一种屏蔽型SiC功率器件、功率转换电路和车辆
By setting an electric field shielding structure between polygonal cells, the problem of excessive electric field in the center leakage channel of the polygonal cell and the gate oxide layer is solved, thereby improving the reverse performance and long-term reliability of the MOSFET.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- ANHUI YOFC ADVANCED SEMICONDUCTOR CO LTD
- Filing Date
- 2024-06-28
- Publication Date
- 2026-07-17
AI Technical Summary
The center of the polygonal cell cannot be completely covered by the depletion region, resulting in excessive electric field in the leakage channel and gate oxide layer, which affects the long-term reliability of the MOSFET.
An electric field shielding structure, including horizontal and vertical parts, is set between the polygonal cell structures and connected to the source electrode through conductive pillars to form an inverted T-shaped structure, which fills the leakage area and reduces the potential of the electric field shielding structure.
This improves the reverse performance of polygonal cells, reduces the gate oxide electric field, and enhances the long-term reliability of MOSFET devices.
Smart Images

Figure CN119421455B_ABST