A calibration method and device for testing equipment

Abstract

The present invention discloses a calibration method and device for detection equipment. The calibration method specifically includes the following steps: obtaining the actual data of the target product and the product detection data measured by the detection equipment; mapping the product detection data based on the reference gauge calibration model to provide initial product calibration data; combining the initial product calibration data and the one-time product calibration model to provide calibration product calibration data; completing the calibration of the detection equipment according to the actual data of the target product and the calibration product calibration data. The calibration scheme for the detection equipment provided by the present invention achieves green calibration by establishing an association between the reference gauge and the target product, thereby avoiding the waste of production materials during product calibration. At the same time, the association between each detection equipment under multiple detection equipment is also provided to ensure the consistency of the calibration results of multiple detection equipment and improve the calibration efficiency.

Description

Technical Field

[0001] The present invention belongs to the technical field of detection equipment calibration, and in particular relates to a detection equipment calibration method and device. Background Art

[0002] For products such as paper, non-woven fabrics, copper foil, etc., during the production process, the testing equipment must detect and feedback control the gram weight, surface density, etc. Generally speaking, the test data is obtained by using X-rays or β-rays to penetrate sheet products and calculating based on the numerical comparison before and after penetration.

[0003] When testing a product of a certain specification, the testing equipment must be calibrated to reduce the testing error and ensure the accuracy of the test data. Conventionally, when calibrating the testing equipment, the method of cutting out the tested object with a specific area for testing is adopted to calibrate the calculation results of the testing equipment.

[0004] For example, patent CN117129371A provides a calibration method, device and readable storage medium for an areal density meter, the method comprising: obtaining the machine-measured areal density of a sample obtained by measuring the areal density meter, and correcting the machine-measured areal density of the sample, and calibrating the areal density meter according to the corrected machine-measured areal density and the actual areal density of the sample. The calibration method provided by the embodiment of the scheme can reduce the error between the machine-measured areal density of the sample and the actual areal density by correcting the machine-measured areal density of the sample. In this way, when the areal density meter is calibrated according to the actual areal density of the sample and the corrected machine-measured areal density, the accuracy of the calibration result can be improved, and then the measurement error of the areal density meter during the measurement process can be reduced.

[0005] However, when mass-production of products is carried out, manufacturers will produce multiple products of different specifications on multiple production lines at the same time, and each production line will be equipped with testing equipment. Each calibration requires cutting out a specific area of ​​the object to be tested of different specifications of the product, and each specification of the customized production needs to be calibrated independently, which will not only cause the distance from the raw material end to the finished product testing end of the production line to be too long, but also because the products damaged by proofing during the calibration of different specifications of products cannot be used in rolls, resulting in a large waste of product materials.

[0006] At the same time, there are often multiple testing devices on the product production line, and each testing device needs to be calibrated before producing products. Moreover, due to the different conditions of radiation attenuation and sensor performance aging between different testing devices, the calibration results of one testing device are almost impossible to apply to another testing device. The calibration results between different testing devices cannot be consistent, and each testing device needs to be calibrated independently, which greatly affects the calibration efficiency of the testing equipment.

[0007] Therefore, how to avoid waste of product production materials during calibration, and how to calibrate multiple testing devices for products of various specifications to ensure consistency of calibration results of multiple testing devices are issues that need to be urgently addressed by technical personnel in this field. Summary of the invention

[0008] In view of the defects existing in the above-mentioned prior art, the present invention provides a calibration method and device for detection equipment, and the calibration method specifically includes the following steps: obtaining the actual data of the target product and the product detection data measured by the detection equipment; mapping the product detection data based on the reference gauge calibration model to give the initial product calibration data, wherein the reference gauge calibration model is used for the calibration of the reference gauge in the detection equipment; combining the initial product calibration data and the first product calibration model, giving the calibration product calibration data, wherein the first product calibration model is used for the calibration of the target product and the reference gauge in the detection equipment for correction; according to the actual data of the target product and the calibration product calibration data, the calibration of the detection equipment is completed. The calibration scheme of the detection equipment provided by the present invention achieves green calibration by establishing the association between the reference gauge and the target product, avoiding the production waste of production materials during product calibration. At the same time, the association between each detection equipment under multiple detection equipment is also given to ensure the consistency of the calibration results of multiple detection equipment and improve the calibration efficiency.

[0009] In a first aspect, the present invention provides a calibration method for a detection device, which specifically comprises the following steps:

[0010] Obtain actual data of target products and product test data measured by testing equipment;

[0011] Based on the reference gauge sheet calibration model, the product inspection data is mapped and processed to give the initial product calibration data, wherein the reference gauge sheet calibration model is used to calibrate the reference gauge sheet in the inspection equipment;

[0012] Combine the initial product calibration data and the primary product calibration model to give the calibration product calibration data, wherein the primary product calibration model is used to correct the calibration of the target product and the reference gauge in the detection equipment;

[0013] Complete the calibration of the testing equipment based on the actual data of the target product and the calibration data of the calibration product.

[0014] Furthermore, the construction of the reference film calibration model specifically includes the following steps:

[0015] Acquire actual data of the reference gauge sheet sample and test data of the reference gauge sheet sample measured by a test device;

[0016] Based on the analysis of the actual data of the benchmark film samples and the test data, a benchmark film calibration model is constructed.

[0017] Furthermore, the construction of a product calibration model specifically includes the following steps:

[0018] Combining the benchmark calibration model with the actual data of the target product, a product calibration model is given.

