Temperature control system and temperature control method

Abstract

Embodiments of the present invention provide a temperature control system and a temperature control method, which relate to the field of semiconductor temperature control technology. The temperature control system includes a first refrigeration system and a second refrigeration system. The circulation system includes a first circulation loop and a second circulation loop. By setting a first three-way valve and a second three-way valve, the first circulation loop and the second circulation loop can selectively exchange heat with the first refrigeration system or the second refrigeration system. The temperature control system can achieve a lower liquid supply temperature while flexibly switching working modes, cope with various load changes, and improve production efficiency and product quality.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor temperature control technology, and in particular to a temperature control system and a temperature control method. Background Art

[0002] In the semiconductor production process, temperature control is one of the key factors to ensure product quality. With the development of semiconductor manufacturing technology, the requirements for temperature stability are getting higher and higher, especially in some advanced process technologies, which require very low temperature control.

[0003] While existing temperature control systems meet multiple temperature requirements, they cannot respond quickly to changes at the load end, affecting overall production efficiency and product quality. Summary of the invention

[0004] The purpose of the present invention includes providing a temperature control system and a temperature control method, which can achieve a lower liquid supply temperature while flexibly switching working modes, cope with diverse load changes, and improve production efficiency and product quality.

[0005] The embodiments of the present invention can be implemented as follows:

[0006] In a first aspect, the present invention provides a temperature control system, comprising:

[0007] a first refrigeration system, the first refrigeration system comprising a first compressor, a first condenser, a first liquid reservoir, a first expansion valve, a second expansion valve, a first evaporator and a first heat exchanger, the first compressor, the first condenser and the first liquid reservoir are connected in sequence, the outlet of the first liquid reservoir is respectively connected to the first side inlet of the first evaporator and the first side inlet of the first heat exchanger, the first side outlet of the first evaporator and the first side outlet of the first heat exchanger are both connected to the inlet of the first compressor, the first expansion valve is arranged between the first liquid reservoir and the first evaporator, and the second expansion valve is arranged between the first liquid reservoir and the first heat exchanger;

[0008] a second refrigeration system, the second refrigeration system comprising a second compressor, a second condenser, a second liquid reservoir, a third expansion valve and a second evaporator, the second compressor, the second condenser and the second liquid reservoir are connected in sequence, a first side outlet of the second condenser is connected to a second side inlet of the first heat exchanger, a second side outlet of the first heat exchanger is connected to an inlet of the second liquid reservoir, an outlet of the second liquid reservoir is connected to an inlet of the second evaporator, an outlet of the second evaporator is connected to an inlet of the second compressor, and the third expansion valve is provided between the second liquid reservoir and the second evaporator;

[0009] A circulation system, the circulation system comprising a first circulation loop, a second circulation loop, a first three-way valve and a second three-way valve;

[0010] The first circulation loop includes a first expansion tank, a first circulation pump, a first heater and a first load connected in sequence, the second circulation loop includes a second expansion tank, a second circulation pump, a second heater and a second load connected in sequence, the first three-way valve includes a first valve port, a second valve port and a third valve port, the second three-way valve includes a fourth valve port, a fifth valve port and a sixth valve port, the outlet of the first load is connected to the first valve port, the third valve port is connected to the second side inlet of the first evaporator, the second side outlet of the first evaporator is connected to the inlet of the first expansion tank, the second valve port is connected to the second side inlet of the second evaporator, the second side outlet of the second evaporator is connected to the fourth valve port, the fifth valve port is connected to the inlet of the first expansion tank; the outlet of the second load is connected to the second side inlet of the second evaporator, and the sixth valve port is connected to the inlet of the second expansion tank.

