Multi-mode composite ultrasonic cleaning device and working method thereof

Abstract

The application discloses a multi-mode composite ultrasonic cleaning device and a working method thereof, which comprises a cleaning bin, a traveling wave piezoelectric stator base, a standing wave piezoelectric driving module, a first traveling wave piezoelectric driving module and a second traveling wave piezoelectric driving module. The traveling wave piezoelectric stator base is located at the bottom of the cleaning bin or is sleeved on the side wall of the cleaning bin, and the first traveling wave piezoelectric driving module and the second traveling wave piezoelectric driving module are located at the bottom or the outer surface of the traveling wave piezoelectric stator base along the circumference. The standing wave piezoelectric driving module is installed at the center position of the bottom of the cleaning bin. By controlling the input electric signal of the piezoelectric driving module, the traveling wave piezoelectric stator base generates the traveling wave vibration along the circular ring direction, so that the acoustic radiation force generated by the vibration is transmitted to the cavity of the cleaned element, the liquid generates the rotating motion and the ultrasonic vibration along the circular ring direction, and the purpose of the traveling wave, the standing wave and the liquid self-rotation composite cleaning is achieved. The application has high reliability, high cleaning efficiency, variable vibration mode, controllable frequency and good universality.

Description

Technical Field

[0001] This invention belongs to the field of piezoelectric drive technology, specifically relating to a multi-mode composite ultrasonic cleaning device and its working method. Background Technology

[0002] With the rapid development of the biomedical field, the requirements for medical device cleaning equipment are also gradually increasing. Especially in the manufacturing and maintenance of precision components, achieving efficient and precise cleaning has become a key technical challenge. Traditional cleaning methods, such as chemical cleaning and mechanical friction, while effective, often suffer from uneven cleaning, surface damage, and low efficiency.

[0003] Ultrasonic cleaning equipment is an ultra-precision cleaning device based on piezoelectric effect and ultrasonic vibration. Due to its characteristics of no surface damage and high cleaning rate, it has extremely wide applications in the cleaning of high-end biological experimental instruments and medical equipment, especially in the production of electronic components.

[0004] Existing ultrasonic cleaning equipment mainly relies on a single vibration mode, such as standing wave vibration, which is insufficient to meet the needs of multi-directional and multi-mode cleaning. Especially in the cleaning of complex-shaped biomedical devices and precision electronic components, achieving more efficient and comprehensive cleaning remains a technical challenge. Summary of the Invention

[0005] To address the aforementioned problems, this invention provides a multi-mode composite ultrasonic cleaning device and its operating method. This invention features high reliability, high cleaning efficiency, multiple vibration modes, controllable frequency, good versatility, ease of promotion, and good economic benefits.

[0006] This invention is achieved through the following technical solution: This invention provides a multi-mode composite ultrasonic cleaning device, including a cleaning chamber, a traveling wave piezoelectric stator substrate, a standing wave piezoelectric drive module, and a first traveling wave piezoelectric drive module and a second traveling wave piezoelectric drive module having the same structure and arranged alternately. The traveling wave piezoelectric stator substrate is located at the bottom of the cleaning chamber or sleeved on the side wall of the cleaning chamber, and the first traveling wave piezoelectric drive module and the second traveling wave piezoelectric drive module are located at the bottom or outer surface of the traveling wave piezoelectric stator substrate along the circumference. The standing wave piezoelectric drive module is installed at the center of the bottom of the cleaning chamber. The standing wave piezoelectric drive module consists of an amplitude transformer, piezoelectric ceramic plates, electrode plates, a rear end cover, and pre-tightening bolts. Several piezoelectric ceramic plates are fitted onto the amplitude transformer, and the electrode plates are respectively arranged on both sides of the piezoelectric ceramic plates. The rear end cover is fitted onto the tail of the amplitude transformer and is tightened by the pre-tightening bolts.

[0007] Furthermore, the number of the first traveling wave piezoelectric drive module and the second traveling wave piezoelectric drive module is the same, and their specific number is the same as the order of the bending vibration mode of the selected traveling wave piezoelectric stator substrate. The distance between the first traveling wave piezoelectric drive module and the second traveling wave piezoelectric drive module is the distance of π / 2 spatial phase difference of the selected bending vibration mode.

