Air floating bearing device

Abstract

An air floating bearing device for manufacturing a display panel, comprising: a plurality of strip-shaped air floating platforms arranged side by side, at least one of the plurality of strip-shaped air floating platforms comprising: a fixed air floating part keeping position unchanged in a horizontal direction; and a movable air floating part configured to switch between a first position and a second position in the horizontal direction, when the movable air floating part is located at the first position, the fixed air floating part and the movable air floating part are spliced together in the horizontal direction; when the movable air floating part is located at the second position, the movable air floating part is away from the fixed air floating part in the horizontal direction.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor equipment, and more specifically, to an air-bearing support device. Background Technology

[0002] In the fabrication process of semiconductor devices such as OLED display panels, a carrier device, together with a robotic arm, is used to carry and transfer the OLED display substrate. For example, various methods such as inkjet printing and inkjet coating can be used to form pixel light-emitting layers and liquid optical adhesive (Optical Clear Resin) layers on the OLED display substrate. Subsequently, the OLED display substrate needs to be transferred to a curing device for curing to achieve the stability of the OLED display substrate layer structure. Summary of the Invention

[0003] This disclosure provides an air-float support device for manufacturing display panels, comprising:

[0004] Multiple strip-shaped air flotation platforms are arranged side by side, and at least one of the multiple strip-shaped air flotation platforms includes:

[0005] The fixed air flotation component maintains its position in the horizontal direction; and

[0006] The movable air flotation section is configured to switch between a first position and a second position in the horizontal direction.

[0007] When the movable air flotation part is in the first position, the fixed air flotation part and the movable air flotation part are attached and spliced ​​together in the horizontal direction.

[0008] When the movable air flotation part is in the second position, the movable air flotation part is horizontally away from the fixed air flotation part.

[0009] In some embodiments, the plurality of strip-shaped air flotation platforms include a first strip-shaped air flotation platform and a second strip-shaped air flotation platform, wherein the first strip-shaped air flotation platform and the second strip-shaped air flotation platform are arranged side by side along a first direction.

[0010] The first strip-shaped air flotation platform includes:

[0011] The first fixed air flotation section maintains its position in the horizontal direction;

[0012] Multiple first movable air-bearing components are configured to be movable relative to the first fixed air-bearing component in a first direction.

[0013] When the plurality of first movable air flotation parts move close to the first fixed air flotation part to the first position, there is a first strip-shaped interval between the first strip-shaped air flotation platform and the second strip-shaped air flotation platform;

[0014] When the plurality of first movable air flotation portions move away from the first fixed air flotation portion to the second position, the plurality of first movable air flotation portions occupy a portion of the first strip-shaped interval.

[0015] In some embodiments, the plurality of strip-shaped air flotation platforms includes a third strip-shaped air flotation platform, wherein the first to third strip-shaped air flotation platforms are arranged side by side in sequence along a first direction.

[0016] The second strip-shaped air flotation platform includes:

[0017] The second fixed air flotation section maintains its position in the horizontal direction;

[0018] Multiple second movable air flotation sections are configured to be movable relative to the second fixed air flotation section in a first direction.

[0019] When the plurality of second movable air flotation parts move close to the second fixed air flotation part to the first position, there is a second strip-shaped interval between the second strip-shaped air flotation platform and the third strip-shaped air flotation platform;

[0020] When the plurality of second movable air flotation portions move away from the second fixed air flotation portion to the second position, the plurality of second movable air flotation portions occupy a portion of the second strip-shaped interval.

[0021] The plurality of first movable air flotation sections and the plurality of second movable air flotation sections are configured to switch synchronously between a first position and a second position.

[0022] In some embodiments, the air flotation support device further includes:

[0023] Multiple guiding mechanisms extend along a first direction, each guiding mechanism being configured to guide a corresponding first movable air flotation part and a second movable air flotation part to switch between a first position and a second position along the first direction.

[0024] In some embodiments, each guide mechanism includes:

[0025] Guide rail, extending along the first direction; and

[0026] The guide plate is slidably connected to the guide rail, and the corresponding first movable air flotation part and second movable air flotation part are fixedly connected to the guide plate.

[0027] In some embodiments, the air flotation support device further includes:

[0028] The drive unit is configured to drive the plurality of first movable air flotation parts and the plurality of second movable air flotation parts to switch synchronously between a first position and a second position.

[0029] In some embodiments, the air flotation support device further includes:

[0030] A fixed air tube is configured to supply gas to the fixed air flotation section;

[0031] A spring-loaded air tube is configured to supply gas to the plurality of movable air flotation sections.

[0032] In some embodiments, the air flotation support device further includes:

[0033] base; and

[0034] An adjustable support column is provided on the base to support the plurality of strip-shaped air flotation platforms, and the height of the support column is adjustable.

