Efficient intelligent leveling device and method for precision platform

Abstract

The application provides a high-efficiency intelligent leveling device and method of a precision platform, applied to the technical field of precision machinery, wherein an X-axis module and a Y-axis module are arranged to be used for a load detection instrument; a pressure sensor module is arranged at the bottom of the precision platform to detect first and second pressure values of the precision platform under the load and convert the first and second pressure values into first and second electric signals; and an inflatable active vibration isolator is arranged at the bottom of the precision platform to receive the first and second electric signals and inflate according to the first and second electric signals to adjust the precision platform to a horizontal state. Therefore, the scheme has the beneficial effects of being able to respond to the inclination of the platform caused by the movement of the load more quickly and accurately, thereby ensuring the horizontal state of the precision platform during the detection process and improving the detection precision.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of precision machinery, and in particular to an efficient intelligent leveling device and method for a precision platform. BACKGROUND

[0002] In the assembly, adjustment and detection of precision machinery, environmental vibration interference is a very serious influencing factor. Vibration makes detection unable to obtain accurate data, thereby unable to guide the assembly and adjustment process, and also unable to determine the precision of the completed equipment. To solve the problem caused by environmental vibration, there are currently two main solutions: one is to directly build a large-area vibration isolation foundation in the area where the equipment is located, which has good vibration isolation effect, but has a long construction period, cannot be moved, and has high cost; the other is to provide an inflatable vibration isolator on the support leg of the precision equipment, which is easy to build, has low cost, and can achieve excellent vibration isolation performance through reasonable layout, and is currently widely used. The inflatable vibration isolator can be divided into active vibration isolation and passive vibration isolation, and the active vibration isolator is more common in ultra-precision diamond machine tools. Since the inflatable active vibration isolator first detects the angular change of the base, and then automatically charges and discharges to supplement the stability of the base, the supplement of the gas usually needs a setting time, and cannot achieve the short and high speed of electrical signal conversion. This leads to the fact that in some working conditions, the vibration isolation effect cannot meet the requirements.

[0003] For example, when detecting indicators such as guide rail straightness and perpendicularity using optical instruments such as a dual-frequency laser interferometer and a laser autocollimator, the body of the optical instrument is usually independently arranged and does not have a relationship with the equipment platform, and the feedback optical component is arranged on the component of the equipment platform and moves with the component.

[0004] For precision machine tool equipment, as long as the rigidity of the machine tool platform itself is sufficient, the adjustment of the inflatable active vibration isolator needs time during the movement of the load on the platform, resulting in the whole machine tool platform appearing to be inclined. However, since the rigidity of the platform is sufficient, the platform itself does not deform, so the relative poses of the spaces between the various components on the machine tool do not change, and do not affect the machining of the precision machine tool equipment. However, for the assembly of components of the precision machine tool equipment in the early stage, such as detection of the straightness of the guide rail during assembly of the machine tool and detection of the perpendicularity precision between the guide rails, since the body of the optical detection equipment is external and does not have a relationship with the equipment platform, when the platform has an inclination angle due to the movement of the load, although the inflatable active vibration isolator will eventually automatically adjust the air pressure to restore the platform to a horizontal state, during this period, the values of straightness, perpendicularity and the like detected by the optical component will have a large error with the actual precision; and accurate basis cannot be provided for subsequent assembly and adjustment.

[0005] In summary, the prior art lacks a device and method that can intelligently level the platform, cooperate with the inflatable active vibration isolator, and quickly and accurately adjust the vibration time of the platform caused by the movement of the load according to the expected movement direction of the load on the machine tool equipment, thereby achieving the beneficial effects of efficiently and accurately detecting the installation accuracy of each key component on the machine tool platform and improving product precision and production efficiency. SUMMARY

[0006] In view of the above shortcomings of the prior art, the present application provides a high-efficiency intelligent leveling device and method for a precision platform, which is applied to the field of precision machinery technology and has the advantages of quickly and accurately adjusting the vibration time of the platform caused by the movement of the load, thereby efficiently and accurately detecting the installation accuracy of each key component on the machine tool platform and improving product precision and production efficiency.

[0007] In a first aspect, a high-efficiency intelligent leveling device for a precision platform includes at least a precision platform, an X-axis module and a Y-axis module arranged on the top of the precision platform, and an inflatable active vibration isolator and a pressure sensor module arranged on the bottom of the precision platform.

[0008] The X-axis module and the Y-axis module are used for load detection instruments.

[0009] The pressure sensor module is used to detect the first and second pressure values of the load on the X-axis module and the Y-axis module on the precision platform and convert the first and second pressure values into first and second electrical signals.

[0010] The inflatable active vibration isolator is used to receive the first and second electrical signals and inflate according to the first and second electrical signals to adjust the precision platform to be horizontal.

[0011] The application provides a high-efficiency intelligent leveling device for a precision platform, which comprises an X-axis module and a Y-axis module, and is used for load detection instruments; a pressure sensor module is arranged at the bottom of the precision platform and is used for detecting first and second pressure values of the load on the precision platform and converting the first and second pressure values into first and second electric signals; and an inflatable active vibration isolator is arranged at the bottom of the precision platform and is used for receiving the first and second electric signals and inflating according to the first and second electric signals to adjust the precision platform to a horizontal state. The above technical features are matched with each other, when the detection instrument moves on the X-axis module and the Y-axis module, the pressure sensor module detects the pressure value changes of the load on the precision platform in real time. The pressure values are converted into electric signals and transmitted to the inflatable active vibration isolator. The inflatable active vibration isolator inflates according to the received electric signals, so that the horizontal state of the precision platform is quickly adjusted. The problems of inclination of the precision platform when the load moves are solved. Therefore, the scheme has the beneficial effects of being able to more quickly and accurately respond to the inclination of the platform caused by the movement of the load, so that the horizontal state of the precision platform in the detection process is ensured, and the detection precision is improved.

