Optical adjusting mechanism, auxiliary device and optical equipment

Abstract

The invention discloses an optical adjusting mechanism, an auxiliary device and optical equipment, the optical adjusting mechanism comprises a support, an angle adjusting assembly, a mounting platform, a first mounting seat and a second mounting seat, the angle adjusting assembly is arranged on the support, the mounting platform is arranged on the angle adjusting assembly, and the angle adjusting assembly is used for adjusting the posture of the mounting platform; the first mounting seat is arranged on the mounting platform and used for mounting a knife edge; the second mounting base is arranged on the mounting platform and used for mounting the sample wafer. The first mounting seat and the second mounting seat are both arranged on the mounting platform and share the same angle adjusting assembly, and a plurality of angle adjusting assemblies for adjusting the first mounting seat and the second mounting seat respectively do not need to be arranged, so that the overall size of the optical adjusting mechanism is greatly reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of optical adjustment mechanisms, and in particular to an optical adjustment mechanism, an auxiliary device and an optical equipment. Background Art

[0002] In the process of wafer inspection or wafer transmission, in order to achieve different functions, a knife edge is usually used to measure the size of light spots of different wavelengths in the X-axis and Y-axis directions, and a sample is used to calibrate the accuracy of the machine's optical path. That is, the sample and the knife edge are both auxiliary structures for monitoring and calibrating the optical path.

[0003] In the related art, the mounting seat of the blade and the mounting seat of the sample are separately arranged on corresponding adjustment components. The staff adjusts the position of the blade or the position of the sample through the corresponding adjustment components to ensure the accuracy of the blade measurement and the accuracy of the sample calibration.

[0004] However, the space reserved for optical equipment is limited, and workers need to install two or more adjustment components in the limited space, which poses great difficulties. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides an optical adjustment mechanism, an auxiliary device and an optical device. The optical adjustment mechanism occupies a small space and is easy to install.

[0006] In a first aspect, an embodiment of the present application provides an optical adjustment mechanism, comprising:

[0007] Support;

[0008] An angle adjustment component, arranged on the support;

[0009] A mounting platform, arranged on the angle adjustment component, and the angle adjustment component is used to adjust the posture of the mounting platform;

[0010] A first mounting seat, disposed on the mounting platform, for mounting a knife edge;

[0011] The second mounting seat is arranged on the mounting platform and is used for mounting the sample.

[0012] According to some embodiments of the present invention, the angle adjustment assembly includes two two-dimensional pendulum tables, which are divided into a first pendulum table and a second pendulum table, the first pendulum table is connected to the support, the second pendulum table is connected to the first pendulum table, and the mounting platform is connected to the second pendulum table, wherein one of the first pendulum table and the second pendulum table is used to drive the mounting platform to rotate around the X-axis, and the other is used to drive the mounting platform to rotate around the Y-axis.

[0013] According to some embodiments of the present invention, the optical adjustment mechanism further includes a lifting and lowering adjustment mechanism, and the lifting and lowering adjustment mechanism is configured to adjust the position of the mounting platform along the Z-axis.

[0014] According to some embodiments of the present invention, the optical adjustment mechanism further comprises a first adjustment component, wherein the first adjustment component is configured to adjust the first mounting seat along an XY axis plane.

[0015] According to some embodiments of the present invention, the first adjustment component comprises:

[0016] a first adjusting member, disposed on one of the mounting platform and the first mounting seat, wherein a driving end of the first adjusting member abuts against a side wall of the other, and the first adjusting member is configured to adjust a position of the first mounting seat and / or an offset in an X-axis direction and a Y-axis direction;

[0017] A first elastic member, the first elastic member is connected to the mounting platform and the first mounting seat, and is used to keep the first adjusting member in contact with the first mounting seat or the mounting platform.

[0018] According to some embodiments of the present invention, the first adjustment assembly includes at least two first adjustment members, the first adjustment members are arranged in parallel, and each of the first adjustment members is arranged at a different position of the XY axis plane.

[0019] According to some embodiments of the present invention, the first adjusting member is an adjusting thread pair or a differential head.

