Visual compensation positioning system and double-drive gantry thereof

Abstract

The application discloses a visual compensation positioning system and a double-drive gantry thereof, and belongs to the technical field of visual compensation positioning systems.The visual compensation positioning system comprises a double-light-path visual module X moving shaft, a double-light-path visual module Y moving shaft slidably installed on the double-light-path visual module X moving shaft, and a double-light-path visual module slidably installed on the double-light-path visual module Y moving shaft; wherein one end of the double-light-path visual module X moving shaft is fixedly installed with a first driving motor, the first driving motor can drive the double-light-path visual module Y moving shaft to slide along the length direction of the double-light-path visual module X moving shaft, one end of the double-light-path visual module Y moving shaft is fixedly installed with a second driving motor, and the second driving motor can drive the double-light-path visual module to slide along the length direction of the double-light-path visual module Y moving shaft.The double-light-path visual module containing the double-light-path visual module X moving shaft is installed on the double-drive gantry base, and high-precision and high-beat rapid switching can be realized without changing the overall structure of the double-drive gantry.

Description

Technical Field

[0001] This invention belongs to the technical field of chip mounting equipment, specifically relating to a visual compensation positioning system and its dual-drive gantry. Background Technology

[0002] Typically, semiconductor chip mounting equipment includes a vision positioning compensation mechanism to improve mounting accuracy. For high-precision mounting, this is implemented as follows: after the bonding head picks up the required chip, it moves to a top-view camera for initial visual positioning and recognition, calculating the chip's positional offset based on the image. Then, it moves to the mounting station and uses another top-view camera to photograph and position the chip. Finally, the bonding head position is adjusted in real-time based on the results of the two images, ensuring the final mounting accuracy.

[0003] There are two main types of high-precision positioning compensation methods. One type, as described above, uses a downward-viewing camera and an upward-viewing camera to take pictures and position the chip and the workstation that needs to be placed. The other type uses a dual-path camera to take pictures and position the chip and the substrate that needs to be placed at the placement location simultaneously. After identification and alignment by the mechanism, the bonding head moves along the Z-axis to place the chip.

[0004] For the solution of using an upward-viewing camera with a downward-viewing camera, due to the inherent error in the camera's installation position, and the fact that the X and Y axes need to be moved to the patch position after the upward-viewing image is taken, motion errors will also be introduced into the mechanism, making it impossible to achieve very high-precision positioning.

[0005] The dual-light-path camera solution has better positioning accuracy than the top-view and bottom-view camera solution. However, due to physical limitations, the camera lens and light source are located between the chip and the substrate during the photo taking process. Only after the dual-light-path camera's motion mechanism moves the camera away from the substrate area can the bonding head start moving along the Z-axis to perform the bonding. The overall speed is slow and the efficiency is low. Summary of the Invention

[0006] To address the aforementioned problems in existing technologies, this invention provides a visual compensation positioning system and its dual-drive gantry. The dual-optical-path visual module, which includes a dual-optical-path visual module and an X-axis moving axis, is mounted on the base of the dual-drive gantry. Without changing the overall structure of the dual-drive gantry, this invention can achieve high-precision, high-speed rapid switching between different scenarios.

[0007] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: A visual compensation positioning system includes a dual-optical-path visual module X-axis, a dual-optical-path visual module Y-axis slidably mounted on the dual-optical-path visual module X-axis, and a dual-optical-path visual module, wherein the dual-optical-path visual module is slidably mounted on the dual-optical-path visual module Y-axis. In this configuration, a first drive motor is fixedly installed at one end of the X-axis of the dual-light-path vision module. The first drive motor can drive the Y-axis of the dual-light-path vision module to slide along the length direction of the X-axis. A second drive motor is fixedly installed at one end of the Y-axis of the dual-light-path vision module. The second drive motor can drive the dual-light-path vision module to slide along the length direction of the Y-axis.

[0008] Furthermore, the dual-light-path vision module includes an industrial camera and a light source module. The industrial camera includes a lens barrel, with a dual-light-path lens mounted at one end and an imaging unit mounted at the other end. The dual-light-path lenses are respectively arranged in two directions corresponding to the Z-axis. The light source module is mounted at the end of the lens barrel with the dual-light-path lens, and the light source module is arranged in the direction corresponding to the dual-light-path lens of the industrial camera.

