A precision metal slit guard for optical imaging systems and method of use

Abstract

The application discloses a precision metal slit protection device for an optical imaging system and a use method, and realizes two functions of anti-pollution and cleaning of the metal slit through cooperation of a metal slit cleaning plate and a metal slit protection assembly. The metal slit protection assembly comprises a metal slit placing plate and a protection assembly upper cover plate, the finished product of the metal slit is placed in the metal slit protection assembly, and physical protection of the metal slit is realized. The surface of the metal slit cleaning plate is processed with two cleaning grooves for cleaning the metal slit. The application can effectively avoid potential pollution problems of the metal slit in links of machining, cleaning, transfer and storage, provides strong guarantee for debugging and assembling of the metal slit in subsequent whole machine equipment, solves the protection problem of the precision metal slit, guarantees reliability of optical performance of the precision metal slit, and has a remarkable guarantee and support effect on development of various high-end precision optical imaging equipment.

Description

Technical Field

[0001] This invention relates to the field of high-end equipment manufacturing industry, specifically proposing a device and method for preventing contamination and cleaning precision metal slits in high-resolution optical imaging systems. Background Technology

[0002] The metal slit in a high-resolution optical imaging system is one of the key components for spectral dispersion, and its machining precision directly determines the spectral resolution of the system. Therefore, the geometric precision of the metal slit is crucial, with its width being one important indicator. However, due to the presence of numerous suspended particles and dust in the air, ranging in size from 0.001 μm to 1000 μm, when the width of a precision metal slit is less than 50 μm, it is highly susceptible to contamination by these particles and human sweat during processing, cleaning, transportation, storage, and handling. Contamination directly affects the slit's width and other geometric parameters, obstructing the imaging field of view and impacting image quality. This necessitates rework in the development of the optical imaging system, increasing both human and material costs. To prevent contamination from affecting the normal operation of the optical imaging system, protective measures must be implemented in advance during the processing, cleaning, transportation, storage, and handling of the metal slit. Therefore, designing a dedicated anti-contamination and cleaning device to address the contamination problem of precision metal slits in high-resolution optical imaging systems has become an urgent issue that needs to be resolved.

[0003] Currently, there are no reports on anti-contamination devices for precision metal slits in high-resolution optical imaging systems. In order to improve the stability of optical imaging systems, there is an urgent need to develop anti-contamination and cleaning devices and their usage methods for precision metal slits in high-resolution optical imaging systems.

[0004] An invention disclosed in publication number CN115683332A provides a dustproof device for an ultra-narrow slit in a spectrometer. This invention addresses the slit contamination problem by optimizing the material, shape, thickness, and film system of the dustproof glass at both ends of the slit, and by using the installation position of the dustproof glass and a partially sealed design. However, this dustproof device is suitable for use in the environment where the slit is installed on the spectrometer, but not for preventing contamination during the processing, cleaning, transportation, storage, and handling of metal slits, thus having limitations. A utility model patent in publication number CN211741039U discloses a spectrometer with a dustproof device, which reduces the possibility of dust accumulation in the slit. However, the dustproof device involved in this utility model patent is suitable for the use environment of the slit installed in the spectrometer, but it is not suitable for the prevention of contamination of metal slits in the processing, cleaning, transportation, storage and clamping processes. Moreover, the slit in this invention is a disc-shaped slit turntable, which is fundamentally different from the metal slit involved in this invention. Therefore, its limitations are obvious.

[0005] In summary, to avoid potential contamination of metal slits during processing, cleaning, transportation, storage, and handling, and to ensure the proper assembly and functionality of the optical system in the later stages, it is urgently necessary to propose a contamination prevention and cleaning device and method for precision metal slits in high-resolution optical imaging systems. Summary of the Invention

[0006] In order to effectively avoid the problem of potential contamination of metal slits during processing, cleaning, transportation, storage and clamping, and to ensure the normal assembly and use of the optical system in the later stages, this invention proposes a protective device and method for precision metal slits in optical imaging systems.

[0007] The precision metal slit protection device for optical imaging systems proposed in this invention consists of a metal slit cleaning plate and a metal slit protection component used together to achieve the two functions of preventing contamination and cleaning the metal slit.

[0008] The metal slot protection assembly includes a metal slot placement plate, a protective assembly cover plate, and a vacuum valve. The protective assembly cover plate is fixed to the upper surface of the metal slot placement plate; the vacuum valve is located on the upper surface of the protective assembly cover plate and is installed in a vacuum valve mounting hole. Once the metal slot is completed, the finished metal slot is placed inside the metal slot protection assembly to achieve physical protection of the metal slot.

