A tracheal tube refurbishment method and a tracheal tube refurbishment apparatus
Patent Information
- Application Number
- CN202411875928.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-19
- Publication Date
- 2026-10-09
- Estimated Expiration
- 2044-12-19
AI Technical Summary
[0006]本发明的目的是解决现有技术中导气管随着使用时间的增加,管体内壁和外壁将发生薄膜沉积,导致导气管的气体通过量不稳定,影响半导体芯片制造的问题
[0014]Compared with existing technologies, the internal wall refurbishment device of the above solution achieves stable clamping of the pipe body through a pipe-moving clamp, and controls the movement of the pipe-moving platform through a linear drive, enabling the reaming tool to enlarge the inner hole of the pipe on the pipe-moving clamp. Meanwhile, the liquid supply pipe continuously injects coolant into the inner hole of the pipe on the pipe-moving clamp, causing the coolant flow direction to be opposite to the reaming direction of the reaming tool, resulting in better cooling and chip removal, thereby achieving the refurbishment of the inner wall of the pipe. The external wall refurbishment device supports the pipe body through a bracket, positioning the pipe body between the left and right baffles. The grinding wheel can pass through the notch in the left baffle and contact the tube body, while the guide wheel can pass through the notch in the right baffle and contact the tube body. When the grinding motor drives the grinding wheel to rotate, the tube body will rotate around its own axis. At the same time, since the guide wheel is centered on the front-to-back direction and the front end of the guide wheel axis is lower than the rear end, when the guide wheel is driven to rotate by the tube body, the guide wheel will exert a forward force on the tube body, causing the tube body to move forward continuously. This allows the outer circumference of the tube body from the beginning to the end to be ground and refurbished by the grinding wheel, ensuring that the outer wall of the tube body can form a good roundness after being ground by the grinding wheel, thereby achieving the refurbishment of the outer wall of the tube body.
Smart Images

Figure CN119658303B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the technical field of air duct refurbishment, and more specifically to an air duct refurbishment method and an air duct refurbishment device. Background Technology
[0002] Chemical vapor deposition (CVD) processes require the use of quartz or silicon gas delivery tubes to introduce process gases into the deposition chamber. During gas delivery, some of the reactant gases deposit as thin films inside and outside the tube, and the thickness of these films is unevenly distributed along the length of the tube. This leads to a continuous reduction in the inner pore size of the gas delivery tube and insufficient gas throughput.
[0003] Considering the high requirements for the quality and dimensional accuracy of the inner hole wall of the gas guide tube during the semiconductor chip manufacturing process, gas guide tubes that do not meet the requirements must be scrapped and replaced. This results in a large consumption of tube-type components used in semiconductor manufacturing, higher product costs, and thus higher usage costs.
[0004] The existing conventional refurbishment method is to enlarge the hole using a deep hole drilling device with a central water outlet. This method has two disadvantages. First, when the hollow drilling tool is long, the tool rigidity is poor, and it will bend during mechanical extrusion, causing the drilling direction to deviate. Second, because the refurbished product itself is a hollow tube, the coolant cannot stay effectively inside the tube during drilling, resulting in poor drilling effect. The thinner tube is also prone to breakage under vibration.
[0005] Another background technique involves polishing and grinding the inside of the air duct with flowing sand and sandblasting the outside. However, these methods can only be used when the thickness of the deposits inside and outside the tube is uniform. This is because both flowing sand polishing and sandblasting are non-selective equivalent eliminations, and therefore cannot guarantee the dimensional accuracy of the tube's inner and outer diameters again. Summary of the Invention
[0006] The purpose of this invention is to solve the problem in the prior art where thin film deposition occurs on the inner and outer walls of the gas conduit over time, leading to unstable gas flow and affecting semiconductor chip manufacturing.
[0007] To address the above problems, this invention provides a method for refurbishing an air duct, comprising the following steps: S1. Cut the air duct into several sections, and then perform internal and external wall refurbishment processes on the sections. The inner wall renovation process S11 is as follows: a hole-reaming cutter driven to rotate by a drive head is configured. The outer diameter of the hole-reaming cutter is selected according to the diameter of the inner hole of the pipe. Then, the first end of the inner hole of the pipe is sent to the hole-reaming cutter in a coaxial manner, so that the hole-reaming cutter expands the inner hole of the pipe. At the same time, coolant is continuously injected from the tail end of the inner hole of the pipe. After the hole-reaming cutter completes the hole-reaming renovation of the inner hole of the pipe, the pipe is moved away from the hole-reaming cutter. The outer wall renovation process S12 is as follows: a grinding wheel driven by a grinding motor is configured to abut against the outer peripheral side of the grinding wheel at the beginning of the tube and ensure that the axis of the tube and the grinding wheel are parallel. Then, while driving the tube to rotate around its own axis, the tube is moved axially so that the outer peripheral wall of the tube from the beginning to the end is ground and renovated by the grinding wheel. S2. The pipe body that has completed the inner wall renovation process and the outer wall renovation process is degreased and cleaned with cleaning solution; S3. The cleaned pipe body is reassembled or welded to restore it to a gas duct.