[0012] Further, the inflatable active vibration isolators are arranged in a plurality of numbers and symmetrically distributed at the bottom of the precision platform.

[0013] The application provides a high-efficiency intelligent leveling device for a precision platform, which comprises an X-axis module and a Y-axis module, and is used for load detection instruments; a pressure sensor module is arranged at the bottom of the precision platform and is used for detecting first and second pressure values of the load on the precision platform and converting the first and second pressure values into first and second electric signals; and an inflatable active vibration isolator is arranged at the bottom of the precision platform and is used for receiving the first and second electric signals and inflating according to the first and second electric signals to adjust the precision platform to a horizontal state. The above technical features are matched with each other, when the detection instrument moves on the X-axis module and the Y-axis module, the pressure sensor module detects the pressure value changes of the load on the precision platform in real time. The pressure values are converted into electric signals and transmitted to the inflatable active vibration isolator. The inflatable active vibration isolator inflates according to the received electric signals, so that the horizontal state of the precision platform is quickly adjusted. The problems of inclination of the precision platform when the load moves are solved. Therefore, the scheme has the beneficial effects of being able to more quickly and accurately respond to the inclination of the platform caused by the movement of the load, so that the horizontal state of the precision platform in the detection process is ensured, and the detection precision is improved.

[0014] Further, the pressure sensor modules are arranged in a plurality of numbers and are arranged at equal intervals in the X-axis module direction and the Y-axis module direction.

[0015] The application provides a high-efficiency intelligent leveling device for a precision platform, which comprises an X-axis module and a Y-axis module, and is used for load detection instruments; a pressure sensor module is arranged at the bottom of the precision platform and is used for detecting first and second pressure values of the load on the precision platform and converting the first and second pressure values into first and second electric signals; and an inflatable active vibration isolator is arranged at the bottom of the precision platform and is used for receiving the first and second electric signals and inflating according to the first and second electric signals to adjust the precision platform to a horizontal state. The above technical features are matched with each other, when the detection instrument moves on the X-axis module and the Y-axis module, the pressure sensor module detects the pressure value changes of the load on the precision platform in real time. The pressure values are converted into electric signals and transmitted to the inflatable active vibration isolator. The inflatable active vibration isolator inflates according to the received electric signals, so that the horizontal state of the precision platform is quickly adjusted. The problems of inclination of the precision platform when the load moves are solved. Therefore, the scheme has the beneficial effects of being able to more quickly and accurately respond to the inclination of the platform caused by the movement of the load, so that the horizontal state of the precision platform in the detection process is ensured, and the detection precision is improved.

[0016] Further, the pressure sensor module at least includes a pressure sensor, a pressure sensor clamp and a locking top rod.

[0017] The pressure sensor is arranged at the bottom of the precision platform and is used to detect the first pressure value and the second pressure value of the precision platform when the detection instrument loaded on the precision platform runs along the X-axis module and the Y-axis module respectively; the pressure sensor clamp is connected with the pressure sensor and is used to lock the pressure sensor; the locking top rod is connected with the pressure sensor clamp and is used to ensure the relative fixation between the pressure sensor and the pressure sensor clamp.

[0018] The high-efficiency intelligent leveling device for the precision platform is proposed in the application. By arranging the pressure sensor at the bottom of the precision platform, the pressure value applied to the precision platform by the load detection instrument when running in the X-axis and Y-axis directions can be directly detected. This arrangement ensures the accuracy and timeliness of pressure detection. The pressure sensor clamp is connected with the pressure sensor and is used to lock the pressure sensor. This locking mechanism ensures the stability of the pressure sensor during operation and prevents position deviation caused by vibration or other external factors, thereby ensuring the accuracy of pressure detection. The locking top rod is connected with the pressure sensor clamp, further ensuring the relative fixation between the pressure sensor and the pressure sensor clamp. This double fixation mechanism enhances the stability and reliability of the entire pressure detection system.

[0019] Further, the pressure sensor module further includes a pressure sensor base and a high-rigidity module support leg, the high-rigidity module support leg is connected with the bottom of the precision platform; the pressure sensor base is connected with the high-rigidity module support leg and is used to install the pressure sensor.

[0020] Further, the pressure sensor module further includes a servo electric cylinder, the servo electric cylinder is fixed on the pressure sensor base and is connected with the pressure sensor, and is used to drive the pressure sensor to rise towards the precision platform, so that the initial pressure value of the pressure sensor reaches the median value of its range.

[0021] Further, the pressure sensor module further includes a guide rod, the guide rod is fixedly connected with the pressure sensor base, and the height of the pressure sensor base is higher than the top of the guide rod and lower than the probe of the pressure sensor.

[0022] Further, the X-axis module includes an X-axis guide rail arranged along the X-axis direction and an X-axis load block arranged on the X-axis guide rail; the Y-axis module includes a Y-axis guide rail arranged along the Y-axis direction and a Y-axis load block arranged on the Y-axis guide rail; the X-axis load block and the Y-axis load block are respectively used for loading the detection instrument.

[0023] In a second aspect, a high-efficiency intelligent leveling method of a precision platform is applied to any of the high-efficiency intelligent leveling devices of the precision platform, and the method comprises the following steps:

[0024] S1: obtaining a first pressure value and a second pressure value detected by an X-axis module and a Y-axis module of a pressure sensor module, respectively;

[0025] S2: converting the first pressure value and the second pressure value into a first electric signal and a second electric signal;

[0026] S3: controlling inflation of an inflatable active vibration isolator according to the first electric signal and the second electric signal;

[0027] S4: calculating a time at which the first pressure value and the second pressure value reach a peak value, and controlling an inflation speed of the inflatable active vibration isolator according to the time, so that the inflatable active vibration isolator reaches a maximum stiffness by inflation when the first pressure value and the second pressure value reach the peak value, thereby keeping the precision platform in a horizontal state in the X-axis module direction and the Y-axis module direction.