[0020] According to some embodiments of the present invention, the mounting platform is provided with a second boss, the second boss is located on a side of the first mounting seat away from the first adjusting member, and the first elastic member is supported between the second boss and the first mounting seat.

[0021] According to some embodiments of the present invention, the second boss is provided with a first positioning hole, and the first mounting seat is provided with a second positioning hole;

[0022] The first adjustment component also includes a positioning shaft, which is arranged in the first positioning hole and the second positioning hole, and the first elastic member is sleeved on the positioning shaft, wherein the diameter of the positioning shaft is smaller than the inner diameter of the first positioning hole and / or the inner diameter of the second positioning hole.

[0023] According to some embodiments of the present invention, the optical adjustment mechanism further comprises a second adjustment component, wherein the second adjustment component is configured to adjust the position of the second mounting seat along the Z-axis.

[0024] According to some embodiments of the present invention, the second adjustment component comprises:

[0025] A second adjusting member is disposed on one of the mounting platform and the second mounting seat, a driving end of the second adjusting member abuts against the other, and the second adjusting member is configured to adjust the position of the second mounting seat along the Z axis;

[0026] A second elastic member, the second elastic member is connected to the mounting platform and the second mounting seat, and is used to keep the second adjusting member and the second mounting seat or the mounting platform in abutment with each other.

[0027] According to some embodiments of the present invention, the second adjustment assembly includes at least three second adjustment members, and on the XY axis plane, at least three second adjustment members are not arranged in a colinear line.

[0028] According to some embodiments of the present invention, the second adjusting member is an adjusting thread pair or a differential head.

[0029] In a second aspect, an embodiment of the present application provides an auxiliary device, including:

[0030] The above optical adjustment mechanism, wherein the second mounting seat is provided with one or more;

[0031] A knife edge is arranged on the first mounting seat, and the knife edge is used to measure the size of light spots of different wavelengths in the XY axis direction;

[0032] A sample, each of the second mounting seats is provided with the sample, and the sample is used to calibrate the optical path of the optical device.

[0033] According to some embodiments of the present invention, the edge of the blade has an X-axis measuring edge and a Y-axis measuring edge that are perpendicular to each other; two second mounting seats are provided, one second mounting seat is located on one side of the X-axis measuring edge, and the other second mounting seat is located on one side of the Y-axis measuring edge.

[0034] In a third aspect, an embodiment of the present application provides an optical device, comprising the above-mentioned auxiliary device.

[0035] It can be seen from the above technical solution that the embodiments of the present application have the following advantages: 1. The first mounting seat and the second mounting seat are both arranged on the mounting platform, the first mounting seat and the second mounting seat share the same angle adjustment component, and there is no need to set up multiple angle adjustment components for adjusting the first mounting seat and the second mounting seat respectively. As a result, the overall size of the optical adjustment mechanism is greatly reduced, and the optical adjustment mechanism occupies a small space as a whole. Therefore, the staff can more conveniently assemble the optical adjustment mechanism at the corresponding position.

[0036] 2. Compared with using multiple angle adjustment components to respectively adjust the postures of the first mounting seat and the second mounting seat, in the present application, the optical adjustment mechanism only needs to use one angle adjustment component, so the preparation cost of the optical adjustment mechanism is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 is a schematic diagram of the overall structure of the optical adjustment mechanism according to an embodiment of the present invention;

[0038] Figure 2 A schematic diagram of the guarantee structure of the optical adjustment mechanism according to an embodiment of the present invention;

[0039] Figure 3 It is a schematic diagram of the exploded structure of the mounting platform and the first mounting seat according to an embodiment of the present invention;

[0040] Figure 4 It is a schematic diagram of the exploded structure of the mounting platform, the first mounting seat and the second mounting seat according to an embodiment of the present invention;

[0041] Figure 5 It is a schematic diagram of the assembly structure of the mounting platform and the first mounting seat according to an embodiment of the present invention.

