Chip cleaning inspection apparatus and method

Abstract

The application relates to the technical field of chip defect detection equipment, in particular to a chip cleaning and detection equipment and a detection method, which comprises a rack, a feeding mechanism, a front high-magnification detector, a first material taking mechanism, a cleaning mechanism, a transfer table, an HR end surface detector, an AR end surface detector, a front low-magnification detector, a second material taking mechanism, a back surface detector and a discharging mechanism; the front high-magnification detector, the first material taking mechanism, the front low-magnification detector and the second material taking mechanism are all erected on the rack; the feeding mechanism, the cleaning mechanism, the transfer table, the back surface detector and the discharging mechanism are sequentially arranged on the rack in the transverse direction; the front high-magnification detector is arranged above the feeding mechanism; the cleaning mechanism, the HR end surface detector, the AR end surface detector and the back surface detector are arranged around the transfer table, and the front low-magnification detector is arranged above the transfer table; the first material taking mechanism can move between the feeding mechanism and the transfer table; and the second material taking mechanism can move between the transfer table and the discharging mechanism.

Description

Technical Field

[0001] This invention relates to the field of chip defect detection equipment technology, specifically to a chip cleaning and detection equipment and method. Background Technology

[0002] The scope of chip appearance defect detection includes the front, back and two side cavity surfaces. Due to the characteristics of its manufacturing process, dirt may remain on the two side cavity surfaces of the chip, and dirt can affect the appearance defect detection of the chip, so it is necessary to clean the dirt.

[0003] Currently, chip appearance defect detection mainly relies on manual inspection under a microscope, while chip cleaning relies on manual wiping with cotton swabs. However, manual inspection has low accuracy, and manual cleaning is inefficient. Chip appearance defect detection can also be automated using chip inspection equipment. This equipment uses visual inspection to detect appearance defects, offering high accuracy and efficiency. However, most existing chip inspection and chip cleaning equipment are set up independently. Even when integrated, they are simply displayed together, resulting in a large footprint and limited application scenarios. Summary of the Invention

[0004] (a) Technical problems to be solved

[0005] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides a chip cleaning and testing equipment and method, which solves the technical problem of the large footprint of existing chip cleaning and testing equipment.

[0006] (II) Technical Solution

[0007] To achieve the above objectives, the chip cleaning and testing equipment of the present invention includes a frame, a loading mechanism, a front high-magnification detector, a first picking mechanism, a cleaning mechanism, a transfer table, an HR end face detector, an AR end face detector, a front low-magnification detector, a second picking mechanism, a back detector, and a unloading mechanism.

[0008] The front high-magnification detector, the first material handling mechanism, the front low-magnification detector, and the second material handling mechanism are all mounted on the frame and can slide laterally on the frame; the feeding mechanism, the cleaning mechanism, the transfer table, the back detector, and the unloading mechanism are arranged sequentially on the frame laterally.

[0009] The front high-magnification detector is positioned above the feeding mechanism; the cleaning mechanism, the HR end face detector, the AR end face detector, and the back detector are arranged around the transfer station, and the front low-magnification detector is positioned above the transfer station;

[0010] The transfer platform can slide laterally; the first material handling mechanism can move between the loading mechanism and the transfer platform; the second material handling mechanism can move between the transfer platform and the unloading mechanism.

[0011] Optionally, the feeding mechanism includes a pre-sweeping feeding module and an ejector pin mechanism;

[0012] The pre-scanning and feeding module is provided with a material tray that slides longitudinally; the center of the material tray has a through hole;

[0013] The ejector mechanism is located below the through hole; the ejector mechanism is provided with an ejector pin that can move vertically up and down and pass through the through hole.

[0014] Optionally, the pre-sweeping and feeding module includes a first longitudinal sliding module, and a motor, belt and pre-sweeper disposed on the first longitudinal sliding module;

[0015] The first longitudinal sliding module is mounted on the frame; the first longitudinal sliding module can synchronously drive the motor, the belt, the material tray and the pre-sweeper to move longitudinally;

[0016] The belt is wound around the material tray and the motor; the motor can drive the material tray to rotate in a horizontal plane;

[0017] The pre-scanner is equipped with a clamping plate that extends and retracts radially along the tray.

