一种真空度传感器及其制造方法
By opening through holes in the cantilever beam of the vacuum sensor and setting protrusions and recesses in the heat exchange structure, the problem of the small measurement range of the Pirani vacuum sensor was solved, enabling accurate measurement from atmospheric pressure to high vacuum, and improving sensitivity and accuracy.
CN119533761BActive Publication Date: 2026-07-17SUZHOU RONGQI SENSOR TECH CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SUZHOU RONGQI SENSOR TECH CO LTD
- Filing Date
- 2024-11-14
- Publication Date
- 2026-07-17
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Figure CN119533761B_ABST
Abstract
本发明公开了一种真空度传感器及其制造方法，涉及真空压力测量技术领域，以解决现有的皮拉尼真空传感器的测量范围较小的问题。所述真空度传感器包括基底、第一支撑层、热敏电阻和钝化层。基底具有绝热空腔，第一支撑层形成在基底的第一面上。热敏电阻形成在第一支撑层远离基底的一面上，钝化层覆盖第一支撑层和热敏电阻。其中，第一支撑层和钝化层形成的叠层结构包括与基底对应的连接结构，设置有热敏电阻的换热结构以及用于连接换热结构和连接结构的悬臂梁；悬臂梁和换热结构均位于绝热空腔上方。沿第一支撑层至钝化层的方向，悬臂梁上开设有至少一个通孔，通孔贯穿悬臂梁，通孔与绝热空腔连通。
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