[0019] Furthermore, according to the actual data of the target product and the calibration data of the calibration product, the calibration of the testing equipment is completed, which is specifically expressed as follows:

[0020] Based on the comparative analysis of the actual data of the target product and the calibration data of the calibration product, the calibration coefficient is determined, the secondary product calibration model of the testing equipment is given, and the calibration of the testing equipment is completed;

[0021] Among them, the secondary product calibration model is used to calibrate the actual data of the target product in the detection equipment with the calibration data of the calibration product, and the calibration coefficient is a constant coefficient.

[0022] In a second aspect, the present invention provides a calibration method for a detection device, which is applied to multiple detection devices and specifically comprises the following steps:

[0023] Obtain the actual data of the target product and the product test data measured by each test equipment;

[0024] Based on the first reference gauge sheet calibration model, the product inspection data is mapped and processed to provide initial product calibration data, wherein the first reference gauge sheet calibration model is used for calibration of the reference gauge sheet in each inspection device;

[0025] Combine the initial product calibration data, the reference gauge correction model and the first product calibration model to give the calibration product calibration data, wherein the reference gauge correction model is used to correct the calibration of the reference gauge based on the main detection device and each detection device, and the first product calibration model is used to correct the calibration of the target product and the reference gauge in the main detection device;

[0026] Complete the calibration of each testing equipment based on the actual data of the target product and the calibration data of the calibration product.

[0027] Furthermore, the construction of the first reference film calibration model specifically includes the following steps:

[0028] Acquire actual data of the reference gauge film sample and test data of the reference gauge film sample measured by each test device;

[0029] Based on the analysis of the actual data of the reference gauge film sample and the detection data, a first reference gauge film calibration model is constructed.

[0030] Furthermore, the first reference piece calibration model is specifically expressed as:

[0031] ;

[0032] in, is the actual data of the reference film sample, x is the detection data of the reference film sample by the slave detection equipment, n is a positive number not less than 2, are respectively the correction coefficients of the first reference piece calibration model.

[0033] Furthermore, combining the initial product calibration data, the reference gauge correction model and the first product calibration model, the calibration product calibration data is given, which specifically includes the following steps:

[0034] Based on the reference gauge correction model, the initial product calibration data is calibrated to obtain the first calibration product calibration data;

[0035] Based on the first product calibration model, the initial calibration product calibration data is calibrated to obtain the calibrated product calibration data.

[0036] Furthermore, the construction of the reference gauge correction model specifically includes the following steps:

[0037] Performing calibration of a reference gauge sheet on the main detection device and providing a calibration model of a second reference gauge sheet;

[0038] Combining the second reference gauge piece calibration model with the first reference gauge piece calibration model, a reference gauge piece correction model is provided.

[0039] Further, the reference gauge piece is calibrated on the main detection device to provide a second reference gauge piece calibration model, which specifically includes the following steps:

[0040] Acquire actual data of the reference gauge sample and detection data of the reference gauge sample measured by the main detection device;

[0041] Based on the analysis of the actual data of the reference gauge film sample and the detection data, a second reference gauge film calibration model is constructed.

[0042] Furthermore, the second reference film calibration model is specifically expressed as:

[0043] ;

[0044] in, is the actual data of the benchmark sample. is the test data of the reference sample measured by the main test equipment, m is a positive number not less than 2, are the correction coefficients of the second reference piece calibration model respectively.

[0045] Furthermore, combining the second reference gauge piece calibration model and the first reference gauge piece calibration model, a reference gauge piece correction model is given, which is specifically expressed as:

[0046]

[0047] in, Correction model for the benchmark piece, is the calibration model for the second reference piece, is the first reference film calibration model, x is the detection data of the reference film measured by each detection equipment, α and β are the first correction coefficient and the second correction coefficient respectively.

[0048] Furthermore, the construction of the first product calibration model specifically includes the following steps:

[0049] Performing calibration of a reference gauge sheet on the main detection device and providing a calibration model of a second reference gauge sheet;

[0050] Based on the product inspection data measured by the main inspection equipment, combined with the second reference piece calibration model and the actual data of the target product, a first product calibration model is given.

[0051] Furthermore, combining the second reference sheet calibration model and the actual data of the target product, the first product calibration model is given, which is specifically expressed as:

[0052] ;

[0053] Among them, F 1 [ ] is the first product calibration model, is the calibration model for the second reference piece, Product test data measured by the main equipment, is the actual data of the target product, γ, They are the primary correction factor and the secondary correction factor respectively.

[0054] Furthermore, according to the actual data of the target product and the calibration data of the calibration product, the calibration of each testing equipment is completed, which is specifically expressed as follows:

[0055] Based on the comparative analysis of the actual data of the target product and the calibration data of the calibration product, the calibration coefficient is determined, the second product calibration model of each testing equipment is given, and the calibration of each corresponding testing equipment is completed;

[0056] The second product calibration model is used for calibrating the actual data of the target product in each detection device with the calibration data of the calibration product, and the calibration coefficient is a constant coefficient.

[0057] Furthermore, the second product calibration model is specifically expressed as:

[0058]

[0059] in, is the actual data of the target product, F 2 {} is the second product calibration model, F 1 [ ] is the first product calibration model, Correction model for the benchmark piece, is the calibration model of the first reference film, X is the test data of the target product measured by each test equipment, is the correction constant.

