A metal target material machining forming apparatus and method

Abstract

The application discloses a metal target machining forming equipment and method, relates to the technical field of metal target machining, and forms the equipment and comprises a workbench, the workbench is equipped with the positioning table for bearing the metal target; the positioning table is circumferentially arranged with a plurality of groups of grinding rollers for positioning the metal target, each grinding roller is connected with a first rotation module for driving the synchronous rotation of the grinding roller along the outer edge surface of the metal target, wherein each grinding roller is also connected with a second rotation module for driving the rotation of the grinding roller; the positioning table is also provided with an adjusting module, the adjusting module is used for adjusting the synchronous movement of each grinding roller towards the direction of approaching or moving away from the axial end of the metal target; the measuring module is also arranged on each grinding roller, and the measuring module is used for real-time detection of the distance between two groups of oppositely arranged grinding rollers; the application does not need to disassemble the metal target for measurement during the forming machining process, can realize the synchronous detection effect during the grinding process, and effectively improves the machining efficiency.

Description

Technical Field

[0001] This invention relates to the field of metal sputtering machining technology, specifically to a metal sputtering machining forming equipment and method. Background Technology

[0002] Metal sputtering targets, as one of the indispensable key materials in modern technology, are widely used in many fields such as thin film preparation, semiconductor manufacturing, optical coating, surface modification, and scientific research. They are usually made of high-purity metals or alloys and have excellent physical and chemical properties as well as good processability.

[0003] The main application of metal targets in semiconductors is in the process of preparing semiconductor thin films, where target materials are deposited onto silicon wafers or other substrates using sputtering technology to form the desired thin film structure.

[0004] After being formed, metal targets need to be processed into targets with specific dimensions and shapes using high-precision machining equipment to ensure precise connection and stable operation with the coating machine. For example, in sputtering coating equipment, metal targets are usually processed into cylindrical shapes. After initial forming, they are machined into the required dimensions using turning equipment to ensure compatibility with the sputtering coating equipment.

[0005] In practical applications, the diameter of the metal target material is first measured before turning. Then, it is placed on the turning equipment and its outer edge is turned to ensure that the diameter of the target material after turning meets the application requirements. However, existing machining equipment does not have a precision detection function when machining the target material, which means that the target material needs to be removed for precision detection. If the detection fails, the target material needs to be reinstalled on the machining equipment for processing, which not only increases repetitive work but also greatly affects the processing efficiency of the target material. For example, the patent document with publication number CN117655898B discloses an automatic polishing device for the side of the target material and its usage method, and also discloses a technical solution for circumferential cutting of the outer edge of the target material. However, it cannot accurately detect the diameter of the target material during the cutting process, so it is easy to have excessive errors and cannot meet the processing requirements. Summary of the Invention

[0006] The purpose of this invention is to provide a machining and forming equipment and method for metal sputtering targets, and to solve the following technical problems:

[0007] Existing target cutting equipment cannot detect the dimensions of the target in real time during the target cutting process, which not only increases repetitive work but also greatly affects the processing efficiency of the target.

[0008] The objective of this invention can be achieved through the following technical solutions:

[0009] A metal target machining and forming equipment includes a worktable, wherein a positioning table for supporting the metal target is provided on the worktable;

[0010] The positioning platform is arranged in a circumferential array with several sets of grinding rollers for positioning the metal target. Each grinding roller is connected to a first rotating module that drives it to rotate synchronously along the outer edge of the metal target. Each grinding roller is also connected to a second rotating module that drives it to rotate on its own axis.

[0011] The positioning platform is also equipped with an adjustment module, which is used to adjust the synchronous movement of each grinding roller toward the direction of approaching or moving away from the axis of the metal target.

[0012] Each of the grinding rollers is also equipped with a measuring module, which is used to detect the distance between the two sets of grinding rollers arranged opposite each other in real time.

[0013] Preferably, the top end of each of the grinding rollers is rotatably connected to the adjusting seat. The first rotating module includes a servo motor mounted on the positioning platform. A turntable is fixedly mounted on the output end of the servo motor. Several sets of positioning plates corresponding to each grinding roller are fixedly mounted in a circumferential array on the turntable. Positioning rods that slide and insert into the adjusting seat are symmetrically mounted on the end of the positioning plate away from the turntable.