[0011] In a second aspect, the present invention provides a temperature control method, which is applied to the temperature control system described in the above embodiment, and the method comprises:

[0012] Acquire a third temperature setting value of the third temperature sensor as SV0;

[0013] Acquire a third temperature measurement value PV0 of the third temperature sensor in real time;

[0014] Calculating a difference X between the third temperature setting value SV0 and the third temperature measurement value PV0;

[0015] If a≤X<a+A, the opening of the first expansion valve increases by M%;

[0016] If a+A≤X<a+B, the opening of the first expansion valve increases by N%;

[0017] If a+B≤X≤bB, the opening of the first expansion valve remains unchanged;

[0018] If bB<X≤bA, the opening of the first expansion valve is reduced by M%;

[0019] If bA<X≤b, the opening of the first expansion valve is reduced by N%;

[0020] If X<a, the opening of the first expansion valve increases by L%;

[0021] If X>b, the opening of the first expansion valve is reduced by L%; wherein a<0<A<B<b;

[0022] The method further comprises:

[0023] Acquire a fourth temperature setting value SV4 of the fourth temperature sensor;

[0024] Acquire a fourth temperature measurement value PV4 of the fourth temperature sensor in real time;

[0025] Calculating a difference U between the fourth temperature setting value SV4 and the fourth temperature measurement value PV4;

[0026] If e≤U<e+E, the opening degree of the third expansion valve increases by M%;

[0027] If e+E≤U<e+F, the opening degree of the third expansion valve increases by N%;

[0028] If e+F≤U≤fF, the opening degree of the third expansion valve remains unchanged;

[0029] If fF<U≤fE, the opening degree of the third expansion valve is reduced by M%;

[0030] If fE<U≤f, the opening degree of the third expansion valve is reduced by N%;

[0031] If U<e, the opening degree of the third expansion valve increases by L%;

[0032] If U>f, the opening degree of the third expansion valve is reduced by L%; wherein, e<0<E<F<f.

[0033] The beneficial effects of the temperature control system and method provided by the embodiments of the present invention include:

[0034] The temperature control system of the present invention is achieved by setting the refrigeration system as a first refrigeration system and a second refrigeration system. Among them, by setting the first heat exchanger in the first refrigeration system, the refrigerant in the second refrigeration system can be cooled down in turn through the second condenser and the first heat exchanger, so that the refrigerant with a lower temperature can cool the circulating liquid, thereby providing a circulating liquid with a lower temperature. By cooling the two circulating systems separately by two refrigeration systems, two liquid supply temperatures can be provided at the same time. At the same time, by setting a three-way valve in the circulating system, the two circulating loops can be switched with each other to achieve multiple refrigeration modes. The temperature control system of the present invention can achieve a lower liquid supply temperature while flexibly switching the working mode, cope with various load changes, and improve production efficiency and product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0036] Figure 1 This is a schematic diagram of the structure of the temperature control system provided in this embodiment.

[0037] Icons: 100-temperature control system; 10-refrigeration system; 101-first refrigeration system; 102-second refrigeration system; 103-first compressor; 104-first condenser; 105-first liquid storage tank; 106-first expansion valve; 107-second expansion valve; 108-first evaporator; 109-first heat exchanger; 110-second compressor; 111-second condenser; 112-third expansion valve; 113-second evaporator; 114-fourth expansion valve; 115-fifth expansion valve; 116-first temperature sensor; 117-first pressure sensor; 118-second temperature sensor; 119-second pressure sensor; 120-fifth temperature sensor; 121-third pressure sensor; 122-sixth temperature sensor; 123-fourth pressure sensor; 1 24-ninth temperature sensor; 125-tenth temperature sensor; 126-second liquid reservoir; 20-circulation system; 201-first circulation loop; 202-second circulation loop; 203-first expansion tank; 204-first circulation pump; 205-first heater; 206-third temperature sensor; 207-first load; 208-first three-way valve; 2081-first valve port; 2082-second valve port; 2083-third valve port; 209-second three-way valve; 2091-fourth valve port; 2092-fifth valve port; 2093-sixth valve port; 210-second expansion tank; 211-second circulation pump; 213-second heater; 214-fourth temperature sensor; 215-seventh temperature sensor; 216-eighth temperature sensor; 30-cooling water system. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0039] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0040] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0041] In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear to indicate an orientation or position relationship, they are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the product of the invention is usually placed when used. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0042] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.

[0043] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention may be combined with each other.

[0044] Please refer to Figure 1 The temperature control system 100 provided in the embodiment of the present invention includes a refrigeration system 10 and a circulation system 20. The refrigeration system 10 includes a first refrigeration system 101 and a second refrigeration system 102.

