一种对准标记定位补偿方法
By combining the main and secondary cameras to calculate the film loading error and mapping distance, and dynamically compensating for the alignment mark coordinates, the problem of alignment mark position deviation in high-precision measurement systems is solved, ensuring the complete recognition of the alignment mark within the camera's field of view and improving positioning accuracy.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- PIOTECH (HAINING) SEMICON EQUIP CO LTD
- Filing Date
- 2024-10-29
- Publication Date
- 2026-07-17
AI Technical Summary
In high-precision measurement systems, existing technologies cannot quickly and accurately locate the position of alignment marks, resulting in marks being partially visible or completely invisible in the camera's field of view, making them unrecognizable. Furthermore, the technology does not take into account film loading errors and motion stage errors, leading to positional deviations in calculations.
A combination of a main camera and a secondary camera is used. The secondary camera is used to calculate the loading error and the mapping distance between adjacent alignment marks, dynamically compensate for the coordinates of the alignment marks, and calculate the positional deviation of any alignment mark through a formula to ensure that the complete alignment mark is identified within the field of view of the main camera.
This technology enables the identification of complete alignment marks within the camera's field of view during each measurement, improving positioning accuracy and reliability while reducing measurement errors.
Smart Images
Figure CN119413070B_ABST