[0014] Preferably, the servo motor is fixed to the mounting plate, the mounting plate is fixed to the lifting plate by a connecting rod, and the lifting plate is fixed to the lifting frame;

[0015] The positioning platform is equipped with a lifting mechanism, the lifting end of which is fixed to the connecting plate, and the top of the connecting plate is fixed to the lifting frame.

[0016] Preferably, the second rotating module includes a first rotating wheel fixedly arranged on each grinding roller, a positioning ring coaxially sleeved on the outer side of the turntable, the positioning ring being fixed to each positioning plate, and several sets of second rotating wheels arranged in a circumferential array on the positioning plate, the number of second rotating wheels being equal to that of the first rotating wheels, the second rotating wheels being on the same plane as the first rotating wheels, and each second rotating wheel being located on the vertical line connecting the axis ends of two adjacent sets of first rotating wheels, the distance between the second rotating wheel and the axis end of the turntable being less than the distance between the first rotating wheel and the axis end of the turntable, and a transmission belt being sleeved on each set of first rotating wheels and second rotating wheels;

[0017] The mounting plate has a toothed ring fixedly arranged at its bottom, and the second rotating wheel has a first gear fixedly arranged on it that meshes with the toothed ring.

[0018] Preferably, for each group of second rotating wheels, any one group of second rotating wheels is rotatably arranged on the support, while the other groups of second rotating wheels are rotatably arranged on the positioning ring;

[0019] The positioning ring has an elastic module connected to the support on one side.

[0020] Preferably, the elastic module includes a support plate fixedly arranged on the positioning ring, a limiting seat fixedly arranged on the support plate, and a guide rod fixed to the support plate being slidably inserted into the limiting seat.

[0021] The guide rod is equipped with a first spring.

[0022] Preferably, the turntable rotates to install a pressure plate at one end facing the positioning platform, and the bottom end of the pressure plate has several sets of protrusions arranged in a circumferential array.

[0023] Preferably, the positioning platform is further provided with several sets of support rods arranged in a circumferential array, with a top seat fixedly arranged at the top of the support rod, the support rod being slidably connected to the positioning platform, a cylinder being arranged below the positioning platform, a second spring being fixedly arranged in the cylinder, the other end of the second spring being fixed to a telescopic rod slidably arranged on the cylinder, and the end of the telescopic rod away from the cylinder being fixed to each support rod through a bracket.

[0024] The bottom of the cylinder is fixed to the U-shaped frame, and the two side plates of the U-shaped frame are fixedly arranged with first racks. The two sides of the positioning platform are respectively arranged with second gears that mesh with the first racks. The two sides of the lifting frame away from the lifting mechanism are respectively fixedly arranged with L-shaped brackets, and the bottom end of the L-shaped bracket is fixedly arranged with a second rack for meshing with the other side of the second gear.

[0025] Preferably, the measuring module includes an infrared rangefinder fixedly arranged on each adjustment seat, with the infrared rangefinder arranged on the side of each adjustment seat facing the center end of the turntable.

[0026] A forming method for a metal sputtering target machining forming equipment includes the following steps:

[0027] Before grinding, the diameter of the metal target is measured, and the initial value of the diameter of the metal target is compared with the value required for forming to obtain the difference.

[0028] The adjustment module adjusts the grinding rollers to be further apart, and the metal target is embedded in the space formed by the grinding rollers. After placement, the grinding rollers are in contact with the outer edge of the metal target.

[0029] The measuring module detects the distance between the two sets of relatively arranged grinding rollers, and based on the above difference, obtains the feed value of each grinding roller moving towards the center end of the metal target.

[0030] The first rotating module drives each grinding roller to rotate synchronously along the outer edge of the metal target. During the rotation, the second rotating module drives each grinding roller to rotate on its own axis to perform grinding on the outer edge of the metal target.

[0031] The adjustment module adjusts each grinding roller to feed synchronously toward the axis of the metal target and perform grinding;

[0032] During the grinding process, the measuring module stops grinding when the feed values ​​of the two sets of relatively set grinding rollers meet the requirements.

[0033] The beneficial effects of this invention are:

[0034] (1) Several sets of rubber vibration isolators are arranged on the workbench of the present invention, and the positioning table is set on the rubber vibration isolators. When the metal target material vibrates during the cutting and forming process, the vibration reduction effect can be achieved through the rubber vibration isolators, thereby reducing the vibration impact on the metal target material during the machining process and effectively improving the machining accuracy of the metal target material during machining.