[0045] The first refrigeration system 101 includes a first compressor 103, a first condenser 104, a first liquid reservoir 105, a first expansion valve 106, a second expansion valve 107, a first evaporator 108 and a first heat exchanger 109. The first compressor 103, the first condenser 104 and the first liquid reservoir 105 are connected in sequence. The outlet of the first liquid reservoir 105 is connected to the first side inlet of the first evaporator 108 and the first side inlet of the first heat exchanger 109 respectively. The first side outlet of the first evaporator 108 and the first side outlet of the first heat exchanger 109 are both connected to the inlet of the first compressor 103. The first expansion valve 106 is arranged between the first liquid reservoir 105 and the first evaporator 108. The second expansion valve 107 is arranged between the first liquid reservoir 105 and the first heat exchanger 109.

[0046] Specifically, the outlet of the first compressor 103 is communicated with the first side inlet of the first condenser 104. The first side outlet of the first condenser 104 is communicated with the inlet of the first liquid reservoir 105. The outlet of the first liquid reservoir 105 is communicated with the inlet of the first expansion valve 106. The outlet of the first expansion valve 106 is communicated with the first side inlet of the first evaporator 108. The first side outlet of the first evaporator 108 is communicated with the inlet of the first compressor 103. The outlet of the first liquid reservoir 105 is also communicated with the inlet of the second expansion valve 107. The outlet of the second expansion valve 107 is communicated with the first side inlet of the first heat exchanger 109. The first side outlet of the first heat exchanger 109 is communicated with the inlet of the first compressor 103.

[0047] It can be understood that the flow path of the refrigerant in the first refrigeration system 101 is as follows: after the refrigerant is pressurized by the first compressor 103, it enters the first condenser 104 to condense into liquid, and then enters the first liquid storage tank 105 for storage. After the refrigerant comes out of the liquid storage tank, it is divided into two paths. One path passes through the first expansion valve 106 and enters the first evaporator 108 for heat exchange, and the refrigerant evaporates into gas and returns to the first compressor 103. The other path passes through the second expansion valve 107 to throttle and reduce the pressure to become a low-temperature and low-pressure liquid, and then enters the first heat exchanger 109 to evaporate and absorb heat, and the refrigerant becomes a low-temperature and low-pressure gas and enters the compressor.

[0048] In this embodiment, a first pressure sensor 117 and a first temperature sensor 116 are provided at the inlet of the first compressor 103. The first temperature sensor 116 is convenient for detecting the temperature of the refrigerant circulating in the first compressor 103. The first pressure sensor 117 can detect the pressure of the refrigerant entering the first compressor 103. According to the physical properties of the refrigerant, the temperature value corresponding to the saturated state can be checked at the pressure, and the temperature value corresponding to the saturated state can be compared with the actual measured value of the first temperature sensor 116, so as to ensure that the first compressor 103 can still work normally, thereby ensuring the accuracy of temperature control.

[0049] The second refrigeration system 102 of this embodiment includes a second compressor 110, a second condenser 111, a second liquid reservoir 126, a third expansion valve 112, and a second evaporator 113. The second compressor 110, the second condenser 111, and the second liquid reservoir 126 are connected in sequence. The first side outlet of the second condenser 111 is connected to the second side inlet of the first heat exchanger 109. The second side outlet of the first heat exchanger 109 is connected to the inlet of the second liquid reservoir 126. The outlet of the second liquid reservoir 126 is connected to the inlet of the second evaporator 113. The outlet of the second evaporator 113 is connected to the inlet of the second compressor 110. The third expansion valve 112 is arranged between the second liquid reservoir 126 and the second evaporator 113.

[0050] Specifically, the outlet of the second compressor 110 is communicated with the first side inlet of the second condenser 111. The first side outlet of the second condenser 111 is communicated with the second side inlet of the first heat exchanger 109. The second side outlet of the first heat exchanger 109 is communicated with the inlet of the second liquid reservoir 126. The outlet of the second liquid reservoir 126 is communicated with the inlet of the third expansion valve 112. The outlet of the third expansion valve 112 is communicated with the inlet of the second evaporator 113. The outlet of the second evaporator 113 is communicated with the inlet of the second compressor 110.