[0008] Furthermore, when the traveling wave piezoelectric stator substrate is located at the bottom of the cleaning chamber, the first traveling wave piezoelectric drive module, the second traveling wave piezoelectric drive module, and the standing wave piezoelectric drive module have the same structure. The first traveling wave piezoelectric drive module and the second traveling wave piezoelectric drive module are alternately arranged along the circumference at the bottom of the traveling wave piezoelectric stator substrate. The lower surface of the traveling wave piezoelectric stator substrate is connected to the front end of the amplitude transformer of the first traveling wave piezoelectric drive module and the second traveling wave piezoelectric drive module through studs. Threaded holes for threaded connection are respectively provided at the connection between the traveling wave piezoelectric stator substrate and the front end of the amplitude transformer.

[0009] Furthermore, the number of piezoelectric ceramic sheets in the first traveling wave piezoelectric drive module and the second traveling wave piezoelectric drive module is an even number; the polarization directions of two adjacent piezoelectric ceramic sheets are placed in opposite directions to ensure that the electrodes on their connection surfaces are the same; the overall polarization directions of two adjacent sets of piezoelectric drive modules are opposite.

[0010] Furthermore, when the traveling wave piezoelectric stator substrate is located on the side wall of the cleaning chamber, the circumferential shell of the cleaning chamber is fixedly connected to the inner surface of the traveling wave piezoelectric stator substrate, and the outer surface of the traveling wave piezoelectric stator substrate is connected to the piezoelectric ceramics of the first traveling wave piezoelectric drive module and the second traveling wave piezoelectric drive module by adhesive.

[0011] Furthermore, the shape of the traveling wave piezoelectric stator substrate is the same as that of the cleaning chamber. When the traveling wave piezoelectric stator substrate is circular, the polarization directions of the piezoelectric units in the first traveling wave piezoelectric drive module are arranged alternately in positive and negative order, and the polarization directions of the piezoelectric units in the second traveling wave piezoelectric drive module are arranged alternately in positive and negative order.

[0012] Furthermore, when the traveling wave piezoelectric stator substrate is square, the polarization directions of the piezoelectric units in the first traveling wave piezoelectric drive module are arranged alternately in a forward and reverse order, and the polarization directions of the piezoelectric units in the second traveling wave piezoelectric drive module are arranged in the same order.

[0013] This invention also provides a method for operating a multi-mode composite ultrasonic cleaning device. Depending on the needs, a traveling wave piezoelectric stator substrate and first and second traveling wave piezoelectric drive modules can be used to generate traveling wave vibrations in the rotational direction within the cleaning chamber, thereby driving the liquid inside the cleaning chamber to generate rotational motion and traveling wave vibrations; or a standing wave piezoelectric drive module can be used to generate longitudinal standing wave vibrations at the bottom of the cleaning chamber; or standing wave and traveling wave piezoelectric drive modules can be used simultaneously, utilizing the water flow rotation and water area traveling wave sound field generated by the traveling wave sound field, and the water area standing wave sound field generated by the standing wave sound field, allowing the traveling wave sound field, rotation, and standing wave sound field to perform composite operations, simultaneously cleaning components in the water area.

[0014] Furthermore, the traveling wave drive includes the following process: S1. Inject liquid into the top cleaning chamber and place the component to be cleaned; S2. Apply a first simple harmonic signal with the resonant frequency of the circular ring bending vibration of the traveling wave piezoelectric stator substrate to the positive electrode piezoelectric ceramic in the first traveling wave piezoelectric drive module; apply a second simple harmonic signal with the same frequency, voltage, and time phase difference π / 2 as the first simple harmonic signal to the positive electrode piezoelectric ceramic in the second traveling wave piezoelectric drive module. The application of S3, the first and second simple harmonic signals will cause two bending vibration modes of the same order to be generated on the upper surface of the traveling wave piezoelectric stator substrate. After coupling, bending vibration traveling wave rotation modes of the same order can be formed, thereby generating a traveling wave sound field in the water. The traveling wave sound field can be used to drive the water flow to rotate, and the traveling wave sound field can be used to clean the components in the water. Its standing wave drive includes the following process: A simple harmonic signal of the desired longitudinal or flexural resonance frequency is applied to the piezoelectric ceramic of the positive electrode in the standing wave piezoelectric drive module to generate the required longitudinal or flexural vibration, thereby generating a longitudinal standing wave sound field in the water. The standing wave sound field in the water can be used to clean the components in the water.