[0035] In some embodiments, the air flotation support device further includes:

[0036] A slide rail extends along a first direction and is disposed on one side of the plurality of strip-shaped air flotation platforms;

[0037] A clamp, slidably connected to the slide rail, is configured to hold a load and slide it along a first direction to transfer the load.

[0038] In some embodiments, the air flotation support device further includes:

[0039] A limiter is disposed at the edge of at least one of the plurality of strip-shaped air flotation platforms and configured to limit the position of the carrier.

[0040] The above-described solutions in this disclosure can have the following beneficial effects:

[0041] The structure employs multiple strip-shaped air-floating platforms arranged side-by-side, eliminating the need for the lifting rods that move through the air-floating platforms in a direction perpendicular to them, as is common in traditional designs. This allows robotic arms or other transport mechanisms to directly and precisely place loads, such as display substrates, onto the air-floating support device for subsequent manufacturing processes. This reduces the coordinate calibration time for robotic arms or other transport mechanisms and avoids the risk of collisions during load descent. At least one of the multiple strip-shaped air-floating platforms includes a movable air-floating section that switches between a first and a second position in the horizontal direction. This allows the air-floating support device to switch to a checkerboard pattern after bearing the load, such as the display substrate, compensating for any deformation of the display substrate and facilitating smooth load transfer. Attached Figure Description

[0042] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this disclosure and, together with the description, serve to explain the principles of this disclosure. It is obvious that the drawings described below are merely some embodiments of this disclosure, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort. In the drawings:

[0043] Figure 1 This is a schematic diagram of the structure of a display substrate carrier device in related technologies;

[0044] Figure 2 This is a schematic diagram of the display substrate carrier device from another perspective in the related technology;

[0045] Figure 3 This is a schematic diagram of the structure of an air flotation bearing device provided in some embodiments of the present disclosure, wherein the movable air flotation part is in a first position;

[0046] Figure 4 This is a schematic diagram of the structure of an air flotation bearing device provided in some embodiments of the present disclosure, wherein the movable air flotation part is in a second position;

[0047] Figure 5 Another structural schematic diagram of the air flotation bearing device provided in some embodiments of this disclosure;

[0048] Figure 6 This is a structural schematic diagram of the air flotation bearing device provided in some embodiments of the present disclosure from another perspective.

[0049] Figure 7 This is a schematic diagram of the structure of an air flotation bearing device provided in some embodiments of this disclosure;

[0050] Figure 8 for Figure 7 A magnified view of a local region M. Detailed Implementation

[0051] To make the objectives, technical solutions, and advantages of this disclosure clearer, the disclosure will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this disclosure, and not all of them. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0052] The terminology used in the embodiments of this disclosure is for the purpose of describing particular embodiments only and is not intended to be limiting of this disclosure. The singular forms “a,” “the,” and “the” as used in the embodiments of this disclosure and the appended claims are also intended to include the plural forms, and “multiple” generally includes at least two unless the context clearly indicates otherwise.

[0053] It should be understood that the term "and / or" used in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this article generally indicates that the preceding and following related objects have an "or" relationship.

[0054] It should be understood that although the terms first, second, third, etc. may be used to describe the embodiments in this disclosure, it should not be limited to these terms.

[0055] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that an article or device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or device. Without further limitation, an element defined by the phrase "comprising one" does not exclude the presence of other identical elements in the article or device that includes said element.

[0056] In related technologies, in the manufacturing process of display panels, such as OLED display panels, the OLED display substrate needs to be transferred between different process equipment. Specifically, the OLED display substrate can be transferred between different process equipment by means of a robotic arm or other transport mechanism in conjunction with a carrier device, such as an air-floating carrier device.

[0057] Figure 1 This is a schematic diagram of the structure of a display substrate carrier device in related technologies. Figure 1 This is a top-down view. Figure 2 This is a schematic diagram of the structure of a display substrate carrier device from another perspective in related technologies. Figure 2 This is a view taken from a low angle. For example... Figure 1 and Figure 2 As shown, the display substrate carrier in the related technology is used, for example, as a curing apparatus. After forming a printed coating, such as a pixel light-emitting layer or an optical clear resin layer, on the display substrate using processes such as inkjet printing, the display substrate needs to be transferred to a curing apparatus to cure the printed display substrate and stabilize the properties of the printed coating.