[0060] In a third aspect, the present invention provides a calibration device for a detection device, which adopts the calibration method for the detection device as described above, and specifically comprises:

[0061] A collection unit, used to obtain actual data of the target product and product test data measured by the testing equipment;

[0062] A data processing unit is used to map the product test data based on the reference gauge calibration model to provide initial product calibration data, wherein the reference gauge calibration model is used to calibrate the reference gauge in the test equipment;

[0063] Combined with the initial product calibration data and the primary product calibration model, the calibration product calibration data is given. The primary product calibration model is used to correct the calibration of the target product and the reference gauge in the detection equipment.

[0064] The calibration unit is used to complete the calibration of the testing equipment according to the actual data of the target product and the calibration data of the calibration product.

[0065] In a fourth aspect, the present invention further provides a calibration device for a detection device, which adopts the calibration method for the detection device as described above, and specifically comprises:

[0066] The acquisition unit is used to obtain the actual data of the target product and the product test data measured by each test equipment;

[0067] A data processing unit, used for mapping the product test data based on the first reference gauge sheet calibration model to provide initial product calibration data, wherein the first reference gauge sheet calibration model is used for calibration of the reference gauge sheet in each test device;

[0068] Combine the initial product calibration data, the reference gauge correction model and the first product calibration model to give the calibration product calibration data, wherein the reference gauge correction model is used to correct the calibration of the reference gauge based on the main detection device and each detection device, and the first product calibration model is used to correct the calibration of the target product and the reference gauge in the main detection device;

[0069] The calibration unit is used to complete the calibration of each testing equipment according to the actual data of the target product and the calibration data of the calibration product.

[0070] The present invention provides a method and device for calibrating a detection device, which has at least the following beneficial effects:

[0071] (1) The calibration scheme of the detection equipment provided by the present invention establishes an association between the reference measuring piece and the target product, thereby avoiding the waste of production materials during product calibration and achieving green calibration. At the same time, the association between the detection equipment under multiple detection equipment is also provided to ensure the consistency of the calibration results of multiple detection equipment and improve the calibration efficiency.

[0072] (2) After obtaining the actual data of the target product and the product test data measured by the testing equipment, the test data of the target product is first mapped. The relationship used for mapping is the reference gauge calibration model, and the initial product calibration data is given. Then the primary product calibration model is used for re-mapping to give the calibration product calibration data. The secondary product calibration model is used to calibrate the actual data of the target product with the calibration product calibration data to determine the correlation between the target product and the reference gauge, thereby avoiding the waste of production materials when the testing equipment calibrates multiple products of different specifications.

[0073] (3) The second reference film calibration model used for the calibration of the main detection device is combined with the first reference film calibration model used for the calibration of each slave detection device to establish an association between the main detection device and each slave detection device, thereby constructing a reference film correction model.

[0074] Based on the first product calibration model, the first reference film calibration model, the second reference film calibration model and the reference film correction model, it is possible to establish the association between the slave detection equipment and the main detection equipment, the reference film and the target product, and ensure the consistency of calibration between each detection equipment and products of different specifications.

[0075] (4) The product inspection data measured by each inspection device is converted into calibration product calibration data through the first reference film calibration model, the second reference film calibration model, the reference film correction model, and the first product calibration model. The calibration of each inspection device can then be achieved through the second product calibration model between the calibration product calibration data and the actual data of the target product. BRIEF DESCRIPTION OF THE DRAWINGS

[0076] Figure 1 A schematic diagram of a flow chart of a calibration method for a detection device provided by the present invention;

[0077] Figure 2 A schematic diagram of a process for constructing a reference gauge piece calibration model according to a certain embodiment of the present invention;

[0078] Figure 3 A schematic diagram of a flow chart of a calibration method for a detection device provided by the present invention;

[0079] Figure 4 A schematic diagram of the structure of a detection device according to an embodiment of the present invention;

[0080] Figure 5 A schematic diagram of a process for constructing a first reference gauge piece calibration model according to a certain embodiment of the present invention;

[0081] Figure 6 A schematic diagram of a process for providing calibration product calibration data in an embodiment of the present invention;

[0082] Figure 7 A schematic diagram of a process for constructing a reference gauge slice correction model according to a certain embodiment of the present invention;

[0083] Figure 8 A schematic diagram of a flow chart of a second reference gauge piece calibration model provided in an embodiment of the present invention;

[0084] Fig. 9 A schematic diagram of a process for constructing a first product calibration model according to an embodiment of the present invention. DETAILED DESCRIPTION

[0085] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0086] The terms used in the embodiments of the present invention are only for the purpose of describing specific embodiments, and are not intended to limit the present invention. The singular forms "a", "said" and "the" used in the embodiments of the present invention and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings, and "multiple" generally includes at least two.

[0087] It should also be noted that the term "includes", "comprising" or any other variation thereof is intended to cover non-exclusive inclusion, so that a commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprising a ..." do not exclude the existence of other identical elements in the commodity or device including the elements.

[0088] Based on the calibration problems of various specifications of products and multiple testing equipment in the existing technology, it is necessary to start from the perspectives of avoiding waste of product production materials, ensuring the consistency of calibration of multiple testing equipment and improving calibration efficiency.

[0089] The testing equipment uses the reference measuring piece as a carrier to calibrate the testing equipment's test results, and determines the correlation between each specification product and the reference measuring piece, thereby avoiding waste of production materials when the testing equipment is calibrated for multiple products of different specifications.

