A metal processing fixture for ceramic edge rings and its application method

Abstract

This invention discloses a metal processing fixture for ceramic edge rings, comprising a first processing fixture and a second processing fixture. The first processing fixture includes a first base, and a first pad ring and a pressure ring for clamping the part blank on the upper surface of the first base. The second processing fixture includes a second base, and a positioning ring, a second pad ring, and a pressure plate for clamping the part blank on the upper surface of the second base. This invention exposes the processing area of ​​the part blank by clamping the part blank with the annular pressure ring, avoiding interference between the fixture and the processing tool, thereby completing the feature processing of one side of the part blank. The pressure plate and positioning ring simultaneously press the inner and outer areas of the part surface to prevent displacement of the part, which would lead to loss of processing coordinates, thereby improving the accuracy of the processing dimensions.

Description

Technical Field

[0001] This invention relates to the field of edge ring processing technology, specifically to a metal processing fixture for ceramic edge rings and its usage method. Background Technology

[0002] Edge rings are crucial structural components in rapid thermal processing (RTP) equipment that come into direct contact with the wafer. Made of ceramic, their primary function is to support the wafer during rapid heating and cooling processes. Key technologies for the development and production of this component remain in the hands of foreign companies, resulting in a high dependence on imports for ceramic edge rings used by domestic equipment manufacturers. With the rapid and booming development of the semiconductor market, the need for domestic research and development of ceramic edge rings is becoming increasingly urgent.

[0003] Rapid thermal processing (RTP) equipment is a type of wafer thermal processing equipment that can rapidly raise the temperature of a wafer to the required process temperature (200–1300°C) and rapidly cool it down, with a heating / cooling rate of 20–250°C / s.

[0004] Ceramics, as a structural and functional material possessing the advantages of various materials such as low density, high temperature resistance, oxidation resistance, high rigidity, and wide bandgap, are widely recognized as the most promising alternative material for next-generation semiconductor wafers and core components. Their comprehensive performance indicators can well meet the production requirements of higher-process chips, and they are gradually replacing oxide ceramics and nitride ceramics in traditional structural components, becoming the preferred high-temperature resistant material in chip manufacturing equipment.

[0005] Ceramic edge rings are characterized by their thin walls, hardness, brittleness, and susceptibility to deformation. As a thin-walled part, machining requires first completing the machining of all features on one surface, then flipping it over to machine all features on the second surface. Adhesive or wax bonding offers advantages such as strong bonding reliability and reduced workpiece detachment during machining. However, the amount of adhesive and wax used is difficult to control, and variations in adhesive or wax layer thickness between bonding points can prevent the workpiece from being completely flattened, resulting in poor flatness and parallelism on both the top and bottom surfaces of the machined part. Furthermore, bonding methods pose a risk of breakage or damage during part removal. Fixing thin-walled parts using tooling clamping is also challenging. Except for the bottom surface in contact with the tooling, all other surfaces are machined. Therefore, using conventional metal tooling to clamp the part can cause interference between the tooling and the cutting tool during machining, preventing the machining of certain features. Alternating clamping with internal and external tooling can lead to displacement of the part and loss of machining coordinates or accuracy when switching tooling. Meanwhile, excessive clamping force from the tooling can cause deformation of the part before machining due to pre-stress, affecting the dimensional accuracy after machining. Furthermore, the presence of pre-stress makes the part highly susceptible to internal defects during machining, leading to its scrapping. Conversely, insufficient clamping force prevents the workpiece from being fully secured, causing vibrations and cracks during machining. Therefore, a solution is needed to address the interference between the tooling and the cutting tool during edge ring machining, the easy displacement of the part during tooling changes leading to loss of machining coordinates or accuracy, and the uncontrollable amount of adhesive or wax used, as well as the poor dimensional accuracy caused by variations in adhesive or wax layer thickness. Summary of the Invention

[0006] To address the aforementioned problems in the prior art, this invention provides a metal processing fixture for ceramic edge rings and its usage method, solving the problem of interference between the fixture and the cutting tool during edge ring processing using traditional machining fixtures.

[0007] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0008] On the one hand, a metal processing fixture for a ceramic edge ring is provided, which includes a first processing fixture and a second processing fixture. The first processing fixture includes a first base, and a first pad ring and a pressure ring for clamping a part blank on the upper surface of the first base. The second processing fixture includes a second base, and a positioning ring, a second pad ring, and a pressure plate for clamping a part blank on the upper surface of the second base.