[0018] Optionally, the ejector mechanism further includes a vertical lifting module and a pusher;

[0019] The vertical lifting module is mounted on the frame;

[0020] The propeller's shaft is connected to a turntable, and the top surface of the turntable is an arc-shaped surface; the bottom end of the ejector pin is rotatably connected to a rotating rod, which can roll on the arc-shaped surface.

[0021] Optionally, both the first and second material handling mechanisms include a lateral sliding module, a lifting sliding module, a compensation adjuster, and a suction nozzle;

[0022] The lateral sliding module is slidably connected to the frame in the lateral direction;

[0023] The lifting and sliding module is slidably mounted on the horizontal sliding module along the vertical direction;

[0024] The compensation adjuster is mounted on the lifting and sliding module; the suction nozzle is connected to the compensation adjuster, and the compensation adjuster can drive the suction nozzle to rotate vertically.

[0025] Optionally, the front high-magnification detector is disposed on the first material handling mechanism.

[0026] Optionally, the cleaning mechanism is a snow cleaning machine.

[0027] Optionally, the transfer station includes a second longitudinal sliding module, a motor, a connecting plate, and a rotary suction head;

[0028] The second longitudinal sliding module is mounted on the frame;

[0029] The motor is mounted on the second longitudinal sliding module; the second longitudinal sliding module is connected to the first end of the connecting plate and can drive the connecting plate to move along the lateral direction;

[0030] The rotary suction head is mounted on the second end of the connecting plate;

[0031] The rotary suction head is connected to the shaft of the motor.

[0032] Furthermore, the present invention also provides a detection method for a chip cleaning and testing equipment, wherein the detection method is implemented based on the chip cleaning and testing equipment described above, and the detection method includes:

[0033] The feeding mechanism feeds the workpiece; the high-magnification front detector performs high-magnification front detection on the workpiece; the first unloading mechanism unloads the workpiece from the feeding mechanism and unloads it onto the transfer platform.

[0034] The transfer platform moves laterally to the turntable inspection station, and the HR end face detector, the AR end face detector and the front low magnification detector respectively perform HR end face inspection, AR end face inspection and low magnification front inspection on the workpiece;

[0035] If both the HR end face inspection and AR end face inspection of the workpiece are OK, the transfer platform moves laterally to the turntable unloading station; otherwise, the workpiece is cleaned by the cleaning mechanism. After cleaning, the HR end face detector, the AR end face detector and the front low-magnification detector re-inspect the workpiece. After the re-inspection is OK, the transfer platform moves to the turntable unloading station.

[0036] The second material handling mechanism picks up the material from the transfer platform and moves the workpiece above the back-side detector; the back-side detector performs back-side detection on the workpiece.

[0037] The second material handling mechanism unloads the workpiece into the unloading mechanism;

[0038] The unloading mechanism discharges the material.

[0039] Optionally, the cleaning mechanism cleans the workpiece at the turntable inspection station.

[0040] (III) Beneficial Effects

[0041] The beneficial effects of this invention are:

[0042] The front high-magnification detector and the front low-magnification detector perform high-magnification and low-magnification detection of the workpiece respectively, enabling high-precision detection of the workpiece from both high-magnification and low-magnification perspectives, thereby improving the accuracy and quality of the equipment's workpiece detection.

[0043] The front high-magnification detector, the first material handling mechanism, the front low-magnification detector, and the second material handling mechanism are all mounted on the frame, i.e., suspended, allowing the mounting components to move above the components installed on the top surface of the frame, thereby reducing the space occupied by the equipment. The cleaning mechanism, HR end face detector, AR end face detector, and back face detector are arranged around the transfer station, with the front low-magnification detector positioned above the transfer station, improving the equipment's integration. The HR end face detector, AR end face detector, and front low-magnification detector can simultaneously detect visual defects in the workpiece, improving the detection efficiency of the chip cleaning and inspection equipment.

[0044] The transfer table's ability to slide laterally enhances its flexibility and effectively prevents interference between the first or second material handling mechanism and the front-facing low-magnification detector. Furthermore, the first and second material handling mechanisms operate independently; after the second mechanism picks up material from the transfer table, the first mechanism can immediately unload it, improving production efficiency.