[0090] like Figure 1 As shown, the present invention provides a calibration method for a detection device, which specifically includes the following steps:

[0091] Obtain actual data of target products and product test data measured by testing equipment;

[0092] Based on the reference gauge sheet calibration model, the product inspection data is mapped and processed to give the initial product calibration data, wherein the reference gauge sheet calibration model is used to calibrate the reference gauge sheet in the inspection equipment;

[0093] Combine the initial product calibration data and the primary product calibration model to give the calibration product calibration data, wherein the primary product calibration model is used to correct the calibration of the target product and the reference gauge in the detection equipment;

[0094] Complete the calibration of the testing equipment based on the actual data of the target product and the calibration data of the calibration product.

[0095] The target product can be a sheet product such as paper, non-woven fabric, copper foil, etc. The data detected by the testing equipment can be the gram weight of the sheet product, or the surface density, etc. The reference sheet is a sheet material with stable performance, such as PET (polyethylene terephthalate), aluminum foil, stainless steel, etc.

[0096] When implementing the calibration of the detection equipment, the reference gauge calibration model and the primary product calibration model can be constructed in advance. The present invention realizes the association between the reference gauge and the target product through the reference gauge calibration model and the primary product calibration model, thereby avoiding the production waste of production materials during product calibration.

[0097] The reference gauge calibration model is used to calibrate the reference gauge in the detection equipment, such as Figure 2 As shown in FIG. 1 , the construction of the reference film calibration model specifically includes the following steps:

[0098] Acquire actual data of the reference gauge sheet sample and test data of the reference gauge sheet sample measured by a test device;

[0099] Based on the analysis of the actual data of the benchmark film samples and the test data, a benchmark film calibration model is constructed.

[0100] When constructing the reference gauge film calibration model, the same (or the same group) reference gauge film samples can be used to establish a correlation between the test data of the reference gauge film samples of the testing equipment and the actual data of the reference gauge film samples, and the reference gauge film calibration model can be constructed. In order to improve the accuracy of the reference gauge film calibration model, the test data of the reference gauge film samples can be measured and checked multiple times, or multiple reference gauge films can be selected as a group of reference gauge film samples.

[0101] By fitting the relationship between the actual data of the given reference gauge film sample and the detection data of the corresponding reference gauge film sample detected by the detection equipment, a reference gauge film calibration model corresponding to the detection equipment is given.

[0102] The reference film calibration model is specifically expressed as:

[0103] ;

[0104] in, is the actual data of the benchmark sample. is the test data of the reference sample, k is a positive number not less than 2, are the correction coefficients of the benchmark calibration model.

[0105] In the benchmark film calibration model, The value of is related to the specific testing equipment and the material and model of the reference measuring piece. There is no specific limitation on its value. The accuracy threshold set by the calibration model of the reference measuring piece shall prevail.

[0106] After obtaining the actual data of the target product and the product test data measured by the test equipment, the test data of the target product is first mapped. The relationship used in the mapping is the reference film calibration model, and the initial product calibration data is given. Then the product calibration model is used for re-mapping to give the calibration product calibration data.

[0107] The construction of a product calibration model includes the following steps:

[0108] Combining the benchmark calibration model with the actual data of the target product, a product calibration model is given.

[0109] The primary product calibration model corrects the calibration of the target product and the reference gauge film in the detection equipment, and realizes the calibration correction from the reference gauge film to the target product by establishing the association between the reference gauge film and the target product.

[0110] According to the actual data of the target product and the calibration data of the calibration product, the calibration of the testing equipment is completed, which is specifically expressed as follows:

[0111] Based on the comparative analysis of the actual data of the target product and the calibration data of the calibration product, the calibration coefficient is determined, the secondary product calibration model of the testing equipment is given, and the calibration of the testing equipment is completed;

[0112] Among them, the secondary product calibration model is used to calibrate the actual data of the target product in the detection equipment with the calibration data of the calibration product, and the calibration coefficient is a constant coefficient.

[0113] The construction of the secondary product calibration model is to obtain the actual data of the target product. The product test data can be measured and checked multiple times, or multiple target products can be selected as a target product test group. The secondary product calibration model is used to calibrate the actual data of the target product with the calibration product calibration data to determine the correlation between the target product and the reference film, avoiding the waste of production materials when the test equipment is calibrated for multiple products of different specifications.

[0114] When multiple testing devices are calibrated at the same time, the multiple testing devices adopt a non-independent calibration method, with one of the testing devices as the main testing device and the other testing devices as slave testing devices. The test results of the main and slave testing devices are mapped, and the relationship between the multiple testing devices is established to achieve consistency in the calibration results of the multiple testing devices and improve the testing efficiency; each testing device uses the reference measuring film as a carrier to calibrate the test results of the testing device, and only the correlation between each specification product and the reference measuring film is determined on the main testing device, avoiding waste of production materials when each testing device calibrates multiple products of different specifications.

[0115] like Figure 3 As shown, the present invention provides a calibration method for a detection device, which is applied to multiple detection devices and specifically includes the following steps:

[0116] Obtain the actual data of the target product and the product test data measured by each test equipment;

[0117] Based on the first reference gauge sheet calibration model, the product inspection data is mapped and processed to provide initial product calibration data, wherein the first reference gauge sheet calibration model is used for calibration of the reference gauge sheet in each inspection device;

[0118] Combine the initial product calibration data, the reference gauge correction model and the first product calibration model to give the calibration product calibration data, wherein the reference gauge correction model is used to correct the calibration of the reference gauge based on the main detection device and each detection device, and the first product calibration model is used to correct the calibration of the target product and the reference gauge in the main detection device;

[0119] Complete the calibration of each testing equipment based on the actual data of the target product and the calibration data of the calibration product.