[0009] Furthermore, the light source module includes lamp holders mounted on both sides of the dual-light-path lens, the lamp holders being equipped with LEDs, and the LEDs being arranged in a circular array around the dual-light-path lens.

[0010] Furthermore, the dual-optical-path vision module is slidably connected to the Y-axis of the dual-optical-path vision module via a connecting frame; The connecting frame includes a cylindrical fixing component, an intermediate plate, and a beam sliding plate. The cylindrical fixing component is sleeved on the outside of the industrial camera, and one end of the cylindrical fixing component is fixedly connected to the intermediate plate. The intermediate plate is horizontally arranged, and the side of the intermediate plate away from the cylindrical fixing component is fixedly connected to the beam sliding plate. Sliding grooves are opened on both sides of the Y-axis of the dual-light path vision module, and guide rails are provided on both sides of the beam sliding plate. The beam sliding plate slides with the Y-axis of the dual-light path vision module through the sliding grooves.

[0011] Furthermore, the first drive motor and the second drive motor are either servo motors or stepper motors.

[0012] In addition, this application also claims protection for a dual-drive gantry, including a base, two parallel slide rail devices arranged on the base, and a movable crossbeam located between the two slide rail devices; The two slide rail devices are mounted on the base, and the two ends of the moving crossbeam are slidably engaged with the slide rail devices. The moving crossbeam can slide under the restriction of the two slide rail devices by a driving device. Any of the above-mentioned visual compensation positioning systems are also installed on the base.

[0013] Furthermore, the visual compensation positioning system is mounted on the base via a support base. The support base is located below the X-axis of the dual-light-path visual module. The support base includes a support block, a support plate, and a pad. There are at least two support blocks, which are vertically arranged and fixed to the lower part of the X-axis of the dual-light-path visual module. The side of the support block away from the X-axis of the dual-light-path visual module is connected to the support plate. The pad is fixed on the base, and the side of the pad away from the base is fixed to the lower part of the support plate. There are two pads, which are respectively distributed at both ends of the support plate.

[0014] Furthermore, the base is also provided with a chip mounting station for chip mounting, the chip mounting station is used to place the chip mounting substrate, and the base is also provided with a chip picking station for placing the chip.

[0015] Furthermore, the movable crossbeam is equipped with a bonding head for patch application.

[0016] Compared with existing technologies, the beneficial effects of this solution are: This invention provides a visual compensation positioning system and its dual-drive gantry. The dual-optical-path vision module, which contains a dual-optical-path vision module and an X-axis, is mounted on the base of the dual-drive gantry. Under high-cycle conditions, the dual-optical-path vision module acts as a downward-looking camera. While the bonding head is picking up materials at the material picking station, it takes pictures and positions the material at the placement station. After taking pictures, the vision module moves away from the placement station, and the gantry platform then drives the bonding head to move to the placement station for placement, which can maintain a fast processing rhythm. When high precision is required, during image capture, the dual-optical-path lens and light source module are positioned between the chip and the substrate. After image capture, the dual-optical-path vision module is moved away from the patching area via its X and Y axes, and then the bonding head begins to move along the Z axis for patching. This invention also achieves high-precision positioning. Without altering the overall structure of the dual-drive gantry, this invention can be used in different scenarios, such as rapid switching between high precision and high-speed operation. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the dual-drive gantry structure; Figure 2 This is another structural diagram of the dual-drive gantry. Figure 3 This is a schematic diagram of the structure of a visual compensation positioning system; Figure 4 This is another structural diagram of a visual compensation positioning system; Figure 5 Top view of the vision compensation positioning system; Figure 6 This is a schematic diagram of the dual-optical-path vision module structure.

[0018] The reference numerals in the attached drawings are as follows: base 1, patch mounting station 11, material picking station 12, slide rail device 2, moving crossbeam 3, bonding head 31, vision compensation positioning system 4, support base 41, support block 411, support plate 412, pad block 413, dual-light path vision module X-axis 42, first drive motor 421, dual-light path vision module Y-axis 43, second drive motor 431, dual-light path vision module 44, lens barrel 441, industrial camera 442, dual-light path lens 443, light source module 45, upward light source 451, connecting frame 46, barrel fixing part 461, intermediate plate 462, beam sliding plate 463. Detailed Implementation

[0019] The present invention will now be described in further detail with reference to the accompanying drawings.