[0009] This invention uses a ring-shaped clamping ring to clamp the part blank, exposing the machining area of ​​the part blank and avoiding interference between the tooling and the machining tool, thereby completing the feature machining of one side of the part blank. The pressure plate and positioning ring simultaneously clamp the inner and outer areas of the part surface to prevent the part from shifting and losing the machining coordinates, thereby improving the accuracy of the machining dimensions.

[0010] Furthermore, a support platform for supporting the part blank is provided in the middle of the upper surface of the second base; a limiting groove that matches the limiting block on the lower surface of the pressure plate is provided in the middle of the support platform.

[0011] Furthermore, multiple mounting holes are evenly provided on the upper surface of the support platform, and through holes that match the mounting holes are provided on the pressure plate.

[0012] Furthermore, a positioning groove is provided on the circumferential surface of the upper surface of the support platform.

[0013] Furthermore, the positioning ring includes two positioning sub-rings arranged opposite each other; each end of the positioning sub-ring is provided with a connecting block, and the connecting block is provided with a threaded hole. The two positioning sub-rings are assembled into a positioning ring in a circular shape by mating the connecting blocks.

[0014] Furthermore, a positioning boss is provided on the inner side of the positioning sub-ring.

[0015] Furthermore, the first base, the second base, the pressure ring, the positioning ring, and the pressure plate are all made of metal.

[0016] Furthermore, both the first and second gaskets are made of high molecular polymer materials.

[0017] On the other hand, a method for using a metalworking fixture based on a ceramic edge ring is provided, which includes the following steps:

[0018] Step S1: Fix the first base on the machine tool table, and clamp the edge ring blank, the first pad ring and the pressure ring in sequence from bottom to top on the upper surface of the first base, so that the pressure plate of the machine tool presses evenly on the upper surface of the pressure ring in the circumferential direction, and then perform the first feature processing on the blank.

[0019] Step S2: After the first feature processing is completed, remove the first processing fixture, fix the second base of the second processing fixture on the machine tool table, and then flip the part blank and place it on the second base.

[0020] Step S3: Fit the positioning ring onto the outer circle of the part blank and press the part blank onto the support platform of the second base.

[0021] Step S4: Place the second washer ring and pressure plate on the upper surface of the part blank in sequence. The limiting block on the lower surface of the pressure plate is embedded in the limiting groove and connected to the mounting hole by screws passing through the through hole to fix the inner circle area of ​​the upper surface of the part blank.

[0022] Step S5: Machining the bottom groove feature in the second feature machining of the part blank;

[0023] Step S6: Remove the second washer ring and pressure plate, place the first washer ring and pressure ring in the bottom groove processed in step S5, and use the pressure plate of the machine tool to press the pressure ring, and then process the small table area features in the second feature processing of the part blank.

[0024] Step S7: After completing the processing of the small platform area features, remove the pressure ring and the first pad ring in sequence, then loosen the positioning ring and remove the finished edge ring part after processing.

[0025] This invention discloses a metal processing fixture for ceramic edge rings and its application method, the beneficial effects of which are:

[0026] 1. This invention uses an annular clamping ring to clamp the part blank, exposing the machining area of ​​the part blank and avoiding interference between the tooling and the machining tool, thereby completing the feature machining of one side of the part blank. The pressure plate and positioning ring simultaneously clamp the inner and outer areas of the part surface to prevent the part from shifting and losing the machining coordinates, thereby improving the accuracy of the machining dimensions.

[0027] 2. The positioning ring in this invention adopts a split structure, which can simultaneously press the part blank in the horizontal and vertical directions during the part processing to prevent the part from being displaced and losing the processing coordinates. At the same time, it also facilitates the removal of the part after processing. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of the first base of the present invention.

[0029] Figure 2 This is a schematic diagram of the structure of the first gasket of the present invention.

[0030] Figure 3 This is a schematic diagram of the pressure ring structure of the present invention.

[0031] Figure 4 This is a schematic diagram of the structure of the second base of the present invention.

[0032] Figure 5 This is a schematic diagram of the positioning ring of the present invention.

[0033] Figure 6 This is a schematic diagram of the pressure plate of the present invention.