[0009] The upper cover of the protective assembly is also a rectangular plate. The mounting hole for the vacuum valve is located on the line of symmetry in the width direction of the upper cover of the protective assembly.

[0010] The upper surface of the metal slot placement plate has two elongated metal slots machined parallel to each other; a partition plate is placed between the two metal slots. The inner dimensions of the metal slots are the same as the outer dimensions of the metal slots. Sealing grooves are machined around the periphery of the two elongated metal slots.

[0011] Connecting holes are distributed on the upper surface of the four edges of the metal slot placement plate; upper cover plate positioning pin holes are distributed on the four sides of the two metal slot placement grooves and on the upper surface of the partition plate. The metal slot placement plate is fixedly connected to the upper cover plate of the protective assembly through the connecting holes and the upper cover plate positioning pin holes.

[0012] Multiple cover plate positioning pins are distributed on the lower surface of the cover plate of the protective assembly, and each cover plate positioning pin corresponds to a cover plate positioning pin hole on the metal slit placement plate. Connecting holes are also distributed along the four edges of the cover plate of the protective assembly, and each connecting hole corresponds to a connecting hole on the metal slit placement plate.

[0013] After the protective component's upper cover plate is assembled with the metal slit placement plate, a gap is formed between the lower surface of the protective component's upper cover plate and the upper surface of the metal slit placement plate by a sealing ring placed in the sealing groove, so that the metal slit placement groove can be evacuated by a vacuum valve.

[0014] The surface of the metal slot cleaning plate is machined with two cleaning grooves, the positions of which correspond to the positions of the metal slot placement grooves. The internal dimensions of the cleaning grooves are the same as those of the metal slot placement grooves. Multiple parallel grooves are present within the cleaning grooves, serving as cleaning fluid flow channels.

[0015] The specific process of using the metal slit protection device proposed in this invention is as follows:

[0016] Step 1, Cleaning of equipment and tools:

[0017] Ultrasonic cleaning is performed on the metal slit protection device to ensure it is thoroughly cleaned.

[0018] Step 2, Precision metal slit placement:

[0019] Two precision metal slits are clamped and placed in the metal slit placement slots of the metal slit placement plate to complete the metal slit placement.

[0020] Step 3, sealing and protection:

[0021] A sealing ring is placed in the sealing groove of the metal slit plate.

[0022] The protective component's upper cover plate is fastened to the upper surface of the metal slit placement plate and positioned using the locating pins of each upper cover plate; the protective component's upper cover plate is then fixed to the metal slit placement plate.

[0023] Step 4, sealing and protection:

[0024] Install the vacuum valve in the vacuum valve mounting hole on the cover plate of the protective assembly.

[0025] Evacuate the protective assembly to a low vacuum. Place the protective assembly into a vacuum bag and seal it to complete the sealing and protection of the metal slit.

[0026] This completes the process of protecting the precision metal slits of the optical imaging system from contamination.

[0027] The specific process for cleaning using the metal slit protection device proposed in this invention is as follows:

[0028] Step 1, Cleaning Preparation:

[0029] When cleaning the metal slit, remove the protective assembly located in the vacuum seal from the vacuum bag and remove the vacuum valve.

[0030] Step 2, Replace the metal slot cleaning plate:

[0031] Replace the protective component cover plate with the metal slot cleaning plate, and make the metal slot placement groove on the metal slot placement plate and the cleaning groove on the metal slot cleaning plate face to face.

[0032] The metal slot placement plate and the metal slot cleaning plate, which are attached together, are flipped over so that the metal slot placement plate is positioned on the upper surface of the metal slot cleaning plate. This allows the metal slots placed in their respective slots to fall into the cleaning tanks on the metal slot cleaning plate. The metal slot cleaning plate with the metal slots is then placed in an ultrasonic cleaning tank for cleaning.

[0033] Turn on ultrasonic cleaning for 10 minutes. During cleaning, the ultrasonic power is 50-80 kHz.

[0034] This completes the cleaning of the metal slits.

[0035] This invention can effectively avoid potential contamination problems that may occur in the processing, cleaning, transportation, and storage of metal slits, and provides strong support for the subsequent debugging and assembly of metal slits in complete equipment.

