Droplet generation structure, microfluidic flow channel, microfluidic chip and droplet generation method

Abstract

The application discloses a droplet generation structure, a micro-fluidic flow channel, a micro-fluidic chip and a droplet generation method. The droplet generation structure comprises a side wall, a deformable member and a driving member. The deformable member is connected with the side wall to form a channel. The deformable member is used for controlling opening and closing of the channel by deformation of the deformable member. The driving member is connected with the deformable member. The driving member is used for driving the deformable member to deform. The micro-fluidic flow channel comprises the above-mentioned droplet generation structure. The micro-fluidic chip comprises the above-mentioned micro-fluidic flow channel. The droplet generation method comprises the following steps: injecting a liquid into a flow channel body through an inlet of the flow channel body; driving the deformable member to deform by the driving member to close the channel. The liquid in the flow channel body extrudes the deformable member under the action of a driving force to form a thin gap channel between the deformable member and the side wall. The liquid passes through the thin gap channel to form a jet droplet to be sprayed out.

Description

Technical Field

[0001] This application relates to the field of microfluidics, and in particular to a droplet generation structure, a microfluidic channel, a microfluidic chip, and a droplet generation method. Background Technology

[0002] In some applications of microfluidics, it is necessary to encapsulate single or multiple particles with a single droplet to form research samples. For example, in biological research, single droplets can be used to encapsulate single or multiple cells to form biochemical reaction vessels suitable for high-throughput and high-resolution biochemical analysis.

[0003] In related technologies, passive methods such as the T-channel method, flow focusing method, and coaxial flow focusing method are commonly used to prepare droplets. These methods generate droplets in several modes: absolutely unstable trickling droplet generation, relatively unstable jet droplet generation, and various critical transition state modes. Among these, the trickling droplet generation mode exhibits good droplet uniformity but low flux; the jet droplet generation mode has high droplet flux but less uniformity. Therefore, there is an urgent need for a droplet generation scheme that can satisfy both uniformity and high flux. Summary of the Invention

[0004] To solve at least one of the above-mentioned technical problems, this application provides a droplet generation structure, a microfluidic channel, a microfluidic chip, and a droplet generation method, and the technical solution adopted is as follows.

[0005] This application provides a droplet generation structure, comprising: a sidewall; a deformable member connected to the sidewall to form a channel, the deformable member being used to control the opening and closing of the channel by its own deformation; and a driving member connected to the deformable member, the driving member being used to drive the deformable member to deform.

[0006] According to the droplet generation structure provided in this application, at least the following technical effects are achieved: the deformable component can close its own deformation control channel; under the action of a driving force, the liquid can squeeze the deformable component to form a thin-slit channel between the deformable component and the sidewall; the liquid then passes through the thin-slit channel to form a jet droplet. In other words, the deformable component can form a valve that controls the opening and closing of the channel through its own deformation. When the valve is closed, the liquid, under the action of a strong driving force, can break through the valve and be ejected from the thin-slit channel, which has almost no height, in a very thin manner, thereby forming a jet droplet. The liquid passing through the thin-slit channel can form a stable jet droplet with uniform size, and it can also ensure a high droplet throughput.

[0007] In some embodiments of this application, the deformable member includes an elastic deformable membrane, the two sides of which are respectively connected to the two sides of the sidewall, so that the elastic deformable membrane and the sidewall enclose the channel, and the elastic deformable membrane can bulge towards the sidewall to fit against the sidewall when it deforms.

[0008] In some embodiments of this application, the driving member includes a pressurized air chamber, one side of the elastic deformable membrane is located in the pressurized air chamber, and the elastic deformable membrane is driven to deform when the pressurized air chamber is pressurized.

[0009] In some embodiments of this application, the top of the sidewall is arc-shaped.

[0010] This application also provides a microfluidic channel, which includes the droplet generation structure described above, and further includes a channel body having an inlet and an outlet, the channel being connected to one end of the outlet of the channel body.

[0011] In some embodiments of this application, the microfluidic channel further includes a droplet collection mechanism connected to the end of the droplet generation structure away from the channel body.