[0028] Further, step S4 comprises:

[0029] S41: calculating a time at which the first pressure value reaches a peak value, and controlling a first inflation speed of two inflatable active vibration isolators symmetrically arranged along the X-axis according to the time, so that the two inflatable active vibration isolators symmetrically arranged along the X-axis reach a maximum stiffness by inflation when the first pressure value reaches the peak value;

[0030] S42: calculating a time at which the second pressure value reaches a peak value, and controlling a second inflation speed of two inflatable active vibration isolators symmetrically arranged along the Y-axis according to the time, so that the two inflatable active vibration isolators symmetrically arranged along the Y-axis reach a maximum stiffness by inflation when the second pressure value reaches the peak value, thereby keeping the precision platform in a horizontal state in the X-axis module direction and the Y-axis module direction.

[0031] Beneficial effects: The efficient intelligent leveling device and method of a precision platform provided by the application, by setting the X-axis module and the Y-axis module, is used for load detection instrument; by setting the pressure sensor module at the bottom of the precision platform, the first pressure value and the second pressure value of the load to the precision platform are detected, and the first pressure value and the second pressure value are converted into the first electric signal and the second electric signal; by setting the inflatable active vibration isolator at the bottom of the precision platform, the first electric signal and the second electric signal are received, and inflation is carried out according to the first electric signal and the second electric signal, and the precision platform is adjusted to a horizontal state. The above technical features cooperate with each other, when the detection instrument moves on the X-axis module and the Y-axis module, the pressure sensor module detects the pressure value change of the load to the precision platform in real time. These pressure values are converted into electric signals and transmitted to the inflatable active vibration isolator. The inflatable active vibration isolator adjusts the inflation according to the received electric signals, so as to quickly adjust the horizontal state of the precision platform. The problem of inclination of the precision platform when the load moves is solved. Therefore, the scheme has the beneficial effects of being able to respond to the inclination of the platform caused by the movement of the load more quickly and accurately, so as to ensure the horizontal state of the precision platform in the detection process and improve the detection accuracy. BRIEF DESCRIPTION OF DRAWINGS

[0032] Figure 1 A perspective view of the efficient intelligent leveling device of a precision platform provided by the application.

[0033] Figure 2 A bottom view of the efficient intelligent leveling device of a precision platform provided by the application.

[0034] Figure 3 A structure diagram of the pressure sensor module provided by the application.

[0035] Figure 4 A sectional view of the pressure sensor module provided by the application.

[0036] Figure 5 A flowchart of the efficient intelligent leveling method of a precision platform provided by the application.

[0037] Label explanation: 101, X-axis guide rail; 102, X-axis load block; 201, Y-axis guide rail; 202, Y-axis load block; 3, precision platform; 4, inflatable active vibration isolator; 5, pressure sensor module; 501, high-rigidity module support leg; 502, pressure sensor base; 503, servo cylinder; 504, pressure sensor clamp; 505, pressure sensor; 506, locking top rod; 507, guide rod. DETAILED DESCRIPTION

[0038] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0039] It should be noted that similar reference numerals and letters refer to similar items throughout the accompanying drawings, and therefore, once an item is defined in one drawing, it need not be further defined and explained in subsequent drawings. Meanwhile, in the description of the present application, the terms "first", "second", and the like are only used to distinguish descriptions, and cannot be understood as indicating or implying relative importance.

[0040] In the process of precision machinery adjustment and detection, environmental vibration has a significant impact on precision and performance. Currently, there are two main methods to solve the problem of environmental vibration: large-area vibration isolation foundation and device support leg with inflatable isolator. Among them, inflatable active isolator is widely used because of its convenient construction, low cost and good isolation effect. However, inflatable active isolator still has limitations in some working conditions. When using optical instruments for detection, since the optical instrument body is independently arranged and not associated with the device platform, the feedback optical components are arranged on the components of the device platform and move with them. In this case, the movement of the load on the platform will cause the entire platform to tilt, affecting the detection accuracy. Although the inflatable active isolator will eventually adjust the air pressure to restore the platform to level, during the adjustment process, there is a large error between the detected value and the actual accuracy, which cannot provide accurate basis for subsequent adjustment. In order to solve this problem, the present application proposes a high-efficiency intelligent leveling device for precision platform.

[0041] Specifically, please refer to Figures 1 to 4 , in a first aspect, a high-efficiency intelligent leveling device for precision platform 3, at least comprising a precision platform 3, an X-axis module and a Y-axis module arranged on the top of the precision platform 3, and an inflatable active isolator 4 and a pressure sensor module 5 arranged on the bottom of the precision platform 3;

[0042] The X-axis module and the Y-axis module are used for load detection instruments;

[0043] The pressure sensor module 5 is used to detect the first pressure value and the second pressure value of the load on the X-axis module and the Y-axis module on the precision platform 3, and convert the first pressure value and the second pressure value into first electric signal and second electric signal;

[0044] The inflatable active isolator 4 is used to receive the first and second electrical signals and inflate according to the first and second electrical signals to adjust the precision platform 3 to be horizontal.

[0045] Among them, the traditional inflatable active isolator 4 adjusts the air pressure by detecting the change of the platform angle, but this method has the problem of response lag. In order to improve the response speed, the present application considers directly detecting the pressure change of the load on the platform. Specifically, a pressure sensor 505 can be installed at the bottom of the platform to monitor the pressure distribution change caused by the movement of the load in real time. However, simply detecting the pressure change is not enough to solve the problem. Therefore, the present application adopts the method of quickly converting the detected pressure value into an electrical signal acceptable to the inflatable active isolator 4 and directly using it to control the inflation process of the inflatable active isolator 4 to solve the problem.