[0036] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0037] When it is necessary to protect precision metal slits from contamination, the metal slit placement plate and the protective component cover plate of the present invention are used in conjunction. After the metal slit is placed in the slit, a sealing ring is installed in the sealing groove of the metal slit placement plate. After assembly, the device is bagged and vacuum-sealed. When it is necessary to clean precision metal slits, the metal slit placement plate and the metal slit cleaning plate of the present invention are used in conjunction. The metal slit is flipped and transferred into the cleaning tank of the metal slit cleaning plate. Then, the metal slit cleaning plate is placed in the cleaning tank for cleaning. The flow channel of the cleaning fluid effectively ensures the convection of the ultrasonic cleaning medium, thereby achieving non-contact and effective cleaning of precision metal slits. Figure 7 After a precision metal slit was exposed to air for a period of time, the coordinate measuring machine image of the slit clearly showed particulate foreign matter at the slit. Figure 8 The image shown is a coordinate measuring machine (CMM) image of a precision metal slit cleaned and stored using the device of this invention. Clearly, this invention achieves both contamination prevention and non-contact cleaning of the precision metal slit. Therefore, the device and its method of use can effectively prevent dust and suspended particles in the air from adhering to the precision metal slit during processing, cleaning, transportation, and storage, solving the protection problem of precision metal slits, ensuring the reliability of their optical performance, and providing significant support for the development of various high-end precision optical imaging equipment. Attached Figure Description

[0038] Figure 1 A 3D view of a metal slot plate.

[0039] Figure 2 A 3D view of the cover plate of the protective component.

[0040] Figure 3 A 3D model of a metal slot cleaning plate.

[0041] Figure 4 This is a cross-sectional view of a metal slot cleaning plate.

[0042] Figure 5 This is a 3D view of a metal slit.

[0043] Figure 6 This is a 3D assembly drawing of a precision metal slit anti-pollution device.

[0044] Figure 7 This is an image of an unprotected metal slit optical imager during inspection.

[0045] Figure 8 This is a metal slit optical imager image stored using this anti-pollution device.

[0046] In the diagram: 1. Metal slit placement groove; 2. Top cover plate positioning pin hole; 3. Sealing groove; 4. Connection hole; 5. Metal slit placement plate; 6. Top cover plate positioning pin; 7. Top cover plate fixing hole; 8. Vacuum valve mounting hole; 9. Protective component top cover plate; 10. Cleaning fluid flow channel; 11. Cleaning tank; 12. Metal slit cleaning plate; 13. Slit; 14. Metal slit; 15. Vacuum valve; 16. Screw. Detailed Implementation

[0047] Example 1:

[0048] This embodiment is a device for preventing contamination and cleaning precision metal slits in optical imaging systems during processing, cleaning, transportation, and storage. By using a metal slit placement plate, a protective component cover plate, and a metal slit cleaning plate in combination, the device achieves contamination prevention and cleaning of the precision metal slits.

[0049] The metal slit protection device is used in conjunction with the metal slit cleaning plate 12 and the metal slit protection assembly to achieve the two functions of preventing pollution and cleaning the metal slit.

[0050] The metal slit protection assembly includes a metal slit placement plate 5, a protective assembly cover plate 9, and a vacuum valve 15. The protective assembly cover plate is fixed to the upper surface of the metal slit placement plate; the vacuum valve is located on the upper surface of the protective assembly cover plate and is installed in the vacuum valve mounting hole 8. The finished metal slit is placed inside the metal slit protection assembly to achieve physical protection of the metal slit.

[0051] The metal slot placement plate 5 is a rectangular plate, and two elongated metal slot placement grooves 1 are machined parallel to each other on the upper surface of the metal slot placement plate; a partition plate is provided between the two metal slot placement grooves. The inner cavity dimensions of the metal slot placement grooves are the same as the outer dimensions of the metal slots. Sealing grooves 3 are machined around the periphery of the two elongated metal slot placement grooves.

[0052] Connecting holes 4 are distributed on the upper surface of the four edges of the metal slot placement plate; upper cover plate positioning pin holes 2 are distributed on the four sides of the two metal slot placement grooves and on the upper surface of the partition plate. The metal slot placement plate 5 is fixedly connected to the upper cover plate 9 of the protective assembly through the connecting holes and the upper cover plate positioning pin holes.

[0053] The upper cover plate 9 of the protective assembly is also a rectangular plate. Multiple upper cover plate positioning pins 6 are distributed on the lower surface of the upper cover plate, each corresponding to a positioning pin hole on the metal slit placement plate. Connecting holes are also distributed along the four edges of the upper cover plate, each corresponding to a connecting hole 4 on the metal slit placement plate. A vacuum valve mounting hole 8 is provided on the upper cover plate, and this hole is located on a line of symmetry along the width direction of the upper cover plate.