[0058] The inkjet-printed display substrate is transferred to the curing unit by a robotic arm. Specifically, the display substrate with the printed coating is transferred by the robotic arm to the top of the display substrate carrying device 1. The supporting lifting rod 3 rises relative to the air-floating platform 2, passing through the through hole on the air-floating platform 2 to receive the display substrate 4 transferred by the robotic arm. The supporting lifting rods 3 are arranged in an array on the lifting rod bracket 6. When the supporting lifting rods 3 carry the display substrate 4, they use an array of point supports to support the display substrate 4. Subsequently, the robotic arm lowers the display substrate, so that the display substrate is carried by the supporting lifting rods 3. After the robotic arm is withdrawn, the supporting lifting rods 3 carry the display substrate 4 down, and the display substrate 4 is supported by the air-floating platform 2. The free end of the supporting lifting rod 3 is lower than the upper surface of the air-floating platform 2. After the display substrate is cured, the supporting lifting rods 3 rise, pushing the display substrate 4 away from the air-floating platform 2, and then the robotic arm transfers the display substrate 4 to the next process.

[0059] In related technologies, since the supporting lifting rod 3 needs to pass through the through hole on the air flotation platform 2, in order to avoid the supporting lifting rod 3 directly contacting the inner wall of the through hole and generating fine particles that would affect the process, a gas sleeve 5 needs to be added to the lower surface of the air flotation platform 2, which is connected to the gas pipeline 7. The supporting lifting rod 3 passes through the gas sleeve 5 and aligns with the through hole on the air flotation platform 2. The gas pipeline 7 supplies gas into the gas sleeve 5, so that the supporting lifting rod 3 does not make physical contact with the inner wall of the gas sleeve 5 or the inner wall of the through hole on the air flotation platform 2 during movement, resulting in a complex overall structure for the display substrate carrying device 1. When the display substrate 4 is transferred to the process equipment, a pick-and-place action is required, which is achieved by the supporting lifting rod 3 moving up and down, so that the display substrate is carried by the air flotation platform 2 or sorted by the air flotation platform 2. In this approach, because the supporting lifting rod 3 is in contact with the display substrate, acceleration is generated when the supporting lifting rod 3 and the display substrate move up and down together, which can cause the position of the display substrate to shift and collide, and in severe cases, even damage the display substrate.

[0060] In the OLED display panel manufacturing process, inkjet printing devices are typically arranged sequentially on the production line along with curing devices and automated optical inspection devices. A robotic arm is used to transfer the OLED display panel between these equipment. However, both picking up and placing the OLED display panel by the robotic arm take considerable time, and each transfer requires alignment to prevent interference between the support lifting rod 3 and the robotic arm. This results in low efficiency in the OLED display panel manufacturing process, and there is a risk of collision when the display substrate is carried by the support lifting rod 3 onto the air-floating platform 2.

[0061] To overcome the above problems, this disclosure provides an air-bearing support device for manufacturing a display panel, comprising: a plurality of strip-shaped air-bearing platforms arranged side by side, at least one of the plurality of strip-shaped air-bearing platforms including: a fixed air-bearing portion that remains in a fixed position in the horizontal direction; and a movable air-bearing portion configured to switch between a first position and a second position in the horizontal direction, wherein when the movable air-bearing portion is in the first position, the fixed air-bearing portion and the movable air-bearing portion are fitted and spliced ​​together in the horizontal direction; and when the movable air-bearing portion is in the second position, the movable air-bearing portion is moved away from the fixed air-bearing portion in the horizontal direction.

[0062] In this disclosure, a structure in which multiple strip-shaped air-floating platforms are arranged side by side is adopted, eliminating the lifting rod that moves through the air-floating platforms in a direction perpendicular to the air-floating platforms in the traditional design. The robotic arm or other transportation mechanism can directly and accurately place the load, such as a display substrate, onto the air-floating support device, so that it can enter the subsequent manufacturing process. This reduces the coordinate calibration time of the robotic arm or other transportation mechanism and avoids the risk of collision of the display substrate during the descent. At least one of the multiple strip-shaped air-floating platforms includes a movable air-floating part, which switches between a first position and a second position in the horizontal direction. This allows the air-floating support device to switch to a checkerboard pattern after bearing the load, such as the display substrate, to compensate for the deformation of the display substrate and facilitate the smooth transfer of the load, such as the display substrate.

[0063] The optional embodiments of this disclosure are described in detail below with reference to the accompanying drawings.

[0064] Figure 3 This is a schematic diagram of the structure of an air flotation bearing device provided in some embodiments of the present disclosure, wherein the movable air flotation part is in the first position. Figure 4 This is a schematic diagram of the structure of an air flotation bearing device provided in some embodiments of the present disclosure, wherein the movable air flotation part is in a second position.