[0046] In a specific application, the present application designs a high-efficiency intelligent leveling device containing a precision platform 3, an X-axis module and a Y-axis module, an inflatable active isolator 4, and a pressure sensor module 5. Among them, the X-axis module and the Y-axis module are used for load detection instruments to realize movement in a two-dimensional plane; the pressure sensor module 5 detects the pressure value of the load on the platform and converts it into an electrical signal; the inflatable active isolator 4 adjusts according to the received electrical signal to quickly adjust the horizontal state of the platform.

[0047] By directly detecting the load change through the pressure sensor 505, the hysteresis of angle detection is avoided; by using electrical signal transmission and control, the system response speed and accuracy are greatly improved; at the same time, this scheme can adapt to detection instruments with different loads and moving speeds, and has good universality.

[0048] In some specific embodiments, multiple pressure sensors 505 and inflatable active isolators 4 can be arranged symmetrically at the bottom of the platform to achieve more accurate balance adjustment. In addition, it is also considered to pre-inflate the isolator according to the expected trajectory of the load movement to further improve the leveling efficiency.

[0049] Through this design, the present application effectively solves the problem of tilting of the precision platform 3 when the load moves, significantly improves the detection accuracy and efficiency, and provides reliable protection for the adjustment and detection of precision machinery.

[0050] Among them, the precision platform 3 refers to a flat structure used to support and position precision instruments or equipment, which can be made of high-rigidity materials such as granite or engineering ceramics.

[0051] Among them, the X-axis module and the Y-axis module refer to mechanical structures used to realize the two-dimensional movement of precision instruments in the horizontal plane, which can be realized by combining linear guides and drive motors.

[0052] The inflatable active vibration isolator 4 refers to a vibration isolation device that adjusts the support force by controlling the air pressure, and can be implemented by combining an air bag and an electric control valve.

[0053] The pressure sensor module 5 refers to a sensing device for detecting the stress of the precision platform 3, and can be implemented by using a strain gauge or a piezoelectric element.

[0054] The core innovation of the present application is to combine the pressure sensor module 5 with the inflatable active vibration isolator 4, to achieve rapid and accurate adjustment of the tilt state of the precision platform 3 by real-time detection of the stress change of the platform and rapid adjustment of the air pressure of the vibration isolator.

[0055] In the present application, the precision platform 3 supports the entire system as the basic structure. The X-axis module and the Y-axis module are installed on the top of the precision platform 3, and are used to carry and move the detection instrument. The pressure sensor module 5 and the inflatable active vibration isolator 4 are installed on the bottom of the precision platform 3.

[0056] When the detection instrument moves along the X-axis module or the Y-axis module, the stress distribution of the precision platform 3 will change. The pressure sensor module 5 detects this change in real time and converts the detected first pressure value and second pressure value into first and second electrical signals. These electrical signals are quickly transmitted to the inflatable active vibration isolator 4. The X-axis module direction is the setting direction of the X-axis guide rail 101, and the Y-axis module direction is the setting direction of the Y-axis guide rail 201.

[0057] After receiving the first and second electrical signals, the inflatable active vibration isolator 4 immediately adjusts the air pressure according to the signal strength. For example, if it is detected that the pressure on one side of the platform increases, the corresponding vibration isolator will increase the air pressure to provide greater support force. This rapid response mechanism ensures that the platform can always maintain a horizontal state during the movement of the load.

[0058] The reason for choosing the pressure sensor 505 as the detection means is that it has fast response speed and high sensitivity. Converting the pressure value into an electrical signal further improves the speed of information transmission and processing. This design enables the system to start adjusting at the moment of load movement, greatly reducing the possibility of the platform tilting significantly.

[0059] Further, the inflatable active vibration isolator 4 is provided with a plurality of inflatable active vibration isolators 4, which are symmetrically distributed on the bottom of the precision platform 3.

[0060] Please refer to Figure 2, by symmetrically arranging multiple inflatable active vibration isolators 4 at the bottom of the precision platform 3, the horizontal state of the platform can be more flexible and accurate. When the load moves on the X-axis module or the Y-axis module, the multiple inflatable active vibration isolators 4 can be adjusted according to the pressure change, quickly respond and maintain the horizontal state of the platform. This design not only improves the accuracy and stability of leveling, but also enhances the adaptability of the system to load changes, thereby solving the technical problem that the inflatable active vibration isolators 4 are difficult to accurately level. Among them, Figure 2 in the horizontal direction, the load moves in the X-axis module direction, and the vertical arrow indicates the load moves in the Y-axis module direction.

[0061] In a specific embodiment, four inflatable active vibration isolators 4 can be symmetrically arranged at the bottom of the precision platform 3. For example, one can be arranged at each corner of the platform. This symmetrical distribution can ensure the balance of the leveling force and avoid tilting or instability caused by uneven single-sided stress.

[0062] Further, the pressure sensor module 5 is provided with multiple pressure sensor modules 5, which are respectively arranged at equal intervals in the X-axis module direction and the Y-axis module direction.

[0063] Among them, the pressure sensor module 5 of the present application is provided with multiple pressure sensor modules 5, which are respectively arranged at equal intervals in the X-axis module direction and the Y-axis module direction. This layout can comprehensively detect the pressure in the X-axis and Y-axis directions, improving the accuracy of detection. By arranging multiple pressure sensor modules 5 at equal intervals in two directions, it ensures uniform distribution of pressure detection and avoids the problem of insufficient or excessive pressure detection in some areas. In addition, this configuration can more accurately capture the pressure changes caused by the load moving in the X-axis module and Y-axis module directions on the precision platform 3.