[0008] The above solution first cuts the air guide tube into tubes of appropriate length, thus facilitating both internal and external wall refurbishment processes. The internal wall refurbishment process involves using a reaming tool to enlarge the inner hole of the tube from one end to the other, while simultaneously injecting coolant from the other end of the inner hole. This coolant flow direction is opposite to the reaming direction of the tool, providing better cooling and chip removal, thereby refurbishing the inner wall of the tube. In the external wall refurbishment process, the tube is rotated around its own axis while simultaneously moving axially, ensuring that the outer circumference of the tube from one end to the other is ground and refurbished by a grinding wheel. This ensures good roundness of the outer wall after grinding, achieving the refurbishment of the outer wall. Subsequently, the tube is degreased and cleaned with a cleaning solution, and then the cleaned tube is reassembled or welded back together to restore it to its original air guide tube state, thus achieving the refurbishment of the air guide tube and restoring its service life. Compared to replacing the pipes with new ones, the above refurbishment method can save a lot of processing time, reduce processing costs, and does not require the investment of new materials, thus saving material costs and effectively reducing the user's operating costs.
[0009] Preferably, in step S11, the reaming tool is a solid structure, and the cutting head of the reaming tool is a conical silicon carbide grinding head. The solid structure of the reaming tool can ensure better rigidity and improve the concentricity when reaming the tube, while the silicon carbide grinding head is less likely to damage the tube.
[0010] Preferably, in step S11, the tube body is held by a tube transfer clamp, which is driven by a linear drive to move in a direction close to or away from the reaming tool. The linear drive gradually moves the tube transfer clamp holding the tube body toward the reaming tool for reaming in a pecking-drill corresponding feed mode, thereby ensuring the stability of the tube body through the tube transfer platform and adjusting the feed amount of the tube body during the reaming process through the linear drive.
[0011] Preferably, the linear drive component, in the feeding mode corresponding to the pecking drill, specifically drives the pipe moving clamp to advance 0.05mm and retreat 0.02mm each time, repeating this process until the reaming tool moves from the beginning to the end of the inner hole of the pipe, thereby ensuring that the reaming tool will not damage the inner hole of the pipe and the reaming effect is stable.
[0012] Preferably, in step S2, the tube is first soaked in a 5% KOH solution at 50°C for 20 minutes, and then soaked in a 10% HCl solution at 30°C for 30 minutes, thereby achieving degreasing and cleaning.
[0013] The present invention also provides a ventilator renovation device, including an inner wall renovation device and an outer wall renovation device; The inner wall renovation device includes an inner wall renovation platform, a drive head, a reaming cutter, and a pipe transfer clamp. The drive head is fixed to the front of the inner wall renovation platform, and the pipe transfer clamp is located at the rear of the inner wall renovation platform and is used to clamp the pipe. A liquid supply pipe is provided at the rear of the pipe transfer clamp. The inner wall renovation platform is provided with a linear drive for driving the pipe transfer clamp to move in the front-back direction. The front end of the reaming cutter is connected to the drive head and the rear end faces the pipe transfer clamp. The external wall renovation device includes an external wall renovation platform, a grinding wheel, a grinding motor, a guide wheel, a guide frame, and a support. The grinding motor is fixed to the left side of the external wall renovation platform. The grinding wheel is driven by the grinding motor to rotate along its front-to-back axis. The guide frame is located on the right side of the external wall renovation platform. The guide wheel is rotatably connected to the guide frame. The guide wheel is aligned with its front-to-back axis, and the front end of the guide wheel's axis is lower than its rear end. The support is fixed to the external wall renovation platform along its front-to-back direction and is located between the grinding wheel and the guide wheel. The upper left and right sides of the support are respectively provided with a left baffle and a right baffle, and a pipe body can pass through between the left and right baffles. The left baffle has a notch corresponding to the position of the grinding wheel, and the right baffle has a notch corresponding to the position of the guide wheel.