[0012] In some embodiments of this application, the liquid filling the droplet collection mechanism is incompatible with the droplets.

[0013] This application also provides a microfluidic chip, which includes the microfluidic channel described above, and further includes a first plate and a second plate. The first plate has a first groove, and the second plate has a second groove. The driving member is disposed in the second groove, and the deformable member is connected to the outer periphery of the opening of the second groove. The first plate and the second plate are connected to cover each other so that the first groove and the second plate surround to form the channel body, and the first groove and the deformable member surround to form the channel.

[0014] This application also provides a method for generating droplets, comprising the following steps:

[0015] Liquid is injected into the flow channel body through the inlet of the flow channel body;

[0016] The deformable component is driven to deform by a driving component to close the channel. The liquid in the flow channel body is squeezed by the driving force to form a thin-slit channel between the deformable component and the side wall. The liquid is ejected as jet droplets through the thin-slit channel.

[0017] In some embodiments of this application, the driving component includes a pressurized air chamber, and the deformable component includes an elastic deformable membrane. The pressurized air chamber continuously applies air pressure to the elastic deformable membrane to drive it to deform. The air pressure of the pressurized air chamber is set to a constant pressure or a regularly changing high-frequency air pressure. Attached Figure Description

[0018] The aspects and advantages described and / or added to the embodiments of this application will become apparent and readily understood in conjunction with the following drawings. It should be noted that the embodiments illustrated in the following drawings are exemplary and are used only to explain this application, and should not be construed as limiting this application.

[0019] Figure 1 A schematic diagram of the droplet generation structure (deformable part not deformed) provided in the embodiments of this application;

[0020] Figure 2 A schematic diagram of the droplet generation structure (deformable part deforms) provided in the embodiments of this application;

[0021] Figure 3 This is a schematic diagram of the structure of the microfluidic chip provided in the embodiments of this application;

[0022] Figure 4 for Figure 3 Sectional view along line AA;

[0023] Figure 5 for Figure 4 Sectional view along the BB direction;

[0024] Figure 6 for Figure 3 Another sectional view along the AA direction;

[0025] Figure 7 for Figure 6 Sectional view along the CC direction.

[0026] Figure label:

[0027] The droplet generating structure 110 includes a sidewall 111, a deformable part 112, a channel 113, a driving part 114, a flow channel body 120, a vertical part 121, an inlet 1211, a horizontal part 122, a planar sidewall 1221, a second arc-shaped sidewall 1222, a horizontal flow channel 1223, a droplet collecting mechanism 130, and an oil phase channel 131.

[0028] First plate 210, second plate 220. Detailed Implementation

[0029] The following is combined Figures 1 to 7The embodiments of this application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0030] In the description of this application, it should be understood that the use of terms such as "center," "middle," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential" to indicate orientation or positional relationships is based on the orientation or positional relationships shown in the accompanying drawings and is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, features defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0031] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0032] In some applications of microfluidics, it is necessary to encapsulate single or multiple particles with a single droplet to form research samples. For example, in biological research, single droplets can be used to encapsulate single or multiple cells to form biochemical reaction vessels suitable for high-throughput and high-resolution biochemical analysis.

[0033] In related technologies, passive methods such as the T-channel method, flow focusing method, and coaxial flow focusing method are commonly used to prepare droplets. Droplet generation through these methods includes the following modes: absolutely unstable trickling droplet generation mode, relatively unstable jet droplet generation mode, and various critical transition state modes. Among these, the trickling droplet generation mode has good droplet uniformity but low flux; the jet droplet generation mode has high droplet flux but less uniformity.

[0034] See Figure 1This application provides a droplet generation structure 110. Exemplarily, the droplet generation structure 110 includes a sidewall 111, a deformable member 112, and a driving member 114. The deformable member 112 is connected to the sidewall 111 to form a channel 113, and the deformable member 112 controls the opening and closing of the channel 113 through its own deformation. The driving member 114 is connected to the deformable member 112 and drives the deformable member 112 to deform.