[0020] A visual compensation positioning system, such as Figure 1 , Figure 2 and Figure 3 As shown, it includes a dual-optical-path vision module X-axis 42, a dual-optical-path vision module Y-axis 43 slidably mounted on the dual-optical-path vision module X-axis 42, and a dual-optical-path vision module 44, wherein the dual-optical-path vision module 44 is slidably mounted on the dual-optical-path vision module Y-axis 43. In this configuration, a first drive motor 421 is fixedly mounted at one end of the X-axis 42 of the dual-light-path vision module. The first drive motor 421 can drive the Y-axis 43 of the dual-light-path vision module to slide along the length direction of the X-axis 42. A second drive motor 431 is fixedly mounted at one end of the Y-axis 43 of the dual-light-path vision module. The second drive motor 431 can drive the dual-light-path vision module 44 to slide along the length direction of the Y-axis 43.

[0021] According to a specific embodiment of the present invention, a dual-path vision module 44 containing a dual-path vision module X-axis 42 is mounted on a dual-drive gantry base 1. A dual-path vision module Y-axis 43 can move relative to the dual-path vision module X-axis 42. The dual-path vision module Y-axis 43 and the dual-path vision module X-axis 42 are driven by a second drive motor 431 and a first drive motor 421, respectively. The principle is that a linear ball screw module drives the movement of the dual-path vision module 44. In this embodiment, when the processing rhythm requirement is high and the precision requirement is slightly low, the dual-path camera is used as a downward-looking camera. Furthermore, during the time the downward-looking camera moves to the placement position after material handling, the positioning and recognition of the downward-looking camera are synchronized with the material handling action of the bonding head 31, thereby achieving a higher working cycle time.

[0022] This invention can maintain a fast processing pace on the one hand, and achieve high-precision positioning on the other. Without changing the overall structure of the dual-drive gantry, this invention can achieve different application purposes, such as rapid switching between high precision and high cycle time.

[0023] The specific working process of the dual-drive gantry of the present invention is as follows: Under high-cycle conditions, when the bonding head 31 moves to the material picking station 12, the dual-light path vision module 44 is equivalent to a downward-looking camera and will take pictures at the patching station 11. After that, the dual-light path vision module 44 moves away from the patching station 11, and the moving beam 3 moves along the Y-axis direction of the two slide rail devices 2 on the base 1 of the dual-drive gantry. The moving beam 3 drives the bonding head 31 to move along its own X-axis direction, and the bonding head 31 descends along the Z-axis to perform patching. The entire patching process is completed.

[0024] When high precision is required: During image capture, the dual-light-path lens 443 and the light source module 45 are positioned between the chip and the substrate. After image capture, the dual-light-path vision module 44 is moved away from the bonding area via the X-axis 42 and Y-axis 43. Then, the bonding head 31 begins to move along the Z-axis to perform bonding. That is, following the normal positioning method of a dual-light-path camera, the chip and the substrate are simultaneously positioned at the actual bonding location to ensure bonding accuracy.

[0025] Furthermore, the dual-light-path vision module 44 includes an industrial camera 442 and a light source module 45. The industrial camera 442 includes a lens barrel 441, with a dual-light-path lens 443 mounted at one end and an imaging unit mounted at the other end. The dual-light-path lens 443 at the end of the lens barrel 441 adopts an existing prism structure to refract light from above and below into the imaging unit of the industrial camera 442, forming an electronic signal. The dual-light-path lens 443 is respectively positioned in two directions corresponding to the Z-axis, i.e., perpendicular to the plane of the base 1. The light source module 45 is mounted on the end of the lens barrel 441 with the dual-light-path lens 443, and the light source module 45 is positioned in the direction corresponding to the dual-light-path lens 443 of the industrial camera 442. The lens barrel 441 of the industrial camera 442 is connected and fixed to the Y-axis of the dual-light-path vision module 43 via a barrel fixing member 461.

[0026] Furthermore, the light source module 45 includes lamp holders mounted on both sides of the dual-light-path lens 443. A circular hole is formed in the center of each lamp holder to allow light to enter the dual-light-path lens 443. LED lights are mounted on the lamp holders, and the LED lights are arranged in a circular array around the dual-light-path lens 443. Specifically, the lamp holders are respectively mounted on the upper and lower sides of the dual-light-path lens 443, serving as an upward-looking light source 451 and a downward-looking light source. The upward-looking light source 451 and the downward-looking light source are oriented in opposite directions and are distributed along the Z-axis of the visual compensation positioning system 4. The upward-looking light source 451 and the downward-looking light source are used to provide supplemental illumination to the dual-light-path lens 443.