[0120] Any one of the multiple detection devices is determined as the main detection device, and the other detection devices are slave detection devices. The association between the main detection device and each detection device is established through the reference film correction model. The association of the reference film correction model is mainly between the main detection device and the slave detection device, and of course, it can also include the association between the main detection device and itself.

[0121] In the calibration method of the detection equipment, the first reference gauge calibration model, the reference gauge correction model, and the first product calibration model can all be constructed in advance. Of course, for a certain slave detection equipment, the same reference gauge is used as a carrier when constructing each model. Among them, the first reference gauge calibration model and the reference gauge correction model are both based on the reference gauge as a carrier, and each detection equipment has its own first reference gauge calibration model, and each detection equipment also has a reference gauge correction model corresponding to the main detection equipment.

[0122] The present invention realizes the association between the reference gauge film and the target product and the association between the various detection devices through the first reference gauge film calibration model, the reference gauge film correction model and the first product calibration model, thereby ensuring the consistency of the calibration results of multiple detection devices, improving the calibration efficiency and avoiding the production waste of production materials during product calibration.

[0123] In one embodiment, if Figure 4 As shown in the figure, multiple testing devices are not calibrated independently, but any one of the testing devices is used as the main testing device A, and the other devices are used as slave testing devices (a 1 、a 2 、a 3 ,……,a N ), using PET, aluminum foil, stainless steel and other materials with stable properties as reference films, mapping the test results of the slave detection equipment to the main detection equipment, and using the reference film as a carrier to achieve consistency in the calibration results of multiple detection equipment, thereby improving the efficiency of calibration.

[0124] For each test device, the first reference gauge calibration model is used to calibrate the reference gauge in the test device. The first reference gauge calibration model is mainly used to calibrate the reference gauge in the subordinate test device. Figure 5 As shown, the construction of the first reference film calibration model specifically includes the following steps:

[0125] Acquire actual data of the reference gauge film sample and test data of the reference gauge film sample measured by each test device;

[0126] Based on the analysis of the actual data of the reference gauge film sample and the detection data, a first reference gauge film calibration model is constructed.

[0127] Each slave detection device can use the same (or the same group) of reference film samples when constructing the first reference film calibration model. At this time, the actual data of the reference film samples is uniquely determined, and the detection data of the reference film samples of different slave detection devices are different. The association between the detection data of the reference film samples of each detection device and the actual data of the reference film samples is established to construct the first reference film calibration model.

[0128] In order to improve the accuracy of the first reference gauge film calibration model, the detection data of the reference gauge film sample can be measured and checked multiple times, or multiple reference gauge films can be selected as a group of reference gauge film samples. For example, in a certain embodiment, the actual data of a group of reference gauge film samples and the actual data of the slave detection device a 1 The test data of a group of reference film samples tested in , is shown in Table 1.

[0129] Table 1 Comparison of the actual data of the reference sample and the test data given by the slave test equipment

[0130]

[0131] The actual data of the three reference pieces of samples given in Table 1 above are compared with the slave detection device a 1 The corresponding reference piece sample test data obtained by the test is fitted with a relational expression to give the corresponding slave test device a 1 The first benchmark piece is used to calibrate the model.

[0132] The first reference piece calibration model is specifically expressed as:

[0133]

[0134] in, is the actual data of the reference film sample, x is the detection data of the reference film sample by the slave detection equipment, n is a positive number not less than 2, are respectively the correction coefficients of the first reference piece calibration model.

[0135] In the first benchmark slice calibration model, The value of is related to the specific subordinate detection equipment and the material and model of the reference measuring piece, and there is no specific limitation on its value. The accuracy threshold set by the fitting detection data of the first reference measuring piece calibration model shall prevail.

[0136] For the calibration of the testing equipment, after obtaining the actual data of the target product and the product test data measured by each testing equipment, the product test data is first mapped. The relationship used for mapping is the first reference piece calibration model, giving the initial product calibration data. Since different specifications of products have different calibration models, the subsequent steps need to be calibrated against the initial product calibration data.

[0137] like Figure 6 As shown, combining the initial product calibration data, the reference gauge correction model and the first product calibration model, the calibration product calibration data is given, which specifically includes the following steps:

[0138] Based on the reference gauge correction model, the initial product calibration data is calibrated to obtain the first calibration product calibration data;

[0139] Based on the first product calibration model, the initial calibration product calibration data is calibrated to obtain the calibrated product calibration data.

[0140] Considering the association between the reference film and the target product, and the relationship between each testing equipment, the calibration of the initial product calibration data requires the introduction of a reference film correction model and a first product calibration model.

[0141] Among them, the reference gauge correction model is used to correct the calibration of the reference gauge based on the main detection equipment and each detection equipment. Of course, the reference gauge correction model is mainly used to correct the calibration of the reference gauge detection by the main detection equipment and the slave detection equipment. It can also correct the calibration of the main detection equipment itself, play a role in establishing the correlation between the slave detection equipment, and ensure the consistency of the calibration results of multiple detection equipment; that is, through the reference gauge correction model, the calibration of the initial product calibration data is realized, and the calibration data of the first calibration product is obtained.

[0142] The first product calibration model corrects the calibration of the target product and the reference gauge sheet in the main detection device, and realizes the calibration correction from the reference gauge sheet to the target product by establishing the association between the reference gauge sheet and the target product. That is, through the first product calibration model, the secondary calibration of the calibration data of the first calibration product is realized to obtain the calibration data of the calibration product.