[0035] Understandably, the deformable component 112 can be closed via its own deformation control channel 113. Under the action of driving force, the liquid can squeeze the deformable component 112, forming a thin-slit channel between the deformable component 112 and the sidewall 111. The liquid then passes through the thin-slit channel to form jet droplets. In other words, the deformable component 112 can form a valve controlling the opening and closing of the control channel 113 through its own deformation. When the valve is closed, the liquid, under the action of a strong driving force, can break through the valve and be ejected from the thin-slit channel, which has almost no height, in a very thin manner, thus forming jet droplets. The liquid passing through the thin-slit channel can form stable jet droplets of uniform size, and can also ensure a high droplet throughput.

[0036] Optionally, in some embodiments, the deformable member 112 includes an elastic deformable membrane, the two sides of which are respectively connected to the two sides of the sidewall 111, so that the elastic deformable membrane and the sidewall 111 enclose the channel 113, and the elastic deformable membrane can bulge towards the sidewall 111 to fit against the sidewall 111 when it deforms. Figure 2 This diagram shows the structure when the elastic deformable membrane bulges towards the sidewall 111 during deformation (the elastic deformable membrane is not attached to the sidewall 111).

[0037] Understandably, when the elastic deformable membrane bulges toward the sidewall 111 to fit against the sidewall 111, the elastic deformable membrane can close the channel 113.

[0038] Of course, the deformable component 112 may also include other deformable structures that can control the opening and closing of the channel 113 through their own deformation; no specific limitations are made here. For example, the deformable component 112 may also include an airbag, and the size of the airbag can be controlled by inflating the airbag, thereby opening and closing the channel 113; further details will not be elaborated here.

[0039] Optionally, in some embodiments, the drive member 114 includes a pressurized air chamber, one side of the elastic deformable membrane being located in the pressurized air chamber, and the elastic deformable membrane being driven to deform when the pressurized air chamber is pressurized. Optionally, the side of the elastic deformable membrane opposite to the channel 113 is located in the pressurized air chamber.

[0040] Optionally, the elastic deformable membrane can be continuously pressurized by a pressurized air chamber to drive it to deform. Optionally, the air pressure can be set to a constant pressure or a regularly changing high-frequency pressure.

[0041] For example, when the air pressure is set to a regularly changing high-frequency air pressure, the pressurized air chamber can alternately apply low-frequency air pressure and high-frequency air pressure to the elastic deformable membrane, thereby achieving vibration of the elastic deformable membrane, promoting the breakup of the jet and the uniform generation of droplets.

[0042] Understandably, the degree of compression between the elastic deformable membrane and the sidewall 111 can be controlled by adjusting the pressurization method and pressure level of the pressurized air chamber, thereby controlling the degree of channel closure. The greater the compression force between the elastic deformable membrane and the sidewall 111, the higher the degree of channel closure, and the more difficult it is to open the liquid breakthrough valve. When the compression force between the elastic deformable membrane and the sidewall 111 is sufficiently large, the elastic deformable membrane can cut off the continuous fluid.

[0043] For example, when a low-frequency air pressure is applied to the elastic deformable membrane by the pressurized air chamber, the liquid can break through the valve and be ejected; when a high-frequency air pressure is applied to the elastic deformable membrane by the pressurized air chamber, the elastic deformable membrane can cut off the continuous fluid and form droplets. By continuously and alternately applying low-frequency and high-frequency air pressure to the elastic deformable membrane, droplet formation can be promoted.

[0044] Alternatively, in some embodiments, the elastic deformable membrane is made of a flexible material.

[0045] Optionally, in some embodiments, the elastic deformable membrane is a thin film. Exemplarily, the film may be made of flexible materials such as PDMS or silicone, without specific limitations.

[0046] It should be noted that, compared with conventional stepped droplet generation, the elastic deformable membrane in this embodiment adopts a thin-film structure. Under the drive of the pressurized gas chamber, it can generate thin-film vibration, which can promote the uniformity of droplet generation and the breakage of jet droplets. Furthermore, the thin-film deformation in this embodiment can realize a heightless stepped droplet generation structure.

[0047] Optionally, the top of the sidewall 111 is arc-shaped. Setting the top of the sidewall 111 to be arc-shaped facilitates the elastic deformable membrane to adhere to the sidewall 111 when it bulges.