[0035] (2) In this invention, when grinding the outer edge of a metal target, the grinding rollers are first adjusted to be further apart by an adjusting module, so that the metal target can be embedded in the space formed by the grinding rollers. After placement, the grinding rollers are in contact with the outer edge of the metal target. Then, the first rotating module drives the grinding rollers to rotate synchronously along the outer edge of the metal target. During the rotation, the second rotating module drives the grinding rollers to rotate on their own axis, thereby grinding the outer edge of the metal target. In this invention, since the grinding rollers are arranged circumferentially... Therefore, when the metal target is placed in the space enclosed by the grinding rollers, the distance between each grinding roller and the center of the metal target is equal due to the limiting effect of the grinding rollers. This ensures that the grinding degree of each grinding roller can remain consistent when grinding the metal target, avoiding uneven grinding on the outer edge of the metal target. During the grinding process, the adjustment module adjusts the grinding rollers to feed synchronously toward the center of the metal target, keeping the feed amount consistent, further improving the accuracy of the ground metal target, so as to facilitate high-precision matching with the sputtering coating equipment.

[0036] (3) Before grinding the metal target, the diameter of the metal target is first detected. The initial value of the diameter of the metal target is compared with the value required for forming to obtain a difference. When the metal target is placed in the space formed by the grinding rollers, the distance between the two sets of grinding rollers is detected by the measuring module. Based on the above difference, the feed value of each grinding roller moving towards the axis of the metal target is obtained. During the grinding process, when the feed value of the two sets of grinding rollers meets the requirements, the grinding can be stopped. Thus, the present invention does not require disassembling the metal target for measurement during the grinding process. It can achieve the effect of synchronous detection during the grinding process, which effectively improves the grinding efficiency.

[0037] (4) The axial height of each grinding roller of the present invention is greater than the thickness of a set of metal targets. Therefore, during grinding, multiple sets of metal targets can be placed in the space formed by the grinding rollers at one time for grinding, thereby further improving the grinding efficiency. Attached Figure Description

[0038] The invention will now be further described with reference to the accompanying drawings.

[0039] Figure 1 This is a schematic diagram of the structure of a metal sputtering and forming equipment according to the present invention;

[0040] Figure 2 This is a schematic diagram of the positioning table in a metal sputtering and forming equipment according to the present invention;

[0041] Figure 3 This is a cross-sectional view of the positioning table in a metal target machining and forming equipment according to the present invention.

[0042] Figure 4 This is a schematic diagram of the transmission belt in a metal sputtering and forming equipment according to the present invention;

[0043] Figure 5 This is a schematic diagram of the top seat structure in a metal sputtering and forming equipment according to the present invention;

[0044] Figure 6 This is a schematic diagram of the support rod structure in a metal sputtering and forming equipment according to the present invention;

[0045] Figure 7 This is a schematic diagram of the structure of the first rotary wheel in a metal sputtering and forming equipment of the present invention;

[0046] Figure 8 This is a schematic diagram of the structure of the second rotary wheel in a metal target machining and forming equipment of the present invention.

[0047] In the diagram: 1. Workbench; 2. Lifting mechanism; 3. Positioning platform; 4. Metal target; 5. Servo motor; 6. Grinding roller; 101. Rubber vibration isolator; 102. Lateral adjustment mechanism; 201. Connecting plate; 202. Lifting frame; 203. L-shaped bracket; 204. Lifting plate; 205. Second rack; 206. Mounting plate; 301. Second gear; 302. First rack; 303. U-shaped frame; 304. Cylinder; 305. Second spring; 306. Telescopic mechanism 307. Support rod; 308. Top seat; 501. Turntable; 502. Pressure plate; 503. Protrusion; 504. Positioning ring; 505. Gear ring; 506. First gear; 507. First spring; 508. Limit seat; 509. Support plate; 510. Infrared rangefinder; 601. First rotating wheel; 602. Transmission belt; 603. Adjusting seat; 604. Positioning rod; 605. Positioning plate; 606. Guide rod; 607. Second rotating wheel; 608. Support. Detailed Implementation