[0042] The meanings of the reference numerals are as follows:

[0043] 10. Auxiliary device; 100. Optical adjustment mechanism; 110. Support; 120. Lifting adjustment mechanism; 130. Mounting base; 140. Angle adjustment assembly; 141. First swing table; 142. Second swing table; 150. Mounting platform; 151. First boss; 152. Second boss; 1521. First positioning hole; 160. First mounting seat; 161. Second positioning hole; 170. First adjustment assembly; 171. First adjustment member; 172. First elastic member; 173. Positioning shaft; 180. Second adjustment assembly; 181. Second adjustment member; 182. Second elastic member; 190. Second mounting seat; 200. Knife edge; 210. X-axis measurement edge; 220. X-axis measurement edge; 300. Sample. DETAILED DESCRIPTION

[0044] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0045] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, upper, lower, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0046] In the description of the present invention, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0047] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0048] In the description of the present invention, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0049] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0050] Please refer to Figures 1 to 2, which show an optical adjustment mechanism 100 provided in an embodiment of the present invention, including a support 110, an angle adjustment component 140, a mounting platform 150, a first mounting seat 160 and a second mounting seat 190, wherein the angle adjustment component 140 is disposed on the support 110, the mounting platform 150 is disposed on the angle adjustment component 140, and the angle adjustment component 140 is used to adjust the posture of the mounting platform 150; the first mounting seat 160 is disposed on the mounting platform 150 for mounting a blade 200; the second mounting seat 190 is disposed on the mounting platform 150 for mounting a sample 300.

[0051] Specifically, during use of the optical adjustment mechanism 100, the blade 200 is assembled on the first mounting seat 160, and the sample 300 is assembled on the second mounting seat 190. Thus, the angle adjustment assembly 140 adjusts the posture of the first mounting seat 160 and the second mounting seat 190 by adjusting the posture of the mounting platform 150, thereby adjusting the posture of the blade 200 and the sample 300.

[0052] It can be understood that the first mounting seat 160 and the second mounting seat 190 are both arranged on the mounting platform 150, the first mounting seat 160 and the second mounting seat 190 share the same angle adjustment component 140, and there is no need to set up multiple angle adjustment components 140 for adjusting the first mounting seat 160 and the second mounting seat 190 respectively. Therefore, the overall size of the optical adjustment mechanism 100 is greatly reduced, and the optical adjustment mechanism occupies a small space as a whole. Therefore, the staff can more conveniently assemble the optical adjustment mechanism 100 at the corresponding position.

[0053] Moreover, compared to using multiple angle adjustment components 140 to respectively adjust the postures of the first mounting seat 160 and the second mounting seat 190, in the present application, the optical adjustment mechanism 100 only needs to use one angle adjustment component 140, so the preparation cost of the optical adjustment mechanism 100 is reduced.

[0054] In a possible embodiment, the angle adjustment assembly 140 includes two two-dimensional swing tables, which are divided into a first swing table 141 and a second swing table 142, wherein the base of the first swing table 141 is fixedly connected to the top of the support 110, the base of the second swing table 142 is fixedly connected to the swing portion of the first swing table 141, and the mounting platform 150 is horizontally fixedly connected to the swing portion of the second swing table 142. When the first swing table 141 is adjusted, the first swing table 141 adjusts the second swing table 142 to swing around the X-axis, thereby driving the mounting platform 150 to swing around the X-axis, thereby adjusting the posture of one angle between the first mounting seat 160 and the second mounting seat 190. And, when the second swing table 142 is adjusted, the second swing table 142 adjusts the mounting platform 150 to swing around the Y-axis, thereby adjusting the posture of another angle between the first mounting seat 160 and the second mounting seat 190. It is also possible that the first swing table 141 is used to adjust the installation platform 150 to swing around the Y axis, and the second swing table 142 is used to adjust the installation platform 150 to swing around the X axis.

[0055] It should be noted that in addition to using a two-dimensional swing table to realize the swinging of the installation platform 150 on the support 110, the second adjustment component 180 can also adopt other structures. For example, the second adjustment component 180 can also be a universal structure, which can also realize the swinging of the installation platform 150 on the support 110.