[0014] Compared with existing technologies, the internal wall refurbishment device of the above solution achieves stable clamping of the pipe body through a pipe-moving clamp, and controls the movement of the pipe-moving platform through a linear drive, enabling the reaming tool to enlarge the inner hole of the pipe on the pipe-moving clamp. Meanwhile, the liquid supply pipe continuously injects coolant into the inner hole of the pipe on the pipe-moving clamp, causing the coolant flow direction to be opposite to the reaming direction of the reaming tool, resulting in better cooling and chip removal, thereby achieving the refurbishment of the inner wall of the pipe. The external wall refurbishment device supports the pipe body through a bracket, positioning the pipe body between the left and right baffles. The grinding wheel can pass through the notch in the left baffle and contact the tube body, while the guide wheel can pass through the notch in the right baffle and contact the tube body. When the grinding motor drives the grinding wheel to rotate, the tube body will rotate around its own axis. At the same time, since the guide wheel is centered on the front-to-back direction and the front end of the guide wheel axis is lower than the rear end, when the guide wheel is driven to rotate by the tube body, the guide wheel will exert a forward force on the tube body, causing the tube body to move forward continuously. This allows the outer circumference of the tube body from the beginning to the end to be ground and refurbished by the grinding wheel, ensuring that the outer wall of the tube body can form a good roundness after being ground by the grinding wheel, thereby achieving the refurbishment of the outer wall of the tube body.
[0015] In an improved embodiment, the pipe clamping platform includes an upper clamping plate and a lower clamping plate. The lower clamping plate is connected to the output end of the linear drive component. A lower receiving groove extending in the front-to-back direction is formed on the upper side of the lower clamping plate, and an upper receiving groove extending in the front-to-back direction is formed on the lower side of the upper clamping plate. The upper clamping plate is stacked on top of the lower clamping plate, allowing the upper and lower receiving grooves to clamp and fix the pipe. A liquid supply connector is provided at the rear of the lower clamping plate. The front end of the liquid supply connector faces the rear of the lower receiving groove, and its rear end is connected to a liquid supply pipe. The front end of the liquid supply connector is used to connect to the pipe inside the lower receiving groove, thereby providing coolant to the inner bore of the pipe and providing front-to-back support for the pipe, ensuring that the pipe does not move backward when the reaming tool reams the inner bore.
[0016] In an improved embodiment, the linear drive includes a guide rail and a lead screw motor assembly both arranged along the front-rear direction. The tube transfer clamp is slidably connected to the guide rail, and the tube transfer clamp is provided with a tube transfer screw assembly screwed to the lead screw motor assembly. The movement of the tube transfer slide is controlled by the lead screw motor assembly, resulting in high precision and good stability.
[0017] In an improved embodiment, the inner wall renovation device further includes a limiting slide slidably connected to the guide rail. The limiting slide is located between the pipe moving clamp and the drive head. The limiting slide is provided with a clamp for holding the pipe body, thereby clamping the pipe body at the position where it extends out of the moving clamp through the clamp, ensuring the stability of the pipe body when it is being enlarged.
[0018] In an improved embodiment, the external wall renovation device further includes an adjustment rail fixed to the right side of the external wall renovation platform, and an adjustment screw arranged parallel to the adjustment rail. The adjustment rail is arranged in the left-right direction, the guide frame is slidably connected to the adjustment rail, and the guide frame is provided with an adjustment screw hole that is screwed to the adjustment screw, thereby controlling the position of the guide frame by adjusting the distance between the guide wheel and the grinding wheel to adapt to pipes of different sizes. Attached Figure Description
[0019] Figure 1 A schematic diagram of the inner wall renovation device of an air duct renovation equipment. Figure 1 ; Figure 2 A schematic diagram of the inner wall renovation device of an air duct renovation equipment. Figure 2 ; Figure 3 This is an overall schematic diagram of the outer wall renovation device of a duct renovation equipment; Figure 4 This is a schematic diagram of the front side of the outer wall renovation device of an air duct renovation equipment; Figure 5 A top view schematic diagram of the outer wall renovation device of an air duct renovation equipment; Figure 6 For along Figure 5 Schematic diagram of the cross section line AA in the middle.