[0048] For example, the sidewall 111 is a first arc-shaped sidewall, and the film is a planar film. When the film bulges on the side facing the sidewall 111, it can be almost in contact with the first arc-shaped sidewall, so that a thin slit channel can be formed between the film and the first arc-shaped sidewall for liquid to pass through and form a stable jet droplet of uniform size.

[0049] Optionally, the cross-section of the sidewall 111 is semi-circular. Of course, the cross-section of the sidewall 111 can also be semi-elliptical or other arc-shaped, without specific limitations.

[0050] Other configurations and operations of the droplet generation structure 110 according to the embodiments of this application are known to those skilled in the art and will not be described in detail here.

[0051] See Figures 3 to 5 This application embodiment also provides a microfluidic channel, which includes the droplet generation structure 110 described above, and also includes a channel body 120 having an inlet 1211 and an outlet. The inlet 1211 is connected to the outlet, and the channel 113 is connected to one end of the outlet of the channel body 120.

[0052] Optionally, see Figure 6 The flow channel body 120 includes a vertical portion 121 and a horizontal portion 122 connected together. The end of the vertical portion 121 away from the horizontal portion 122 is an inlet 1211, and the end of the horizontal portion 122 away from the vertical portion 121 is an outlet. Optionally, the inlet 1211 can be used to inject a water phase into the flow channel body 120.

[0053] Optionally, see Figure 6 and Figure 7 The horizontal section 122 may include a planar sidewall 1221 and a second arcuate sidewall 1222. The two sides of the planar sidewall 1221 are respectively connected to the two sides of the second arcuate sidewall 1222 to enclose and form a horizontal flow channel 1223 for liquid to pass through. The outlet end of the planar sidewall 1221 is connected to one end of the membrane, and the outlet end of the second arcuate sidewall 1222 is connected to one end of the first arcuate sidewall.

[0054] Optionally, the cross-section of the second arc-shaped sidewall 1222 is a semicircle of the same size as the cross-section of the first arc-shaped sidewall. Of course, the cross-section of the second arc-shaped sidewall 1222 can also be semi-elliptical or other arc-shaped, without specific limitations.

[0055] Optionally, in some embodiments, the flow channel body 120 and the sidewall 111 are integrally formed. Exemplarily, the first arcuate sidewall is formed by the extension of the second arcuate sidewall 1222 along the flow direction of the liquid.

[0056] Optionally, the flow channel body 120 and the first arc-shaped sidewall are made of one or more materials such as DMS, silicone, COC, COP, PS, and PC, without specific limitations. It should be noted that DMS, silicone, COC, COP, PS, and PC are all hard or soft materials in the field of microfluidics.

[0057] Alternatively, in some embodiments, see Figure 3The microfluidic channel also includes a droplet collection mechanism 130, which is connected to the end of the droplet generation structure 110 away from the channel body 120.

[0058] Optionally, in some embodiments, the liquid filling the droplet collection mechanism 130 is incompatible with the droplets to achieve the effect of droplet collection. Optionally, when generating aqueous droplets, the droplet collection mechanism 130 can be a droplet collection tank filled with oil phase. Of course, the droplet collection mechanism 130 can also be other droplet collection structures, as long as they can achieve droplet collection, and no specific limitations are made here.

[0059] Optionally, the width of the oil phase channel 131 of the droplet collection mechanism 130 is greater than the width of the channel 113.

[0060] For example, one end of the thin film away from the planar sidewall 1221 is connected to the bottom wall of the oil phase channel 131, and one end of the first arcuate sidewall away from the second arcuate sidewall 1222 is connected to the sidewall 111 of the oil phase channel 131, so that one end of the droplet generation structure 110 away from the flow channel body 120 is connected to the oil phase channel 131.

[0061] Other configurations and operations of the microfluidic channels according to the embodiments of this application are known to those skilled in the art and will not be described in detail here.