[0054] After the protective component upper cover plate is assembled with the metal slit placement plate, a gap is formed between the lower surface of the protective component upper cover plate and the upper surface of the metal slit placement plate by the sealing ring placed in the sealing groove 3, so that the metal slit placement groove can be evacuated by the vacuum valve.

[0055] The metal slot cleaning plate 12 is also a rectangular plate; two cleaning grooves 11 are machined on the surface of the metal slot cleaning plate, and the positions of the two cleaning grooves correspond to the positions of the metal slot placement groove 1. The inner cavity size of the cleaning groove is the same as the size of the metal slot placement groove. There will be multiple parallel grooves in the cleaning groove, which are cleaning fluid flow channels 10.

[0056] In this embodiment, the metal slot placement plate 5 is made of lightweight, high-strength aluminum alloy. Its main feature is that two metal slot placement grooves 1, with the same length, width, and thickness as the metal slots, are machined on the upper surface of the metal slot placement plate 5, and these grooves 1 are symmetrically distributed on the upper surface of the metal slot placement plate 5. Two connecting holes 2 are machined on the upper surface of each of the two long edges of the two metal slot placement grooves 1, and one connecting hole 2 is machined on the upper surface of each of the two short edges, for a total of 12 connecting holes 2 machined on the upper surfaces of the four edges of the two metal slot placement grooves 1. A sealing groove 3 is machined around the perimeter of each of the two metal slot placement grooves 1. Eight connecting holes 4 are distributed on the upper surface of the four edges of the metal slot placement plate 5, with three connecting holes 4 distributed on the upper surface of each long edge and three connecting holes 4 distributed on the upper surface of each short edge.

[0057] The protective component upper cover plate 9 is made of lightweight, high-strength aluminum alloy, and its main feature is that it has the same external dimensions as the metal slot placement plate 5. The lower surface of the protective component upper cover plate 9 is machined with upper cover plate positioning pins 6 corresponding to the upper cover plate positioning pin holes 2 on the upper surface of the metal slot placement plate 5. A total of 12 upper cover plate positioning pins 6 are machined, with a height equal to the depth of the upper cover plate positioning pin holes 2. Their function is to prevent the precision metal slot 14 from moving freely after the metal slot placement plate 5 and the protective component upper cover plate 9 are assembled. The lower surface of the protective component upper cover plate 9 is machined with upper cover plate fixing holes 7 corresponding to the upper cover plate connecting holes 4 on the upper surface of the metal slot placement plate 5. Their function is to secure the metal slot placement plate 5 and the protective component upper cover plate 9 with screws after assembly. The protective component upper cover plate 9 is machined with vacuum valve mounting holes 8, and these vacuum valve mounting holes 8 are located on a symmetrical line in the width direction of the protective component upper cover plate 9.

[0058] The metal slot cleaning plate 12 is made of lightweight, high-strength aluminum alloy. Its structural features are basically the same as those of the metal slot placement plate 5. The main difference is that the upper surface of the metal slot cleaning plate 12 does not have a sealing groove 3. Instead, 12 through cleaning fluid flow grooves 10 are machined along the length of the bottom surface of the two metal slot placement grooves 1, which have the same length, width, and thickness as the metal slot. The function of these grooves is that when cleaning the metal slot, the upper cover plate 9 of the protective component is removed, and then the metal slot cleaning plate 12 is directly assembled with the metal slot placement plate 5. By flipping it over, the metal slot is transferred into the metal slot placement groove 11 of the metal slot cleaning plate 12, thereby avoiding the problem of contamination of the metal slot caused by manual operation during ultrasonic cleaning.

[0059] During assembly, the rubber sealing ring is installed in the sealing groove 3 of the metal slit placement plate 5 to achieve a seal after assembly with the upper cover plate 9 of the protective component. The screws 16 are sequentially installed into the upper cover plate fixing holes 7 of the upper cover plate 9 of the protective component and tightened sequentially to complete the locking and fixing of the device. The vacuum valve 15 is installed in the vacuum valve mounting hole 8 of the upper cover plate 9 of the protective component and tightened, serving as the interface for subsequent vacuuming.

[0060] Example 2:

[0061] This embodiment is a protection method for precision metal slits in optical imaging systems during processing, cleaning, transportation, and storage.