[0020] Explanation of reference numerals in the attached figures. a1. Inner wall renovation platform; a11. Guide rail; a12. Lead screw motor pair; a13. Limiting slide; a14. Clamp; a2. Drive head; a3. Hole reaming tool; a4. Pipe transfer clamp; a41. Upper clamp; a411. Upper receiving groove; a42. Lower clamp; a421. Lower receiving groove; a43. Upper fixing block; a44. Lower fixing block; a45. Pipe transfer screw platform; a5. Liquid supply pipe; a6. Liquid supply connector; b1. External wall renovation platform; b2. Grinding wheel; b3. Grinding motor; b4. Guide wheel; b5. Guide frame; b51. Support frame; b511. Rotating shaft; b52. Base frame; b521. Shaft seat; b522. Adjusting screw hole; b53. Height adjustment component; b6. Bracket; b61. Left baffle; b62. Right baffle; b63. Notch; b7. Adjusting rail; b8. Adjusting screw. Detailed Implementation
[0021] It should be understood by those skilled in the art that the following embodiments are merely illustrative of the technical principles of the embodiments of this application and are not intended to limit the scope of protection of the embodiments of this application. Those skilled in the art can make adjustments as needed to adapt to specific application scenarios.
[0022] In the following description of the embodiments, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.
[0023] In the embodiments of this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0024] The present application will now be described in further detail with reference to the accompanying drawings and specific embodiments.
[0025] Example 1 Embodiment 1 of the present invention provides a method for refurbishing an air duct, comprising the following steps: S1. Cut the air duct into several sections, and then perform internal and external wall refurbishment processes on the sections. The inner wall renovation process S11 is as follows: a hole-reaming cutter a3 driven by a drive head a2 is configured to rotate. The outer diameter of the hole-reaming cutter a3 is selected according to the diameter of the inner hole of the pipe. Then, the first end of the inner hole of the pipe is sent to the hole-reaming cutter a3 in a coaxial manner, so that the hole-reaming cutter a3 expands the inner hole of the pipe. At the same time, coolant is continuously injected from the tail end of the inner hole of the pipe. After the hole-reaming cutter a3 completes the hole-reaming renovation of the inner hole of the pipe, the pipe is moved away from the hole-reaming cutter a3. The outer wall refurbishment process S12 is as follows: a grinding wheel b2 driven by a grinding motor b3 is configured to abut against the outer peripheral side of the first end of the tube and ensure that the axis of the tube and the axis of the grinding wheel b2 are parallel. Then, while driving the tube to rotate around its own axis, the tube is moved axially so that the outer peripheral wall of the tube from the first end to the last end is ground and refurbished by the grinding wheel b2. S2. The pipe body that has completed the inner wall renovation process and the outer wall renovation process is degreased and cleaned with cleaning solution; S3. The cleaned pipe body is reassembled or welded to restore it to a gas duct.
[0026] The above solution first cuts the air guide tube into tubes of appropriate length, thus facilitating the internal and external wall refurbishment processes. In the internal wall refurbishment process, a reaming tool a3 enlarges the hole from the beginning to the end of the tube's inner bore. Simultaneously, coolant is continuously injected from the end of the inner bore, with the coolant flow direction opposite to the reaming direction of tool a3, resulting in better cooling and chip removal, thereby refurbishing the inner wall of the tube. In the external wall refurbishment process, the tube is rotated around its own axis while moving axially, ensuring that the outer circumference of the tube from the beginning to the end is ground and refurbished by a grinding wheel b2. This ensures that the outer wall of the tube achieves good roundness after grinding by wheel b2, thus refurbishing the outer wall. Subsequently, the tube is degreased and cleaned with a cleaning solution, and then the cleaned tube is reassembled or welded back to its original shape as an air guide tube, thus achieving the refurbishment of the air guide tube and restoring its service life. Compared to replacing the pipes with new ones, the above refurbishment method can save a lot of processing time, reduce processing costs, and does not require the investment of new materials, thus saving material costs and effectively reducing the user's operating costs.
[0027] The order of interior wall renovation process S11 and exterior wall renovation process S12 can be interchanged. For example... Figure 1-6 As shown, in the inner wall renovation process S11, a reaming tool a3 is configured to rotate driven by a drive head a2. The outer diameter of the reaming tool a3 is selected according to the diameter of the inner hole of the pipe. The pipe body is fixed on the pipe transfer clamp a4. The pipe transfer clamp a4 is driven by the linear drive on the inner wall renovation platform a1 to move back and forth. Thus, the first end of the inner hole of the pipe is sent to the reaming tool a3 in a coaxial manner through the pipe transfer clamp a4, so that the reaming tool a3 expands the inner hole of the pipe. At the same time, coolant is continuously injected into the tail end of the inner hole of the pipe through the liquid supply pipe on the rear side of the pipe transfer clamp a4. After the reaming tool a3 completes the reaming and renovation of the inner hole of the pipe, the pipe transfer clamp a4 moves the pipe body to disengage from the reaming tool a3.