[0048] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0049] Example 1

[0050] Please see Figures 1-2 As shown, the present invention is a metal target machining and forming equipment, including a worktable 1, on which a positioning platform 3 for supporting the metal target 4 is provided; specifically, in order to improve the vibration reduction effect of the metal target 4 during the machining and forming process, a number of rubber vibration isolators 101 are correspondingly arranged on the worktable 1 in this embodiment, and the positioning platform 3 is set on the rubber vibration isolators 101. When the metal target 4 vibrates during the cutting and forming process, the vibration reduction effect can be achieved through the rubber vibration isolators 101, thereby reducing the vibration impact on the metal target 4 during the machining process and effectively improving the machining accuracy of the metal target 4 during machining.

[0051] In this embodiment, please refer to Figure 3 Several sets of grinding rollers 6 for positioning metal target 4 are arranged in a circumferential array on the positioning stage 3. Each grinding roller 6 is connected to a first rotating module that drives it to rotate synchronously along the outer edge of the metal target 4. Each grinding roller 6 is also connected to a second rotating module that drives it to rotate.

[0052] In this embodiment, the grinding rollers 6 are arranged in four groups, but they can also be arranged in six or eight groups, and there is no limitation on this.

[0053] Specifically, the positioning table 3 is also equipped with an adjustment module, which is used to adjust the synchronous movement of each grinding roller 6 toward the direction of approaching or moving away from the axis of the metal target 4.

[0054] It should be noted that, in this embodiment, when grinding the outer edge of the metal target 4, the grinding rollers 6 are first adjusted to move away from each other by the adjustment module, so that the metal target 4 can be embedded in the space formed by the grinding rollers 6. After placement, the grinding rollers 6 are in contact with the outer edge of the metal target 4. Then, the first rotation module drives the grinding rollers 6 to rotate synchronously along the outer edge of the metal target 4. During the rotation, the second rotation module drives the grinding rollers 6 to rotate on their own axis, thereby grinding the outer edge of the metal target 4. In this embodiment, since the grinding rollers 6 are circumferential... Therefore, when the metal target 4 is placed within the space enclosed by the grinding rollers 6, the distance between each grinding roller 6 and the axial end of the metal target 4 is equal due to the limiting effect of the grinding rollers 6. This ensures that the grinding degree of each grinding roller 6 can remain consistent when grinding the metal target 4, avoiding uneven grinding on the outer edge of the metal target 4. During the grinding process, the adjusting module adjusts each grinding roller 6 to feed synchronously toward the axial direction of the metal target 4, keeping the feed amount consistent, further improving the accuracy of the ground metal target 4, so as to facilitate high-precision matching with the sputtering coating equipment.

[0055] As a further embodiment, each grinding roller 6 is also provided with a measuring module, which is used to detect the distance between the two sets of relatively arranged grinding rollers 6 in real time.

[0056] It can be explained that, in this embodiment, before grinding the metal target 4, the diameter of the metal target 4 is first detected. The initial value of the diameter of the metal target 4 is compared with the value required for forming to obtain a difference. When the metal target 4 is placed in the space formed by the grinding rollers 6, the distance between the two sets of relatively arranged grinding rollers 6 is detected by the measuring module. Based on the above difference, the feed value of each grinding roller 6 moving towards the axial end of the metal target 4 is obtained. During the grinding process, when the measuring module detects that the feed value of the two sets of relatively arranged grinding rollers 6 meets the requirements, the grinding can be stopped. Therefore, in this embodiment, it is not necessary to disassemble the metal target 4 for measurement during the grinding process. The effect of synchronous detection can be achieved during the grinding process, which effectively improves the grinding efficiency.

[0057] In addition, you can refer to Figure 2 In this embodiment, the axial height of each grinding roller 6 is greater than the thickness of a set of metal targets 4. Therefore, during grinding, multiple sets of metal targets 4 can be placed in the space formed by the grinding rollers 6 at one time for grinding, thereby further improving grinding efficiency.

