Device and method for testing flow of quartz filter
CN119595055APending Publication Date: 2025-03-11LIAONING ADVANCE FOUNDATION SEMICON MATERIAL CO LTD
Patent Information
- Application Number
- CN202411957967.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-27
- Publication Date
- 2025-03-11
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Figure CN119595055A_ABST
Abstract
The invention discloses a device and a method for testing the flow of a quartz filter, and relates to the technical field of flow testing of quartz filters. Comprising a high-purity nitrogen gas source, a first pressure reducer, a buffer tank, a filter, a precise pressure reducer, a pressure transmitter, an electromagnetic valve, a regulating valve, an electronic flowmeter, a glass rotameter and a quartz filter which are sequentially connected through a pipeline, and through cooperation of all the elements, precise measurement of the flow of the quartz filter and flow testing under different pressures are achieved. The automatic control and data recording of the system are realized by the computer, the printer, and the pressure transmitter, the electromagnetic valve and the electronic flowmeter which are electrically connected with the computer and the printer, and the design of the safety valve ensures that the high pressure in the system can be automatically released when the secondary pressure reducer fails, so that the reliability of the test result is ensured. The safety of the quartz filter and a system pipeline is protected, the operation safety is improved, manual intervention is reduced, and the working efficiency is improved.
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Citation Information
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