Helium mass spectrum leak detection device and leak detection method

Abstract

The invention belongs to the technical field of helium mass spectrometer leak detection, and discloses a helium mass spectrometer leak detection device and method.The helium mass spectrometer leak detection device comprises a leak detection cabin, a helium mass spectrometer leak detector, a loading and unloading mechanism and a control module, a cabin opening is formed in one end of the detection cabin, the leak detection cabin is connected with a cabin door and a vacuum pump set, and the cabin door is connected with an opening and closing driving part; the vacuum pump group is arranged in the leak detection cabin; the helium mass spectrometer leak detector is connected with the leak detection cabin; the loading and unloading mechanism comprises a first translation assembly and a second translation assembly, the first translation assembly is used for driving the electrical penetration assembly to move in the first direction, and the second translation assembly is connected with the first translation assembly and used for driving the electrical penetration assembly to move in the second direction; the control module is connected with the opening and closing driving part, the vacuum pump set, the helium mass spectrometer leak detector, the first translation assembly and the second translation assembly. Therefore, the first translation assembly and the second translation assembly can enable the electrical penetration assembly to move stably, and the leak detection efficiency and safety of the helium mass spectrometer are improved.

Images