[0045] The cleaning mechanism is positioned close to the turntable, reducing the turnaround time of workpieces between the turntable cleaning station and the turntable inspection station. When the turntable cleaning station and the turntable inspection station are the same station, there is no turnaround time, significantly improving operational efficiency. This also allows the HR end face detector, AR end face detector, and front low-magnification detector to directly re-inspect the workpieces after cleaning, further reducing workpiece inspection time and improving production efficiency.

[0046] The chip cleaning and testing equipment integrates the cleaning mechanism to the side of the transfer station, using the transfer station as the cleaning platform for the cleaning mechanism. This allows the cleaning mechanism to directly clean the dirty workpieces on the transfer station. The high degree of integration between the cleaning mechanism and the transfer station reduces the number of equipment components, thereby reducing the equipment's footprint and expanding its application scenarios. Attached Figure Description

[0047] Figure 1 This is a schematic diagram of the chip cleaning and testing equipment of the present invention;

[0048] Figure 2This is a top view of the chip cleaning and testing equipment of the present invention;

[0049] Figure 3 This is a schematic diagram of the pre-scanning and feeding module of the present invention;

[0050] Figure 4 This is a schematic diagram of the ejector pin mechanism of the present invention;

[0051] Figure 5 This is a schematic diagram of the structure of the first material handling mechanism of the present invention;

[0052] Figure 6 This is a schematic diagram of the structure of the transfer station of the present invention;

[0053] Figure 7 This is a schematic diagram of the AR end-face detector of the present invention;

[0054] Figure 8 This is a schematic diagram of the structure of the HR end face detector of the present invention;

[0055] Figure 9 This is a schematic diagram of the front-facing low-magnification detector of the present invention;

[0056] Figure 10 This is a schematic diagram of the structure of the second material handling mechanism of the present invention;

[0057] Figure 11 This is a schematic diagram of the structure of the back-side detector of the present invention;

[0058] Figure 12 This is a schematic diagram of the feeding mechanism of the present invention;

[0059] Figure 13 This is a schematic diagram of the cleaning mechanism of the present invention.

[0060] [Explanation of Labels in the Attached Image]

[0061] 1: Rack;

[0062] 2: Feeding mechanism; 21: Pre-sweeping feeding module; 211: Material tray; 212: First longitudinal sliding module; 213: Motor; 214: Belt; 215: Pre-sweeper; 2151: Chess plate; 22: Ejector mechanism; 221: Ejector; 222: Vertical lifting module; 223: Pusher; 224: Turntable;

[0063] 3: Front-facing high-magnification detector;

[0064] 4: First material handling mechanism; 41: Lateral sliding module; 42: Lifting and sliding module; 43: Compensation adjuster; 44: Suction nozzle;

[0065] 5: Cleaning mechanism;

[0066] 6: Transfer platform; 61: Second longitudinal sliding module; 62: Motor; 63: Rotary suction head; 64: Connecting plate;

[0067] 7: HR end face detector;

[0068] 8: AR end face detector;

[0069] 9: Frontal low-magnification detector;

[0070] 10: Second material handling mechanism;

[0071] 11: Backside detector;

[0072] 12: Feeding mechanism. Detailed Implementation

[0073] To better explain and facilitate understanding of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0074] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0075] Furthermore, in this invention, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0076] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; "connection" can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0077] See Figure 1 , Figure 2 as well as Figures 7 to 13This invention provides a chip cleaning and testing device, comprising a frame 1, a loading mechanism 2, a front high-magnification detector 3, a first picking mechanism 4, a cleaning mechanism 5, a transfer table 6, an HR end face detector 7, an AR end face detector 8, a front low-magnification detector 9, a second picking mechanism 10, a back detector 11, and a unloading mechanism 12; the front high-magnification detector 3, the first picking mechanism 4, the front low-magnification detector 9, and the second picking mechanism 10 are all mounted on the frame 1, and the mounting components are all capable of sliding laterally on the frame 1; the loading mechanism 2... The cleaning mechanism 5, transfer station 6, back-side detector 11, and unloading mechanism 12 are arranged horizontally on the frame 1; the front high-magnification detector 3 is positioned above the loading mechanism 2; the cleaning mechanism 5, HR end face detector 7, AR end face detector 8, and back-side detector 11 are arranged around the transfer station 6, and the front low-magnification detector 9 is positioned above the transfer station 6; the transfer station 6 can slide horizontally; the first picking mechanism 4 can move between the loading mechanism 2 and the transfer station 6; the second picking mechanism 10 can move between the transfer station 6 and the unloading mechanism 12. The chip cleaning and testing equipment of this invention can detect and clean chips such as COC, CHIP, Bar, and COS.