[0015] Furthermore, the aforementioned traveling wave piezoelectric drive module can simultaneously apply the third harmonic signal of the circular ring resonant frequency of the traveling wave piezoelectric stator substrate. All traveling wave piezoelectric stator drive modules have the same excitation signal frequency, voltage, and phase difference, thereby exciting a certain standing wave mode of the traveling wave piezoelectric stator. When the same third harmonic signal is applied to the standing wave piezoelectric drive module, the required standing wave vibration can be formed under the excitation of the same signal in all piezoelectric drive modules, thereby generating a stronger standing wave sound field in the water. The standing wave sound field in the water is used to clean the components.

[0016] The beneficial effects of this invention are as follows: 1. By setting up a traveling wave piezoelectric drive module, the present invention can realize non-contact water rotation and traveling wave sound field under the effect of the traveling wave vibration generated by it, realize multi-directional rotating cleaning operation, and when the multi-layer traveling wave piezoelectric stator substrate is located on the side wall of the cleaning chamber, it can generate uniform traveling wave vibration in the height direction of the cleaning chamber, thereby improving cleaning efficiency. 2. Because the present invention adopts an integrated design of traveling wave and standing wave piezoelectric drive modules, it can realize the combined effect of traveling wave, water rotation and standing wave, thereby further improving the cleaning rate and cleaning efficiency of the components; 3. The present invention is equipped with multiple sets of independent piezoelectric drive modules, which can enable the device to achieve standing wave excitation with a larger sound field at the same time, thereby improving the efficiency of standing wave cleaning. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of Embodiment 1 of the present invention; Figure 2 This is a bottom view of Embodiment 1 of the present invention; Figure 3 This is a schematic diagram of the piezoelectric drive module structure according to Embodiment 1 of the present invention; Figure 4 This is a schematic diagram of the annular traveling wave piezoelectric stator substrate of Embodiment 1 of the present invention; Figure 5 This is a schematic diagram of the cleaning chamber in Embodiment 1 of the present invention; Figure 6 a, 6b, and 6c are schematic diagrams of the polarization direction of the positive polarization piezoelectric unit, the anti polarization piezoelectric unit, and the piezoelectric ceramic group of the traveling wave piezoelectric drive module in Embodiment 1 of the present invention, respectively. Figure 7 This is a schematic diagram of the overall structure of Embodiment 2 of the present invention; Figure 8 This is a bottom view of Embodiment 2 of the present invention; Figure 9 This is a schematic diagram of the piezoelectric ceramic polarization direction of the first traveling wave piezoelectric drive module in Embodiment 2 of the present invention; Figure 10 This is a schematic diagram of the piezoelectric ceramic polarization direction of the second traveling wave piezoelectric drive module in Embodiment 2 of the present invention; Figure 11 This is a schematic diagram of the annular traveling wave piezoelectric stator substrate of Embodiment 2 of the present invention; Figure 12 This is a schematic diagram of the cleaning chamber structure in Embodiment 2 of the present invention; Figure 13 This is a schematic diagram of the standing wave piezoelectric drive module of Embodiment 2 of the present invention; Figure 14 This is the asymmetric vibration mode along the side length of the quadrilateral piezoelectric stator in Embodiment 2 of the present invention; Figure 15 This is the symmetrical vibration mode along the side length of the quadrilateral piezoelectric stator in Embodiment 2 of the present invention; Reference numerals: 1-Cleaning chamber, 2-Traveling wave piezoelectric stator substrate, 3-Amplitude rod, 4-Piezoelectric ceramic sheet, 5-Electrode sheet, 6-Rear end cover, 7-Preload bolt, 8-First traveling wave piezoelectric drive module, 9-Second traveling wave piezoelectric drive module, 10-Standing wave piezoelectric drive module. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