[0064] Specifically, one pressure sensor module 5 can be arranged at each end of the X-axis module or the Y-axis, and one or more pressure sensor modules 5 can be arranged at the middle position. The pressure sensor module 5 at one end and the pressure sensor module 5 at the middle position are used to determine the moving direction of the load by detecting the pressure value, and the pressure sensor module 5 at the other end is used to determine the moving stroke of the load by detecting the pressure value. Such a layout can capture the pressure distribution in the X-axis module or Y-axis module direction.

[0065] Further, the pressure sensor module 5 at least includes a pressure sensor 505, a pressure sensor clamp 504 and a locking top rod 506;

[0066] Please refer to Figure 3, the pressure sensor 505 is arranged at the bottom of the precision platform 3, used to detect the first pressure value and the second pressure value of the precision platform 3 when the detection instrument on the precision platform 3 runs along the X-axis module and the Y-axis module respectively; the pressure sensor clamp 504 is connected with the pressure sensor 505, used to lock the pressure sensor 505; the locking top rod 506 is connected with the pressure sensor clamp 504, used to ensure the relative fixation between the pressure sensor 505 and the pressure sensor clamp 504.

[0067] In some embodiments described above, during the implementation of the present application, there is also a problem of how to solve the detection and transmission of the pressure value of the precision platform 3 when the detection instrument on the precision platform 3 runs along the X-axis module and the Y-axis module respectively.

[0068] Specifically, the design of the pressure sensor module 5 in the present application includes three main components: the pressure sensor 505, the pressure sensor clamp 504 and the locking top rod 506. The pressure sensor clamp 504 clamps the shell of the pressure sensor 505, and the locking top rod 506 passes through the pressure sensor clamp 504 to resist the shell of the pressure sensor 505 for tightening, thereby fixing the pressure sensor 505. The probe of the pressure sensor 505 will move downward in the shell after being subjected to the pressure of the precision platform 3. These components work together to accurately detect and stably transmit the pressure value generated when the detection instrument on the precision platform 3 runs.

[0069] The setting position of the pressure sensor 505 is the bottom of the precision platform 3. This arrangement enables the pressure sensor 505 to directly contact the precision platform 3, thereby accurately capturing the pressure value exerted by the detection instrument on the precision platform 3 when running in the X-axis and Y-axis directions. Since the pressure sensor 505 is in direct contact with the precision platform 3, the intermediate links are reduced, improving the sensitivity and accuracy of pressure detection.

[0070] The pressure sensor clamp 504 is connected with the pressure sensor 505, and its main function is to lock the pressure sensor 505. This locking mechanism is crucial for ensuring the stability of the pressure sensor 505. In actual application, the precision platform 3 may be affected by various external factors such as vibration or impact. The presence of the pressure sensor clamp 504 can effectively prevent the pressure sensor 505 from shifting due to these external factors, thereby ensuring the continuous accuracy of pressure detection.

[0071] The locking top rod 506 is connected with the pressure sensor clamp 504, further ensuring the relative fixation between the pressure sensor 505 and the pressure sensor clamp 504. This double fixation mechanism enhances the stability and reliability of the entire pressure detection system. The design of the locking top rod 506 can be adjusted according to specific needs, such as using threaded connection or buckle connection, to facilitate installation and adjustment.

[0072] The synergy of the three components enables the pressure sensor module 5 to accurately capture the pressure changes of the precision platform 3 during the operation of the load detection instrument. For example, when the detection instrument operates along the X-axis module, the pressure sensor 505 can detect the changes in the first pressure value in real time; similarly, when the detection instrument operates along the Y-axis module, the pressure sensor 505 can detect the changes in the second pressure value. These pressure value change information is converted into electrical signals by the pressure sensor 505 and then transmitted to the control system.

[0073] The design of the pressure sensor module 5 not only solves the problem of pressure detection, but also provides necessary data support for the subsequent leveling process of the precision platform 3. Through the accurately detected pressure value information, the control system can accurately control the inflation process of the inflatable active vibration isolator 4, thereby realizing the real-time leveling of the precision platform 3.

[0074] Further, the pressure sensor module 5 also includes a pressure sensor base 502 and a high-stiffness module support leg 501 connected to the bottom of the precision platform 3; the pressure sensor base 502 is connected to the high-stiffness module support leg 501 for installing the pressure sensor 505.

[0075] In some embodiments described above, the present application also has the technical problem of installation stability of the pressure sensor module 5.

[0076] The present application enhances the rigidity of the entire pressure sensor module 5 by setting the high-stiffness module support leg 501, reducing the influence of external vibration on the pressure sensor 505. The pressure sensor base 502 provides a stable installation platform for the pressure sensor 505, ensuring accurate positioning and stable work of the pressure sensor 505.

[0077] Through this structural design, the problem of installation stability of the pressure sensor module 5 can be effectively solved. The combination of the high-stiffness module support leg 501 and the pressure sensor base 502 not only enhances the structural strength of the entire module, but also improves the installation accuracy and working stability of the pressure sensor 505. This is crucial for accurately detecting the pressure value of the load on the precision platform 3, and further provides a reliable data basis for the intelligent leveling of the precision platform 3.

[0078] In the present application, the high-stiffness module support leg 501 can be implemented using a variety of materials and structural designs. For example, high-strength alloy materials such as titanium alloy or special steel can be used. The shape of the support leg can be designed as a cylinder, a prism or other geometric shapes with high stability. To further enhance the stiffness, the support leg can be designed with internal reinforcing ribs or a honeycomb structure.

[0079] The design of the pressure sensor base 502 can also have multiple variations. The base can adopt a planar design or a design with grooves or protruding structures to better fit the pressure sensor 505. In terms of material selection, high-stiffness metal materials such as stainless steel or aluminum alloy can be used, or composite materials can be considered to reduce weight.