[0078] Vertical lifting mechanisms can be installed on the front high-magnification detector 3, the first material handling mechanism 4, the front low-magnification detector 9, and the second material handling mechanism 10. The lifting modules are slidably mounted on the I-beam of the frame. Each component on the top surface of the frame 1 can be equipped with a longitudinal sliding mechanism. Through the effective cooperation of these components, the workpiece can move three-dimensionally on the chip cleaning and inspection equipment. Each sliding module can be driven by a cylinder, hydraulic cylinder, or electric push rod. The front high-magnification detector 3, HR end face detector 7, AR end face detector 8, front low-magnification detector 9, and back face detector 11 are all inspection cameras.

[0079] The front high-magnification detector 3 and the front low-magnification detector 9 perform high-magnification and low-magnification detection on the workpiece, respectively, and perform high-precision detection on the workpiece from high-magnification and low-magnification perspectives, thereby improving the detection accuracy and quality of the workpiece by the equipment.

[0080] The front high-magnification detector 3, the first material handling mechanism 4, the front low-magnification detector 9, and the second material handling mechanism 10 are all mounted on the frame 1, i.e., suspended, so that the mounting components can move above the components installed on the top surface of the frame 1, thereby reducing the space occupied by the equipment. The cleaning mechanism 5, the HR end face detector 7, the AR end face detector 8, and the back detector 11 are arranged around the transfer platform 6. In this embodiment, the cleaning mechanism 5, the HR end face detector 7, the AR end face detector 8, and the back detector 11 are correspondingly arranged in the front, back, left, and right directions of the transfer platform 6, and the front low-magnification detector 9 is arranged above the transfer platform 6, improving the integration of the equipment. The HR end face detector 7, the AR end face detector 8, and the front low-magnification detector 9 can simultaneously detect appearance defects in the workpiece, improving the detection efficiency of the chip cleaning and inspection equipment.

[0081] The transfer table 6 can slide laterally. In this embodiment, the transfer table 6 includes a loading station, a detection station, and an unloading station. At the loading station, the transfer table 6 docks with the first material handling mechanism 4 to pick up materials. The detection station, also known as the cleaning station, is responsible for defect detection and cleaning of the workpieces. At the unloading station, the transfer table 6 docks with the second material handling mechanism 10 to unload materials. The ability of the transfer table 6 to slide laterally improves its flexibility and effectively avoids interference between the first material handling mechanism 4 or the second material handling mechanism 10 and the front low-magnification detector 9. Furthermore, the first material handling mechanism 4 and the second material handling mechanism 10 operate independently. After the second material handling mechanism 10 picks up materials from the transfer table 6, the first material handling mechanism 4 can immediately unload materials from the transfer table 6, improving production efficiency.

[0082] The cleaning mechanism 5 is positioned close to the turntable 6, reducing the turnaround time of workpieces between the turntable cleaning station and the turntable inspection station. When the turntable cleaning station and the turntable inspection station are the same station, there is no turnaround time, significantly improving operational efficiency. This also allows the HR end face detector 7, AR end face detector 8, and front low-magnification detector 9 to directly re-inspect the workpieces after cleaning, further reducing workpiece inspection time and improving production efficiency.

[0083] The chip cleaning and testing equipment integrates the cleaning mechanism 5 to the side of the transfer table 6, using the transfer table 6 as the cleaning platform for the cleaning mechanism 5. This allows the cleaning mechanism 5 to directly clean the dirty workpieces on the transfer table 6. The high degree of integration between the cleaning mechanism 5 and the transfer table 6 reduces the number of equipment components in the cleaning mechanism 5, thereby reducing the space occupied by the equipment and expanding its application scenarios.