[0019] Example 1: like Figure 1 , Figure 2 As shown, a multi-mode composite ultrasonic cleaning device includes a cleaning chamber 1, a traveling wave piezoelectric stator substrate 2, a first traveling wave piezoelectric drive module 8, a second traveling wave piezoelectric drive module 9, and a standing wave piezoelectric drive module 10. The first and second traveling wave piezoelectric drive modules are disposed on the traveling wave piezoelectric stator substrate 2 at the bottom of the cleaning chamber 1, and are used to excite traveling wave vibrations in the piezoelectric stator substrate. The standing wave piezoelectric drive module 10 is disposed at the center of the bottom of the cleaning chamber 1, and is used to generate the standing wave vibrations required for cleaning. By controlling the input electrical signal of the piezoelectric drive module, the traveling wave piezoelectric stator substrate 2 generates traveling wave vibrations along the annular direction, thereby transmitting the acoustic radiation force generated by the vibration to the liquid in the cleaning chamber 1, causing the liquid to generate rotational motion and ultrasonic vibration along the annular direction, thereby achieving the purpose of composite cleaning by traveling waves, standing waves, and liquid spin.

[0020] like Figure 5 As shown, the cleaning chamber 1 in this embodiment is a cylindrical hollow groove structure, or it can be a square structure, etc., which is used to hold the cleaning liquid; the bottom surface of the cleaning chamber 1 is fixedly connected to the upper surface of the traveling wave piezoelectric stator substrate 2, and the connection method can be epoxy resin adhesive bonding or bolt connection. like Figure 4 As shown, the traveling wave piezoelectric stator base 2 is annular, and its lower surface is connected to the amplitude rods of the first traveling wave piezoelectric drive module 8 and the second traveling wave piezoelectric drive module 9 through studs; threaded holes for threaded connection are respectively provided at the connection points of the traveling wave piezoelectric stator base 2 and the front end of the amplitude rod. The traveling wave piezoelectric stator substrate 2 is not limited to one; multiple annular traveling wave piezoelectric stator substrates of different sizes can be installed on the same surface according to the size of the cleaning chamber, and each can be equipped with its own traveling wave piezoelectric drive module. The first traveling wave piezoelectric drive module 8, the second traveling wave piezoelectric drive module 9, and the standing wave piezoelectric drive module 10 have the same structure; the standing wave piezoelectric drive module 10 is vertically installed at the center of the bottom of the cleaning chamber and can be connected by adhesive or threaded holes. like Figure 3 As shown, the piezoelectric drive module consists of an amplitude transformer 3, a piezoelectric ceramic plate 4, an electrode plate 5, a rear end cover 6, and a pre-tightening bolt 7; the installation sequence is amplitude transformer 3—electrode plate 5—ceramic plate 4—electrode plate 5—…—electrode plate 5—rear end cover 6—pre-tightening bolt 7; after all installations are completed, the pre-tightening bolt 7 should be pre-tightened to ensure that the piezoelectric ceramic plate 4 is subjected to a certain pre-pressure. The number of ceramic plates in the piezoelectric drive module is not limited to four and can be selected according to the actual power, but it should be an even number; the electrode plates 5 are respectively arranged on both sides of the piezoelectric ceramic plate 4; the polarization directions of two adjacent ceramic plates should be opposite to ensure that the electrodes on their connection surfaces are the same; the overall polarization directions of two adjacent piezoelectric drive modules should be opposite. The number of the first and second piezoelectric drive modules is the same, and the number of each type is not limited to four. The specific number is the same as the order of the selected bending vibration mode. The first and second piezoelectric drive modules are arranged alternately, and the distance between the two types of piezoelectric drive modules is the distance of π / 2 spatial phase difference of the selected bending vibration mode.