[0051] It can be understood that the flow path of the refrigerant in the second refrigeration system 102 is as follows: after the refrigerant is discharged from the second compressor 110, it forms a high-temperature and high-pressure refrigerant gas, enters the second condenser 111 to condense into liquid, then enters the first heat exchanger 109 to further cool down, and then enters the second liquid storage 126 for storage. The refrigerant then enters the second evaporator 113 from the liquid storage to evaporate and absorb heat, and then enters the second compressor 110 after forming a high-temperature refrigerant gas.

[0052] In this embodiment, a second pressure sensor 119 and a second temperature sensor 118 are provided at the inlet of the second compressor 110. The second temperature sensor 118 is convenient for detecting the temperature of the refrigerant circulating in the second compressor 110. The second pressure sensor 119 can detect the pressure of the refrigerant entering the second compressor 110. According to the physical properties of the refrigerant, the temperature value corresponding to the saturated state can be checked at the pressure, and the temperature value corresponding to the saturated state can be compared with the actual measurement value of the second temperature sensor 118, so as to ensure that the second compressor 110 can still work normally, thereby ensuring the accuracy of temperature control.

[0053] Furthermore, the circulation system 20 in this embodiment includes a first circulation loop 201 , a second circulation loop 202 , a first three-way valve 208 and a second three-way valve 209 .

[0054] The first circulation loop 201 includes a first expansion tank 203, a first circulation pump 204, a first heater 205, and a first load 207. The second circulation loop 202 includes a second expansion tank 210, a second circulation pump 211, a second heater 213, and a second load connected in sequence. The first three-way valve 208 includes a first valve port 2081, a second valve port 2082, and a third valve port 2083. The second three-way valve 209 includes a fourth valve port 2091, a fifth valve port 2092, and a sixth valve port 2093. The outlet of the first load 207 is communicated with the first valve port 2081. The third valve port 2083 is communicated with the second side inlet of the first evaporator 108. The second side outlet of the first evaporator 108 is communicated with the inlet of the first expansion tank 203. The second valve port 2082 is communicated with the second side inlet of the second evaporator 113. The second side outlet of the second evaporator 113 is communicated with the fourth valve port 2091. The fifth valve port 2092 is communicated with the inlet of the first expansion tank 203. The outlet of the second load is communicated with the second side inlet of the second evaporator 113. The sixth valve port 2093 is communicated with the inlet of the second expansion tank 210.

[0055] Specifically, the outlet of the first expansion tank 203 is communicated with the inlet of the first circulation pump 204. A third temperature sensor 206 is provided between the first expansion tank 203 and the first circulation pump 204. The outlet of the first circulation pump 204 is communicated with the inlet of the first heater 205. The outlet of the first heater 205 is communicated with the inlet of the first load 207. The outlet of the first load 207 is communicated with the first valve port 2081. The third valve port 2083 is communicated with the second side inlet of the first evaporator 108. The second side outlet of the first evaporator 108 is communicated with the inlet of the first expansion tank 203. The second valve port 2082 is communicated with the second side inlet of the second evaporator 113. The second side outlet of the second evaporator 113 is communicated with the fourth valve port 2091. The fifth valve port 2092 is communicated with the inlet of the first expansion tank 203.

[0056] The outlet of the second expansion tank 210 is communicated with the inlet of the second circulation pump 211. A fourth temperature sensor 214 is provided between the second expansion tank 210 and the second circulation pump 211. The outlet of the second circulation pump 211 is communicated with the inlet of the second heater 213. The outlet of the second heater 213 is communicated with the inlet of the second load. The outlet of the second load is communicated with the second side inlet of the second evaporator 113. The sixth valve port 2093 is communicated with the inlet of the second expansion tank 210.

[0057] It can be understood that by providing the first three-way valve 208 and the second three-way valve 209 in the circulation system 20 , the first refrigeration system 101 and the second refrigeration system 102 can selectively exchange heat with the first circulation loop 201 and the second circulation loop 202 .

