Capillary heat transfer structure of bag-shaped hole and micro-column composite array, manufacturing method and application

Abstract

The invention discloses a capillary heat transfer structure of a bag-shaped hole and micro-column composite array and a manufacturing method and application, and belongs to the technical field of heat transfer. The structure comprises a substrate, a bag-shaped hole array and a curved surface side micro-column array; the bag-shaped hole array is composed of a plurality of bag-shaped holes which are orthogonally arranged, each bag-shaped hole is of a groove structure which is sunken downwards from the surface of the base plate, and an inlet of each bag-shaped hole is narrow and an inner cavity of each bag-shaped hole is large; the curved-surface side micro-column array is composed of a plurality of curved-surface side micro-columns which are orthogonally arranged, the curved-surface side micro-columns are of columnar structures which protrude upwards from the surface of the substrate, and the cross sections of the curved-surface side micro-columns are circular or multi-sharp-lobe-line star-shaped lines; and the plurality of bag-shaped holes and the plurality of curved-surface side micro-columns are arranged in a staggered manner. The method has the advantages of high nucleation efficiency, high phase change capability and the like.

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