[0065] As shown in Figure 3 and Figure 4 As shown, some embodiments of this disclosure provide an air flotation support device 100 for the manufacture of display panels. The air flotation support device 100 includes a plurality of strip-shaped air flotation platforms 10. The plurality of strip-shaped air flotation platforms 10 are arranged side by side. At least one of the plurality of strip-shaped air flotation platforms 10 includes a fixed air flotation portion 11 and a movable air flotation portion 12. Figure 3 As shown, the number of strip-shaped air flotation platforms 10 is, for example, five. The four strip-shaped air flotation platforms 10 on the left have fixed air flotation parts 11 and movable air flotation parts 12. The one strip-shaped air flotation platform 10 on the right is an integral structure, for example, a fixed strip-shaped air flotation platform.

[0066] The fixed air flotation section 11 remains in a fixed position in the horizontal direction; that is, the fixed air flotation section 11 remains fixed in the horizontal direction. The movable air flotation section 12 is configured to switch between a first position and a second position in the horizontal direction, wherein... Figure 3 An example of the movable air flotation section 12 in the first position is shown. Figure 4 An example of the movable air flotation section 12 in the second position is shown.

[0067] When the movable air flotation part 12 is in the first position, the fixed air flotation part 11 and the movable air flotation part 12 are horizontally fitted and spliced ​​together to form a strip-shaped air flotation platform 10. For example... Figure 3 As shown, multiple strip-shaped air-floating platforms 10 are arranged side by side at intervals, with a gap G between two adjacent strip-shaped air-floating platforms 10. These gaps allow the support fingers of the robotic arm to pass through, so that the robotic arm carries the load L, such as a display substrate, and descends in the vertical direction. The descent transfers the load L, such as the display substrate, to the air-floating support device 100.

[0068] When the movable air flotation part 12 is in the second position, the movable air flotation part 12 moves away from the fixed air flotation part 11 in the horizontal direction. For example... Figure 4 As shown, at this time, the movable air-bearing part 12 occupies at least a portion of the gap G, and the air-bearing bearing device 100 is generally in the shape of a checkerboard, so that when the air-bearing bearing device 100 bears the load L, such as a display substrate, the deformation of the load can be reduced and collisions caused by the deformation of the load L can be avoided.

[0069] In some embodiments, such as Figure 3 and Figure 4 As shown, the plurality of strip-shaped air flotation platforms include a first strip-shaped air flotation platform 101 and a second strip-shaped air flotation platform 102, which are arranged side by side along a first direction X.

[0070] The first strip-shaped air flotation platform 101 includes a first fixed air flotation portion 1011 and a plurality of first movable air flotation portions 1012. The first fixed air flotation portion 1011 remains in a fixed position in the horizontal direction. The plurality of first movable air flotation portions 1012 are configured to be movable relative to the first fixed air flotation portion 1011 in a first direction X.

[0071] When the plurality of first movable air flotation parts 1012 move close to the first fixed air flotation part 1011 to the first position, there is a first strip-shaped interval G1 between the first strip-shaped air flotation platform 101 and the second strip-shaped air flotation platform 101; when the plurality of first movable air flotation parts 1012 move away from the first fixed air flotation part 1011 to the second position, the plurality of first movable air flotation parts 1012 occupy a portion of the first strip-shaped interval G1.

[0072] In some embodiments, such as Figure 3 and Figure 4 As shown, the plurality of strip-shaped air flotation platforms 10 also includes a third strip-shaped air flotation platform 103, and the first strip-shaped air flotation platform 101 to the third strip-shaped air flotation platform 103 are arranged side by side along the first direction X.

[0073] The second strip-shaped air flotation platform 102 includes: a second fixed air flotation portion 1021 and a plurality of second movable air flotation portions 1022, which remain in a fixed position in the horizontal direction, and the plurality of second movable air flotation portions 1022 are configured to be movable relative to the second fixed air flotation portion 1021 in a first direction X.

[0074] When the plurality of second movable air flotation portions 1022 move close to the second fixed air flotation portion 1021 to the first position, a second strip-shaped interval G2 is formed between the second strip-shaped air flotation platform 102 and the third strip-shaped air flotation platform 103; when the plurality of second movable air flotation portions 1022 move away from the second fixed air flotation portion 1021 to the second position, the plurality of second movable air flotation portions 1022 occupy a portion of the second strip-shaped interval G2.

[0075] The plurality of first movable air flotation sections 1012 and the plurality of second movable air flotation sections 1022 are configured to switch synchronously between a first position and a second position.

[0076] The previous embodiments showed two or three strip-shaped air flotation platforms 10. The number of strip-shaped air flotation platforms 10 can also be more, such as... Figure 3 , Figure 4 As shown. The number of multiple strip-shaped air flotation platforms 10 is, for example, five, specifically, a first strip-shaped air flotation platform 101, a second strip-shaped air flotation platform 102, a third strip-shaped air flotation platform 103, a fourth strip-shaped air flotation platform 104, and a fifth strip-shaped air flotation platform 105.