[0058] Specifically, the circulating liquid flow path in this embodiment can be divided into three schemes:

[0059] The first scheme: the first valve port 2081 and the second valve port 2082 of the first three-way valve 208 are connected, and the fourth valve port 2091 and the sixth valve port 2093 of the second three-way valve 209 are connected. The first circulation loop 201 and the second circulation loop 202 are independently temperature controlled. In the first circulation loop 201, the circulating liquid enters from the first load 207 through the first valve port 2081 of the first three-way valve 208, returns to the first evaporator 108 from the second valve port 2082 to cool to the target temperature, and then enters the first expansion tank 203 and passes through the first circulation pump 204 and the first heater 205 in sequence to reach the first load 207; in the second circulation loop 202, the circulating liquid is divided into two paths after flowing out from the second load, one path directly returns to the second evaporator 113 to cool, and then enters through the fourth valve port 2091 of the second three-way valve 209, and is discharged from the sixth valve port 2093 to the second expansion tank 210, and then passes through the second circulation pump 211 and the second heater 213 in sequence to reach the second load.

[0060] Specifically, in this embodiment, the first solution is that the first circulation loop 201 and the second circulation loop 202 are individually temperature controlled. The first circulation loop 201 corresponds to the first refrigeration system 101, and the temperature of the circulating fluid is -20°C to 90°C. The second circulation loop 202 corresponds to the second refrigeration system 102, and the temperature of the circulating fluid is -60°C to 20°C.

[0061] Second solution: In the first circulation loop 201, the circulating liquid enters from the first load 207 through the first valve port 2081 of the first three-way valve 208, is discharged from the third valve port 2083 and enters the first evaporator 108 for cooling, and is divided into two paths. One path passes through the first expansion tank 203, the first circulation pump 204, and the first heater 205 in sequence to reach the first load 207, and the other path enters through the fifth valve port 2092 of the second three-way valve 209, is discharged from the sixth valve port 2093, passes through the second expansion tank 210, the second circulation pump 211, and the second heater 213 in sequence to reach the second load end, enters through the second valve port 2082 of the first three-way valve 208 after heat exchange, is discharged from the third valve port 2083, and returns to the first evaporator 108 for cooling.

[0062] It should be noted that, in the above second solution, the first three-way valve 208 initially connects the first valve port 2081 and the third valve port 2083 , and then connects the second valve port 2082 and the third valve port 2083 .

[0063] It is understandable that the second solution is that the first circulation loop 201 and the second circulation loop 202 are connected in series to exchange heat with the first refrigeration system 101. The temperature of the circulating liquid in the first circulation loop 201 and the second circulation loop 202 is -20°C to 90°C.

[0064] The third scheme: In the first circulation loop 201, the circulating liquid enters from the first load 207 through the first valve port 2081 of the first three-way valve 208, is discharged from the second valve port 2082, passes through the second evaporator 113, enters from the fourth valve port 2091 of the second three-way valve 209, and is discharged from the fifth valve port 2092 and the sixth valve port 2093. The circulating liquid is discharged from the fifth valve port 2092, passes through the first expansion valve 106, the first circulation pump 204, and the first heater 205 in sequence, enters the first load 207, enters through the first valve port 2081 of the first three-way valve 208 after heat exchange, is discharged from the second valve port 2082 and enters the second evaporator 113 for cooling; the circulating liquid is discharged from the sixth valve port 2093, passes through the second expansion valve 107, the second circulation pump 211, and the second heater 213 in sequence, reaches the second load, and enters the second evaporator 113 for cooling after heat exchange.

[0065] It is understandable that the third solution is that the second refrigeration system 102 cools the circulating fluids of the first circulation loop 201 and the second circulation loop 202. Specifically, in this embodiment, the temperatures of the circulating fluids of the first circulation loop 201 and the second circulation loop 202 are both -80°C to -20°C.

[0066] It should be noted that the present invention can also adjust the first circulation loop 201 to be a high-temperature circulation fluid or a low-temperature circulation fluid, and adjust the second circulation loop 202 to be a high-temperature circulation fluid or a low-temperature circulation fluid by adjusting the conduction direction of the first three-way valve 208 and the second three-way valve 209. The circulation path of the circulation fluid in the circulation system 20 of the present invention is not limited to the above three schemes, and other circulation paths can also be adopted.