[0056] In some embodiments, the second adjustment assembly 180 further includes a lifting adjustment module, which is used to adjust the height of the mounting platform 150 along the Z axis. Specifically, the base of the lifting adjustment module is fixedly connected to the support 110, the movable part of the lifting adjustment module is fixedly connected to the mounting base 130, and the base of the first swing table 141 is fixedly connected to the mounting base 130. Therefore, when the first mounting seat 160 and the second mounting seat 190 are in the lifting and adjusting stage, the lifting adjustment module drives the first swing table 141 to move along the Z axis through the mounting base 130, and accordingly, the second swing table 142 and the mounting platform 150 move synchronously along the Z axis, thereby realizing the adjustment of the first mounting seat 160 and the second mounting seat 190 along the Z axis. In which, instead of the lifting adjustment module being arranged between the support 110 and the first swing table 141, the lifting adjustment module can also be arranged between the second swing table 142 and the mounting platform 150.

[0057] Reference Figure 2 and Figure 3 , the blade 200 has an X-axis measuring edge 210 and a Y-axis measuring edge 220 which are perpendicular to each other. In actual application, the X-axis measuring edge 210 of the blade 200 needs to be kept parallel to the X-axis, and the Y-axis measuring edge 220 needs to be kept parallel to the Y-axis. Based on the above problems, in a possible embodiment, the optical adjustment mechanism 100 also includes a first adjustment component 170, and the first adjustment component 170 is used to be adjustable along the XY axis plane and arranged on the mounting platform 150. In order to facilitate the understanding of the scheme, the XY axis plane can be understood as a horizontal plane, and the first mounting seat 160 can adjust the posture on the horizontal plane. Therefore, the staff can adjust the posture of the blade 200 on the horizontal plane by adjusting the posture of the first mounting seat 160 on the horizontal plane, thereby adjusting the X-axis measuring edge 210 of the blade 200 to be parallel to the X axis, and correspondingly, the Y-axis measuring edge 220 is adjusted to be parallel to the Y axis.

[0058] Reference Figure 3 and Figure 4 In order to achieve that the mounting base 130 can be adjusted in the XY axis plane, in a possible embodiment, the first adjustment assembly 170 includes a first adjustment member 171 and a first elastic member 172, wherein the mounting platform 150 is provided with a first boss 151 located on one side of the first mounting seat 160, the first adjustment member 171 is provided on the side wall of the first boss 151, and the driving end of the first adjustment member 171 abuts against the side wall of the first mounting seat 160. The first elastic member 172 is connected to the mounting platform 150 and the first mounting seat 160, and the force of the first elastic member 172 on the first mounting seat 160 is opposite to the force of the first adjustment member 171 on the first mounting seat 160, therefore, the driving end of the first adjustment member 171 maintains an abutting state with the side wall of the first mounting seat 160, and the first mounting seat 160 remains mounted on the mounting platform 150.

[0059] When it is necessary to adjust the posture of the blade 200 in the X-axis plane, the staff causes the driving end of the first adjustment member 171 to push the first mounting seat 160 to move, and the first mounting seat 160 changes its posture in the XY-axis plane, that is, the first mounting seat 160 is offset toward the X-axis direction and the Y-axis direction. In this way, the first mounting seat 160 is adjusted to a suitable position, and the X-axis measuring edge 210 of the blade 200 is adjusted to be parallel to the X-axis, and correspondingly, the Y-axis measuring edge 220 is adjusted to be parallel to the Y-axis. It should be added that the device is provided with a corresponding detection module, and after the blade 200 is adjusted into place, it can be detected and confirmed by the detection module, which is not described in detail here.

[0060] The first elastic member 172 may be a spring, a tension spring, or the like.

[0061] And, the first adjusting member 171 can be an adjusting thread pair or a differential head. It is understandable that the first adjusting member 171 adopts an adjusting thread pair or a differential head, and the first adjusting member 171 can accurately adjust the extension distance of the driving end, so as to accurately adjust the posture of the first mounting seat 160, thereby ensuring that the X-axis measuring edge 210 is just adjusted to be parallel to the X-axis, and the Y-axis measuring edge 220 is just adjusted to be parallel to the Y-axis.