[0077] The first strip-shaped air flotation platform 101, the second strip-shaped air flotation platform 102, the third strip-shaped air flotation platform 103, the fourth strip-shaped air flotation platform 104, and the fifth strip-shaped air flotation platform 105 are arranged side by side along the first direction X. The first strip-shaped air flotation platform 101, the second strip-shaped air flotation platform 102, the third strip-shaped air flotation platform 103, the fourth strip-shaped air flotation platform 104, and the fifth strip-shaped air flotation platform 105 all extend in the horizontal direction in a direction perpendicular to the first direction X.

[0078] Each of the first strip-shaped air flotation platform 101, the second strip-shaped air flotation platform 102, the third strip-shaped air flotation platform 103, and the fourth strip-shaped air flotation platform 104 includes a fixed air flotation portion 11 and a movable air flotation portion 12. Specifically, the first strip-shaped air flotation platform 101 includes a first fixed air flotation portion 1011 and a plurality of first movable air flotation portions 1012; the second strip-shaped air flotation platform 102 includes a second fixed air flotation portion 1021 and a plurality of second movable air flotation portions 1022; the third strip-shaped air flotation platform 103 includes a third fixed air flotation portion 1031 and a plurality of third movable air flotation portions 1032; and the fourth strip-shaped air flotation platform 104 includes a fourth fixed air flotation portion 1041 and a plurality of fourth movable air flotation portions 1042. For example, the number of each of the plurality of first movable air flotation portions 1012, the plurality of second movable air flotation portions 1022, the plurality of third movable air flotation portions 1032, and the plurality of fourth movable air flotation portions 1042 is four. Figure 3 and Figure 4 As shown. The fifth strip-shaped air flotation platform 105 is a fixed air flotation platform, which maintains its position in the horizontal direction.

[0079] In some embodiments, the first fixed air flotation portion 1011, the second fixed air flotation portion 1021, the third fixed air flotation portion 1031, and the fourth fixed air flotation portion 1041 each have a plurality of groove portions, such as rectangular grooves. The plurality of first movable air flotation portions 1012, the plurality of second movable air flotation portions 1022, the plurality of third movable air flotation portions 1032, and the plurality of fourth movable air flotation portions 1042 each have a shape that matches the groove portions of the plurality of fixed air flotation portions, such as rectangular.

[0080] In some embodiments, the first fixed air flotation portion 1011, the second fixed air flotation portion 1021, the third fixed air flotation portion 1031, and the fourth fixed air flotation portion 1041 remain in a fixed position in the horizontal direction. A plurality of first movable air flotation portions 1012, a plurality of second movable air flotation portions 1022, a plurality of third movable air flotation portions 1032, and a plurality of fourth movable air flotation portions 1042 are movable in the first direction X relative to the first fixed air flotation portion 1011, the second fixed air flotation portion 1021, the third fixed air flotation portion 1031, and the fourth fixed air flotation portion 1041, respectively, between a first position and a second position.

[0081] When multiple first movable air flotation parts 1012, multiple second movable air flotation parts 1022, multiple third movable air flotation parts 1032, and multiple fourth movable air flotation parts 1042 are all in the first position, the multiple first movable air flotation parts 1012, multiple second movable air flotation parts 1022, multiple third movable air flotation parts 1032, and multiple fourth movable air flotation parts 1042 respectively match and adhere to the grooves of the first fixed air flotation parts 1011, the second fixed air flotation parts 1021, the third fixed air flotation parts 1031, and the fourth fixed air flotation parts 1041. The first strip-shaped air flotation platform 101, the second strip-shaped air flotation platform 102, the third strip-shaped air flotation platform 103, and the fourth strip-shaped air flotation platform 104 are all in a spliced ​​state, forming a long strip extending perpendicular to the first direction X. The first strip-shaped air flotation platform 101, the second strip-shaped air flotation platform 102, the third strip-shaped air flotation platform 103, the fourth strip-shaped air flotation platform 104, and the fifth strip-shaped air flotation platform 105 are sequentially spaced apart by a predetermined gap G. Specifically, there is a first gap G1 between the first strip-shaped air flotation platform 101 and the second strip-shaped air flotation platform 102, a second gap G2 between the second strip-shaped air flotation platform 102 and the third strip-shaped air flotation platform 103, a third gap G3 between the third strip-shaped air flotation platform 103 and the fourth strip-shaped air flotation platform 104, and a fourth gap G4 between the fourth strip-shaped air flotation platform 104 and the fifth strip-shaped air flotation platform 105.