[0028] The outer wall refurbishment process S12 is as follows: A grinding wheel b2 driven to rotate by a grinding motor b3 is configured, the tube is placed on the support a6 and located between the left baffle b61 and the right baffle b62, the outer peripheral wall of the first end of the tube abuts against the outer peripheral side of the grinding wheel b2 and ensures that the axis of the tube and the axis of the grinding wheel b2 are parallel. When the grinding wheel b2 is driven to rotate by the grinding motor b3, the tube is driven by the grinding wheel b2 to rotate around its own axis. At the same time, under the action of the guide wheel b4, the tube moves axially, so that the outer peripheral wall of the tube from the first end to the last end is ground and refurbished by the grinding wheel b2. In step S11, the reaming tool a3 is preferably a solid structure, and the cutting head of the reaming tool a3 is a conical silicon carbide grinding head. The solid structure of the reaming tool a3 can ensure good rigidity and improve the concentricity when reaming the tube, while the silicon carbide grinding head is less likely to damage the tube.
[0029] In step S11, the tube body is held by a tube-moving clamp a4, which is driven by a linear drive to move towards or away from the reaming tool a3. The linear drive gradually moves the tube-moving clamp a4 holding the tube body toward the reaming tool a3 for reaming using a pecking-drilling feed method. This ensures the stability of the tube body through the tube-moving platform, and the linear drive adjusts the feed amount of the tube body during the reaming process. The linear drive can be of the form found in the prior art, such as a lead screw motor pair a12.
[0030] The linear drive unit, in the corresponding feeding mode of the pecking drill, moves the pipe clamp a4 forward by 0.05mm and backward by 0.02mm each time, repeating this process until the reaming tool a3 moves from the beginning to the end of the inner hole of the pipe, thereby ensuring that the reaming tool a3 will not damage the inner hole of the pipe and that the reaming effect is stable.
[0031] In addition, in step S2, the tube is first soaked in a 5% KOH solution at 50°C for 20 minutes, and then soaked in a 10% HCl solution at 30°C for 30 minutes to achieve degreasing and cleaning.
[0032] Example 2 like Figure 1-6 As shown, Embodiment 2 of the present invention also provides a duct refurbishment device, including an inner wall refurbishment device and an outer wall refurbishment device; The inner wall renovation device includes an inner wall renovation platform a1, a drive head a2, a reaming cutter a3, and a pipe transfer clamp a4. The drive head a2 is fixed to the front of the inner wall renovation platform a1. The pipe transfer clamp a4 is located at the rear of the inner wall renovation platform a1 and is used to clamp the pipe body. A liquid supply pipe a5 is provided at the rear of the pipe transfer clamp a4. The inner wall renovation platform a1 is provided with a linear drive for driving the pipe transfer clamp a4 to move in the front-back direction. The front end of the reaming cutter a3 is connected to the drive head a2 and the rear end faces the pipe transfer clamp a4. The external wall renovation device includes an external wall renovation platform b1, a grinding wheel b2, a grinding motor b3, a guide wheel b4, a guide frame b5, and a support b6. The grinding motor b3 is fixed to the left side of the external wall renovation platform b1. The grinding wheel b2 is driven by the grinding motor b3 to rotate in the front-to-back direction as its axis. The guide frame b5 is located on the right side of the external wall renovation platform b1. The guide wheel b4 is rotatably connected to the guide frame b5. The guide wheel b4 has its front-to-back direction as its axis, and the front end of the guide wheel b4's axis is lower than its rear end. The support b6 is fixed to the external wall renovation platform b1 in the front-to-back direction and is located between the grinding wheel b2 and the guide wheel b4. The upper left and right sides of the support b6 are respectively provided with a left baffle b61 and a right baffle b62, and the tube can pass through between the left baffle b61 and the right baffle b62. The left baffle b61 has a notch b63 corresponding to the position of the grinding wheel b2, and the right baffle b62 has a notch b63 corresponding to the position of the guide wheel b4.