[0062] In addition, the first adjusting member 171 can also be disposed on the first mounting seat 160, the driving end of the first adjusting member 171 abuts against the side wall of the first boss 151, and the first elastic member 172 is used to keep the driving end of the first adjusting member 171 abutting against the side wall of the first boss 151. Therefore, when the driving end of the first adjusting member 171 contracts or extends, the posture of the first mounting seat 160 changes in the XY axis plane, so that the first mounting seat 160 can be adjusted to a suitable posture.

[0063] In a further embodiment, referring to Figure 3 and Figure 4 , at least two first adjustment members 171 are provided, and each first adjustment member 171 is provided at a different position of the XY axis plane and is provided in parallel. For example, the two first adjustment members 171 are arranged on the first boss 151 along the X axis. Specifically, when the staff adjusts one of the first adjustment members 171, the first mounting seat 160 is flipped with the other first adjustment member 171 as a fulcrum, thereby adjusting the posture of the first mounting seat 160. Conversely, when the staff adjusts the other first adjustment member 171, the first mounting seat 160 is flipped with the previous first adjustment member 171 as a fulcrum, thereby adjusting the posture of the first mounting seat 160. And, if the two first adjustment members 171 are adjusted at the same time, the position of the first mounting seat 160 on the X axis can be adjusted.

[0064] In some embodiments, if the first elastic member 172 is a tension spring, the tension spring is disposed on the upper side of the mounting platform 150 along the X-axis, one end of the tension spring is hooked on the side wall of the first boss 151, and the other end is hooked on the side wall of the first mounting seat 160, so that the tension spring keeps the first mounting seat 160 against the driving end of the first adjusting member 171. If the first elastic member 172 is a spring, a second boss 152 is disposed on the upper side of the mounting platform 150, the second boss 152 is located on the side of the first mounting seat 160 away from the first boss 151, the spring is located between the first mounting seat 160 and the second boss 152, one end of the spring is against the side wall of the second boss 152, and the other end is against the side wall of the first mounting seat 160, so that the spring pushes the first mounting seat 160 to abut against the driving end of the first adjusting member 171.

[0065] In a further embodiment, referring to Figure 4 and Figure 5 The side wall of the second boss 152 is provided with a first positioning hole 1521, and the side wall of the first mounting seat 160 is provided with a second positioning hole 161. The opening direction of the first positioning hole 1521 is opposite to the opening direction of the second positioning hole 161. The optical adjustment mechanism 100 further includes a positioning shaft 173, one end of which is located in the first positioning hole 1521, and the other end of which is located in the second positioning hole 161. The first elastic member 172 is sleeved on the positioning shaft 173.

[0066] Among them, in order for the first mounting seat 160 to be adjusted by the first adjusting member 171, the diameter of the positioning shaft 173 is smaller than the inner diameter of the first positioning hole 1521, and there is a movable gap between the positioning shaft 173 and the first positioning hole 1521, and the movable gap is approximately between 1 mm and 10 mm. Therefore, when the first adjusting member 171 acts on the first mounting seat 160, the positioning shaft 173 can move in the movable gap to avoid interference with the movement of the first mounting seat 160; or, the diameter of the positioning shaft 173 is smaller than the inner diameter of the second positioning hole 161, and there is a movable gap between the positioning shaft 173 and the second positioning hole 161, and the movable gap is approximately between 1 mm and 10 mm. Therefore, when the first adjusting member 171 acts on the first mounting seat 160, the positioning shaft 173 can move in the movable gap to avoid interference with the movement of the first mounting seat 160. Alternatively, the diameter of the positioning shaft 173 is smaller than the inner diameter of the first positioning hole 1521 and the inner diameter of the second positioning hole 161, and the principle is consistent with the above, which will not be described in detail.

[0067] It is understandable that, through the setting of the positioning shaft 173, the positioning shaft 173 has a positioning effect on the first elastic member 172, thereby ensuring that the first elastic member 172 is stably assembled between the second boss 152 and the first mounting seat 160, so as to reduce the bending of the first elastic member 172. In addition, the first positioning shaft 173 has a rough positioning effect on the position of the first mounting seat 160, so that when the first mounting seat 160 is assembled on the mounting platform 150, the posture of the first mounting seat 160 is roughly close to the adjusted posture, thereby facilitating the subsequent adjustment of the first mounting seat 160 to a suitable position through the first adjustment member 171.