[0067] Further, the first refrigeration system 101 further includes a fourth expansion valve 114. The outlet of the first accumulator 105 is communicated with the inlet of the first compressor 103 through the fourth expansion valve 114. The second refrigeration system 102 further includes a fifth expansion valve 115. The outlet of the second accumulator 126 is communicated with the inlet of the second compressor 110 through the fifth expansion valve 115.

[0068] It can be understood that the outlet of the first liquid reservoir 105 can be directly connected to the first compressor 103. In this embodiment, the refrigerant enters the first compressor 103 through the throttling and pressure reduction through the fourth expansion valve 114 for bar head spray cooling, and then enters the first compressor 103 suction port together with the return air, and is discharged after being compressed by the first compressor 103. The outlet of the second liquid reservoir 126 can be directly connected to the second compressor 110. In this embodiment, the refrigerant enters the second compressor 110 through the throttling and pressure reduction through the fifth expansion valve 115 for bar head spray cooling, and then enters the second compressor 110 suction port together with the return air, and is discharged after being compressed by the second compressor 110.

[0069] Further, the outlet of the first compressor 103 is also provided with a fifth temperature sensor 120 and a third pressure sensor 121. The outlet of the second compressor 110 is also provided with a sixth temperature sensor 122 and a fourth pressure sensor 123. It can be understood that the fifth temperature sensor 120 is used to detect the temperature of the refrigerant discharged from the first compressor 103. The third pressure sensor 121 is used to detect the pressure of the refrigerant discharged from the first compressor 103, thereby detecting the working state of the first compressor 103. The sixth temperature sensor 122 is used to detect the temperature of the refrigerant discharged from the second compressor 110. The fourth pressure sensor 123 is used to detect the pressure of the refrigerant discharged from the second compressor 110, thereby detecting the working state of the second compressor 110.

[0070] Furthermore, the temperature control system 100 also includes a cooling water system 30. The second side of the first condenser 104 and the second side of the second condenser 111 are respectively connected to the cooling water system 30. A solenoid valve is provided between the second side of the second condenser 111 and the cooling water system 30. It can be understood that the cooling water system 30 is used to provide cooling water to facilitate the condensation of the high-temperature and high-pressure refrigerant gas discharged from the first compressor 103 or the second compressor 110 into liquid.

[0071] In this embodiment, a seventh temperature sensor 215 is provided between the first heater 205 and the first load 207. An eighth temperature sensor 216 is provided between the second heater 213 and the second load. It is understood that the seventh temperature sensor 215 detects the actual temperature of the circulating fluid reaching the first load 207, and by comparing it with the preset temperature value of the first load 207, it is convenient to adjust the power of the first heater 205 so that the temperature of the circulating fluid reaching the first load 207 approaches the preset temperature value of the first load 207. The eighth temperature sensor 216 detects the actual temperature of the circulating fluid reaching the second load, and by comparing it with the preset temperature value of the second load, it is convenient to adjust the power of the second heater 213 so that the temperature of the circulating fluid reaching the second load approaches the preset temperature value of the second load.

[0072] Further, a ninth temperature sensor 124 is provided at the outlet of the first liquid reservoir 105. A tenth temperature sensor 125 is provided at the outlet of the second liquid reservoir 126. The ninth temperature sensor is used to detect the temperature of the refrigerant discharged from the first liquid reservoir 105. The tenth temperature sensor 125 is used to detect the temperature of the refrigerant discharged from the second liquid reservoir 126.

[0073] In this embodiment, temperature monitoring is performed at multiple locations in the temperature control system 100 to adjust the temperature and improve the temperature control accuracy. In addition to the above-mentioned temperature sensor installation locations, one or more temperature sensors or pressure sensors may also be installed at other locations, depending on actual needs and are not limited here.

[0074] This embodiment also provides a temperature control method, which is applied to the temperature control system 100 of the above embodiment. Specifically, the temperature control method includes:

[0075] Acquire the third temperature setting value of the third temperature sensor 206 as SV0;

[0076] The value range of SV0 can be -80°C to +200°C. The specific value of SV0 is determined according to actual processing requirements and is not limited here.

[0077] Acquire the third temperature measurement value PV0 of the third temperature sensor 206 in real time;

[0078] PV0 is a dynamically changing value, which changes with time and the first load 207 .