[0034] Figure 7 This is a schematic diagram of the cross-sectional structure of the pressure plate of the present invention.

[0035] Figure 8 This is a schematic diagram of the structure of the second gasket ring of the present invention.

[0036] Figure 9 This is a schematic diagram of the structure of the first machining fixture of the present invention for clamping the part blank.

[0037] Figure 10 This is a schematic diagram of the cross-sectional structure of the first machining fixture of the present invention for clamping the part blank.

[0038] Figure 11 This is a schematic diagram of the cross-sectional structure of the second machining fixture of the present invention for clamping the part blank.

[0039] Figure 12 This is a schematic diagram of the bottom groove machining in the second feature machining process of the present invention.

[0040] Figure 13 This is a schematic diagram of the structure of the small platform area during the second feature processing of the present invention.

[0041] Among them, 1. First machining fixture; 2. Second machining fixture; 3. Part blank; 4. First base; 5. First washer ring; 6. Pressure ring; 7. Second base; 71. Support platform; 72. Limiting groove; 73. Mounting hole; 74. Positioning groove; 8. Positioning ring; 81. Positioning sub-ring; 82. Connecting block; 83. Positioning boss; 9. Pressure plate; 91. Limiting block; 92. Through hole; 10. Second washer ring; 11. Bottom groove. Detailed Implementation

[0042] The present invention is described in detail with reference to specific embodiments to enable those skilled in the art to understand the invention. However, it should be understood that the invention is not limited to the scope of the specific embodiments. For those skilled in the art, various changes are obvious as long as they are within the spirit and scope of the invention as defined and determined by the appended claims. All inventions utilizing the concept of the present invention are protected.

[0043] Example 1

[0044] This embodiment provides a metal machining fixture for ceramic edge rings, the purpose of which is to solve the problem of interference between the fixture and the machining tool during the edge ring machining process in traditional machining fixtures. (Refer to...) Figures 1-8 The specific structure of this embodiment will be described in detail below.

[0045] A metal processing fixture for a ceramic edge ring, comprising a first processing fixture 1 and a second processing fixture 2;

[0046] The first processing fixture 1 includes a first base 4, and a first washer 5 and a pressure ring 6 for clamping the part blank 3 on the upper surface of the first base 4.

[0047] The second machining fixture 2 includes a second base 7, and a positioning ring 8, a second washer ring 10, and a pressure plate 9 for clamping the part blank 3 on the upper surface of the second base 7.

[0048] In this embodiment, the first base 4, the second base 7, the pressure ring 6, the positioning ring 8, and the pressure plate 9 are all made of metal materials, such as steel or cast iron. The first gasket 5 and the second gasket 10 are both made of polymer materials, such as polytetrafluoroethylene or polyoxymethylene resin.

[0049] Both the first washer ring 5 and the pressure ring 6 are annular. The annular pressure ring 6 clamps the part blank 3 on the upper surface of the second base 7. The first washer ring 5 is placed between the pressure ring 6 and the part blank 3 to expose the machining area of ​​the part blank 3, avoid interference between the tooling and the machining tool, and thus complete the feature machining of one side (A side) of the part blank 3.

[0050] After the first feature processing is completed, the blank part 3 is flipped and placed on the second base 7. The second pad ring 10 is placed between the pressure plate 9 and the blank part 3. The pressure plate 9 and the positioning ring 8 simultaneously press the inner and outer circular areas of the blank part 3 surface to limit the movement in the horizontal and vertical directions, preventing the blank part 3 from shifting. This completes the feature processing of the other side (side B) of the blank part 3 without changing the tooling, preventing the loss of processing coordinates and improving the accuracy of the processing dimensions. It eliminates the need for adhesive or wax bonding, avoiding the problems of uncontrollable adhesive or wax bonding amounts and poor dimensional accuracy caused by variations in adhesive or wax layer thickness.

[0051] Specifically, a support platform 71 for supporting the blank part 3 is provided in the middle of the upper surface of the second base 7; a limiting groove 72 that matches the limiting block 91 on the lower surface of the pressure plate 9 is provided in the middle of the support platform 71. A plurality of mounting holes 73 are evenly provided on the upper surface of the support platform 71, and a through hole 92 that matches the mounting holes 73 is provided on the pressure plate 9.