[0027] According to a specific embodiment of the present invention, a dual-beam lens 443 is used to collect images. The main function of the dual-beam lens 443 is to image the target onto the photosensitive surface of the image sensor, realizing beam transformation (modulation), thereby affecting the overall performance of the machine vision system. Compared with traditional civilian cameras, the industrial camera 442 has high image stability, high transmission capability, and high anti-interference capability. The industrial camera 442 is used for imaging. The industrial camera 442 is electrically connected to the control system, and the control system's algorithm performs positioning analysis on the image, then adjusts the position of the chip and chip substrate for positioning.

[0028] Furthermore, such as Figure 3 , Figure 4 and Figure 5 As shown, the dual-optical-path vision module 44 is slidably connected to the Y-axis of the dual-optical-path vision module 43 via a connecting frame 46; The connecting frame 46 includes a cylindrical fixing member 461, an intermediate plate 462, and a beam sliding plate 463. The cylindrical fixing member 461 is sleeved on the outside of the lens barrel 441. One end of the cylindrical fixing member 461 is fixedly connected to the intermediate plate 462. The intermediate plate 462 is horizontally arranged. The side of the intermediate plate 462 away from the cylindrical fixing member 461 is fixedly connected to the beam sliding plate 463. Sliding grooves are opened on both sides of the Y-axis of the dual-light path vision module 43. The beam sliding plate 463 has guide rails on both sides. The sliding grooves are slidably engaged with the Y-axis of the dual-light path vision module 43.

[0029] According to a specific embodiment of the present invention, the cylindrical fixing member 461 covers the outside of the lens barrel 441 of the dual-light path vision module 44 and is fixed to the lens barrel 441. The specific structure of the cylindrical fixing member 461 is not limited. One end of the intermediate plate 462 is fixed to the cylindrical fixing member 461, and the other end is fixed to the connecting beam sliding plate 463. The two sides of the beam sliding plate 463 are respectively slidably engaged with the sliding grooves opened on both sides of the Y-axis of the optical path vision module.

[0030] Furthermore, the first drive motor 421 and the second drive motor 431 are either servo motors or stepper motors.

[0031] In addition, the present invention also claims protection for a dual-drive gantry, comprising a base 1, two parallel slide rail devices 2 arranged on the base 1, and a movable crossbeam 3 located between the two slide rail devices 2, wherein the movable crossbeam 3 is equipped with a bonding head 31 for patching. The two slide rail devices 2 are mounted on the base 1, and the two ends of the moving beam 3 are slidably engaged with the slide rail devices 2. The moving beam 3 can slide under the restriction of the two slide rail devices 2 by a driving device. The base 1 is also equipped with any of the above-mentioned visual compensation positioning systems 4.

[0032] According to a specific embodiment of the present invention, in this embodiment, the main motion axis is the Y-axis of the system corresponding to the two slide rail devices 2 on the dual-drive gantry base 1, and the X-axis of the system corresponding to the moving crossbeam 3 of the dual-drive gantry. The moving crossbeam 3 is driven by the drive device to move along the slide rail device 2 in the Y-axis direction, and the contact head 31 corresponds to the Z-axis. In this embodiment, the drive device can adopt the existing structure of a servo motor driving a linear module, which will not be described in detail here.

[0033] Furthermore, the visual compensation positioning system 4 is mounted on the base 1 via a support base 41. The support base 41 is located below the X-axis of the dual-light-path visual module 42. The support base 41 includes a support block 411, a support plate 412, and a pad 413. There are at least two support blocks 411, which are vertically arranged and fixed to the lower part of the X-axis of the dual-light-path visual module 42. The side of the support block 411 away from the X-axis of the dual-light-path visual module 42 is connected to the support plate 412. The pad 413 is fixed to the base 1, and the side of the pad 413 away from the base 1 is fixed to the lower part of the support plate 412. There are two pads 413, which are distributed at both ends of the support plate 412. The support block 411 and the pad 413 adopt a hollow structure in the middle, which saves materials and increases the strength of the support. The length direction of the support plate 412 is arranged along the X-axis direction of the base 1.

[0034] Furthermore, the base 1 is also provided with a chip mounting station 11 for chip mounting, the chip mounting station 11 is used to place the chip mounting substrate to be mounted, and the base 1 is also provided with a chip picking station 12 for placing chips.