[0068] In order to adjust the first mounting seat 160 along the XY axis plane, in another possible embodiment, the first mounting seat 160 is rotatably arranged on the mounting platform 150 around the Z axis. It is understandable that when the posture of the first mounting seat 160 needs to be adjusted, the staff rotates the position of the first mounting seat 160 horizontally, thereby adjusting the posture of the first mounting seat 160, and then adjusting the X-axis measuring edge 210 to be parallel to the X-axis, and the Y-axis measuring edge 220 to be parallel to the Y-axis.

[0069] Reference Figure 3 and Figure 4 In order to achieve that the second mounting seat 190 can be adjusted along the Z axis on the mounting platform 150, in some embodiments, the optical adjustment mechanism 100 further includes a second adjustment component 180, and the second adjustment component 180 is used to adjust the position of the second mounting seat 190 along the Z axis. The mounting platform 150 can be installed with multiple second mounting seats 190, and each second mounting seat 190 is correspondingly provided with an independent second adjustment component 180. It can be understood that in order to ensure the consistency of the height of each second mounting seat 190, the staff can adjust the height of each second mounting seat 190 through the second adjustment component 180, so that each second mounting seat 190 is at the same height position, and then the sample 300 on the second mounting seat 190 is at the same height position. Of course, the height position of the second mounting seat 190 can also be adjusted to make the height of the sample 300 consistent with the height of the blade 200.

[0070] Furthermore, the second adjustment component 180 includes a second adjustment member 181 and a second elastic member 182, wherein the second adjustment member 181 is fixedly arranged on the second mounting seat 190, and the driving end of the second adjustment member 181 is abutted against the mounting platform 150; at the same time, the second elastic member 182 is connected to the mounting platform 150 and the second mounting seat 190, and the second elastic member 182 is used to make the second adjustment member 181 abut against the second mounting seat 190 or the mounting platform 150.

[0071] The second elastic member 182 may be a spring, a tension spring, or the like.

[0072] Specifically, when the height of the second mounting seat 190 needs to be adjusted, the staff retracts or extends the driving end of the second adjusting member 181, and the second mounting seat 190 overcomes the elastic force of the second elastic member 182 and is adjusted up and down along the Z-axis until it is adjusted to a suitable height. For example, when the driving end of the second adjusting member 181 is extended, the second mounting seat 190 is adjusted upward along the Z-axis, and vice versa, the second mounting seat 190 is adjusted downward along the Z-axis.

[0073] And, the second adjusting member 181 can be an adjusting thread pair or a differential head. It is understandable that the second adjusting member 181 adopts an adjusting thread pair or a differential head, and the second adjusting member 181 can accurately adjust the extension distance of the driving end, so as to accurately adjust the height of the second mounting seat 190, so as to adjust the second mounting seat 190 to a suitable height.

[0074] In addition, the second adjusting member 181 can also be disposed on the mounting platform 150, the driving end of the second adjusting member 181 abuts against the bottom of the second mounting seat 190, and the second elastic member 182 is used to keep the driving end of the second adjusting member 181 abutting against the bottom of the second mounting seat 190. Therefore, when the driving end of the second adjusting member 181 contracts or extends, the second mounting seat 190 is adjusted along the Z-axis direction.

[0075] In a further specific embodiment, at least three second adjustment members 181 are provided; wherein, on the XY axis plane, at least three second adjustment members 181 are not provided on the same straight line. It is understandable that the second adjustment members 181 are provided in three or more numbers, and the driving ends of the three second adjustment members 181 just define a plane, thereby, the three second adjustment members 181 are used to keep the second mounting seat 190 at a corresponding height. It is understandable that the second mounting seat 190 adopts the above-mentioned assembly method. When the flatness of the second mounting seat 190 is poor, the staff adjusts the second adjustment member 181 at the corresponding position according to the posture of the second mounting seat 190, thereby adjusting the height of the corresponding position of the second mounting seat 190, and then adjusting the second mounting seat 190 to a flat state.