[0062] See Figure 3 and Figure 6 This application embodiment also provides a microfluidic chip, which includes the microfluidic channel described above, and also includes a first plate 210 and a second plate 220. The first plate 210 has a first groove, and the second plate 220 has a second groove. A driving member is disposed in the second groove, and a deformable member is connected to the outer periphery of the opening of the second groove. The first plate 210 and the second plate 220 are connected to cover each other so that the first groove and the second plate 220 enclose each other to form a channel body, and the first groove and the deformable member enclose each other to form a channel.

[0063] Optionally, the second slot is the pressurized air chamber.

[0064] Optionally, a third groove communicating with the first groove is also provided on the first plate 210. When the first plate 210 and the second plate 220 are closed, the third groove and the second plate 220 surround each other to form an oil phase channel 131.

[0065] Optionally, the first plate 210 and the second plate 220 may be made of PDMS material.

[0066] It is understandable that by machining the first and second grooves on the first plate 210, machining the pressurized air chamber on the second plate 220, and setting a driving element (elastic deformation membrane) at the opening of the pressurized air chamber, and then covering and connecting the first plate 210 and the second plate 220, a microfluidic chip with microfluidic channels can be obtained. This structural arrangement is beneficial for the fabrication of microfluidic chips.

[0067] Other configurations and operations of the microfluidic chip according to the embodiments of this application are known to those skilled in the art and will not be described in detail here.

[0068] This application also provides a method for generating droplets. Exemplarily, the method for generating droplets includes the following steps.

[0069] Step S100: Inject liquid into the flow channel body 120 through the inlet 1211.

[0070] Optionally, in some embodiments, the above step S100 may include the following steps: injecting a first liquid into the flow channel body 120 through the inlet 1211 of the flow channel body 120, and filling the droplet collection mechanism 130 with a second liquid, wherein the second liquid is incompatible with the first liquid.

[0071] Optionally, the first liquid is an aqueous phase liquid and the second liquid is an oil phase liquid.

[0072] Optionally, liquid can be injected into the flow channel body 120 via an injection device. Optionally, the injection device can be a micropump. See, for example... Figure 4 The injection element (not shown in the figure) can provide a driving force to drive the first fluid in the flow channel body 120 to flow to the right, while also preventing the second liquid in the droplet collection mechanism 130 from flowing into the flow channel body 120.

[0073] Step S200: The deformable member 112 is driven to deform by the driving member 114 to close the channel 113. The liquid in the flow channel body 120 is squeezed by the driving force to form a thin slit channel between the deformable member 112 and the side wall 111. The liquid passes through the thin slit channel to form a jet droplet and is ejected.

[0074] Optionally, in some embodiments, step S200 may include the following steps: driving the deformable member 112 to deform by the driving member 114 to close the channel 113; the liquid in the flow channel body 120 is squeezed by the driving force to form a thin-slit channel between the deformable member 112 and the side wall 111; the liquid in the flow channel body 120 passes through the thin-slit channel to form jet droplets; the jet droplets are sprayed into the second liquid in the droplet collection mechanism 130 to collect the generated droplets.

[0075] Optionally, in some embodiments, the driving member 114 includes a pressurized air chamber, and the deformable member 112 includes an elastic deformable membrane. The pressurized air chamber continuously applies air pressure to the elastic deformable membrane to drive it to deform. The air pressure of the pressurized air chamber is set to a constant pressure or a regularly changing high-frequency air pressure.

[0076] Understandably, the degree of compression between the elastic deformable membrane and the sidewall 111 can be controlled by adjusting the pressurization method and pressure level of the pressurized air chamber, thereby controlling the degree of channel closure. The greater the compression force between the elastic deformable membrane and the sidewall 111, the higher the degree of channel closure, and the more difficult it is to open the liquid breakthrough valve. When the compression force between the elastic deformable membrane and the sidewall 111 is sufficiently large, the elastic deformable membrane can cut off the continuous fluid.

[0077] For example, when a low-frequency air pressure is applied to the elastic deformable membrane by the pressurized air chamber, the liquid can break through the valve and be ejected; when a high-frequency air pressure is applied to the elastic deformable membrane by the pressurized air chamber, the elastic deformable membrane can cut off the continuous fluid and form droplets. By continuously and alternately applying low-frequency and high-frequency air pressure to the elastic deformable membrane, droplet formation can be promoted.