[0143] For different slave detection devices, it is necessary to establish associations with the master detection device respectively and provide corresponding reference gauge correction models. Figure 7 As shown in FIG. 1 , the construction of the reference gauge correction model specifically includes the following steps:

[0144] Performing calibration of a reference gauge sheet on the main detection device and providing a calibration model of a second reference gauge sheet;

[0145] Combining the second reference gauge piece calibration model with the first reference gauge piece calibration model, a reference gauge piece correction model is provided.

[0146] By combining the second reference gauge calibration model used for calibration of the main detection device with the first reference gauge calibration model used for calibration of each slave detection device, the association between the main detection device and each slave detection device can be established to construct a reference gauge correction model. If used for correction of the main detection device itself at this time, the first reference gauge calibration model and the second reference gauge calibration model are both used for calibration of the main detection device.

[0147] like Figure 8 As shown, the reference gauge piece calibration is performed on the main detection device, and a second reference gauge piece calibration model is provided, which specifically includes the following steps:

[0148] Acquire actual data of the reference gauge sample and detection data of the reference gauge sample measured by the main detection device;

[0149] Based on the analysis of the actual data of the reference gauge film sample and the detection data, a second reference gauge film calibration model is constructed.

[0150] The second reference piece calibration model is specifically expressed as:

[0151]

[0152] in, is the actual data of the benchmark sample. is the test data of the reference sample measured by the main test equipment, m is a positive number not less than 2, are the correction coefficients of the second reference piece calibration model respectively.

[0153] The construction of the second reference gauge film calibration model is similar to that of the first reference gauge film calibration model. The detection data of the reference gauge film samples can be measured and checked multiple times, or multiple reference gauge films can be selected as a group of reference gauge film samples.

[0154] For example, in a certain embodiment, actual data of a group of reference film samples and detection data of a corresponding group of reference film samples detected in the main detection device A are shown in Table 2.

[0155] Table 2 Comparison of the actual data of the reference sample and the test data given by the main test equipment

[0156]

[0157] By fitting the relationship between the actual data of the three reference film samples given in Table 2 above and the detection data of the corresponding reference film samples detected by the main detection device A, a second reference film calibration model corresponding to the main detection device A is given.

[0158] Combining the second reference gauge calibration model and the first reference gauge calibration model, a reference gauge correction model is given, which is specifically expressed as:

[0159]

[0160] in, Correction model for the benchmark piece, is the calibration model for the second reference piece, is the first reference film calibration model, x is the detection data of the reference film measured by each detection equipment, α and β are the first correction coefficient and the second correction coefficient respectively.

[0161] In order to establish the correlation between the reference film and the target product, the correlation between each product of different specifications and the reference film can be determined only on the main detection equipment. By combining the reference film correction model, the correlation between multiple products of different specifications and multiple detection equipment can be established.

[0162] like Fig. 9 As shown, the construction of the first product calibration model specifically includes the following steps:

[0163] Performing calibration of a reference gauge sheet on the main detection device and providing a calibration model of a second reference gauge sheet;

[0164] Based on the product inspection data measured by the main inspection equipment, combined with the second reference piece calibration model and the actual data of the target product, a first product calibration model is given.

[0165] The construction of the first product calibration model is to obtain the actual data of the target product. The product detection data measured by the main detection equipment can be measured and checked multiple times, or multiple target products can be selected as a group of target product test groups.

[0166] For example, in a certain embodiment, actual data of a group of target products and product detection data of a corresponding group of target products detected in the main detection device A are shown in Table 3.

[0167] Table 3 Comparison of actual data of target products and product test data measured by main equipment

[0168]

[0169] By fitting the relationship between the actual data of the three target products given in Table 3 above and the calibration data after the second reference piece calibration model is calibrated, the first product calibration model corresponding to the main detection device A is given.

[0170] Specifically, combining the second reference gauge calibration model and the actual data of the target product, the first product calibration model is given, which is specifically expressed as:

[0171]

[0172] Among them, F 1 [ ] is the first product calibration model, is the calibration model for the second reference piece, Product test data measured by the main equipment, is the actual data of the target product, γ, They are the primary correction factor and the secondary correction factor respectively.

[0173] Currently, based on the first product calibration model, the first reference film calibration model, the second reference film calibration model and the reference film correction model, it is possible to establish the association between the slave detection equipment and the main detection equipment, the reference film and the target product, and ensure the consistency of calibration between each detection equipment and products of different specifications.

[0174] The product inspection data measured by each inspection device is converted into calibration product calibration data after passing through the first reference gauge calibration model, the second reference gauge calibration model, the reference gauge correction model, and the first product calibration model. Finally, the calibration of each inspection device can be realized by the calibration product calibration data and the actual data of the target product.

[0175] Specifically, according to the actual data of the target product and the calibration data of the calibration product, the calibration of each testing equipment is completed, which is specifically expressed as:

[0176] Based on the comparative analysis of the actual data of the target product and the calibration data of the calibration product, the calibration coefficient is determined, the second product calibration model of each testing equipment is given, and the calibration of each corresponding testing equipment is completed;

[0177] The second product calibration model is used for calibrating the actual data of the target product in each detection device with the calibration data of the calibration product, and the calibration coefficient is a constant coefficient.

[0178] The second product calibration model is specifically expressed as:

[0179]

[0180] in, is the actual data of the target product, F 2{} is the second product calibration model, F 1 [ ] is the first product calibration model, Correction model for the benchmark piece, is the calibration model of the first reference film, X is the test data of the target product measured by each test equipment, is the correction constant.