[0082] In this configuration, the robotic arm's supporting fingers, such as those supporting a display substrate, can move vertically through gap G, transferring the load, such as the display substrate, to or from the air-floating support device 100. Specifically, the number of supporting fingers is, for example, four, each equipped with a vacuum adsorption device, allowing the robotic arm to securely grasp the load. When the load, such as the display substrate, is transferred from the robotic arm to the air-floating support device 100, the supporting fingers adsorb the load, such as the display substrate. The robotic arm moves the load above the air-floating support device 100, and then the supporting fingers of the robotic arm descend vertically carrying the load. The four supporting fingers are respectively allowed to enter the first gap G1, the second gap G2, the third gap G3, and the fourth gap G4. When the load approaches the upper surface of the air-floating support device 100, the vacuum adsorption devices on the supporting fingers cease operation, and the four supporting fingers continue to descend vertically, transferring the load onto the air-floating support device 100, where it is supported by multiple strip-shaped air-floating platforms 10. Subsequently, the robotic arm was withdrawn from below the air-bearing support device 100.

[0083] When the plurality of first movable air flotation parts 1012, the plurality of second movable air flotation parts 1022, the plurality of third movable air flotation parts 1032, and the plurality of fourth movable air flotation parts 1042 are all in the second position, the plurality of first movable air flotation parts 1012, the plurality of second movable air flotation parts 1022, the plurality of third movable air flotation parts 1032, and the plurality of fourth movable air flotation parts 1042 respectively disengage from the grooves of the first fixed air flotation part 1011, the second fixed air flotation part 1021, the third fixed air flotation part 1031, and the fourth fixed air flotation part 1041.

[0084] The first strip-shaped air flotation platform 101, the second strip-shaped air flotation platform 102, the third strip-shaped air flotation platform 103, and the fourth strip-shaped air flotation platform 104 are all in the deployed state. Multiple first movable air flotation sections 1012 occupy a portion of the first interval G1, and the width of the multiple first movable air flotation sections 1012 is, for example, equal to the width of the first interval G1. The multiple first movable air flotation sections 1012, for example, abut against the second fixed air flotation section 1021. Similarly, multiple second movable air flotation sections 1022, multiple third movable air flotation sections 1032, and multiple fourth movable air flotation sections 1042 occupy a portion of the second interval G2, the third interval G3, and the fourth interval G4, respectively. The widths of the multiple second movable air flotation sections 1022, the multiple third movable air flotation sections 1032, and the multiple fourth movable air flotation sections 1042 are, for example, equal to the widths of the second interval G2, the third interval G3, and the fourth interval G4, respectively. The multiple second movable air flotation sections 1022, the multiple third movable air flotation sections 1032, and the multiple fourth movable air flotation sections 1042 abut against, for example, the third fixed air flotation section 1031, the fourth fixed air flotation section 1041, and the fifth strip-shaped air flotation platform 105, respectively.

[0085] In this configuration, the first strip-shaped air-float platform 101, the second strip-shaped air-float platform 102, the third strip-shaped air-float platform 103, the fourth strip-shaped air-float platform 104, and the fifth strip-shaped air-float platform 105 are arranged in an approximate checkerboard pattern. This facilitates load application, such as air-float support for display substrates.

[0086] In this embodiment, a structure with multiple strip-shaped air-floating platforms arranged side by side is adopted, eliminating the lifting rod that moves through the air-floating platform in a direction perpendicular to the air-floating platform in the traditional design. The robotic arm or other transportation mechanism can directly and accurately place the load, such as a display substrate, onto the air-floating support device, so that it can enter the subsequent manufacturing process. This reduces the coordinate calibration time of the robotic arm or other transportation mechanism and avoids the risk of collision of the display substrate during the descent. At least one of the multiple strip-shaped air-floating platforms includes a movable air-floating part, which switches between a first position and a second position in the horizontal direction. This allows the air-floating support device to switch to a checkerboard pattern after bearing the load, such as the display substrate, to compensate for the deformation of the display substrate and facilitate the smooth transfer of the load, such as the display substrate.

[0087] Figure 5 This is a structural schematic diagram from another perspective of the air flotation bearing device provided in some embodiments of this disclosure. Figure 6 This is a structural schematic diagram of another perspective of the air flotation bearing device provided in some embodiments of this disclosure.

[0088] like Figures 3 to 6As shown, in some embodiments, the air flotation support device 100 further includes a plurality of guide mechanisms 20 extending along a first direction X. Each guide mechanism 20 is configured to guide a corresponding first movable air flotation section 1012 and a second movable air flotation section 1022 to switch between a first position and a second position along the first direction X. Specifically, the number of guide mechanisms 20 is, for example, four, with each guide mechanism 20 corresponding to a first movable air flotation section 1012, a second movable air flotation section 1022, a third movable air flotation section 1032, and a fourth movable air flotation section 1042 arranged along the first direction X, guiding them to switch synchronously between the first position and the second position.