[0062] The precision metal slit 14 is made of pure tungsten alloy with a thickness of 0.1 mm and 0.2 mm, and the slits 13 distributed on the surface have a width of 40 μm.

[0063] The specific process of this embodiment is as follows:

[0064] Step 1, Cleaning of equipment and tools:

[0065] The metal slit placement plate 5, the protective component cover plate 9, the metal slit cleaning plate 12, the vacuum valve 15, the screws 16, as well as the tweezers and sealing rings used to grip the precision metal slits, are ultrasonically cleaned using distilled water to ensure they are thoroughly cleaned.

[0066] Step 2, Precision metal slit placement:

[0067] Using clean tweezers with rubber tips, pick up two precision metal slits 14 and place them in the metal slit placement slot 1 of the metal slit placement plate 5 to complete the metal slit placement.

[0068] Step 3, Installation of the sealing ring:

[0069] After completing step 2 above, a sealing ring is placed in the sealing groove 3 of the metal slit placement plate 5.

[0070] Step 4, Assembly of the metal slotted plate and the protective assembly cover plate:

[0071] The upper cover plate locating pins 6 of the protective component upper cover plate 9 are fully engaged with the upper cover plate locating pin holes 2, so that the upper cover plate locating pins 6 and the upper cover plate locating pin holes 2 are correspondingly engaged, thereby completing the assembly of the metal slit placement plate 5 and the protective component upper cover plate 9.

[0072] Step 5, lock and secure the device:

[0073] Screws 16 are installed sequentially at the upper cover plate fixing holes 7 of the upper cover plate 5 of the protective component, so that the metal slit placement plate 5 and the upper cover plate 9 of the protective component are tightly assembled to complete the locking and fixing of the device.

[0074] Step 6, Vacuum valve installation:

[0075] The vacuum valve 15 is installed in the vacuum valve mounting hole 8 of the cover plate 9 of the protective assembly for evacuation, thereby completing the installation of the vacuum valve 15.

[0076] Step 7, vacuum sealing and bagging:

[0077] Vacuum valve 15 is provided to evacuate the protective components to a low vacuum. The protective components are then placed into a vacuum bag and sealed to complete the sealing and protection of the metal slit.

[0078] This completes the process of protecting the precision metal slits of the optical imaging system from contamination.

[0079] Experiments show that the application of this invention can effectively prevent dust and suspended particles in the air from adhering to the precision metal slit during processing, cleaning, transportation, and storage, thereby ensuring the reliability of the optical properties of the precision metal slit.

[0080] Example 3:

[0081] This embodiment describes a method for cleaning a precision metal slit in an optical imaging system using the aforementioned metal slit cleaning plate. The precision metal slit 14 is made of pure tungsten alloy with a thickness of 0.1 mm and has 6 slits distributed on its surface. The slit width of the slit 13 is 40 μm.

[0082] The specific process is as follows:

[0083] Step 1, Cleaning Preparation:

[0084] When cleaning the metal slit 14, the protective assembly located in the vacuum seal is removed from the vacuum bag, and the vacuum valve 15 and connecting screws are removed.

[0085] Step 2, Replace the metal slot cleaning plate:

[0086] Replace the protective component cover plate 9 with the metal slot cleaning plate 12. After replacement, ensure that the metal slot placement plate 5 and the metal slot cleaning plate 12 are aligned in the geometric length and width direction, and that the metal slot placement groove 1 on the metal slot placement plate 5 and the cleaning groove 11 on the metal slot cleaning plate 12 are face to face.

[0087] The metal slot placement plate and the metal slot cleaning plate, which are attached together, are flipped over so that the metal slot placement plate is positioned on the upper surface of the metal slot cleaning plate. This allows the metal slots placed in the slots to fall into the cleaning tanks on the metal slot cleaning plate. The metal slot cleaning plate 12 with the metal slots is then placed in an ultrasonic cleaning tank for cleaning.

[0088] Turn on ultrasonic cleaning for 10 minutes. During cleaning, the ultrasonic power is 50-80 kHz.

[0089] This completes the cleaning of the metal slits.

[0090] Experiments show that the present invention can effectively clean precision metal slits, thereby ensuring the reliability of the optical properties of precision metal slits.