[0181] The construction of the second product calibration model is to obtain the actual data of the target product. The product detection data can be measured and checked multiple times, or multiple target products can be selected as a group of target product test groups.

[0182] For example, in one embodiment, a set of actual data of a target product and the actual data of each detection device (a 1 、a 2 、a 3 ,……,a N ) is shown in Table 4.

[0183] Table 4 Comparison of actual data of target products and product test data measured by slave test equipment

[0184]

[0185] Through the calibration and calibration evolution process between the actual data of the three target products given in Table 4 above and the corresponding target products detected by a certain slave detection equipment, the calibration of each detection equipment is achieved.

[0186] The present invention provides a calibration device for a detection device, which adopts the calibration method for the detection device as described above, and specifically includes:

[0187] A collection unit, used to obtain actual data of the target product and product test data measured by the testing equipment;

[0188] A data processing unit is used to map the product test data based on the reference gauge calibration model to provide initial product calibration data, wherein the reference gauge calibration model is used to calibrate the reference gauge in the test equipment;

[0189] Combined with the initial product calibration data and the primary product calibration model, the calibration product calibration data is given. The primary product calibration model is used to correct the calibration of the target product and the reference gauge in the detection equipment.

[0190] The calibration unit is used to complete the calibration of the testing equipment according to the actual data of the target product and the calibration data of the calibration product.

[0191] The present invention also provides a calibration device for a detection device, which adopts the calibration method for the detection device as described above, and specifically comprises:

[0192] The acquisition unit is used to obtain the actual data of the target product and the product test data measured by each test equipment;

[0193] A data processing unit, used for mapping the product test data based on the first reference gauge sheet calibration model to provide initial product calibration data, wherein the first reference gauge sheet calibration model is used for calibration of the reference gauge sheet in each test device;

[0194] Combine the initial product calibration data, the reference gauge correction model and the first product calibration model to give the calibration product calibration data, wherein the reference gauge correction model is used to correct the calibration of the reference gauge based on the main detection device and each detection device, and the first product calibration model is used to correct the calibration of the target product and the reference gauge in the main detection device;

[0195] The calibration unit is used to complete the calibration of each testing equipment according to the actual data of the target product and the calibration data of the calibration product.

[0196] The present invention provides a method and device for calibrating a detection device, which has at least the following beneficial effects:

[0197] (1) The calibration scheme of the detection equipment provided by the present invention establishes an association between the reference measuring piece and the target product, thereby avoiding the waste of production materials during product calibration and achieving green calibration. At the same time, the association between the detection equipment under multiple detection equipment is also provided to ensure the consistency of the calibration results of multiple detection equipment and improve the calibration efficiency.

[0198] (2) After obtaining the actual data of the target product and the product test data measured by the testing equipment, the test data of the target product is first mapped. The relationship used for mapping is the reference gauge calibration model, and the initial product calibration data is given. Then the primary product calibration model is used for re-mapping to give the calibration product calibration data. The secondary product calibration model is used to calibrate the actual data of the target product with the calibration product calibration data to determine the correlation between the target product and the reference gauge, thereby avoiding the waste of production materials when the testing equipment calibrates multiple products of different specifications.

[0199] (3) The second reference film calibration model used for the calibration of the main detection device is combined with the first reference film calibration model used for the calibration of each slave detection device to establish an association between the main detection device and each slave detection device, thereby constructing a reference film correction model.

[0200] Based on the first product calibration model, the first reference film calibration model, the second reference film calibration model and the reference film correction model, it is possible to establish the association between the slave detection equipment and the main detection equipment, the reference film and the target product, and ensure the consistency of calibration between each detection equipment and products of different specifications.

[0201] (4) The product inspection data measured by each inspection device is converted into calibration product calibration data through the first reference film calibration model, the second reference film calibration model, the reference film correction model, and the first product calibration model. The calibration of each inspection device can then be achieved through the second product calibration model between the calibration product calibration data and the actual data of the target product.

[0202] Although preferred embodiments of the present invention have been described, additional changes and modifications may be made to these embodiments by those skilled in the art once the basic inventive concepts are known. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present invention. Obviously, those skilled in the art may make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A calibration method for a detection device, characterized in that: The specific steps include: Obtain actual data of target products and product test data measured by testing equipment; Based on the reference gauge film calibration model, the product test data is mapped and processed to give the initial product calibration data, wherein the reference gauge film calibration model is given by fitting the relationship between the actual data of the reference gauge film sample and the test data of the reference gauge film sample obtained by the test equipment; Combined with the initial product calibration data and the primary product calibration model, the calibration product calibration data is given, wherein the primary product calibration model is used to correct the calibration of the target product and the reference gauge sheet in the detection equipment. The construction of the primary product calibration model specifically includes the following steps: Combined with the reference gauge sheet calibration model and the actual data of the target product, the primary product calibration model is given; Based on the comparative analysis of the actual data of the target product and the calibration data of the calibration product, the calibration coefficient is determined, the secondary product calibration model of the testing equipment is given, and the calibration of the testing equipment is completed; Among them, the secondary product calibration model is used to calibrate the actual data of the target product in the detection equipment with the calibration data of the calibration product, and the calibration coefficient is a constant coefficient.

2. The calibration method of the detection device according to claim 1, characterized in that: The construction of the reference film calibration model specifically includes the following steps: Acquire actual data of the reference gauge sheet sample and test data of the reference gauge sheet sample measured by a test device; Based on the analysis of the actual data of the benchmark film samples and the test data, a benchmark film calibration model is constructed.