[0084] like Figure 3 and Figure 4As shown, the feeding mechanism 2 includes a pre-scanning feeding module 21 and an ejector pin mechanism 22. The pre-scanning feeding module 21 has a longitudinally sliding tray 211 with a through hole at its center. The ejector pin mechanism 22 is located below the through hole and has ejector pins 221 that can move vertically and penetrate the through hole. Specifically, the tray 211 holds a blue film with a chip attached. The ejector pin mechanism 22 is located below the through hole, and by raising and lowering the ejector pin 221, it punctures the blue film, separating it from the workpiece, facilitating material handling by the first material handling mechanism 4. The tray 211 and the ejector pin mechanism 22 are arranged linearly in the vertical direction, optimizing the space occupied by the equipment.

[0085] Furthermore, the pre-scanning and loading module 21 includes a first longitudinal sliding module 212, and a motor 213, a belt 214, and a pre-scanner 215 disposed on the first longitudinal sliding module 212; the first longitudinal sliding module 212 is disposed on the frame 1; the first longitudinal sliding module 212 can synchronously drive the motor 213, the belt 214, the material tray 211, and the pre-scanner 215 to move longitudinally; the belt 214 is wound around the material tray 211 and the motor 213; the motor 213 can drive the material tray 211 to rotate in the horizontal plane; the pre-scanner 215 is provided with a clamping plate 2151 that extends and retracts radially along the material tray 211. Specifically, the first longitudinal sliding module 212 transports the material tray 211 to the front high-magnification detector 3, the motor 213 drives the material tray 211 to rotate at a set angle, and the front high-magnification detector 3 takes a picture. The high-magnification front detector 3 can perform high-magnification frontal detection of the workpiece and identify its position on the blue film. This allows the angle compensation mechanism 43 on the first picking mechanism 4, i.e., the compensation adjuster 43, to compensate and adjust the angle at which the workpiece is picked up, achieving high-precision workpiece picking. The clamping plate 2151 presses against or holds the blue film after the material tray 211 rotates, and works in conjunction with the ejector pin mechanism 22 to separate the blue film and the workpiece. Through the effective cooperation of the high-magnification front detector 3, the pre-scanning loading module 21, and the first picking mechanism 4, the first picking mechanism 4 can obtain the required rotation angle compensation information for the workpiece, achieving high-precision picking.

[0086] Secondly, the ejector mechanism 22 also includes a vertical lifting module 222 and a pusher 223; the vertical lifting module 222 is mounted on the frame 1; the pusher 223 is mounted on the vertical lifting module 222; the shaft of the pusher 223 is connected to a turntable, and the top surface of the turntable is an arc-shaped surface; the bottom end of the ejector 221 is rotatably connected to a rotating rod, which can roll on the arc-shaped surface. Specifically, the pusher 223 is a motor. When the pusher 223 drives the turntable to rotate, the arc-shaped surface can compress the rotating rod to rotate and move vertically, thereby realizing the vertical lifting of the ejector 221. The ejector pin 221 is driven in two stages by the vertical lifting module 222 and the pusher 223. The vertical lifting module 222 can quickly drive the ejector pin 221 to move below the blue film. The arc surface of the turntable can limit the vertical lifting stroke of the ejector pin 221. The driving method of the pusher 223 is gentler than that of the vertical lifting module 222, which can effectively protect the chip and prevent the chip from being damaged due to the excessive lifting speed of the ejector pin 221.

[0087] See Figure 5 Both the first material handling mechanism 4 and the second material handling mechanism 10 include a transverse sliding module 41, a lifting sliding module 42, a compensation adjuster 43, and a suction nozzle 44. The transverse sliding module 41 is slidably connected to the frame 1 in the transverse direction. The lifting sliding module 42 is slidably mounted on the transverse sliding module 41 in the vertical direction. The compensation adjuster 43 is mounted on the lifting sliding module 42. The suction nozzle 44 is connected to the compensation adjuster 43, which can drive the suction nozzle 44 to rotate vertically. Specifically, the compensation adjuster 43 is a motor, and the suction nozzle 44 is a vacuum suction nozzle with an external air pipe. Based on the workpiece position information obtained by the high-magnification detector 3 on the loading mechanism 2, the compensation adjuster 43 drives the suction nozzle 44 to compensate and rotate by a corresponding angle, thereby achieving high-precision unloading of the first material handling mechanism 4 on the transfer table 6 and improving the detection accuracy or cleaning accuracy of subsequent components.