[0079] Calculate the difference X between the third temperature setting value SV0 and the third temperature measurement value PV0, that is, X=SV0-PV0;

[0080] If a≤X<a+A, the opening of the first expansion valve 106 increases by M%;

[0081] If a+A≤X<a+B, the opening of the first expansion valve 106 increases by N%;

[0082] If a+B≤X≤bB, the opening degree of the first expansion valve 106 remains unchanged;

[0083] If bB<X≤bA, the opening degree of the first expansion valve 106 is reduced by N%;

[0084] If bA<X≤b, the opening degree of the first expansion valve 106 is reduced by M%;

[0085] If X<a, the opening of the first expansion valve 106 increases by L%;

[0086] If X>b, the opening degree of the first expansion valve 106 is reduced by L%, wherein a<0<A<B<b.

[0087] Specifically, in this embodiment, a=-1, b=1, A=0.5, B=0.9, M=2, N=1, L=5, namely:

[0088] If -1≤X<-0.5, the opening of the first expansion valve 106 increases by 2%;

[0089] If -0.5≤X<-0.1, the opening of the first expansion valve 106 increases by 1%;

[0090] If -0.1≤X≤0.1, the opening degree of the first expansion valve 106 remains unchanged;

[0091] If 0.1<X<0.5, the opening degree of the first expansion valve 106 is reduced by 1%;

[0092] If 0.5<X≤1, the opening of the first expansion valve 106 is reduced by 2%;

[0093] If X<-1, the opening of the first expansion valve 106 increases by 5%;

[0094] If X>1, the opening degree of the first expansion valve 106 is reduced by 5%.

[0095] Through step-by-step adjustment, we can save energy and reduce consumption, and also improve the accuracy of temperature control.

[0096] It can be understood that X is the difference between the set temperature value and the measured temperature value. When X is greater than the preset range, for example, when X is greater than 0.1, it means that the actual temperature value is low. At this time, by adjusting the opening of the first expansion valve 106, the opening of the first expansion valve 106 is reduced, the cooling capacity is reduced, and the measured temperature value is increased, so that the value of X is reduced; when X is less than 0.1, it means that the actual temperature value is high. At this time, by adjusting the opening of the first expansion valve 106, the opening of the first expansion valve 106 is increased, so that the measured temperature value is reduced, so that the value of X is increased, and finally the value of X is stabilized between ±0.1.

[0097] Furthermore, the present invention sets different ranges to control the opening of the first expansion valve 106 to be different. When X deviates more from the preset range, that is, ±0.1, the opening adjustment value of the first expansion valve 106 is larger.

[0098] It should be noted that the opening adjustment value of the first expansion valve 106 refers to the value of each adjustment of the first expansion valve 106. In this embodiment, the opening of the first expansion valve 106 is gradually adjusted, for example, once after a certain period of time, specifically once every 1 second.

[0099] Of course, the above values ​​may also be set to other values, which can be determined according to needs and system circuits and are not limited here.

[0100] It can be understood that by comparing the actual temperature of the circulating fluid with the preset temperature, the opening of the first expansion valve 106 is adjusted so that the temperature of the circulating fluid is maintained within a certain range of the preset temperature, thereby achieving precise temperature control.

[0101] Similarly, the temperature control method also includes:

[0102] Acquire the fourth temperature setting value SV4 of the fourth temperature sensor 214;

[0103] Acquire a fourth temperature measurement value PV4 of the fourth temperature sensor 214 in real time;

[0104] Calculating a difference U between a fourth temperature setting value SV4 and a fourth temperature measurement value PV4;

[0105] If e≤U<e+E, the opening degree of the third expansion valve 112 increases by M%;

[0106] If e+E≤U<e+F, the opening degree of the third expansion valve 112 increases by N%;

[0107] If e+F≤U≤fF, the opening degree of the third expansion valve 112 remains unchanged;

[0108] If fF<U≤fE, the opening degree of the third expansion valve 112 is reduced by N%;

[0109] If fE<U≤f, the opening degree of the third expansion valve 112 is reduced by M%;

[0110] If U<e, the opening degree of the third expansion valve 112 increases by L%;

[0111] If U>f, the opening degree of the third expansion valve 112 is reduced by L%; wherein, e<0<E<F<f.