[0076] Of course, the second mounting seat 190 is slidably disposed on the mounting platform 150 along the Z axis, for example, the second mounting seat 190 is slidably disposed on the mounting platform 150 through a guide rail structure, and in this way, the position of the second mounting seat 190 is preliminarily positioned. Therefore, it is not necessary to set three or more second adjustment members 181, and one or two second adjustment members 181 are set, and the second adjustment member 181 is used to control the second mounting seat 190 to slide up and down along the Z axis, thereby adjusting the height of the second mounting seat 190.

[0077] The present application also discloses an auxiliary device 10, referring to Figure 1, including a knife edge 200, a sample 300 and the above-mentioned optical adjustment mechanism 100, wherein the knife edge 200 is set on the second mounting seat 190, and the knife edge 200 is used to measure the size of the light spot of different wavelengths in the XY direction. Each second mounting seat 190 is provided with a sample 300, and the sample 300 is used to calibrate the optical path of the optical device.

[0078] It can be understood that the auxiliary device 10 adopts the above-mentioned optical adjustment component, the blade 200 is set on the first mounting seat 160, the sample 300 is set on the second mounting seat 190, and the first mounting seat 160 and the second mounting seat 190 are both set on the mounting platform 150. Therefore, the first mounting seat 160 and the second mounting seat 190 share the same second adjustment component 180, and there is no need to set up multiple second adjustment components 180 for adjusting the first mounting seat 160 and the second mounting seat 190 respectively. As a result, the overall size of the auxiliary device 10 is greatly reduced, and the auxiliary device 10 occupies a small space as a whole. Therefore, the staff can more conveniently assemble the auxiliary device 10 at the corresponding position.

[0079] In some embodiments, the edge of the blade 200 has a perpendicular X-axis measuring edge 210 and a Y-axis measuring edge 220; two second mounting seats 190 are provided, one second mounting seat 190 is located on the side of the first mounting seat 160 close to the X-axis measuring edge 210, and the other second mounting seat 190 is located on the side of the first mounting seat 160 close to the Y-axis measuring edge 220.

[0080] It should be noted that when the auxiliary device 10 is applied to an optical device, due to the limitation of the movement stroke of the wafer, the installation space reserved by the optical device for installing the auxiliary device 10 is limited. The two second mounting seats 190 are arranged in the above-mentioned position, and the two second mounting seats 190 are compactly assembled together with the first mounting seat 160. The auxiliary device 10 occupies a small space, thereby facilitating the assembly of the auxiliary device 10; and when the auxiliary device 10 is installed in the corresponding position, it makes full use of the installation space of the corresponding position, so that it can be easily assembled in the corresponding installation space. Among them, each second mounting seat 190 can be installed with a sample 300, and each sample 300 can calibrate a different optical path.

[0081] The present application also discloses an optical device, referring to Figure 1 , including the auxiliary device 10 mentioned above.

[0082] It can be understood that the optical device adopts the above-mentioned optical adjustment component, the blade 200 is set on the first mounting seat 160, the sample 300 is set on the second mounting seat 190, and the first mounting seat 160 and the second mounting seat 190 are both set on the mounting platform 150. Therefore, the first mounting seat 160 and the second mounting seat 190 share the same second adjustment component 180, and there is no need to set up multiple second adjustment components 180 for adjusting the first mounting seat 160 and the second mounting seat 190 respectively. As a result, the overall size of the auxiliary device 10 is greatly reduced, and the auxiliary device 10 occupies a small space as a whole. Therefore, the staff can more conveniently assemble the auxiliary device 10 at the corresponding position of the optical device.

[0083] The technical means disclosed in the scheme of the present invention are not limited to the technical means disclosed in the above-mentioned implementation mode, but also include technical schemes composed of any combination of the above-mentioned technical features. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications are also regarded as the protection scope of the present invention.

Claims

1. An optical adjustment mechanism, characterized in that: include: Support; An angle adjustment component, arranged on the support; A mounting platform, arranged on the angle adjustment component, and the angle adjustment component is used to adjust the posture of the mounting platform; A first mounting seat, disposed on the mounting platform, for mounting a knife edge; The second mounting seat is arranged on the mounting platform and is used for mounting the sample.