[0088] Furthermore, the front high-magnification detector 3 is mounted on the first material handling mechanism 4. On the one hand, integrating the front high-magnification detector 3 onto the first material handling mechanism 4 reduces the number of lateral sliding components on the frame 1, lowering the risk of interference between components. On the other hand, after the first material handling mechanism 4 completes unloading on the transfer table 6, the front high-magnification detector 3 can photograph the placement position of the workpiece on the transfer table 6, enabling the system to obtain the placement position information of the workpiece on the transfer table 6. This allows subsequent components to compensate and adjust the placement position of the workpiece, improving detection and cleaning accuracy.

[0089] In addition, cleaning mechanism 5 is a snowflake cleaning machine. The snowflake cleaning machine uses environmentally friendly carbon dioxide snowflake cleaning technology to efficiently clean the end face of the workpiece. The cleaning is gentle and does not easily damage the workpiece, improving the reliability of cleaning the workpiece directly at the turntable inspection station. After cleaning mechanism 5 cleans the workpiece, it is then re-inspected by HR end face detector 7, AR end face detector 8, and front low-magnification detector 9. Once the workpiece is OK, the transfer table 6 moves the workpiece to the turntable unloading station.

[0090] like Figure 6 As shown, the transfer station 6 includes a second longitudinal sliding module 61, a motor 62, a connecting plate 64, and a rotary suction head 63. The second longitudinal sliding module 61 is mounted on the frame 1. The motor 62 is mounted on the second longitudinal sliding module 61. The second longitudinal sliding module 61 is connected to the first end of the connecting plate 64 and can drive the connecting plate 64 to move laterally. The rotary suction head 63 is mounted on the second end of the connecting plate 64. The rotary suction head 63 is connected to the rotating shaft of the motor 62. Specifically, the rotary suction head 63 moves in the horizontal plane through the combined drive of the second longitudinal sliding module 61 and the motor 62. The rotary suction head 63 includes a suction head and a rotary motor, which realizes the compensation adjustment of the adsorbed workpiece, improving the detection accuracy and cleaning accuracy of the workpiece.

[0091] Furthermore, the present invention also provides a detection method for a chip cleaning and testing equipment. The detection method is implemented based on the chip cleaning and testing equipment described above, and includes:

[0092] The feeding mechanism 2 feeds the workpiece; the high-magnification front detector 3 performs high-magnification front inspection on the workpiece; the first unloading mechanism 4 unloads the workpiece from the feeding mechanism 2 and unloads it onto the transfer table 6;

[0093] The transfer table 6 moves laterally to the turntable inspection station, and the HR end face detector 7, AR end face detector 8 and front low magnification detector 9 perform HR end face inspection, AR end face inspection and low magnification front inspection on the workpiece respectively.

[0094] If both the HR end face inspection and AR end face inspection of the workpiece are OK, the transfer table 6 moves laterally to the turntable unloading station; otherwise, the workpiece is cleaned by the cleaning mechanism 5. After cleaning, the HR end face detector 7, AR end face detector 8 and front low magnification detector 9 re-inspect the workpiece. If the re-inspection is OK, the transfer table 6 moves to the turntable unloading station; if the re-inspection is NG, the equipment alarms and the operator troubleshoots the equipment error or unloads the NG workpiece to the defective product storage area.

[0095] The second material handling mechanism 10 picks up the material on the transfer table 6 and moves the workpiece above the back detector 11; the back detector 11 performs back detection on the workpiece.

[0096] The second material handling mechanism 10 unloads the workpiece to the unloading mechanism 12;

[0097] Unloading mechanism 12 discharges material.

