Extreme ultraviolet light generation method, extreme ultraviolet light source assembly, and optical system

CN119668035BActive Publication Date: 2026-08-28SHAANXI STARTORUS FUSION TECHNOLOGY COMPANY LIMITED
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Patent Information

Application Number
CN202311212358.6
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-09-19
Publication Date
2026-08-28
Estimated Expiration
2043-09-19

AI Technical Summary

Technical Problem

然而，激光产生等离子体辐射方式仍存在成本高、寿命短、稳定性差等诸多问题，因此，亟需一种成本低且稳定的极紫外光产生方案

Benefits of technology

[0014]本申请一个实施例提供的极紫外光产生方法，利用磁约束装置产生等离子体；在等离子体满足预设注入条件的情况下，控制重金属注入装置向磁约束装置中注入指定重金属，以使指定重金属在磁约束装置中与等离子体作用产生极紫外光；控制光学装置收集极紫外光。由于满足极紫外光产生要求的磁约束装置成本较低、运行简单且稳定、电光转换效率也较高，因此，提高了极紫外光的稳定性，还可以降低极紫外光产生成本。

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Abstract

The embodiment of the present application provides an extreme ultraviolet light generation method, an extreme ultraviolet light source assembly and an optical system, wherein the extreme ultraviolet light generation method comprises the following steps: generating plasma by using a magnetic confinement device; in the case that the plasma meets preset injection conditions, controlling a heavy metal injection device to inject a specified heavy metal into the magnetic confinement device, so that the specified heavy metal interacts with the plasma in the magnetic confinement device to generate extreme ultraviolet light; and controlling an optical device to collect the extreme ultraviolet light. Since the magnetic confinement device meeting the extreme ultraviolet light generation requirement has low cost, simple and stable operation and high electric-optical conversion efficiency, the extreme ultraviolet light generation method improves the stability of the extreme ultraviolet light and reduces the extreme ultraviolet light generation cost.
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Citation Information

Patent Citations

  • Optical assembly, in particular plasma light source or EUV lithography system

    CN105723282A

  • Measuring system for extreme ultraviolet spectrum spatial distribution of Tokamak device

    CN115468910A