[0058] Example 2

[0059] Based on Example 1, please refer to Figure 4 as well as Figures 7-8The top of each grinding roller 6 is rotatably connected to the adjusting seat 603. The first rotating module includes a servo motor 5 mounted on the positioning table 3. A turntable 501 is fixedly mounted on the output end of the servo motor 5. Several sets of positioning plates 605 corresponding to each grinding roller 6 are fixedly mounted in a circumferential array on the turntable 501. Positioning rods 604 that are slidably inserted into the adjusting seat 603 are symmetrically mounted on the end of the positioning plate 605 away from the turntable 501. It can be explained that when driving each grinding roller 6 to move circumferentially along the outer edge of the metal target 4, the servo motor 5 is first started to drive the turntable 501 to rotate. The turntable 501 can drive the grinding roller 6 to rotate synchronously through the positioning plate 605, the positioning rod 604 and the adjusting seat 603.

[0060] Correspondingly, when the adjustment module adjusts each grinding roller 6 to move towards or away from the axis of the metal target 4, the grinding roller 6 drives the adjustment seat 603 to slide synchronously along the positioning rod 604 to improve the stability of the grinding roller 6 during movement.

[0061] In this embodiment, the number of positioning rods 604 is set in two sets, and the specific number is not limited.

[0062] To facilitate the loading and unloading of the metal target 4, please refer to the following embodiment: Figures 1-3 The servo motor 5 is fixed on the mounting plate 206, which is fixed to the lifting plate 204 via a connecting rod. The lifting plate 204 is fixed to the lifting frame 202. The positioning table 3 is equipped with a lifting mechanism 2. The lifting end of the lifting mechanism 2 is fixed to the connecting plate 201, and the top of the connecting plate 201 is fixed to the lifting frame 202. It can be explained that during loading and unloading, this embodiment can drive the connecting plate 201 and the lifting frame 202 to rise through the lifting mechanism 2. The lifting frame 202 drives the servo motor 5 to rise through the lifting plate 204 and the mounting plate 206, thereby synchronously driving each grinding roller 6 to rise to a certain height, so that there is sufficient distance between it and the positioning table 3, so as to place or remove the metal target material 4.

[0063] In addition, in order to facilitate fine-tuning of the horizontal position of the positioning platform 3 on the workbench 1, in this embodiment, a horizontal adjustment mechanism 102 is also fixedly arranged on the workbench 1, and the driving end of the horizontal adjustment mechanism 102 is fixed to the lifting mechanism 2.

[0064] In this embodiment, the lifting mechanism 2 and the lateral adjustment mechanism 102 can be either screw and nut drive mechanisms or synchronous belt drive mechanisms, and there is no limitation on which one is adopted.

[0065] Please see Figures 3-4 as well as Figures 7-8The second rotating module includes first rotating wheels 601 fixedly arranged on each grinding roller 6. A positioning ring 504 is coaxially sleeved on the outer side of the turntable 501. The positioning ring 504 is fixed to each positioning plate 605. Several sets of second rotating wheels 607 are arranged in a circumferential array on the positioning plates 605. The number of second rotating wheels 607 is equal to that of the first rotating wheels 601. The second rotating wheels 607 and the first rotating wheels 601 are on the same plane, and each second rotating wheel 607 is located on the perpendicular line connecting the axial ends of two adjacent sets of first rotating wheels 601. The distance between the second rotating wheel 607 and the axial end of the turntable 501 is less than the distance between the first rotating wheel 601 and the axial end of the turntable 501. A drive belt 6 is sleeved on each set of first rotating wheels 601 and second rotating wheels 607. 02, wherein a toothed ring 505 is fixedly arranged at the bottom of the mounting plate 206, and a first gear 506 meshing with the toothed ring 505 is fixedly arranged on the second rotating wheel 607; it can be explained that when the servo motor 5 of this embodiment drives each grinding roller 6 to move circumferentially around the outer edge of the metal target 4, it can synchronously drive each second rotating wheel 607 to move circumferentially. During the movement, the second rotating wheel 607 can be driven to rotate by the meshing of the first gear 506 and the toothed ring 505. The second rotating wheel 607 can synchronously drive the grinding roller 6 to rotate by the transmission belt 602 and the first rotating wheel 601, so that the grinding roller 6 can rotate synchronously during the circumferential movement to grind the outer edge of the metal target 4.