[0080] The connection between the high-stiffness module support leg 501 and the bottom of the precision platform 3 can be achieved through various methods such as bolt fixation, welding, or buckle connection. Selecting the appropriate connection method can further improve the stability of the overall structure. The connection between the pressure sensor base 502 and the high-stiffness module support leg 501 can also be achieved through various methods such as threaded connection, buckle connection, or integrated design.

[0081] This structural design not only improves the installation stability of the pressure sensor module 5, but also actively interacts with other components of the precision platform 3. The high-stiffness module support leg 501 provides additional support points for the entire precision platform 3, enhancing the overall stability of the platform. At the same time, stable installation of the pressure sensor 505 helps improve the accuracy of pressure detection, which in turn enables more precise control of the operation of the inflatable active isolator 4, thereby achieving more efficient intelligent leveling.

[0082] Furthermore, the pressure sensor module 5 also includes a servo cylinder 503, which is fixed on the pressure sensor base 502 and connected with the pressure sensor 505, for driving the pressure sensor 505 to rise towards the precision platform 3, so that the initial pressure value of the pressure sensor 505 reaches the middle value of its range.

[0083] In some of the above embodiments, the application also has the problem of inaccurate initial pressure value of the pressure sensor 505 during implementation.

[0084] To solve the problem of inaccurate initial pressure value of the pressure sensor 505, the application introduces a servo cylinder 503. The servo cylinder 503 can accurately control the position of the pressure sensor 505, so that its initial pressure value reaches the preset optimal state. This design ensures that the pressure sensor 505 is within the optimal detection range when it starts working, thereby improving the accuracy and reliability of the entire leveling system.

[0085] By accurately controlling the initial state of the pressure sensor 505, the application can more accurately detect the pressure changes caused by changes in the load on the precision platform 3. This provides a more reliable data basis for subsequent intelligent leveling processes, thereby achieving more efficient and accurate platform leveling.

[0086] The connection between the servo cylinder 503 and the pressure sensor 505 can be achieved through rigid connection.

[0087] The technical solution of the present application precisely adjusts the initial position of the pressure sensor 505 through the servo cylinder 503, so that the initial pressure value reaches the preset pressure value corresponding to the middle value of the range of the servo cylinder 503. This design ensures that the pressure sensor 505 is in the best state when it starts working, and can more accurately detect the pressure change.

[0088] Specifically, after the pressure sensor 505 is installed, the servo cylinder 503 will control the pressure sensor 505 to move towards the precision platform 3 according to the preset target pressure value. In this process, the system will monitor the output value of the pressure sensor 505 in real time. When the detected pressure value reaches the preset target value, the servo cylinder 503 stops moving, and at this time the pressure sensor 505 is in the middle position of its range. When the value is reached, the holding brake on the servo cylinder 503 is locked, thereby fixing the pressure sensor 505 at this position to better detect the pressure value on the precision platform 3.

[0089] The advantage of this design is that it makes the pressure sensor 505 always work in the most sensitive and best linear range. Since the initial state of the pressure sensor 505 is precisely controlled, the system can more accurately detect the small pressure changes caused by changes in the load on the precision platform 3. This provides a more reliable data basis for the subsequent intelligent leveling process.

[0090] Further, the pressure sensor module 5 also includes a guide rod 507, which is fixedly connected with the pressure sensor base 502, and the height of the pressure sensor base 502 is higher than the top of the guide rod 507 and lower than the measuring head of the pressure sensor 505.

[0091] In some of the above embodiments, during the implementation of the present application, there is also a technical problem of the relative position relationship between the pressure sensor 505 and the pressure sensor base 502.

[0092] To this end, the present application sets the height of the guide rod 507 and the pressure sensor base 502 reasonably, which not only ensures the normal work of the measuring head of the pressure sensor 505, but also provides sufficient support and protection. Specifically, the guide rod 507 is assembled perpendicular to the precision platform 3, which can ensure that the pressure sensor 505 rises and falls vertically to the precision platform 3. This structural design helps to improve the stability and measurement accuracy of the pressure sensor module 5, thereby providing reliable data support for the efficient intelligent leveling of the entire precision platform 3.

[0093] Wherein, assuming the initial height difference between the pressure sensor 505 and the pressure sensor base 502 is d1, when the precision platform 3 is tilted and presses the pressure sensor 505, causing the displacement deformation of the pressure sensor 505 to be greater than d1, the excess pressure is borne by the pressure sensor base 502 to ensure the stability of the installation of the pressure sensor 505. For details, please refer to Figure 4 , Figure 4 In the above, d1 is the initial height difference between the pressure sensor 505 and the pressure sensor base 502, and d2 is the maximum displacement distance after the displacement deformation of the pressure sensor 505 exceeds d1.

[0094] The guide rod 507 in the present application is fixedly connected with the pressure sensor base 502, which can provide stable support and guidance for the pressure sensor 505. This design ensures that the pressure sensor 505 maintains the correct position and direction during measurement, thereby improving the accuracy and reliability of the measurement.

[0095] Further, the X-axis module includes an X-axis guide rail 101 arranged along the X-axis direction, and an X-axis load block 102 arranged on the X-axis guide rail 101; the Y-axis module includes a Y-axis guide rail 201 arranged along the Y-axis direction, and a Y-axis load block 202 arranged on the Y-axis guide rail 201; the X-axis load block 102 and the Y-axis load block 202 are respectively used for loading the detection instrument.

[0096] Among them, the design of the X-axis module and the Y-axis module provides high-precision motion control for the detection instrument. The X-axis guide rail 101 and the Y-axis guide rail 201 are arranged along the X-axis and the Y-axis directions respectively, providing a stable track for the movement of the X-axis load block 102 and the Y-axis load block 202. The X-axis load block 102 and the Y-axis load block 202 can slide on their respective guide rails, achieving precise positioning and movement of the detection instrument in the X-axis and Y-axis directions.