[0098] The first picking mechanism 4 is responsible for loading and unloading workpieces between the loading mechanism 2 and the transfer station 6, while the second picking mechanism 10 is responsible for loading and unloading workpieces between the transfer station 6 and the unloading mechanism 12. This clear division of labor, coupled with the ability of the first and second picking mechanisms 4 and 10 to operate independently, reduces waiting time for the next workpiece and improves the equipment's inspection efficiency. Furthermore, the first and second picking mechanisms 4 and 10 are mounted on the I-beams of the frame 1, allowing them to operate above the top surface of the frame 1. This rational spatial layout of the components effectively reduces the equipment's footprint. The transfer station 6 includes a loading station, an inspection station, and an unloading station, enhancing the interaction between the transfer station 6 and the first picking mechanism 4, cleaning mechanism 5, and second picking mechanism 10. This improves the workpiece inspection and cleaning accuracy and effectively prevents interference between the first and second picking mechanisms 4 and 10 and the front low-magnification detector 9, thus improving the equipment's reliability.

[0099] Furthermore, the cleaning mechanism 5 cleans the workpiece at the turntable inspection station, allowing the turntable cleaning station and the turntable inspection station to overlap. This means that after a workpiece is detected with an appearance defect, it does not need to be moved; the cleaning mechanism 5 directly cleans the workpiece, reducing the time spent on the workpiece moving between the turntable cleaning station and the turntable inspection station. The same principle applies to re-inspection, improving the equipment's inspection efficiency. Of course, during workpiece cleaning, the HR end face detector 7, AR end face detector 8, and front low-magnification detector 9 can be driven away from the workpiece by their respective drive modules, facilitating the cleaning work of the cleaning mechanism 5.

[0100] It should be understood that the above description of specific embodiments of the present invention is only for illustrating the technical approach and features of the present invention, and is intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly. However, the present invention is not limited to the specific embodiments described above. All changes or modifications made within the scope of the claims of the present invention should be covered within the protection scope of the present invention.

Claims

1. A chip cleaning and testing device, characterized in that, The chip cleaning and testing equipment includes a frame (1), a feeding mechanism (2), a front high-magnification detector (3), a first picking mechanism (4), a cleaning mechanism (5), a transfer station (6), an HR end face detector (7), an AR end face detector (8), a front low-magnification detector (9), a second picking mechanism (10), a back detector (11), and a unloading mechanism (12). The front high-magnification detector (3), the first material handling mechanism (4), the front low-magnification detector (9) and the second material handling mechanism (10) are all mounted on the frame (1) and can slide laterally on the frame (1); the loading mechanism (2), the cleaning mechanism (5), the transfer station (6), the back detector (11) and the unloading mechanism (12) are arranged laterally on the frame (1); The front high-magnification detector (3) is positioned above the feeding mechanism (2); the cleaning mechanism (5), the HR end face detector (7), the AR end face detector (8), and the back face detector (11) are arranged around the transfer station (6); The transfer station (6) is capable of sliding laterally; the transfer station (6) includes a transfer station loading station, a transfer station inspection station, and a transfer station unloading station; the first material handling mechanism (4) is capable of moving between the loading mechanism (2) and the transfer station (6) so that the transfer station (6) at the transfer station docks with the first material handling mechanism (4) to handle material handling; the second material handling mechanism (10) is capable of moving between the transfer station (6) and the unloading mechanism (12) so that the transfer station (6) at the transfer station docks with the second material handling mechanism (10) to unload material; the transfer station inspection station is capable of performing defect detection and cleaning on the workpiece; The cleaning mechanism (5), the HR end face detector (7) and the AR end face detector (8) are arranged around the turntable inspection station; the front low magnification detector (9) is arranged above the turntable inspection station.

2. The chip cleaning and testing equipment according to claim 1, characterized in that, The feeding mechanism (2) includes a pre-scanning feeding module (21) and an ejector pin mechanism (22); The pre-sweeping loading module (21) is provided with a material tray (211) that slides longitudinally; a through hole is provided in the center of the material tray (211); The ejector mechanism (22) is located below the through hole; the ejector mechanism (22) is provided with an ejector (221) that can move vertically up and down and pass through the through hole.