2. An optical adjustment mechanism according to claim 1, characterized in that: The angle adjustment assembly includes two two-dimensional swing tables, which are divided into a first swing table and a second swing table. The first swing table is connected to the support, the second swing table is connected to the first swing table, and the mounting platform is connected to the second swing table. One of the first swing table and the second swing table is used to drive the mounting platform to rotate around the X-axis, and the other is used to drive the mounting platform to rotate around the Y-axis.

3. An optical adjustment mechanism according to claim 1, characterized in that: The optical adjustment mechanism further includes a lifting and lowering adjustment mechanism, and the lifting and lowering adjustment mechanism is configured to adjust the position of the mounting platform along the Z-axis.

4. An optical adjustment mechanism according to claim 1, characterized in that: The optical adjustment mechanism further includes a first adjustment component configured to adjust the first mounting seat along an XY axis plane.

5. An optical adjustment mechanism according to claim 4, characterized in that: The first adjustment component comprises: a first adjusting member, disposed on one of the mounting platform and the first mounting seat, wherein a driving end of the first adjusting member abuts against a side wall of the other, and the first adjusting member is configured to adjust a position of the first mounting seat and / or an offset in an X-axis direction and a Y-axis direction; A first elastic member, the first elastic member is connected to the mounting platform and the first mounting seat, and is used to keep the first adjusting member in contact with the first mounting seat or the mounting platform.

6. An optical adjustment mechanism according to claim 5, characterized in that: The first adjustment component includes at least two first adjustment members, the two first adjustment members are arranged in parallel, and each of the first adjustment members is arranged at a different position of the XY axis plane.

7. An optical adjustment mechanism according to claim 5, characterized in that: The first adjusting member is an adjusting thread pair or a differential head.

8. An optical adjustment mechanism according to claim 5, characterized in that: The mounting platform is provided with a second boss, the second boss is located at a side of the first mounting seat away from the first adjusting member, and the first elastic member is supported between the second boss and the first mounting seat.

9. An optical adjustment mechanism according to claim 8, characterized in that: The second boss is provided with a first positioning hole, and the first mounting seat is provided with a second positioning hole; The first adjustment component also includes a positioning shaft, which is arranged in the first positioning hole and the second positioning hole, and the first elastic member is sleeved on the positioning shaft, wherein the diameter of the positioning shaft is smaller than the inner diameter of the first positioning hole and / or the inner diameter of the second positioning hole.

10. The optical adjustment mechanism according to claim 1, characterized in that: The optical adjustment mechanism also includes a second adjustment component, which is configured to adjust the position of the second mounting seat along the Z axis.

11. An optical adjustment mechanism according to claim 10, characterized in that: The second adjustment component comprises: A second adjusting member is disposed on one of the mounting platform and the second mounting seat, a driving end of the second adjusting member abuts against the other, and the second adjusting member is configured to adjust the position of the second mounting seat along the Z axis; A second elastic member, wherein the second elastic member is connected to the mounting platform and the second mounting seat, and is used to keep the second adjusting member in contact with the second mounting seat or the mounting platform.

12. An optical adjustment mechanism according to claim 11, characterized in that: The second adjustment assembly includes at least three second adjustment members, and on the XY axis plane, at least three second adjustment members are not arranged in a straight line.

13. The optical adjustment mechanism according to claim 11, characterized in that: The second adjusting member is an adjusting thread pair or a differential head.

14. An auxiliary device, characterized in that: include: The optical adjustment mechanism according to any one of claims 1 to 13, wherein the second mounting seat is provided with one or more; A knife edge is arranged on the first mounting seat, and the knife edge is used to measure the size of light spots of different wavelengths in the XY axis direction; A sample, each of the second mounting seats is provided with the sample, and the sample is used to calibrate the optical path of the optical device.

15. An auxiliary device according to claim 14, characterized in that: The edge of the blade has an X-axis measuring edge and a Y-axis measuring edge that are perpendicular to each other; two second mounting seats are provided, one second mounting seat is located on one side of the X-axis measuring edge, and the other second mounting seat is located on one side of the Y-axis measuring edge.

16. An optical device, characterized in that: An auxiliary device comprising any one of claims 14 to 15.

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