Cryogenic pump

By adopting heat pipes and magnetically driven plug structures in the cryopump, the problems of low heating efficiency and long regeneration time in the prior art are solved, efficient heat transfer and shortening regeneration time, and improving the reliability of the cryopump and productivity.

CN119393317AActive Publication Date: 2025-02-07BEST VACUUM (SHANGHAI) EQUIP CO LTD
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Patent Information

Application Number
CN202411759267.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-03
Publication Date
2025-02-07
Estimated Expiration
2044-12-03

AI Technical Summary

Technical Problem

The existing low-temperature pump electric heating method has poor thermal conductivity, which leads to low heating efficiency and long regeneration time. Due to the limitations of space and sealing interface, it is difficult to increase the heating capacity by increasing the number of heating rods.

Method used

The plug structure is adopted with a heat pipe and a magnetically driven plug. The heat pipe is filled with working fluid, and the ice crystals are moved by gravity, so that the working fluid in the heat pipe can still undergo phase change and conduct heat after solidification. The plug body is driven by magnetic force to prevent the ice crystal from moving to the heat absorption section, reducing the interference of external temperature to the inside of the cryopump.

Benefits of technology

It greatly improves the thermal conductivity of the heat pipe, shortens the regeneration time, improves the production efficiency, reduces electromagnetic interference, and improves the reliability of the cryopump.

✦ Generated by Eureka AI based on patent content.

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    Figure CN119393317A_ABST
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Abstract

The low-temperature pump comprises a low-temperature pump body, a heat pipe comprises a pipe body and a plug body, the plug body is located in the pipe body, a first permanent magnet is located on the outer side of the pipe body and drives the plug body to move through magnetic force, the pipe body comprises a heat absorption section, a heat release section and a hole shrinkage section, and the two ends of the hole shrinkage section are integrally formed with the heat absorption section and the heat release section correspondingly. The piston body is used for plugging the reducing section, the heat release section makes contact with the first-stage cold head and the second-stage cold head in the low-temperature pump body, and the heat absorption section is located on the outer side of an air cylinder shell of the low-temperature pump body and fixedly connected with a heat source. Ice crystals in the heat pipe move in the heat pipe through gravity, so that working fluid in the heat pipe can still conduct phase change heat conduction after being solidified, and the heat conduction efficiency of the heat pipe is greatly improved; the plug body in the pipe body is driven to move through magnetic force, the plug body separates the heat absorption section from the heat release section, ice crystals are prevented from moving to the heat absorption section, phase change heat conduction is stopped, and interference of the external temperature on the internal temperature of the cryogenic pump body is reduced.
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Citation Information

Patent Citations

  • An improved cryogenic pump

    CN117489563B

  • Low-temperature pump system with regenerating function

    CN106704145A

  • Low-temperature plate performance testing device for low-temperature pump

    CN115308291A

  • Compression device for fluid stored in form of cryogenic liquid and method for production thereof

    CN117098914A

  • Improved low-temperature pump

    CN117489563A