[0089] In some embodiments, such as Figures 3 to 6 As shown, each guide mechanism 20 includes a guide rail 21 and a guide plate 22.

[0090] The guide rail 21 extends along the first direction X. The guide plate 22 is slidably connected to the guide rail 21, and its corresponding first movable air-bearing portion 1012, second movable air-bearing portion 1022, third movable air-bearing portion 1032, and fourth movable air-bearing portion 1042 are fixedly connected to the guide plate 22. Thus, the guide mechanism 20 can drive its corresponding first movable air-bearing portion 1012, second movable air-bearing portion 1022, third movable air-bearing portion 1032, and fourth movable air-bearing portion 1042 to switch synchronously between a first position and a second position.

[0091] In some embodiments, such as Figures 3 to 6 As shown, in some embodiments, the air flotation bearing device 100 further includes a driving device 30, which is configured to drive the guide plates 22 of the plurality of guiding mechanisms 20 to move, thereby enabling the plurality of first movable air flotation parts 1012, the plurality of second movable air flotation parts 1022, the plurality of third movable air flotation parts 1032, and the plurality of fourth movable air flotation parts 1042 to switch synchronously in a first position and a second position, so that the air flotation bearing device 100 can receive or bear the load.

[0092] Figure 7 This is a schematic diagram of the structure of the air flotation bearing device provided in some embodiments of this disclosure. Figure 8 for Figure 7 A magnified view of a local region M.

[0093] In some embodiments, such as Figure 3 to Figure 8As shown, the air flotation support device 100 also includes a fixed air pipe 41 and a spring air pipe 42. The fixed air pipe 41 is configured to supply gas to the fixed air flotation section 11 and the fixed strip-shaped air flotation platform. Specifically, the strip-shaped air flotation platform 10 is densely covered with multiple irregularly distributed micron-sized jet holes, which allow externally input gas to form a stable and uniform airflow output, enabling the carrier to be air-float on the air flotation support device 100 without contact between the carrier and the surface of the air flotation support device 100. The fixed air pipe 41 is located on one side of the multiple strip-shaped air flotation platforms 10 and is connected to the air inlet at the bottom of the fixed air flotation section 11 and the fixed strip-shaped air flotation platform to supply gas, such as nitrogen or air. Figures 3 to 8 As shown, the number of fixed air tubes 41 is, for example, 5, which are respectively provided for the first fixed air flotation section 1011, the second fixed air flotation section 1021, the third fixed air flotation section 1031, the fourth fixed air flotation section 1041 and the fifth strip-shaped air flotation platform 105, to provide gas to them.

[0094] The spring-loaded air tube 42 is configured to supply gas to the movable air flotation section 12. The spring-loaded air tube 42 is located on one side of the plurality of strip-shaped air flotation platforms 10 and connects to an air inlet at the bottom of the movable air flotation section 12 to supply gas, such as nitrogen or air. Figures 3 to 8 As shown, the number of spring-loaded air tubes 42 is, for example, four, corresponding to multiple first movable air flotation sections 1012, multiple second movable air flotation sections 1022, multiple third movable air flotation sections 1032, and multiple fourth movable air flotation sections 1042, respectively, to supply gas to them. Due to the elasticity of the spring-loaded air tubes 42, they can adapt to the switching between a first position and a second position for the multiple first movable air flotation sections 1012, multiple second movable air flotation sections 1022, multiple third movable air flotation sections 1032, and multiple fourth movable air flotation sections 1042.

[0095] In some embodiments, such as Figures 3 to 8 The air flotation bearing device 100 also includes a base. The base is a horizontal support platform, and an adjustable support column 50 is disposed on the base platform to support the plurality of strip-shaped air flotation platforms 10. The height of the support column is adjustable, thereby adjusting the height of the plurality of strip-shaped air flotation platforms 10 relative to the base platform, so that the upper surfaces of the plurality of strip-shaped air flotation platforms 10 are located on the same horizontal plane, which is beneficial for load bearing.

[0096] In some embodiments, such as Figure 7As shown, the air flotation support device 100 further includes a slide rail 60 and a clamp 70. The slide rail 60 extends along a first direction X and is disposed on one side of the plurality of strip-shaped air flotation platforms 10. The clamp 70 is slidably connected to the slide rail 60 and configured to clamp a load, such as a display substrate, which slides along the first direction X to transfer the load. This method can be used to transfer loads, i.e., loads, between the air flotation support device 100 and process equipment.