[0066] As a further embodiment, for each group of second rotating wheels 607, any one group of second rotating wheels 607 is rotatably mounted on the support 608, while the remaining groups of second rotating wheels 607 are rotatably mounted on the positioning ring 504. The positioning ring 504 has an elastic module connected to the support 608 on one side. It can be explained that, initially, due to the elastic module, the distance between the axis of the second rotating wheel 607 mounted on the support 608 and the axis of the turntable 501 is smaller than the distance between the axis of the other groups of second rotating wheels 607 and the axis of the turntable 501. Furthermore, due to the constraint of the transmission belt 602, the distance between the axis of each grinding roller 6 and the axis of the turntable 501 is minimized. When grinding the metal target 4 is required, [the following can be achieved]. The grinding rollers 6 are pulled synchronously away from the axis of the turntable 501. During the movement of the grinding rollers 6, the support 608 can be driven synchronously away from the axis of the turntable 501 through the transmission belt 602. At this time, the elastic module is in a contracted state and generates elastic force. When the metal target 4 is placed in the space enclosed by each grinding roller 6, the elastic module can be driven by the elastic force of each grinding roller 6 moving towards the axis of the turntable 501. Therefore, when the grinding roller 6 rotates, the outer edge of the metal target 4 can be ground. In this embodiment, the elastic force of the elastic module can drive each grinding roller 6 to feed towards the axis of the metal target 4, without the need for other feeding equipment. This results in higher automation and stability, and can save costs.

[0067] In this embodiment, the elastic module includes a support plate 509 fixedly arranged on the positioning ring 504, a limiting seat 508 fixedly arranged on the support plate 509, and a guide rod 606 fixed to the support 608 slidably inserted in the limiting seat 508. The guide rod 606 is provided with a first spring 507. Specifically, one end of the first spring 507 is fixed to the limiting seat 508, and the other end is fixed to the support 608. It can be explained that during the movement of the support 608, the guide rod 606 can be driven to slide in the limiting seat 508 to compress the first spring 507 and generate elastic force.

[0068] For further details, please refer to Figures 2-3 as well as Figures 5-6 In order to prevent the metal target 4 from moving synchronously when the grinding roller 6 grinds the metal target 4, in this embodiment, the turntable 501 rotates to one end facing the positioning table 3 to arrange the pressure plate 502. The bottom end of the pressure plate 502 is arranged with several sets of protrusions 503 in a circumferential array. It can be explained that when the lifting mechanism 2 drives the grinding roller 6 to move towards the positioning table 3, the protrusions 503 can press against the upper surface of the topmost metal target 4, thereby achieving the effect of pressing the metal target 4 and increasing the friction between the two to prevent the metal target 4 from moving synchronously.

[0069] In addition, several sets of support rods 307 are arranged in a circumferential array on the positioning platform 3. A top seat 308 is fixedly mounted on the top of each support rod 307. The support rods 307 are slidably connected to the positioning platform 3. A cylinder 304 is arranged below the positioning platform 3. A second spring 305 is fixedly mounted inside the cylinder 304. The other end of the second spring 305 is fixed to a telescopic rod 306 slidably mounted on the cylinder 304. The end of the telescopic rod 306 away from the cylinder 304 is fixed to each support rod 307 via a bracket. The cylinder 3... The bottom of 04 is fixed to the U-shaped frame 303. First racks 302 are fixedly arranged on both side plates of the U-shaped frame 303. Second gears 301 meshing with the first racks 302 are respectively arranged on both sides of the positioning platform 3. L-shaped brackets 203 are fixedly arranged on both sides of the end of the lifting frame 202 away from the lifting mechanism 2. A second rack 205 for meshing with the other side of the second gear 301 is fixedly arranged at the bottom end of the L-shaped bracket 203. It can be noted that, in the initial state, each top seat 308... The lower surface is in contact with the positioning table 3. When positioning the metal target 4, the metal target 4 is placed on each top seat 308. When the lifting mechanism 2 drives the grinding roller 6 to descend, it can simultaneously drive the L-shaped bracket 203 and the second rack 205 to descend. As the second rack 205 meshes with the second gear 301, the second gear 301 can simultaneously drive the U-shaped frame 303 to rise, thereby driving the cylinder 304 to rise. The cylinder 304 drives the top seat 308 to rise through the second spring 305 and the telescopic rod 306 until the top seat 308 separates from the positioning table 3 and a certain gap is generated. On the one hand, the top seat 308 can cooperate with the pressure plate 502 to achieve the effect of clamping and positioning the metal target 4. On the other hand, it can separate the top metal target 4 from the positioning table 3 so that the grinding roller 6 can descend to the bottom of the bottom metal target, thereby fully grinding the bottom metal target 4. At the same time, based on the setting of the second spring 305, the shock absorption effect of the metal target 4 is further improved during the grinding process.