[0021] The working method of a multi-mode composite ultrasonic cleaning device is as follows: A) The traveling wave piezoelectric stator substrate 2 and the first and second traveling wave piezoelectric drive modules can be used to generate traveling wave vibrations in the rotational direction at the bottom of the cleaning chamber, thereby driving the liquid in the cleaning chamber 1 to generate rotational motion and traveling wave vibrations. The traveling wave drive includes the following process: Inject liquid into the top cleaning chamber 1 and place the component to be cleaned therein; A first simple harmonic signal with the resonant frequency of the circular ring bending vibration of the traveling wave piezoelectric stator substrate is applied to the positive electrode piezoelectric ceramic in the first traveling wave piezoelectric drive module 8; a second simple harmonic signal with the same frequency, voltage, and time phase difference of π / 2 as the first simple harmonic signal is applied to the positive electrode piezoelectric ceramic in the second traveling wave piezoelectric drive module 9. The application of the first and second harmonic signals will cause two bending vibration modes of the same order to be generated on the upper surface of the traveling wave piezoelectric stator substrate 2. After coupling, bending vibration traveling wave rotation modes of the same order can be formed, thereby generating a traveling wave sound field in the water. The traveling wave sound field can be used to drive the water flow to rotate, and the traveling wave sound field can be used to clean the components in the water. B) The standing wave piezoelectric drive module 10 can be used to generate longitudinal standing wave vibration at the bottom of the cleaning chamber. The standing wave drive includes the following process: A simple harmonic signal of the longitudinal resonance frequency is applied to the positive electrode piezoelectric ceramic in the standing wave piezoelectric drive module 10 to make it form the required longitudinal vibration, thereby generating a longitudinal standing wave sound field in the water. The standing wave sound field in the water can be used to clean the components in the water. C) The above-mentioned standing wave and traveling wave piezoelectric drive modules can be used simultaneously, utilizing the water flow rotation and water area traveling wave sound field generated by the traveling wave sound field, and the water area standing wave sound field generated by the standing wave sound field; the traveling wave sound field, rotation and standing wave sound field can be combined to clean the components in the water area at the same time.

[0022] D) The aforementioned traveling wave piezoelectric drive module can simultaneously apply the third simple harmonic signal of the circular ring bending resonance frequency of the traveling wave piezoelectric stator substrate. All traveling wave piezoelectric stator drive modules have the same excitation signal frequency, voltage, and phase difference, thereby exciting a certain standing wave mode of the traveling wave piezoelectric stator. When the same third harmonic signal is applied to all the piezoelectric drive modules, the required standing wave vibration can be formed under the excitation of the same signal, thereby generating a stronger standing wave sound field in the water. The standing wave sound field in the water is then used to clean the components.

[0023] Example 2 like Figure 7 As shown, a multi-mode composite ultrasonic cleaning device includes a cleaning chamber 1, a traveling wave piezoelectric stator substrate 2, a first traveling wave piezoelectric drive module 8, a second traveling wave piezoelectric drive module 9, and a standing wave piezoelectric drive module 10. The first and second traveling wave piezoelectric drive modules are arranged on the annular traveling wave piezoelectric stator substrate 2 in the circumferential direction of the cleaning chamber 1 to excite the traveling wave vibration of the annular traveling wave piezoelectric stator substrate. The standing wave piezoelectric drive module 10 is located at the center of the bottom of the cleaning chamber 1 to generate the standing wave vibration required for cleaning. By controlling the input electrical signal of the piezoelectric drive module, the traveling wave piezoelectric stator substrate 2 generates traveling wave vibration along the annular direction, thereby transmitting the acoustic radiation force generated by the vibration to the circumferential direction inside the cleaning chamber, causing the liquid to generate rotational motion and ultrasonic vibration along the annular direction, thereby achieving the purpose of composite cleaning of traveling waves, standing waves, and liquid spin.