[0078] Alternatively, in some embodiments, the elastic deformable membrane is made of a flexible material.

[0079] Optionally, in some embodiments, the elastic deformable membrane is a thin film. Exemplarily, the film may be made of flexible materials such as PDMS or silicone, without specific limitations.

[0080] Optionally, the droplet collection mechanism 130 is a droplet collection box filled with oil phase. The aqueous liquid in the flow channel body 120 passes through the thin-slit channel to form a stable jet droplet of uniform size, which is then sprayed into the oil phase in the droplet collection box. This process can be referred to as the stable jet droplet generation mode.

[0081] Other steps and operations of the droplet generation method according to the embodiments of this application are known to those skilled in the art and will not be described in detail here.

[0082] In the description of this specification, the use of terms such as "an embodiment," "some examples," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples" indicates that the specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in the embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0083] The embodiments of this application have been described in detail above with reference to the accompanying drawings. However, this application is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of this application.

[0084] In the description of this application, the presence of a comma ("、") in the patent title indicates an "and" relationship, not an "or" relationship. For example, if the patent title is "A type A, B type", it means that the content claimed in this application is: a technical solution with the subject matter title A and a technical solution with the subject matter title B.

Claims

1. A droplet generation structure, characterized in that, include: Sidewall; A deformable member is connected to the sidewall to form a channel. The deformable member is used to control the opening and closing of the channel by its own deformation. The deformable member includes an elastic deformable membrane. The two sides of the elastic deformable membrane are respectively connected to the two sides of the sidewall so that the elastic deformable membrane and the sidewall enclose the channel. When the elastic deformable membrane deforms, it can bulge towards the sidewall to fit against the sidewall. A driving component, which is connected to the deformable component, is used to drive the deformable component to deform. When the channel is closed, the liquid flowing through the channel is driven to squeeze the deformable member to form a thin-slit channel between the deformable member and the sidewall, and the liquid forms jet droplets through the thin-slit channel; the driving member includes a pressurized air chamber, one side of the elastic deformable membrane is located in the pressurized air chamber, and the pressurized air chamber drives the elastic deformable membrane to deform when pressurized; the pressurized air chamber alternately applies low-frequency air pressure and high-frequency air pressure to the elastic deformable membrane.

2. The droplet generation structure according to claim 1, characterized in that: The top of the sidewall is arc-shaped.

3. A microfluidic channel, characterized in that, The droplet generation structure as described in any one of claims 1 to 2 further includes a flow channel body having an inlet and an outlet, wherein the channel formed by the deformable member and the sidewall communicates with one end of the outlet of the flow channel body.

4. The microfluidic channel according to claim 3, characterized in that: The microfluidic channel also includes a droplet collection mechanism, which is connected to the end of the droplet generation structure away from the channel body.

5. The microfluidic channel according to claim 4, characterized in that: The liquid filling the droplet collection mechanism is incompatible with the droplets.

6. A microfluidic chip, characterized in that, The microfluidic channel as described in any one of claims 3 to 5 further includes a first plate and a second plate. The first plate has a first groove, and the second plate has a second groove. The driving member is disposed in the second groove, and the deformable member is connected to the outer periphery of the opening of the second groove. The first plate and the second plate are connected to cover each other so that the first groove and the second plate surround the channel body, the first groove and the deformable member surround the channel, and the first plate forms the sidewall.

7. A method for generating droplets, characterized in that, Includes the following steps: Liquid is injected into the flow channel body through the inlet of the flow channel body; The deformable component is driven by a driving component to deform and close the channel. The liquid in the flow channel body is squeezed by the driving force to form a thin-slit channel between the deformable component and the side wall. The liquid is ejected as jet droplets through the thin-slit channel. The deformable component includes an elastic deformable membrane. The driving component includes a pressurized air chamber, through which air pressure is continuously applied to the elastic deformable membrane to drive the elastic deformable membrane to deform. The pressurized air chamber alternately applies low-frequency air pressure and high-frequency air pressure to the elastic deformable membrane.

Images