[0070] In addition, please see Figure 8 The measurement module includes an infrared rangefinder 510 fixedly arranged on each adjustment seat 603. The infrared rangefinder 510 is arranged on the side of each adjustment seat 603 facing the axis of the turntable 501. Since the number of adjustment seats 603 in this embodiment is even, each adjustment seat 603 is arranged opposite to the axis of the turntable 501, and the distance between them can be detected by the infrared rangefinder 510.

[0071] A method for machining and forming a metal sputtering target includes the following steps:

[0072] Please see Figures 1-2 S1. Before grinding, the diameter of the metal target 4 is detected, and the initial value of the diameter of the metal target 4 is compared with the value required for forming to obtain the difference.

[0073] S2. Adjust the module to move each grinding roller 6 away from each other, and embed the metal target 4 into the space formed by the grinding rollers 6. After placement, each grinding roller 6 is in contact with the outer edge of the metal target 4.

[0074] S3. The measuring module detects the distance between the two sets of relatively set grinding rollers 6. Based on the above difference, the feed value of each grinding roller 6 moving towards the center end of the metal target 4 is obtained.

[0075] S4. The first rotating module drives each grinding roller 6 to rotate synchronously along the outer edge of the metal target 4. During the rotation, the second rotating module drives each grinding roller 6 to rotate on its own to perform grinding on the outer edge of the metal target 4.

[0076] S5. Adjust the module to adjust each grinding roller 6 to feed synchronously toward the axis of the metal target 4 and perform grinding.

[0077] S6. During the grinding process, when the measuring module detects that the feed values ​​of the two sets of relatively set grinding rollers 6 meet the requirements, the grinding is stopped.

[0078] In the description of this invention, it should be understood that the terms "upper," "lower," "left," and "right," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or a specific orientational structure and operation. Therefore, they should not be construed as limitations on the invention. Furthermore, "first" and "second" are only for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "multiple" means two or more.

[0079] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0080] The foregoing has provided a detailed description of one embodiment of the present invention, but this description is merely a preferred embodiment and should not be construed as limiting the scope of the invention. All equivalent variations and modifications made within the scope of the claims of this invention should still fall within the patent coverage of this invention.

Claims

1. A metal target machining and forming equipment, comprising a worktable (1), wherein the worktable (1) is provided with a positioning table (3) for supporting a metal target (4). Its features are, The positioning platform (3) is arranged in a circumferential array with several sets of grinding rollers (6) for positioning the metal target (4). Each grinding roller (6) is connected to a first rotating module that drives it to rotate synchronously along the outer edge of the metal target (4). Each grinding roller (6) is also connected to a second rotating module that drives it to rotate. The positioning platform (3) is also equipped with an adjustment module, which is used to adjust the synchronous movement of each grinding roller (6) toward the axis end of the metal target (4) or away from it. Each of the grinding rollers (6) is also provided with a measuring module, which is used to detect the distance between the two sets of grinding rollers (6) arranged opposite each other in real time; The top ends of each of the grinding rollers (6) are rotatably connected to the adjusting seat (603). The first rotating module includes a servo motor (5) arranged on the positioning table (3). A turntable (501) is fixedly arranged at the output end of the servo motor (5). Several sets of positioning plates (605) corresponding to each grinding roller (6) are fixedly arranged in a circumferential array on the turntable (501). A positioning rod (604) that slides into the adjusting seat (603) is symmetrically arranged at the end of the positioning plate (605) away from the turntable (501). The servo motor (5) is fixed on the mounting plate (206), and the mounting plate (206) is fixed to the lifting plate (204) by a connecting rod. The lifting plate (204) is fixed to the lifting frame (202). The positioning platform (3) is equipped with a lifting mechanism (2), the lifting end of the lifting mechanism (2) is fixed to the connecting plate (201), and the top of the connecting plate (201) is fixed to the lifting frame (202). The second rotating module includes a first rotating wheel (601) fixedly arranged on each grinding roller (6), a positioning ring (504) coaxially sleeved on the outer side of the turntable (501), the positioning ring (504) being fixed to each positioning plate (605), and several sets of second rotating wheels (607) arranged in a circumferential array on the positioning plate (605). The number of second rotating wheels (607) is equal to that of the first rotating wheels (601), the second rotating wheels (607) and the first rotating wheels (601) are on the same plane, and each second rotating wheel (607) is located on the vertical line connecting the axial ends of two adjacent sets of first rotating wheels (601). The distance between the second rotating wheel (607) and the axial end of the turntable (501) is smaller than the distance between the first rotating wheel (601) and the axial end of the turntable (501). Each set of first rotating wheels (601) and second rotating wheels (607) is sleeved with a transmission belt (602). Among them, a toothed ring (505) is fixedly arranged at the bottom of the mounting plate (206), and a first gear (506) that meshes with the toothed ring (505) is fixedly arranged on the second rotating wheel (607).