[0052] In this embodiment, when the part blank is placed on the support platform 71, the second washer 10 is placed between the pressure plate 9 and the part blank 3. The limiting block 91 on the lower surface of the pressure plate 9 is embedded in the limiting groove 72 on the upper surface of the support platform 71. The limiting groove 72 provides a limit for the pressure plate 9, thereby limiting the part blank 3 in the inner circle area. At the same time, the pressure plate 9 is installed on the support platform 71 by bolts passing through the through hole 92 and being threadedly connected to the mounting hole 73.

[0053] The upper surface of the support platform 71 is provided with a positioning groove 74 in the circumferential direction. The positioning groove 74 is used to support surface A after the part blank 3 has been machined.

[0054] Specifically, the positioning ring 8 includes two positioning sub-rings 81 arranged opposite to each other; each end of the positioning sub-ring 81 is provided with a connecting block 82, and the connecting block 82 is provided with a threaded hole. The two positioning sub-rings 81 are assembled into the positioning ring 8 in a circular shape by mating the connecting blocks 82.

[0055] A positioning boss 83 is provided on the inner side of the positioning sub-ring 81.

[0056] In this embodiment, the positioning ring 8 consists of two opposing semi-circular positioning sub-rings 81. Connecting blocks 82 are provided at both ends of the positioning sub-rings 81. The two positioning sub-rings 81 are sleeved on the support platform 71. By passing bolts through the threaded holes on the connecting blocks 82 at the ends of the two positioning sub-rings 81, the two positioning sub-rings 81 are assembled into a circular positioning ring 8 to limit the horizontal movement of the part blank 3. At the same time, a positioning boss 83 is provided on the inner side of the positioning sub-rings 81. The positioning boss 83 can press against the edge of the part blank 3 to limit the height of the part blank 3.

[0057] Example 2

[0058] Based on Embodiment 1, this embodiment provides a method for using a metal machining fixture for ceramic edge rings. Its purpose is to solve the problem of interference between the fixture and the machining tool during edge ring machining using traditional fixtures. (Refer to...) Figures 9-13 The specific steps in this embodiment will be described in detail below.

[0059] A method for using a metalworking fixture based on a ceramic edge ring includes the following steps:

[0060] Step S1: Fix the first base 4 on the machine tool table, and clamp the edge ring blank 3, the first pad ring 5 and the pressure ring 6 sequentially from bottom to top on the upper surface of the first base 4, so that the machine tool's pressure plate presses evenly on the upper surface of the pressure ring 6 in the circumferential direction. The pressure ring 6 clamps the blank 3 and exposes the machining area of ​​surface A on the blank 3, avoiding interference between the tooling and the machining tool. Then, perform the first feature machining on surface A of the blank 3. Since the thickness of the blank 3 is already the thickness of the finished part, it is only necessary to machine the inner circle, outer circle and the inner step circle of the blank 3 to complete the feature machining of one side (surface A) of the blank 3.

[0061] Step S2: After the first feature processing is completed, remove the first processing fixture 1, fix the second base 7 of the second processing fixture 2 on the machine tool table, and then flip the part blank 3 and place it on the second base 7, so that the A side of the part blank 3 after processing is facing down and the B side of the unprocessed part blank 3 is facing up on the second base 7.

[0062] Step S3: Fit the positioning ring 8 onto the outer circle of the part blank 3 and press the part blank 3 onto the support platform 71 of the second base 7.

[0063] In this embodiment, two positioning rings 81 are fitted onto the support platform 71. By passing bolts through the threaded holes on the connecting blocks 82 at the ends of the two positioning rings 81, the two positioning rings 81 are assembled into a circular positioning ring 8 to limit the outer circle of the part blank 3 in the horizontal direction. At the same time, the positioning boss 83 can press against the edge of the part blank 3 to limit the height of the part blank 3. Thus, by limiting and fixing the outer circle area of ​​the part blank 3, the part blank 3 is pressed tightly onto the support platform 71.

[0064] Step S4: Place the second washer ring 10 and the pressure plate 9 on the upper surface of the part blank 3 in sequence. The limiting block 91 on the lower surface of the pressure plate 9 is embedded in the limiting groove 72 and connected to the mounting hole 73 by screws passing through the through hole 92 to fix the inner circle area of ​​the upper surface of the part blank 3.