[0033] The inner wall refurbishment device of the above scheme achieves stable clamping of the pipe body through the pipe transfer clamp a4. The movement of the pipe transfer platform is controlled by a linear drive, so that the reaming tool a3 can ream the inner hole of the pipe body on the pipe transfer clamp a4. The liquid supply pipe a5 continuously injects coolant into the inner hole of the pipe body on the pipe transfer clamp a4, so that the coolant flow direction is opposite to the reaming direction of the reaming tool a3, which plays a better role in cooling and chip removal, thereby realizing the refurbishment of the inner wall of the pipe. The outer wall refurbishment device supports the pipe body through the bracket b6, so that the pipe body is located between the left baffle b61 and the right baffle b62, so that the grinding wheel b2 can pass through the left baffle b61. The notch b63 of the baffle b61 contacts the tube body, and the guide wheel b4 can pass through the notch b63 of the right baffle b62 to contact the tube body. When the grinding motor b3 drives the grinding wheel b2 to rotate, the tube body will rotate around its own axis. At the same time, since the guide wheel b4 is centered on the front and back direction and the front end of the guide wheel b4 axis is lower than the rear end, when the guide wheel b4 is driven to rotate by the tube body, the guide wheel b4 will exert a forward force on the tube body, causing the tube body to move forward continuously. This allows the outer peripheral wall of the tube body from the first end to the last end to be ground and refurbished by the grinding wheel b2, ensuring that the outer peripheral wall of the tube body can form a good roundness after being ground by the grinding wheel b2, thereby realizing the refurbishment of the outer peripheral wall of the tube body.
[0034] In this embodiment, the pipe-moving clamp a4 is provided with an upper clamping plate a41 and a lower clamping plate a42. The lower clamping plate a42 is fixedly disposed relative to the pipe-moving clamp a4. A lower receiving groove a421 extending in the front-back direction is opened on the upper side of the lower clamping plate a42, and an upper receiving groove a411 extending in the front-back direction is opened on the lower side of the upper clamping plate a41. The upper clamping plate a41 is stacked on top of the lower clamping plate a42, so that the upper receiving groove a411 and the lower receiving groove a421 can clamp and fix the pipe body. A liquid supply connector a6 is provided at the rear of the lower clamping plate a42. The front end of the liquid supply connector a6 is disposed facing the rear side of the lower receiving groove a421 and the rear end is connected to the liquid supply pipe a5. The front end of the liquid supply connector a6 is used to connect to the pipe body in the receiving groove, thereby providing coolant to the inner hole of the pipe body on the one hand, and also supporting the pipe body in the front-back direction on the other hand, ensuring that the pipe body will not move backward when the reaming tool a3 reams the inner hole of the pipe body.
[0035] In the modified design, an upper fixing block a43 is connected to the upper side of the upper clamping plate a41. The upper fixing block a43 is preferably made of metal to provide good structural strength, while the upper clamping plate a41 is preferably made of PVC to provide a certain degree of deformation capability and avoid damage to the pipe body. A lower fixing block a44 is connected to the lower side of the lower clamping plate a42. The lower fixing block a44 is preferably made of metal to provide good structural strength, while the lower clamping plate a42 is preferably made of PVC to provide a certain degree of deformation capability and avoid damage to the pipe body.
[0036] Furthermore, both the lower clamping plate a42 and the lower fixing block a44 are fixed relative to the pipe moving clamping platform a4. The upper fixing block a43 and the upper clamping plate a41 are provided with multiple vertical mounting holes, and the lower clamping plate a42 is provided with multiple vertical screw holes. The mounting holes and screw holes correspond one by one. Thus, by setting screws in the mounting holes and screwing the lower end of the screws to the screw holes of the lower clamping plate a42, the upper clamping plate a41 and the lower clamping plate a42 can be fitted and fixed. By rotating the screws, the tightness of the fit between the upper clamping plate a41 and the lower clamping plate a42 can be controlled to ensure that the upper clamping plate a41 and the lower clamping plate a42 apply appropriate clamping pressure to the pipe body, and to prevent the pipe body from loosening due to insufficient clamping force or breaking due to excessive clamping force.
[0037] In this embodiment, the linear drive includes a guide rail a11 and a lead screw motor assembly a12, both arranged along the front-rear direction. A pipe-shifting clamp a4 is slidably connected to the guide rail a11, and the clamp a4 has a pipe-shifting screw assembly a45 screwed to the lead screw motor assembly a12. The movement of the pipe-shifting slide is controlled by the lead screw motor assembly a12, resulting in high precision and good stability. Of course, the linear drive can also be in other forms, such as an electric cylinder, and this design does not limit this.
[0038] As an optimization of the internal wall renovation device, the device also includes a limiting slide a13 slidably connected to the guide rail a11. The limiting slide a13 is located between the pipe moving clamp a4 and the drive head a2. The limiting slide a13 is provided with a clamp a14 for holding the pipe body, thereby clamping the pipe body at the position extending from the moving clamp through the clamp a14, ensuring the stability of the pipe body when the hole is enlarged. More specifically, the clamp a14 is annular, and a rubber ring is provided on the inner ring side of the clamp a14, thereby achieving the clamping of the pipe body through the rubber ring.
