Device and method for testing flow of quartz filter

CN119595055APending Publication Date: 2025-03-11LIAONING ADVANCE FOUNDATION SEMICON MATERIAL CO LTD
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Patent Information

Application Number
CN202411957967.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-27
Publication Date
2025-03-11

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Abstract

The invention discloses a device and a method for testing the flow of a quartz filter, and relates to the technical field of flow testing of quartz filters. Comprising a high-purity nitrogen gas source, a first pressure reducer, a buffer tank, a filter, a precise pressure reducer, a pressure transmitter, an electromagnetic valve, a regulating valve, an electronic flowmeter, a glass rotameter and a quartz filter which are sequentially connected through a pipeline, and through cooperation of all the elements, precise measurement of the flow of the quartz filter and flow testing under different pressures are achieved. The automatic control and data recording of the system are realized by the computer, the printer, and the pressure transmitter, the electromagnetic valve and the electronic flowmeter which are electrically connected with the computer and the printer, and the design of the safety valve ensures that the high pressure in the system can be automatically released when the secondary pressure reducer fails, so that the reliability of the test result is ensured. The safety of the quartz filter and a system pipeline is protected, the operation safety is improved, manual intervention is reduced, and the working efficiency is improved.
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Citation Information

Cited By

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