Claims

1. A precision metal slit guard for an optical imaging system, characterized by, The metal slot cleaning plate (12) and the metal slot protection assembly are used together to achieve the two functions of preventing contamination and cleaning the metal slot; The metal slit protection assembly includes a metal slit placement plate (5), a protection assembly cover plate (9), and a vacuum valve (15). The protection assembly cover plate is fixed to the upper surface of the metal slit placement plate. The vacuum valve is located on the upper surface of the protection assembly cover plate and is installed in the vacuum valve mounting hole (8). The finished metal slit is placed inside the metal slit protection assembly to achieve physical protection of the metal slit. The protective component cover plate (9) is a rectangular plate; the vacuum valve mounting hole is located on the line of symmetry in the width direction of the protective component cover plate; two elongated metal slot placement grooves (1) are machined parallel to each other on the upper surface of the metal slot placement plate (5); there is a partition plate between the two metal slot placement grooves; the inner cavity size of the metal slot placement groove is the same as the outer size of the metal slot; sealing grooves (3) are machined around the two elongated metal slot placement grooves. When the protective component upper cover plate is assembled with the metal slit placement plate, a gap is formed between the lower surface of the protective component upper cover plate and the upper surface of the metal slit placement plate by the sealing ring placed in the sealing groove (3), so as to evacuate the metal slit placement groove by the vacuum valve. The surface of the metal slot cleaning plate is processed with two cleaning grooves (11), and the positions of the two cleaning grooves correspond to the positions of the metal slot placement groove (1); the inner cavity size of the cleaning groove is the same as the size of the metal slot placement groove; there are multiple parallel grooves in the cleaning groove, which are cleaning fluid flow grooves (10).

2. The precision metal slit guard for optical imaging systems of claim 1, wherein, Connecting holes (4) are distributed on the upper surface of the four edges of the metal slot placement plate; upper cover plate positioning pin holes (2) are distributed on the four sides of the two metal slot placement slots and the upper surface of the partition plate; the metal slot placement plate (5) is fixedly connected to the upper cover plate (9) of the protective component through the connecting holes and the upper cover plate positioning pin holes.

3. The precision metal slit protection device for optical imaging systems as described in claim 1, characterized in that, Multiple upper cover positioning pins (6) are distributed on the lower surface of the upper cover plate of the protective component, and each upper cover positioning pin corresponds to the upper cover positioning pin hole on the metal slit placement plate; connecting holes are also distributed on the four edges of the upper cover plate of the protective component, and each connecting hole corresponds to the connecting hole (4) on the metal slit placement plate.

4. A protection method using the metal slit protection device as described in claim 1, characterized in that, The specific process is as follows: Step 1, Cleaning of equipment and tools: Ultrasonic cleaning of metal slit protection devices is performed to ensure they are thoroughly cleaned. Step 2, Precision metal slit placement: Two precision metal slots (14) are clamped and placed in the metal slot placement groove (1) of the metal slot placement plate (5) to complete the metal slot placement; Step 3, sealing and protection: A sealing ring is placed in the sealing groove (3) of the metal slit plate; The protective component upper cover plate (9) is fastened to the upper surface of the metal slit placement plate and positioned by the positioning pins of each upper cover plate; the protective component upper cover plate is fixed to the metal slit placement plate; Step 4, sealing and protection: Install the vacuum valve (15) in the vacuum valve mounting hole (8) on the cover plate of the protective assembly. Evacuate the protective components to a low vacuum; place the protective components into a vacuum bag and seal it to complete the sealing and protection of the metal slit; This completes the process of protecting the precision metal slits of the optical imaging system from contamination.

5. A cleaning method using the metal slit protection device as described in claim 1, characterized in that, The specific process is as follows: Step 1, Cleaning Preparation: When cleaning the metal slit (14), the protective assembly located in the vacuum seal is removed from the vacuum bag and the vacuum valve (15) is removed. Step 2, Replace the metal slot cleaning plate: Replace the protective component cover plate (9) with the metal slot cleaning plate (12), and make the metal slot placement groove (1) on the metal slot placement plate (5) and the cleaning groove (11) on the metal slot cleaning plate face to face. Flip the metal slot placement plate and the metal slot cleaning plate that are attached together so that the metal slot placement plate is located on the upper surface of the metal slot cleaning plate, and then let the metal slots placed in each metal slot placement groove fall into the cleaning groove on the metal slot cleaning plate; put the metal slot cleaning plate (12) with metal slots into the ultrasonic cleaning tank for cleaning. Turn on ultrasonic cleaning for 10 minutes; during cleaning, the ultrasonic power is 50~80KHz; This completes the cleaning of the metal slits.

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