[0035] Finally, it should be noted that in the description of this invention, the terms "vertical," "upper," "lower," "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0036] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0037] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A visual compensation positioning system, characterized in that: It includes a dual-optical-path vision module X-axis, a dual-optical-path vision module Y-axis slidably mounted on the dual-optical-path vision module X-axis, and a dual-optical-path vision module, wherein the dual-optical-path vision module is slidably mounted on the dual-optical-path vision module Y-axis; Wherein, a first drive motor is fixedly installed at one end of the X-axis of the dual-light path vision module, and the first drive motor can drive the Y-axis of the dual-light path vision module to slide along the length direction of the X-axis of the dual-light path vision module; a second drive motor is fixedly installed at one end of the Y-axis of the dual-light path vision module, and the second drive motor can drive the dual-light path vision module to slide along the length direction of the Y-axis of the dual-light path vision module. The dual-light-path vision module includes an industrial camera and a light source module. The industrial camera includes a lens barrel, with a dual-light-path lens mounted at one end and an imaging unit mounted at the other end. The dual-light-path lenses are respectively arranged in two directions corresponding to the Z-axis. The light source module is mounted at the end of the lens barrel with the dual-light-path lens, and the light source module is arranged in the direction corresponding to the dual-light-path lens of the industrial camera. This allows the dual-optical-path vision module to act as a downward-looking camera and take pictures at the placement station when the bonding head of the moving crossbeam moves to the material handling station under high-cycle conditions. Under conditions requiring high precision, the dual-optical-path lens and the light source module will be positioned between the chip and the placement substrate during the picture taking. After the picture taking is completed, the dual-optical-path vision module is moved away from the placement station via the X-axis and Y-axis of the dual-optical-path vision module, and then the bonding head starts to move along the Z-axis to perform the placement.

2. The visual compensation positioning system according to claim 1, characterized in that: The light source module includes lamp holders installed on both sides of the dual-light-path lens, and LED lights are installed on the lamp holders. The LED lights are arranged in a ring array around the dual-light-path lens.

3. The visual compensation positioning system according to claim 2, characterized in that: The dual-optical-path vision module is slidably connected to the Y-axis of the dual-optical-path vision module via a connecting frame; The connecting frame includes a cylindrical fixing component, an intermediate plate, and a beam sliding plate. The cylindrical fixing component is sleeved on the outside of the industrial camera, and one end of the cylindrical fixing component is fixedly connected to the intermediate plate. The intermediate plate is horizontally arranged, and the side of the intermediate plate away from the cylindrical fixing component is fixedly connected to the beam sliding plate. Sliding grooves are opened on both sides of the Y-axis of the dual-light path vision module, and guide rails are provided on both sides of the beam sliding plate. The two sides of the beam sliding plate are slidably engaged with the Y-axis of the dual-light path vision module through the sliding grooves.

4. A visual compensation positioning system according to any one of claims 1-3, characterized in that: The first drive motor and the second drive motor are either servo motors or stepper motors.

5. A dual-drive gantry, characterized in that: It includes a base, two parallel slide rails arranged on the base, and a movable crossbeam located between the two slide rails; The two slide rail devices are mounted on the base, and the two ends of the movable crossbeam are slidably engaged with the slide rail devices. The movable crossbeam can slide under the restriction of the two slide rail devices by a driving device. The base is also equipped with the visual compensation positioning system according to any one of claims 1-4.

6. A dual-drive gantry according to claim 5, characterized in that: The visual compensation positioning system is mounted on the base via a support base. The support base is located below the X-axis of the dual-light-path visual module. The support base includes a support block, a support plate, and a pad. There are at least two support blocks, which are vertically arranged and fixed to the lower part of the X-axis of the dual-light-path visual module. The side of the support block away from the X-axis is connected to the support plate. The pad is fixed on the base, and the side of the pad away from the base is fixed to the lower part of the support plate. There are two pads, which are distributed at both ends of the support plate.

7. A dual-drive gantry according to claim 6, characterized in that: The base is also provided with a chip mounting station for chip mounting, on which a chip mounting substrate to be mounted is placed, and the base is also provided with a chip picking station for placing chips.

8. A dual-drive gantry according to claim 7, characterized in that: The movable crossbeam is equipped with a bonding head for patch application.

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