[0039] In this embodiment, the external wall renovation device also includes an adjustment rail b7 fixed to the right side of the external wall renovation platform b1, and an adjustment screw b8 arranged parallel to the adjustment rail b7. The adjustment rail b7 is arranged in the left-right direction, and the guide frame b5 is slidably connected to the adjustment rail b7. The guide frame b5 is provided with an adjustment screw hole b522 that is screwed to the adjustment screw b8, so that the position of the guide frame b5 can be controlled by the adjustment screw b8, and the distance between the guide wheel b4 and the grinding wheel b2 can be adjusted to adapt to pipes of different sizes.
[0040] As an optimization of the external wall renovation device, the guide frame b5 includes a support frame b51, a base frame b52, and a height adjustment component b53. An adjusting screw hole b522 is located at the lower part of the base frame b52. A bearing seat b521 with its axis running left-right is located on the upper side of the base frame b52. A guide wheel b4 is rotatably connected to the upper side of the support frame b51 with its axis running front-back. A rotating shaft b511 rotatably connected to the bearing seat b521 is located on the lower side of the support frame b51. A gap is left between the support frame b51 and the base frame b52. The height adjustment component b53 is preferably a cylinder. 3 is connected to the base frame b52, and the output end of the height adjustment component b53 is rotatably connected to the front end of the receiving frame b51. Thus, when the height adjustment component b53 controls the front end of the receiving frame b51 to approach the base frame b52, the height of the front part of the receiving frame b51 is lower than the height of the rear part. This achieves the effect that the guide wheel b4 is axial in the front-rear direction and the front end of the guide wheel b4 axis is lower than the rear end. The tilt angle of the guide wheel b4 axis can be changed by adjusting the height adjustment component b53, thereby changing the magnitude of the forward force applied by the guide wheel b4 to the pipe body and adjusting the speed of pipe movement.
[0041] In addition, the upper side of the bracket b6 is designed to be inclined with the left side higher than the right side, so that the tube can fit better against the guide wheel b4, thus achieving the effect of the tube being pushed forward by the guide wheel b4.
[0042] It should be noted that in the description of this application, the terms "inner" and "outer," etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. This is only for the convenience of description and does not indicate or imply that the device or component must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this application. All directional indications (such as up, down, left, right, front, back, inner, and outer) are only used to explain the relative positional relationships and movement between components in a specific posture. If the specific posture changes, the directional indication will also change accordingly.
[0043] In the description of this application, the references to terms such as "an embodiment," "some embodiments," "in this embodiment," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.
[0044] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.
Claims
1. A device for refurbishing air ducts, characterized in that, Includes interior wall renovation equipment and exterior wall renovation equipment; The inner wall renovation device includes an inner wall renovation platform (a1), a drive head (a2), a reaming cutter (a3), and a pipe transfer clamp (a4). The drive head (a2) is fixed to the front of the inner wall renovation platform (a1), and the pipe transfer clamp (a4) is located at the rear of the inner wall renovation platform (a1) and is used to clamp the pipe body. A liquid supply pipe (a5) is provided at the rear of the pipe transfer clamp (a4). The inner wall renovation platform (a1) is provided with a linear drive for driving the pipe transfer clamp (a4) to move in the front-back direction. The front end of the reaming cutter (a3) is connected to the drive head (a2), and the rear end faces the pipe transfer clamp (a4). The external wall renovation device includes an external wall renovation platform (b1), a grinding wheel (b2), a grinding motor (b3), a guide wheel (b4), a guide frame (b5), and a support (b6). The grinding motor (b3) is fixed to the left side of the external wall renovation platform (b1). The grinding wheel (b2) is driven by the grinding motor (b3) to rotate around its axis in the front-back direction. The guide frame (b5) is located on the right side of the external wall renovation platform (b1). The guide wheel (b4) is rotatably connected to the guide frame (b5). The guide wheel (b4) is rotatably connected to the guide frame (b5) in the front-back direction. The front end of the axis is lower than the rear end. The bracket (b6) is fixed to the outer wall renovation platform (b1) in the front-to-back direction and is located between the grinding wheel (b2) and the guide wheel (b4). The upper left and right sides of the bracket (b6) are respectively provided with a left baffle (b61) and a right baffle (b62), and the tube can pass through between the left baffle (b61) and the right baffle (b62). The left baffle (b61) has a notch (b63) corresponding to the position of the grinding wheel (b2), and the right baffle (b62) has a notch (b63) corresponding to the position of the guide wheel (b4). The tube transfer clamp (a4) is provided with an upper clamp (a41) and a lower clamp (a42). The lower clamp (a42) has a lower receiving groove (a421) extending in the front-back direction on its upper side, and the upper clamp (a41) has an upper receiving groove (a411) extending in the front-back direction on its lower side. The upper clamp (a41) is stacked on top of the lower clamp (a42) so that the upper receiving groove (a411) and the lower receiving groove (a421) can clamp and fix the tube body. The lower clamp (a42) is provided with a liquid supply connector (a6) at its rear. The front end of the liquid supply connector (a6) is set towards the rear side of the lower receiving groove (a421), and the rear end is connected to the liquid supply pipe (a5).