[0097] In some embodiments, such as Figure 7 and Figure 8 As shown, the air flotation support device 100 also includes a limiter 80, which is disposed at the edge of at least one of the plurality of strip air flotation platforms 10 and configured to limit the position of the support and prevent the support from shifting on the air flotation support device 100.

[0098] Finally, it should be noted that the various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the systems or apparatus disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the descriptions are relatively simple, and relevant parts can be referred to the method section.

[0099] The above embodiments are only used to illustrate the technical solutions of this disclosure, and are not intended to limit it. Although this disclosure has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this disclosure.

Claims

1. An air-floating support device for manufacturing display panels, characterized in that, include: Multiple strip-shaped air flotation platforms are arranged side by side, and at least one of the multiple strip-shaped air flotation platforms includes: The fixed air flotation component maintains its position in the horizontal direction; and The movable air flotation section is configured to switch between a first position and a second position in the horizontal direction. When the movable air flotation part is in the first position, the fixed air flotation part and the movable air flotation part are attached and spliced ​​together in the horizontal direction. When the movable air flotation part is in the second position, the movable air flotation part moves away from the fixed air flotation part in the horizontal direction. The plurality of strip-shaped air flotation platforms include a first strip-shaped air flotation platform and a second strip-shaped air flotation platform, wherein the first strip-shaped air flotation platform and the second strip-shaped air flotation platform are arranged side by side along a first direction. The first strip-shaped air flotation platform includes: The first fixed air flotation section maintains its position in the horizontal direction; Multiple first movable air-bearing components are configured to be movable relative to the first fixed air-bearing component in a first direction. When the plurality of first movable air flotation parts move close to the first fixed air flotation part to the first position, there is a first strip-shaped interval between the first strip-shaped air flotation platform and the second strip-shaped air flotation platform; When the plurality of first movable air flotation portions move away from the first fixed air flotation portion to the second position, the plurality of first movable air flotation portions occupy a portion of the first strip-shaped interval.

2. The air flotation bearing device according to claim 1, characterized in that, The plurality of strip-shaped air flotation platforms includes a third strip-shaped air flotation platform, and the first to third strip-shaped air flotation platforms are arranged side by side in sequence along a first direction. The second strip-shaped air flotation platform includes: The second fixed air flotation section maintains its position in the horizontal direction; Multiple second movable air flotation sections are configured to be movable relative to the second fixed air flotation section in a first direction. When the plurality of second movable air flotation parts move close to the second fixed air flotation part to the first position, there is a second strip-shaped interval between the second strip-shaped air flotation platform and the third strip-shaped air flotation platform; When the plurality of second movable air flotation portions move away from the second fixed air flotation portion to the second position, the plurality of second movable air flotation portions occupy a portion of the second strip-shaped interval. The plurality of first movable air flotation sections and the plurality of second movable air flotation sections are configured to switch synchronously between a first position and a second position.

3. The air flotation bearing device according to claim 2, characterized in that, The air flotation support device also includes: Multiple guiding mechanisms extend along a first direction, each guiding mechanism being configured to guide a corresponding first movable air flotation part and a second movable air flotation part to switch between a first position and a second position along the first direction.

4. The air flotation bearing device according to claim 3, characterized in that, Each guidance mechanism includes: Guide rail, extending along the first direction; and The guide plate is slidably connected to the guide rail, and the corresponding first movable air flotation part and second movable air flotation part are fixedly connected to the guide plate.

5. The air flotation bearing device according to claim 2, characterized in that, The air flotation support device also includes: The drive unit is configured to drive the plurality of first movable air flotation parts and the plurality of second movable air flotation parts to switch synchronously between a first position and a second position.

6. The air flotation bearing device according to any one of claims 1 to 2, characterized in that, The air flotation support device also includes: A fixed air tube is configured to supply gas to the fixed air flotation section; A spring-loaded air tube is configured to supply gas to the plurality of movable air flotation sections.

7. The air flotation bearing device according to any one of claims 1 to 2, characterized in that, The air flotation support device also includes: base; and An adjustable support column is provided on the base to support the plurality of strip-shaped air flotation platforms, and the height of the support column is adjustable.

8. The air flotation bearing device according to claim 2, characterized in that, The air flotation support device also includes: A slide rail extends along a first direction and is disposed on one side of the plurality of strip-shaped air flotation platforms; A clamp, slidably connected to the slide rail, is configured to hold a load and slide it along a first direction to transfer the load.

9. The air flotation bearing device according to any one of claims 1 to 2, characterized in that, The air flotation support device also includes: A limiter is disposed at the edge of at least one of the plurality of strip-shaped air flotation platforms and configured to limit the position of the carrier.

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