[0024] like Figure 12 As shown, in this embodiment, the cleaning chamber is square, but it can also be other shapes with a circumferentially symmetrical structure, such as a cylinder, and the internal grooved chamber is used to hold the cleaning liquid; In this embodiment, the traveling wave piezoelectric stator substrate 2 is sleeved on the outer circumferential surface of the traveling wave piezoelectric stator substrate 2, and the circumferential shell of the cleaning chamber 1 is fixedly connected to the annular inner surface of the traveling wave piezoelectric stator substrate 2. The connection method can be epoxy resin adhesive bonding or bolt connection; the shape of the traveling wave piezoelectric stator substrate 2 should be the same as that of the cleaning chamber 1; the outer surface of the traveling wave piezoelectric stator substrate 2 is connected to the piezoelectric ceramics of the first traveling wave piezoelectric drive module 8 and the second traveling wave piezoelectric drive module 9 by adhesive. The traveling wave piezoelectric stator substrate 2 is not limited to one. Multiple traveling wave piezoelectric stator substrates of the same size can be installed on the circumference of the outer shell of the cleaning chamber 1 according to the height of the cleaning chamber 1, and each of them can be equipped with its own first and second traveling wave piezoelectric drive modules. The first traveling wave piezoelectric drive module and the second traveling wave piezoelectric drive module have the same structure; The piezoelectric unit in the piezoelectric drive module is not limited to piezoelectric ceramic sheets, but can also be selected from piezoelectric devices such as sandwich piezoelectric transducers and piezoelectric stacks according to power requirements. The number of the first and second piezoelectric drive modules is the same, but the number of each type is not fixed. The specific number is the same as the order of the bending vibration mode of the selected annular piezoelectric stator substrate. The total number should be n times the number of sides of the symmetrical polygon. The first and second piezoelectric drive modules are arranged alternately, and the distance between the two types of piezoelectric drive modules is the distance of π / 2 spatial phase difference of the bending vibration mode at the selected polygon side length. When a circular traveling wave piezoelectric stator matrix 2 is selected, two resonant modes with approximately the same frequency, mode shape, and orthogonal vibration direction should be selected as design references; when a circumferentially symmetrical circular piezoelectric stator matrix similar to a quadrilateral is selected, bending vibration modes that are symmetrical along the circumferential direction, symmetrical along the single side length direction, and anti-symmetrical should be selected as design references. The standing wave piezoelectric drive module 10 is installed at the center of the bottom of the cleaning chamber 1 and can be connected by adhesive or threaded holes. The standing wave piezoelectric drive module 10 can be selected from piezoelectric devices such as patch piezoelectric transducers, sandwich piezoelectric transducers, and piezoelectric stacks according to power requirements.

[0025] The working method of the multi-mode composite ultrasonic cleaning device is as follows: A) By utilizing the annular traveling wave piezoelectric stator substrate 2 and the first and second traveling wave piezoelectric drive modules, traveling wave vibrations in the circumferential direction can be generated in the cleaning shell, thereby driving the liquid in the cleaning chamber to generate rotational motion and traveling wave vibrations. The traveling wave drive includes the following process: Inject liquid into the top cleaning chamber 1 and place the component to be cleaned therein; A first simple harmonic signal with the bending resonance frequency of the ring-shaped traveling wave piezoelectric stator substrate 2 is applied to the positive electrode piezoelectric ceramic in the first traveling wave piezoelectric drive module 8; a second simple harmonic signal with the same frequency, voltage, and time phase difference π / 2 as the first simple harmonic signal is applied to the positive electrode piezoelectric ceramic in the second traveling wave piezoelectric drive module 10. The application of the first and second simple harmonic signals will cause two bending vibration modes of the same order to be generated on the inner ring surface of the ring traveling wave piezoelectric stator substrate 2. After coupling, bending vibration traveling wave rotation modes of the same order can be formed, thereby generating a traveling wave sound field in the water. The traveling wave sound field can be used to drive the water flow to rotate, and the traveling wave sound field can be used to clean the components in the water. B) The standing wave piezoelectric drive module 10 can be used to generate longitudinal standing wave vibration at the bottom of the cleaning chamber. The standing wave drive includes the following process: A simple harmonic signal of the longitudinal or flexural resonance frequency is applied to the positive electrode piezoelectric ceramic in the standing wave piezoelectric drive module 10 to generate the required longitudinal or flexural vibration, thereby generating a standing wave sound field in the water. The standing wave sound field in the water can be used to clean the components in the water. C) The above-mentioned standing wave and traveling wave piezoelectric drive modules can be used simultaneously, utilizing the water flow rotation and water area traveling wave sound field generated by the traveling wave sound field, and the water area standing wave sound field generated by the standing wave sound field; the traveling wave sound field, rotation and standing wave sound field can be combined to clean the components in the water area at the same time.