2. The air duct refurbishment equipment according to claim 1, characterized in that, The linear drive unit includes a guide rail (a11) and a lead screw motor pair (a12) both arranged in the front-back direction. The pipe transfer clamp (a4) is slidably connected to the guide rail (a11), and the pipe transfer clamp (a4) is provided with a pipe transfer screw (a45) screwed to the lead screw motor pair (a12).
3. The air duct refurbishment equipment according to claim 2, characterized in that, The inner wall renovation device also includes a limiting slide (a13) slidably connected to the guide rail (a11). The limiting slide (a13) is located between the pipe transfer clamp (a4) and the drive head (a2). The limiting slide (a13) is provided with a clamp (a14) for clamping the pipe body.
4. The air duct refurbishment equipment according to claim 1, characterized in that, The external wall renovation device also includes an adjustment rail (b7) fixed to the right side of the external wall renovation platform (b1) and an adjustment screw (b8) arranged parallel to the adjustment rail (b7). The adjustment rail (b7) is arranged in the left-right direction. The guide frame (b5) is slidably connected to the adjustment rail (b7), and the guide frame (b5) is provided with an adjustment screw hole (b522) that is screwed to the adjustment screw (b8).
5. A method for refurbishing an air duct, applied to the air duct refurbishing equipment according to any one of claims 1-4, characterized in that, Includes the following steps: S1. Cut the air duct into several sections, and then perform internal and external wall refurbishment processes on the sections. The inner wall renovation process S11 is as follows: a reaming cutter (a3) driven to rotate by a drive head (a2) is configured. The outer diameter of the reaming cutter (a3) is selected according to the diameter of the inner hole of the pipe. Then, the first end of the inner hole of the pipe is sent to the reaming cutter (a3) in a coaxial manner, so that the reaming cutter (a3) expands the inner hole of the pipe. At the same time, coolant is continuously injected from the tail end of the inner hole of the pipe. After the reaming cutter (a3) completes the reaming and renovation of the inner hole of the pipe, the pipe is moved away from the reaming cutter (a3). The outer wall refurbishment process S12 is as follows: a grinding wheel (b2) driven to rotate by a grinding motor (b3) is configured, the outer peripheral wall of the first end of the tube is brought into contact with the outer peripheral side of the grinding wheel (b2) and the axis of the tube and the grinding wheel (b2) are kept parallel. Then, while driving the tube to rotate around its own axis, the tube is moved axially so that the outer peripheral wall of the tube from the first end to the last end is refurbished by the grinding wheel (b2). S2. The pipe body that has completed the inner wall renovation process and the outer wall renovation process is degreased and cleaned with cleaning solution; S3. The cleaned pipe body is reassembled or welded to restore it to a gas duct.
6. The air duct refurbishment method according to claim 5, characterized in that, In step S11, the reaming tool (a3) is a solid structure, and the cutting head of the reaming tool (a3) is a conical silicon carbide grinding head.
7. The air duct refurbishment method according to claim 5, characterized in that, In step S11, the tube body is held by the tube transfer clamp (a4), which is driven by a linear drive to move in the direction of approaching or moving away from the reaming tool (a3). The linear drive gradually moves the tube transfer clamp (a4) holding the tube body toward the reaming tool (a3) for reaming in a pecking-drill corresponding feed mode.
8. The method for refurbishing an air duct according to claim 7, characterized in that, The linear drive unit, in the feeding mode corresponding to the pecking drill, specifically drives the pipe moving chuck (a4) forward 0.05mm and backward 0.02mm each time, repeating this process until the reaming tool (a3) moves from the beginning to the end of the inner hole of the pipe.
9. The method for refurbishing an air duct according to claim 5, characterized in that, In step S2, the tube is first soaked in a 5% KOH solution at 50°C for 20 minutes, and then soaked in a 10% HCl solution at 30°C for 30 minutes, thereby achieving degreasing and cleaning.
Citation Information
Patent Citations
Device for renovating inner hole of gas-guide tube
CN223557074U
Device for renovating outer wall of gas-guide tube
CN223558001U