[0097] Please refer to Figure 5 , an efficient intelligent leveling method of a precision platform, applied to any efficient intelligent leveling device of the above precision platform, comprising:

[0098] S1: obtaining the first pressure value and the second pressure value detected by the pressure sensor module 5 on the X-axis module and the Y-axis module respectively;

[0099] S2: converting the first pressure value and the second pressure value into a first electric signal and a second electric signal;

[0100] S3: controlling the inflation of the inflatable active vibration isolator 4 according to the first electric signal and the second electric signal;

[0101] S4: Calculate the time when the first pressure value and the second pressure value reach the peak value, and control the inflation speed of the inflatable active vibration isolator 4 according to the time, so that when the first pressure value and the second pressure value reach the peak value, the inflatable active vibration isolator 4 reaches the maximum stiffness through inflation, thereby keeping the precision platform 3 horizontal in the X-axis module direction and the Y-axis module direction.

[0102] Wherein, the high-efficiency intelligent leveling method of the present application predicts the time when the pressure peak value appears by monitoring the pressure change in real time, and adjusts the inflation speed in advance, so that the vibration isolator can reach the maximum stiffness before the platform is tilted due to the movement of the load. This method not only improves the leveling efficiency of the precision platform 3, but also ensures the stability of the platform during the movement of the load, providing a reliable foundation for precision detection and processing.

[0103] Wherein, in order to achieve high sensitivity of the pressure sensor 505, a pressure sensor 505 with small range and high resolution is selected, and the high-sensitivity pressure sensor 505 is used as a trigger point to transmit signals to the active vibration isolator in advance, thereby shortening the time to restore the precision platform 3 to horizontal.

[0104] Wherein, the first pressure value and the second pressure value can be converted into first and second electrical signals by an analog-to-digital converter (ADC).

[0105] Wherein, precise electrically controlled air valves can be used to adjust the opening of the air valve according to the strength of the electrical signal, thereby controlling the inflation rate. In order to achieve more precise control, a step motor driven air valve can be used to achieve small incremental pressure adjustment.

[0106] Further, step S4 includes:

[0107] S41: Calculate the time when the first pressure value reaches the peak value, and control the first inflation speed of the two inflatable active vibration isolators 4 symmetrically arranged along the X-axis according to the time, so that when the first pressure value reaches the peak value, the two inflatable active vibration isolators 4 symmetrically arranged along the X-axis reach the maximum stiffness through inflation;

[0108] S42: Calculate the time when the second pressure value reaches the peak value, and control the second inflation speed of the two inflatable active vibration isolators 4 symmetrically arranged along the Y-axis according to the time, so that when the second pressure value reaches the peak value, the two inflatable active vibration isolators 4 symmetrically arranged along the Y-axis reach the maximum stiffness through inflation, thereby keeping the precision platform 3 horizontal in the X-axis module direction and the Y-axis module direction.

[0109] For details, please refer to Figure 3 Taking the X-axis direction as an example, assuming that the load runs from the pressure sensor module 5-Ⅰ to the pressure sensor module 5-Ⅲ; each pressure sensor module 5 acts as follows:

[0110] The pressure sensor module 5-I and 5-II judge the moving direction of the X guide rail load block 102 by detecting the first pressure value, and the pressure sensor module 5-III judges the moving stroke of the guide rail load block 102;

[0111] The pressure sensor module 5-II judges the pressure of the X guide rail load block 202 on the precision platform 3 by detecting the second pressure value.

[0112] By monitoring the time when the first pressure value of the pressure sensor module 5-II reaches the peak value from the initial pressure value, the peak value can be considered as the maximum stiffness increase of the inflatable active vibration isolator 4, and the time can be considered as the allowable inflation time of the inflatable active vibration isolator.

[0113] In some specific embodiments, when it is necessary to detect the straightness and other precision values of the Y-axis guide rail 201, the load is moved to the side of the guide rail where the pressure sensor module 5-I is located, and the detection is started; when the pressure sensor module 5-II detects pressure fluctuation, the first pressure value detected by the pressure sensor module 5-II is converted into a first electric signal, and the first electric signal starts to drive the inflatable active vibration isolator 4-I, 4-II to inflate and increase the stiffness, reducing the inclination change of the precision platform 3; at the same time, according to the time when the pressure of the pressure sensor module 5-II reaches the peak value, the moving speed of the load is calculated, and then the inflation speed of the inflatable active vibration isolator 4-I, 4-II is controlled, the time is adjusted, and then the working condition requirements of different load moving speeds are met. The pressure change of the inflatable active vibration isolator 4-II, 4-III is continuously detected to judge whether the load is still moving forward, and the inflation of the inflatable active vibration isolator 4-I, 4-II is continuously adjusted until the pressure value of the pressure sensor module 5-III reaches the maximum, which actually means that the inflatable active vibration isolator 4-I, 4-II should also reach the maximum stiffness value by adjusting the air pressure. When the load moves reversely, the action sequence of the pressure sensor module 5 is also reversed, and the inflatable active vibration isolator 4 automatically exhausts to restore to the original stiffness value. In this way, when a large mass load moves, the precision platform 3 on the X-axis guide rail 101 can be efficiently kept in a horizontal state; the operation logic of the Y-axis guide rail 201 precision detection is the same as that of the X-axis guide rail 101. At this point, the adjustment of the efficient intelligent leveling device of the present scheme is completed.

[0114] In the embodiments of the present application, it should be understood that the disclosed apparatus and method can be implemented in other manners. The embodiments described above are merely exemplary, for example, the division of the units is only a logical function division, and there can be another division manner in actual implementation; for example, a plurality of units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the displayed or discussed mutual couplings or direct couplings or communication connections can be indirect couplings or communication connections through some interfaces, devices or units, and can be in electrical, mechanical or other forms.

