Dead pixel pattern screening method, device and equipment

Abstract

The invention discloses a dead pixel graph screening method, device and equipment, and the method comprises the steps: determining a first graph set meeting a first design rule in a test layout based on the design rule of the test layout, and determining graphs which do not meet the first design rule as dead pixel graphs, the first design rule is a design rule related to the parameters of the graph; a second graph meeting a second design rule in the graph set is determined, a first graph not meeting the second design rule is determined as a dead pixel graph, and the second design rule is a design rule related to other reference graphs; determining whether the second graph meets an ideal process window or not; and determining the second pattern which does not meet the ideal process window as a dead pixel pattern. According to the scheme, the dead pixel graph screening method can be automatically achieved, manual participation is not needed, and the dead pixel screening efficiency and the dead pixel screening accuracy can be greatly improved.

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