[0026] D) The aforementioned traveling wave piezoelectric drive module can simultaneously apply the third simple harmonic signal of the circular ring bending resonance frequency of the traveling wave piezoelectric stator substrate. All traveling wave piezoelectric stator drive modules have the same excitation signal frequency, voltage, and phase difference, thereby exciting a certain standing wave mode of the traveling wave piezoelectric stator. When the same third harmonic signal is applied to all the piezoelectric drive modules, the required standing wave vibration can be formed under the excitation of the same signal, thereby generating a stronger standing wave sound field in the water. The standing wave sound field in the water is then used to clean the components.

[0027] It should be noted that although the present invention has been described through the above embodiments, the present invention may have many other embodiments. Without departing from the spirit and scope of the present invention, those skilled in the art can obviously make various corresponding changes and modifications to the present invention, but all such changes and modifications should fall within the scope of protection of the appended claims and their equivalents.

Claims

1. A multi-mode composite ultrasonic cleaning device, characterized in that: It includes a cleaning chamber (1), a traveling wave piezoelectric stator substrate (2), a standing wave piezoelectric drive module (10), and a first traveling wave piezoelectric drive module (8) and a second traveling wave piezoelectric drive module (9) with the same structure and arranged alternately. The traveling wave piezoelectric stator substrate (2) is located at the bottom of the cleaning chamber (1) or sleeved on the side wall of the cleaning chamber (1), and the first traveling wave piezoelectric drive module (8) and the second traveling wave piezoelectric drive module (9) are located on the outer surface of the traveling wave piezoelectric stator substrate (2) along the circumference. The standing wave piezoelectric drive module (10) is installed at the center of the bottom of the cleaning chamber. The standing wave piezoelectric drive module (10) consists of an amplitude rod (3), piezoelectric ceramic plates (4), electrode plates (5), a rear end cover (6), and pre-tightening bolts (7). Several piezoelectric ceramic plates (4) are fitted on the amplitude rod (3), and the electrode plates (5) are respectively arranged on both sides of the piezoelectric ceramic plates (4). The rear end cover (6) is fitted on the tail of the amplitude rod (3) and tightened by the pre-tightening bolts (7). The first traveling wave piezoelectric drive module (8), the second traveling wave piezoelectric drive module (9), and the standing wave piezoelectric drive module (10) are started simultaneously. The traveling wave sound field generates water flow rotation and water area traveling wave sound field, and the standing wave sound field generates water area standing wave sound field, so that the traveling wave sound field, rotation, and standing wave sound field perform compound operation, while cleaning the components in the water area. The traveling wave drive includes the following process: S1. Inject liquid into the top cleaning chamber (1) and place the component to be cleaned; S2. Apply a first simple harmonic signal with the resonant frequency of the circular ring bending vibration of the traveling wave piezoelectric stator substrate to the positive electrode piezoelectric ceramic in the first traveling wave piezoelectric drive module (8); apply a second simple harmonic signal with the same frequency, voltage, and time phase difference π / 2 as the first simple harmonic signal to the positive electrode piezoelectric ceramic in the second traveling wave piezoelectric drive module (9); The application of S3, the first and second simple harmonic signals will cause two bending vibration modes of the same order to be generated on the upper surface of the traveling wave piezoelectric stator substrate (2). After coupling, bending vibration traveling wave rotation modes of the same order can be formed, thereby generating a traveling wave sound field in the water. The traveling wave sound field can be used to drive the water flow to rotate, and the traveling wave sound field can be used to clean the components in the water. Its standing wave drive includes the following process: A simple harmonic signal of the longitudinal or flexural resonance frequency is applied to the positive electrode piezoelectric ceramic in the standing wave piezoelectric drive module (10) to generate the required longitudinal or flexural vibration, thereby generating a longitudinal standing wave sound field in the water. The standing wave sound field in the water can be used to clean the components in the water.

