一种分光棱镜的新型分光薄膜及其制造方法

By employing an alternating metal-dielectric film structure in the beam splitter and combining it with an optimization algorithm to design the film thickness, the problems of complex dielectric film preparation and low metal film spectral efficiency are solved, achieving simplified preparation and high-efficiency spectral splitting.

CN119738903BActive Publication Date: 2026-07-17SHANGHAI MODERN ADVANCED ULTRA PRECISION MFG CENT

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI MODERN ADVANCED ULTRA PRECISION MFG CENT
Filing Date
2024-11-13
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

In the existing technology, the preparation of dielectric beam splitting films is complex and the changes in surface shape are difficult to control, while metal beam splitting films have low beam splitting efficiency and cannot meet the requirements of high-precision optical systems.

Method used

A novel spectral thin film was fabricated by employing an alternating structure of metal and high-refractive-index dielectric layers, combined with the transfer matrix method and needle-type optimization algorithm to design the film thickness. The film consists of an outer low-refractive-index dielectric antireflection film and a middle layer of alternating metal and high-refractive-index dielectric layers.

Benefits of technology

This simplifies the preparation process, improves the feasibility of preparing spectroscopic thin films and their spectroscopic efficiency, and meets the requirements of high-precision optical systems.

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Abstract

本发明公开了一种分光棱镜的新型分光薄膜及其制造方法。一种分光棱镜的新型分光薄膜,包括上下设置的外层膜以及中层膜;所述中层膜包括交替设置的金属膜以及高折射率介质膜层;所述中层膜用于设置在基板与所述外层膜之间;所述中层膜和基板接触的膜层是所述高折射率介质膜层;所述外层膜为单层低折射率介质减反射膜。所述新型分束薄膜对波长415‑615nm范围内的可见光透过率在80%以上,对波长940‑1500nm范围内的近红外光,其透过率小于20%。
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