[0115] In addition, the units described as separate components can or can not be physically separate, and the components displayed as units can or can not be physical units, i.e., can be located in one place, or can be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purposes of the embodiments of the present application.

[0116] In addition, the functional modules in the various embodiments of the present application can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

[0117] In this document, the terms such as first and second are used only to distinguish one entity or operation from another, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations.

[0118] The above only describes the embodiments of the present application, and is not used to limit the protection scope of the present application. For those skilled in the art, various modifications and changes can be made to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. An efficient intelligent leveling device for a precision platform, characterized in that: The system comprises at least a precision platform (3), an X-axis module and a Y-axis module arranged on the top of the precision platform (3), and an inflatable active vibration isolator (4) and a pressure sensor module (5) arranged on the bottom of the precision platform (3); The X-axis module and the Y-axis module are used for load detection instruments; The pressure sensor module (5) is used to detect a first pressure value and a second pressure value of the load on the X-axis module and the Y-axis module on the precision platform (3), and convert the first pressure value and the second pressure value into a first electrical signal and a second electrical signal; There are multiple pressure sensor modules (5), and the multiple pressure sensor modules (5) are arranged at equal distances in the X-axis module direction and the Y-axis module direction; The pressure sensor module (5) comprises at least a pressure sensor (505), a pressure sensor clamp (504) and a locking ejector rod (506); The pressure sensor (505) is arranged at the bottom of the precision platform (3) and is used to detect the first pressure value and the second pressure value of the precision platform (3) when the detection instrument for detecting the load on the precision platform (3) runs along the X-axis module and the Y-axis module respectively; the pressure sensor clamp (504) is connected to the pressure sensor (505) and is used to lock the pressure sensor (505); the locking push rod (506) is connected to the pressure sensor clamp (504) and is used to ensure that the pressure sensor (505) and the pressure sensor clamp (504) are relatively fixed; The inflatable active vibration isolator (4) is used to receive the first electrical signal and the second electrical signal, and to be inflated according to the first electrical signal and the second electrical signal, thereby adjusting the precision platform (3) to a horizontal position.

2. The high-efficiency intelligent leveling device for a precision platform according to claim 1, characterized in that: A plurality of the inflatable active vibration isolators (4) are provided, and the plurality of the inflatable active vibration isolators (4) are symmetrically distributed on the bottom of the precision platform (3).

3. The high-efficiency intelligent leveling device for a precision platform according to claim 1, characterized in that: The pressure sensor module (5) further comprises a pressure sensor base (502) and a high-rigidity module support leg (501), wherein the high-rigidity module support leg (501) is connected to the bottom of the precision platform (3); the pressure sensor base (502) is connected to the high-rigidity module support leg (501) for mounting the pressure sensor (505).

4. The high-efficiency intelligent leveling device for a precision platform according to claim 3, characterized in that: The pressure sensor module (5) further comprises a servo electric cylinder (503), which is fixed on the pressure sensor base (502) and connected to the pressure sensor (505), and is used to drive the pressure sensor (505) to rise toward the precision platform (3), so that the initial pressure value of the pressure sensor (505) reaches the midpoint of its range.

5. The high-efficiency intelligent leveling device for a precision platform according to claim 4, characterized in that: The pressure sensor module (5) further comprises a guide rod (507), wherein the guide rod (507) is fixedly connected to the pressure sensor base (502), and the height dimension of the pressure sensor base (502) is higher than the top of the guide rod (507) and lower than the probe of the pressure sensor (505).

6. The high-efficiency intelligent leveling device for a precision platform according to claim 1, characterized in that: The X-axis module comprises an X-axis guide rail (101) arranged along the X-axis direction, and an X-axis load block (102) arranged on the X-axis guide rail (101); the Y-axis module comprises a Y-axis guide rail (201) arranged along the Y-axis direction, and a Y-axis load block (202) arranged on the Y-axis guide rail (201); the X-axis load block (102) and the Y-axis load block (202) are respectively used for a load detection instrument.

7. A high-efficiency intelligent leveling method for a precision platform, applied to the high-efficiency intelligent leveling device for a precision platform according to any one of claims 1 to 6, characterized in that: The method comprises: S1: Acquire a first pressure value and a second pressure value detected by the pressure sensor module (5) on the X-axis module and the Y-axis module respectively; S2: Converting the first pressure value and the second pressure value into a first electrical signal and a second electrical signal; S3: controlling the inflation of the inflatable active vibration isolator (4) according to the first electrical signal and the second electrical signal; S4: Calculating the time when the first pressure value and the second pressure value reach a peak value, and controlling the inflation speed of the inflatable active vibration isolator (4) according to the time, so that when the first pressure value and the second pressure value reach a peak value, the inflatable active vibration isolator (4) reaches a maximum stiffness through inflation, thereby keeping the precision platform (3) in a horizontal state in the X-axis module direction and the Y-axis module direction.

8. The efficient and intelligent leveling method for a precision platform according to claim 7, characterized in that: Step S4 includes: S41: Calculating the time when the first pressure value reaches a peak value, and controlling the first inflation speed of the two inflatable active vibration isolators (4) symmetrically arranged along the X axis according to the time, so that when the first pressure value reaches a peak value, the two inflatable active vibration isolators (4) symmetrically arranged along the X axis reach a maximum stiffness through inflation; S42: Calculating the time when the second pressure value reaches a peak value, and controlling the second inflation speed of the two inflatable active vibration isolators (4) symmetrically arranged along the Y axis according to the time, so that when the second pressure value reaches a peak value, the two inflatable active vibration isolators (4) symmetrically arranged along the Y axis reach a maximum stiffness through inflation, thereby keeping the precision platform (3) in a horizontal state in the X-axis module direction and the Y-axis module direction.

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