and the use of a non-adhesive diaphragm can prevent the sand particles on the sandblasted surface 11 from falling off, thereby affecting the roughness.

[0051] Optionally, the non-adhesive diaphragm may include, but is not limited to, polyethylene plastic bags.

[0052] In some embodiments, protecting the surface 11 to be sandblasted after reprocessing includes wrapping the surface 11 with tape. This arrangement prevents the surface 11 from being affected when it is reprocessed.

[0053] Optionally, the tape may include, but is not limited to, Teflon tape.

[0054] Specifically, repairing the surface 11 that has been sandblasted includes: performing a second low-pressure sandblasting treatment on the surface 11 that has been sandblasted.

[0055] The process of re-blasting the already blasted surface 11 includes: low-pressure blasting with a blasting pressure of 20psi-30psi. Maintaining the blasting pressure between 20psi and 30psi prevents deformation of the already blasted surface 11, ensuring that the part to be blasted conforms to the drawing requirements and meets the dimensional and positional tolerances of the finished product.

[0056] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A sandblasting method for protecting disc products, characterized in that, include: S1: The sandblasting surface (11) of the part to be sandblasted (1) is machined to the dimensions required by the drawing, and a certain machining allowance is retained on the non-sandblasting surface (12) of the part to be sandblasted (1) opposite to the sandblasting surface (11); the machining allowance retained on the non-sandblasting surface (12) is 0.5mm-2mm in thickness of the part to be sandblasted (1); the flatness of the sandblasting surface (11) and the flatness of the non-sandblasting surface (12) are both machined to 0.1mm-0.2mm; the machining allowance retained on the non-sandblasting surface (12) is sufficient to allow the flatness of the part to be sandblasted (1) to be corrected by re-processing after the sandblasting process; S2: According to the roughness requirements of the drawing, the surface to be sandblasted (11) is sandblasted; S3: The sandblasted part (1) is processed again after sandblasting to ensure that the flatness of the sandblasted part (1) meets the requirements of the drawing. S4: Protect the surface to be sandblasted (11) after reprocessing, and process the un-sandblasted surface (12) to the dimensions required by the drawing; S5: Sandblast the two sandblasted sides (13) of the part to be sandblasted (1) and repair the sandblasted surface (11) that has been sandblasted.

2. The sandblasting method for protecting disc products according to claim 1, characterized in that, S2 include: Select the corresponding grit size according to the roughness requirements of the drawing, and the sandblasting pressure for the sandblasting treatment is 20psi-60psi.

3. The sandblasting method for protecting disc products according to claim 2, characterized in that, Based on the surface roughness requirements of the drawing, select the corresponding sand mesh number, including: When the drawing requires a roughness of 6 μm, the selected sand mesh number is 24. When the drawing requires a roughness of 7µm, the selected sand mesh number is 26. When the drawing requires a roughness of 8µm, the selected sand mesh is 28 mesh.

4. The sandblasting method for protecting disc products according to claim 1, characterized in that, S3 include: The flatness of the surface to be sandblasted (11) and the flatness of the surface not sandblasted (12) are both processed to 0.1mm-0.2mm using a hydraulic press.

5. The sandblasting method for protecting disc products according to claim 4, characterized in that, S3 also includes: The sandblasted part (1) is wrapped with a non-adhesive diaphragm after sandblasting.

6. The sandblasting method for protecting disc products according to claim 1, characterized in that, Protecting the sandblasted surface (11) after further processing includes: Wrap the surface to be sandblasted with tape (11).

7. The sandblasting method for protecting disc products according to claim 1, characterized in that, Repairing the sandblasted surface (11) that has already been sandblasted includes: The surface to be sandblasted (11) that has been sandblasted is subjected to low-pressure sandblasting again.

8. The sandblasting method for protecting disc products according to claim 7, characterized in that, The process of re-blasting the surface (11) that has already been blasted includes: The sandblasting pressure for the low-pressure sandblasting treatment is 20 psi - 30 psi.

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