3. The chip cleaning and testing equipment according to claim 2, characterized in that, The pre-sweeping loading module (21) includes a first longitudinal sliding module (212), and a motor (213), a belt (214) and a pre-sweeper (215) disposed on the first longitudinal sliding module (212). The first longitudinal sliding module (212) is mounted on the frame (1); the first longitudinal sliding module (212) can synchronously drive the motor (213), the belt (214), the tray (211) and the pre-sweeper (215) to move longitudinally; The belt (214) is wound around the material tray (211) and the motor (213); the motor (213) is capable of driving the material tray (211) to rotate in the horizontal plane; The pre-sweeper (215) is provided with a clamping plate (2151) that extends and retracts radially along the tray (211).

4. The chip cleaning and testing equipment according to claim 2, characterized in that, The ejector mechanism (22) also includes a vertical lifting module (222) and a pusher (223); The vertical lifting module (222) is mounted on the frame (1); The thruster (223) is mounted on the vertical lifting module (222); The shaft of the pusher (223) is connected to a turntable, and the top surface of the turntable is an arc-shaped surface; the bottom end of the ejector pin (221) is rotatably connected to a rotating rod, which can roll on the arc-shaped surface.

5. The chip cleaning and testing equipment according to claim 1, characterized in that, Both the first material handling mechanism (4) and the second material handling mechanism (10) include a transverse sliding module (41), a lifting sliding module (42), a compensation adjuster (43), and a suction nozzle (44). The lateral sliding module (41) is slidably connected to the frame (1) in the lateral direction; The lifting and sliding module (42) is vertically slidably mounted on the horizontal sliding module (41); The compensation regulator (43) is disposed on the lifting and sliding module (42); the suction nozzle (44) is connected to the compensation regulator (43), and the compensation regulator (43) can drive the suction nozzle (44) to rotate vertically.

6. The chip cleaning and testing equipment according to claim 1, characterized in that, The front high-magnification detector (3) is mounted on the first material handling mechanism (4).

7. The chip cleaning and testing equipment according to claim 1, characterized in that, The cleaning mechanism (5) is a snowflake cleaning machine.

8. The chip cleaning and testing equipment according to claim 1, characterized in that, The transfer station (6) includes a second longitudinal sliding module (61), a motor (62), a connecting plate (64), and a rotary suction head (63). The second longitudinal sliding module (61) is disposed on the frame (1); The motor (62) is mounted on the second longitudinal sliding module (61); the second longitudinal sliding module (61) is connected to the first end of the connecting plate (64) and can drive the connecting plate (64) to move along the lateral direction; The rotary suction head (63) is mounted on the second end of the connecting plate (64). The rotary suction head (63) is connected to the shaft of the motor (62).

9. A detection method for a chip cleaning and testing device, characterized in that, The detection method of the chip cleaning and testing equipment is implemented based on the chip cleaning and testing equipment according to any one of claims 1-8, and the detection method includes: The feeding mechanism (2) feeds the workpiece; the high-magnification front detector (3) performs high-magnification front detection on the workpiece; the first material handling mechanism (4) handles the material on the feeding mechanism (2) and unloads the workpiece onto the transfer table (6); The transfer station (6) moves laterally to the turntable inspection station, and the HR end face detector (7), the AR end face detector (8) and the front low magnification detector (9) respectively perform HR end face inspection, AR end face inspection and low magnification front inspection on the workpiece; If both the HR end face inspection and AR end face inspection of the workpiece are OK, the transfer station (6) moves laterally to the turntable unloading station; otherwise, the workpiece is cleaned by the cleaning mechanism (5). After cleaning, the HR end face detector (7), the AR end face detector (8) and the front low magnification detector (9) re-inspect the workpiece. After the re-inspection is OK, the transfer station (6) moves to the turntable unloading station. The second material handling mechanism (10) picks up the material on the transfer table (6) and moves the workpiece above the back detector (11); the back detector (11) performs back detection on the workpiece; The second material handling mechanism (10) unloads the workpiece to the unloading mechanism (12); The unloading mechanism (12) unloads the material.

10. The detection method of the chip cleaning and detection equipment according to claim 9, characterized in that, The cleaning mechanism (5) cleans the workpiece at the turntable inspection station.

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