2. The metal sputtering and forming equipment according to claim 1, characterized in that, For each group of second rotating wheels (607), any one group of second rotating wheels (607) is rotatably arranged on the support (608), and the other groups of second rotating wheels (607) are rotatably arranged on the positioning ring (504); Among them, an elastic module connected to the support (608) is provided on one side of the positioning ring (504).

3. The metal sputtering and forming equipment according to claim 2, characterized in that, The elastic module includes a support plate (509) fixedly arranged on the positioning ring (504), a limiting seat (508) fixedly arranged on the support plate (509), and a guide rod (606) fixed to the support (608) slidably inserted in the limiting seat (508). The guide rod (606) is provided with a first spring (507).

4. The metal sputtering and forming equipment according to claim 1, characterized in that, The turntable (501) rotates to place a pressure plate (502) at one end facing the positioning platform (3), and the bottom of the pressure plate (502) is arranged with several sets of protrusions (503) in a circumferential array.

5. The metal sputtering and forming equipment according to claim 1, characterized in that, The positioning platform (3) is also provided with several sets of support rods (307) arranged in a circumferential array. The top of the support rod (307) is fixedly provided with a top seat (308). The support rod (307) is slidably connected to the positioning platform (3). A cylinder (304) is provided below the positioning platform (3). A second spring (305) is fixedly provided in the cylinder (304). The other end of the second spring (305) is fixed to a telescopic rod (306) slidably provided on the cylinder (304). The end of the telescopic rod (306) away from the cylinder (304) is fixed to each support rod (307) through a bracket. The bottom of the cylinder (304) is fixed to the U-shaped frame (303), and the first rack (302) is fixedly arranged on the two side plates of the U-shaped frame (303). The two sides of the positioning platform (3) are respectively arranged with the second gear (301) meshing with the first rack (302). The two sides of the lifting frame (202) away from the lifting mechanism (2) are respectively fixedly arranged with the L-shaped bracket (203). The bottom end of the L-shaped bracket (203) is fixedly arranged with the second rack (205) for meshing with the other side of the second gear (301).

6. The metal sputtering and forming equipment according to claim 1, characterized in that, The measurement module includes an infrared rangefinder (510) fixedly mounted on each adjustment seat (603). The infrared rangefinder (510) is mounted on the side of each adjustment seat (603) facing the axis of the turntable (501).

7. A forming method for a metal sputtering and forming equipment as described in any one of claims 1-6, characterized in that, Includes the following steps: Before grinding, the diameter of the metal target (4) is detected, and the initial value of the diameter of the metal target (4) is compared with the value required for forming to obtain the difference. Adjust the grinding rollers (6) to move away from each other, and embed the metal target (4) into the space formed by the grinding rollers (6). After placement, the grinding rollers (6) are in contact with the outer edge of the metal target (4). The measuring module detects the distance between the two sets of relatively arranged grinding rollers (6), and based on the above difference, obtains the feed value of each grinding roller (6) moving toward the axis end of the metal target (4); The first rotating module drives each grinding roller (6) to rotate synchronously along the outer edge of the metal target (4). During the rotation, the second rotating module drives each grinding roller (6) to rotate on its own to perform grinding on the outer edge of the metal target (4). The adjustment module adjusts each grinding roller (6) to feed synchronously toward the axis of the metal target (4) and perform grinding; During the grinding process, the measuring module stops grinding when the feed values ​​of the two sets of relatively set grinding rollers (6) meet the requirements.

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