Preparation method of indium oxide film, gas sensor and preparation method of gas sensor

Abstract

The invention discloses a preparation method of an indium oxide film, a gas sensor and a preparation method of the gas sensor, and relates to the technical field of sensors. The method comprises the following steps: mixing an indium ion compound, deionized water, a urea solution and a surfactant for hydrothermal reaction to obtain indium oxide powder; adding the indium oxide powder into a dispersing agent solution to obtain gas-sensitive material ink; and carrying out electrohydrodynamic printing by using the gas-sensitive material ink so as to form an indium oxide film on the surface of a micro hot plate. The invention aims to solve the problem that NO2 cannot be accurately and quickly detected due to poor gas sensitivity of the existing indium oxide film.

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