3. A calibration method for a detection device, applied to multiple detection devices, characterized in that: The specific steps include: Obtain the actual data of the target product and the product test data measured by each test equipment; Based on the first reference gauge film calibration model, the product test data is mapped and processed to give initial product calibration data, wherein the first reference gauge film calibration model is used for calibration of the reference gauge film in each test device, and the construction of the first reference gauge film calibration model specifically includes the following steps: obtaining actual data of the reference gauge film sample and test data of the reference gauge film sample measured by each test device; based on the analysis of the actual data of the reference gauge film sample and the test data, constructing the first reference gauge film calibration model; Based on the reference gauge piece correction model, the initial product calibration data is calibrated to obtain the initial calibration product calibration data, wherein the reference gauge piece correction model is used to correct the calibration of the reference gauge piece based on the main detection device and each detection device, and the construction of the reference gauge piece correction model specifically includes the following steps: calibrating the reference gauge piece on the main detection device to obtain a second reference gauge piece calibration model; combining the second reference gauge piece calibration model with the first reference gauge piece calibration model to obtain a reference gauge piece correction model; Based on the first product calibration model, the calibration data of the initial calibration product is calibrated to obtain the calibration product calibration data, wherein the first product calibration model is used to correct the calibration of the target product and the reference gauge sheet in the main detection device. The construction of the first product calibration model specifically includes the following steps: calibrating the reference gauge sheet on the main detection device to obtain a second reference gauge sheet calibration model; based on the product detection data measured by the main detection device, combined with the second reference gauge sheet calibration model and the actual data of the target product, the first product calibration model is obtained; Based on the comparative analysis of the actual data of the target product and the calibration data of the calibration product, the calibration coefficient is determined, the second product calibration model of each testing equipment is given, and the calibration of each corresponding testing equipment is completed; The second product calibration model is used for calibrating the actual data of the target product in each detection device with the calibration data of the calibration product, and the calibration coefficient is a constant coefficient.

4. The calibration method of the detection device according to claim 3, characterized in that: The first reference piece calibration model is specifically expressed as: ； in, is the actual data of the reference film sample, x is the detection data of the reference film sample by the slave detection equipment, n is a positive number not less than 2, are respectively the correction coefficients of the first reference piece calibration model.

5. The calibration method of the detection device according to claim 3, characterized in that: The reference gauge sheet calibration is performed on the main detection device, and a second reference gauge sheet calibration model is provided, which specifically includes the following steps: Acquire actual data of the reference gauge sample and detection data of the reference gauge sample measured by the main detection device; Based on the analysis of the actual data of the reference gauge film sample and the detection data, a second reference gauge film calibration model is constructed.

6. The calibration method of the detection device according to claim 3, characterized in that: The second reference piece calibration model is specifically expressed as: ； in, is the actual data of the benchmark sample. is the test data of the reference sample measured by the main test equipment, m is a positive number not less than 2, are the correction coefficients of the second reference piece calibration model respectively.

7. The calibration method of the detection device according to claim 3, characterized in that: Combining the second reference gauge calibration model and the first reference gauge calibration model, a reference gauge correction model is given, which is specifically expressed as: ； in, Correction model for the benchmark piece, is the calibration model for the second reference piece, is the first reference film calibration model, x is the detection data of the reference film measured by each detection equipment, α and β are the first correction coefficient and the second correction coefficient respectively.

8. The calibration method of the detection device as claimed in claim 3, characterized in that: Combining the second reference gauge calibration model and the actual data of the target product, the first product calibration model is given, which is specifically expressed as: ； Among them, F1[ ] is the first product calibration model, is the calibration model for the second reference piece, Product test data measured by the main equipment, Actual data for the target product They are the primary correction factor and the secondary correction factor respectively.

9. The calibration method of the detection device according to claim 3, characterized in that: The second product calibration model is specifically expressed as: ； in, is the actual data of the target product, F2{} is the calibration model of the second product, and F1[ ] is the calibration model of the first product. Correction model for the benchmark piece, is the calibration model of the first reference film, X is the test data of the target product measured by each test equipment, is the correction constant.

10. A calibration device for a detection device, characterized in that: The calibration method of the detection device according to claim 1 or 2 specifically comprises: A collection unit, used to obtain actual data of the target product and product test data measured by the testing equipment; A data processing unit is used to map the product test data based on the reference gauge calibration model to provide initial product calibration data, wherein the reference gauge calibration model is used to calibrate the reference gauge in the test equipment; Combined with the initial product calibration data and the primary product calibration model, the calibration product calibration data is given. The primary product calibration model is used to correct the calibration of the target product and the reference gauge in the detection equipment. The calibration unit is used to complete the calibration of the testing equipment according to the actual data of the target product and the calibration data of the calibration product.

11. A calibration device for a detection device, characterized in that: The calibration method of the detection device according to any one of claims 3 to 9 specifically comprises: The acquisition unit is used to obtain the actual data of the target product and the product test data measured by each test equipment; A data processing unit, used for mapping the product test data based on the first reference gauge sheet calibration model to provide initial product calibration data, wherein the first reference gauge sheet calibration model is used for calibration of the reference gauge sheet in each test device; Combine the initial product calibration data, the reference gauge correction model and the first product calibration model to give the calibration product calibration data, wherein the reference gauge correction model is used to correct the calibration of the reference gauge based on the main detection device and each detection device, and the first product calibration model is used to correct the calibration of the target product and the reference gauge in the main detection device; The calibration unit is used to complete the calibration of each testing equipment according to the actual data of the target product and the calibration data of the calibration product.

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