[0065] Step S5: Perform the second feature processing on the part blank 3, processing the bottom groove 11 feature;

[0066] Step S6: Remove the second pad ring 10 and the pressure plate 9, and place the first pad ring 5 and the pressure ring 6 into the bottom groove 11 processed in step S5. Use the pressure plate of the machine tool to press the pressure ring 6, and then process the small table area features in the second feature processing of the part blank 3.

[0067] Step S7: After completing the processing of the small platform area features, remove the pressure ring 6 and the first pad ring 5 in sequence, then loosen the positioning ring 8 and remove the finished edge ring part after processing.

[0068] Although seven specific embodiments of the invention have been described in detail with reference to the accompanying drawings, this should not be construed as limiting the scope of protection of this patent. Various modifications and variations that can be made by a person skilled in the art without inventive effort within the scope described in the claims still fall within the scope of protection of this patent.

Claims

1. A metal processing fixture for a ceramic edge ring, characterized in that: It includes a first machining fixture (1) and a second machining fixture (2); The first processing fixture (1) includes a first base (4), and a first washer (5) and a pressure ring (6) for clamping the part blank (3) on the upper surface of the first base (4). The second machining fixture (2) includes a second base (7), and a positioning ring (8), a second washer (10), and a pressure plate (9) for clamping the part blank (3) on the upper surface of the second base (7); The second base (7) has a support platform (71) in the middle of the upper surface for supporting the blank part (3); the support platform (71) has a limiting groove (72) in the middle that matches the limiting block (91) on the lower surface of the pressure plate (9). The upper surface of the support platform (71) is provided with a plurality of mounting holes (73), and the pressure plate (9) is provided with a through hole (92) that matches the mounting holes (73). The positioning ring (8) includes two positioning sub-rings (81) arranged opposite to each other; each end of the positioning sub-ring (81) is provided with a connecting block (82), and the connecting block (82) is provided with a threaded hole. The two positioning sub-rings (81) are assembled into a positioning ring (8) in a circle by connecting the connecting blocks (82). The positioning sub-ring (81) is provided with a positioning boss (83) on its inner side.

2. The metal processing fixture for the ceramic edge ring according to claim 1, characterized in that: The upper surface of the support platform (71) is provided with a positioning groove (74) in the circumferential direction.

3. The metal processing fixture for the ceramic edge ring according to claim 1, characterized in that: The first base (4), the second base (7), the pressure ring (6), the positioning ring (8), and the pressure plate (9) are all made of metal.

4. The metal processing fixture for the ceramic edge ring according to claim 1, characterized in that: The first gasket (5) and the second gasket (10) are both made of polymer materials.

5. A method of using a metal processing fixture for a ceramic edge ring according to any one of claims 1-4, characterized in that, Includes the following steps: Step S1: Fix the first base (4) on the machine tool table, and clamp the edge ring blank (3), the first pad ring (5) and the pressure ring (6) sequentially from bottom to top on the upper surface of the first base (4), so that the pressure plate of the machine tool presses evenly on the upper surface of the pressure ring (6) in the circumferential direction, and then perform the first feature processing on the blank (3). Step S2: After the first feature processing is completed, remove the first processing fixture (1), fix the second base (7) of the second processing fixture (2) on the machine tool table, and then flip the part blank (3) and place it on the second base (7); Step S3: Fit the positioning ring (8) onto the outer circle of the part blank (3) and press the part blank (3) onto the support platform (71) of the second base (7); Step S4: Place the second washer ring (10) and the pressure plate (9) on the upper surface of the part blank (3) in sequence. The limiting block (91) on the lower surface of the pressure plate (9) is embedded in the limiting groove (72) and connected to the mounting hole (73) by screws passing through the through hole (92) to fix the inner circle area of ​​the upper surface of the part blank (3). Step S5: Perform the second feature processing on the bottom groove feature of the part blank (3); Step S6: Remove the second pad ring (10) and pressure plate (9), and place the first pad ring (5) and pressure ring (6) in the bottom groove processed in step S5. Use the pressure plate of the machine tool to press the pressure ring (6) tightly, and then process the small table area features of the part blank (3) in the second feature processing. Step S7: After completing the processing of the small platform area features, remove the pressure ring (6) and the first pad ring (5) in sequence, then loosen the positioning ring (8) and remove the finished edge ring part after processing.

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