一种用于复杂结构的激光三维体制造装置及方法

By combining beam positioning, dispersion compensation, acousto-optic modulation, and optical relay compensation units, the problem of low precision and efficiency in femtosecond laser processing technology in complex structures is solved, realizing high-precision and high-efficiency laser three-dimensional body manufacturing.

CN119566543BActive Publication Date: 2026-07-17XIAN INST OF OPTICS & PRECISION MECHANICS CHINESE ACAD OF SCI

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
XIAN INST OF OPTICS & PRECISION MECHANICS CHINESE ACAD OF SCI
Filing Date
2024-12-20
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing femtosecond laser processing technology suffers from low precision and low efficiency when processing complex structures, especially due to the cumulative error and insufficient processing efficiency caused by the limited multi-axis motion platform and scanning rate.

Method used

A laser three-dimensional volume manufacturing device is adopted, including a beam positioning unit, a dispersion compensation unit, an acousto-optic modulation unit, and an optical relay compensation unit. By adjusting the spatial position and energy distribution of the beam, the acousto-optic modulation unit divides the laser into multiple sub-beams, and the micro-focusing unit achieves precise focusing, thus avoiding dependence on a multi-axis motion platform.

Benefits of technology

It improves the precision and efficiency of laser processing, reduces the thermal effect on the material surface, lowers roughness, enables efficient three-dimensional processing of complex structures, and reduces cumulative errors and focal position errors inside the material.

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Abstract

本发明公开了一种用于复杂结构的激光三维体制造装置及方法,解决了现有飞秒激光加工技术的加工精度低、加工效率低的问题,具体包括用于发射加工激光的激光源,和沿其出射方向依次设置在加工激光所在光路上的光束位预定单元、色散补偿单元、声光调制单元以及光学中继补偿单元以及显微聚焦单元;光束位预定单元用于对加工激光的光轴空间位置进行调整;色散补偿单元用于对光轴空间位置调整后的加工激光进行色散补偿;声光调制单元用于通过不同和 / 或相同频率的电信号调幅将色散补偿后的加工激光分为多束子光束,并调整各子光束的空间位置;光学中继补偿单元用于对各子光束的光程进行调整;显微聚焦单元用于对光程调整后的各子光束进行聚焦。
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