Chip high-speed appearance defect detection device and detection method

By designing a chip high-speed appearance defect detection device, using the material tray flow module and detection mechanism to realize batch detection of the front and back sides of the chip, the problems of few inspection items and insufficient speed of existing equipment are solved, the detection efficiency and accuracy are improved, and the requirements of high-performance computing are met.

CN119747242AInactive Publication Date: 2025-04-04PENGCHENG INTELLIGENT EQUIPMENT CO LTD
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Patent Information

Application Number
CN202510026901.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-01-08
Publication Date
2025-04-04
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

Existing chip defect detection equipment has few chip defect detection items, which are limited to single-sided detection of chips, and the detection speed and accuracy are insufficient, making it difficult to meet the needs of high-performance computing, artificial intelligence and data centers.

Method used

A chip high-speed appearance defect detection device is designed, using a material tray flow module and a detection mechanism, including 2D and 3D defect detection modules, and batch detection of the front and back sides of the chip is realized through the material tray flip transfer mechanism, and sorting is performed according to the detection results through the chip sorting mechanism.

Benefits of technology

It realizes the efficiency and accuracy of defect detection on the front and back sides of the chip, improves the detection efficiency, avoids damage caused by chip drop, reduces the equipment area, and meets the needs of large-scale chip detection.

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Abstract

The invention discloses a high-speed chip appearance defect detection device and method, and the detection device comprises a charging tray runner module which is used for driving a charging tray to move and flow in the detection device, and a detection mechanism which is arranged at one side of a runner in the charging tray conveying direction of the charging tray runner module, the detection mechanism comprises a 2D defect detection module and a 3D defect detection module, and the charging tray runner module comprises a plurality of conveying runners arranged side by side; the end part of the conveying flow channel is provided with a material tray overturning and transferring mechanism for transferring the material tray between the flow channels and a chip sorting mechanism for sorting and feeding the defective chips detected in the material tray, the front and back defects of the chips can be detected in batches through overall overturning of the material tray, the detection efficiency of the chips is improved, and the detection efficiency of the chips is improved. And meanwhile, the chip is positioned and supported by the charging tray in the detection process, so that the risk of damage to the chip caused by falling of the chip in the existing chip suction detection mode can be avoided.
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