Method and device for correcting and repairing plane carrier plate of exposure machine

Abstract

The invention discloses a method and a device for correcting and repairing a plane carrier plate of an exposure machine, and relates to the technical field of exposure machines. Comprising the following steps: scanning an exposure machine plane carrier plate, and obtaining a to-be-repaired position of the exposure machine plane carrier plate; the correcting and repairing device is moved to the to-be-repaired position; drilling the salient points at the to-be-repaired position according to a preset aperture, and collecting waste materials and dust generated during drilling at the same time; the replacement part is conveyed to the position, corresponding to the to-be-repaired position, over the drill hole and pressed into the drill hole; and after repairing is completed, scanning and rechecking are carried out again. The method can quickly position and repair the salient points on the plane carrier plate of the exposure machine, does not need integral disassembly, and is short in repair time and high in repair efficiency; waste and dust are collected in time in the drilling process, pollution to the working environment and equipment is avoided, the whole plane carrier plate does not need to be replaced, the repair cost is reduced, the service life of the equipment is prolonged, and the stability of the equipment is improved.

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