2. The multi-mode composite ultrasonic cleaning device according to claim 1, characterized in that: The number of the first traveling wave piezoelectric drive module (8) and the second traveling wave piezoelectric drive module (9) is the same, and their specific number is the same as the order of the side length bending vibration mode of the selected traveling wave piezoelectric stator substrate (2). The distance between the first traveling wave piezoelectric drive module (8) and the second traveling wave piezoelectric drive module (9) is the distance of the π / 2 spatial phase difference of the selected bending vibration mode.

3. The multi-mode composite ultrasonic cleaning device according to claim 1, characterized in that: When the traveling wave piezoelectric stator substrate (2) is located at the bottom of the cleaning chamber (1), the first traveling wave piezoelectric drive module (8), the second traveling wave piezoelectric drive module (9) and the standing wave piezoelectric drive module (10) have the same structure. The first traveling wave piezoelectric drive module (8) and the second traveling wave piezoelectric drive module (9) are alternately arranged at the bottom of the traveling wave piezoelectric stator substrate (2) along the circumference. The lower surface of the traveling wave piezoelectric stator substrate (2) is connected to the front end of the amplitude rod of the first traveling wave piezoelectric drive module and the second traveling wave piezoelectric drive module through studs. The connection between the traveling wave piezoelectric stator substrate (2) and the front end of the amplitude rod (3) is provided with threaded holes for threaded connection.

4. The multi-mode composite ultrasonic cleaning device according to claim 3, characterized in that: The number of piezoelectric ceramic sheets in the first traveling wave piezoelectric drive module (8) and the second traveling wave piezoelectric drive module (9) is an even number; the polarization directions of two adjacent piezoelectric ceramic sheets are placed in opposite directions to ensure that the electrodes on their connecting surfaces are the same; the overall polarization directions of two adjacent piezoelectric drive modules are opposite.

5. The multi-mode composite ultrasonic cleaning device according to claim 1, characterized in that: When the traveling wave piezoelectric stator substrate (2) is located on the side wall of the cleaning chamber (1), the circumferential shell of the cleaning chamber (1) is fixedly connected to the inner surface of the traveling wave piezoelectric stator substrate (2), and the outer surface of the traveling wave piezoelectric stator substrate (2) is connected to the piezoelectric ceramics of the first traveling wave piezoelectric drive module (8) and the second traveling wave piezoelectric drive module (9) by adhesive.

6. The multi-mode composite ultrasonic cleaning device according to claim 5, characterized in that: The shape of the traveling wave piezoelectric stator substrate (2) is the same as that of the cleaning chamber (1). When the traveling wave piezoelectric stator substrate (2) is circular, the polarization direction of the piezoelectric ceramic sheet in the first traveling wave piezoelectric drive module (8) is arranged alternately in positive and negative order, and the polarization direction of the piezoelectric ceramic sheet in the second traveling wave piezoelectric drive module (9) is arranged alternately in positive and negative order.

7. The multi-mode composite ultrasonic cleaning device according to claim 5, characterized in that: When the traveling wave piezoelectric stator substrate (2) is square, the polarization directions of the piezoelectric ceramic sheets in the first traveling wave piezoelectric drive module (8) are arranged alternately in positive and negative order, and the polarization directions of the piezoelectric ceramic sheets in the second traveling wave piezoelectric drive module (9) are arranged in the same order.

8. The multi-mode composite ultrasonic cleaning device according to claim 1, characterized in that: The first traveling wave piezoelectric drive module (8) and the second traveling wave piezoelectric drive module (9) simultaneously apply the third simple harmonic signal of the circular ring bending resonance frequency of the traveling wave piezoelectric stator substrate (2). The excitation signals of the first traveling wave piezoelectric drive module (8) and the second traveling wave piezoelectric drive module (9) have the same frequency, the same voltage, and the same phase difference, thus exciting a certain standing wave mode of the traveling wave piezoelectric stator substrate. When the same third harmonic signal is applied to the standing wave piezoelectric drive module (10), the required standing wave vibration is formed under the excitation of the same signal in all piezoelectric drive modules.

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