[0112] Specifically, in this embodiment, e=-1, f=1, E=0.5, F=0.9, M=2, N=1, L=5, namely:

[0113] If -1≤U<-0.5, the opening of the third expansion valve 112 increases by 2%;

[0114] If -0.5≤U<-0.1, the opening degree of the third expansion valve 112 increases by 1%;

[0115] If -0.1≤U≤0.1, the opening degree of the third expansion valve 112 remains unchanged;

[0116] If 0.1<U<0.5, the opening degree of the third expansion valve 112 is reduced by 1%;

[0117] If 0.5<U≤1, the opening degree of the third expansion valve 112 is reduced by 2%;

[0118] If U<-1, the opening of the third expansion valve 112 increases by 5%;

[0119] If U>1, the opening degree of the third expansion valve 112 is reduced by 5%.

[0120] It can be understood that U is the difference between the set temperature value and the measured temperature value. When U is greater than the preset range, for example, when U is greater than 0.1, it means that the actual temperature value is low. At this time, by adjusting the opening of the third expansion valve 112, the opening of the third expansion valve 112 is reduced, the cooling capacity is reduced, and the measured temperature value is increased, so that the value of U is reduced; when U is less than 0.1, it means that the actual temperature value is high. At this time, by adjusting the opening of the third expansion valve 112, the opening of the third expansion valve 112 is increased, so that the measured temperature value is reduced, so that the value of U is increased, and finally the value of U is stabilized between ±0.1.

[0121] It can be understood that by comparing the actual temperature of the circulating fluid in the first circulation loop 201 with the preset temperature, the opening of the first expansion valve 106 is adjusted so that the temperature of the circulating fluid is maintained within a certain range of the preset temperature, thereby achieving precise temperature control. By comparing the actual temperature of the circulating fluid in the second circulation loop 202 with the preset temperature, the opening of the third expansion valve 112 is adjusted so that the temperature of the circulating fluid is maintained within a certain range of the preset temperature, thereby achieving precise temperature control.

[0122] The temperature control method of this embodiment also includes:

[0123] In the case of a≤X≤b, the first temperature measurement value PV1 of the first temperature sensor 116 and the first pressure measurement value PV2 of the first pressure sensor 117 are acquired in real time;

[0124] Converting the first pressure measurement value PV2 into a saturation temperature value PV2' according to the pressure-enthalpy diagram;

[0125] Calculate the difference Y between the saturated temperature value PV2' and the first temperature measurement value PV1, that is, Y = PV2'-PV1;

[0126] If c≤Y<c+C, the opening of the first expansion valve 106 increases by P%;

[0127] If c+C≤Y<c+D, the opening of the first expansion valve 106 increases by Q%;

[0128] If c+D≤Y≤dD, the opening of the first expansion valve 106 remains unchanged;

[0129] If dD<Y≤dC, the opening of the first expansion valve 106 is reduced by Q%;

[0130] If dC<Y≤d, the opening of the first expansion valve 106 is reduced by P%;

[0131] If Y<c, the opening degree of the first expansion valve 106 increases by 0%;

[0132] If Y>d, the opening degree of the first expansion valve 106 is reduced by 0%; wherein, c<C<D<d.

[0133] Specifically, c=3, d=9, C=2, D=2.5, P=2, Q=1, O=5, that is:

[0134] If 3≤Y<5, the opening of the first expansion valve 106 increases by 2%;

[0135] If 5≤Y<5.5, the opening of the first expansion valve 106 increases by 1%;

[0136] If 5.5≤Y≤6.5, the opening of the first expansion valve 106 remains unchanged;

[0137] If 7<Y≤9, the opening of the first expansion valve 106 is reduced by 1%;

[0138] If 6.5<Y≤7, the opening of the first expansion valve 106 is reduced by 2%;

[0139] If Y<3, the opening of the first expansion valve 106 increases by 5%;

[0140] If Y>9, the opening of the first expansion valve 106 is reduced by 5%.

[0141] It can be understood that Y is the difference between the set temperature value and the measured temperature value. When Y is greater than the preset range, it means that the actual temperature value is low. At this time, by adjusting the opening of the first expansion valve 106, the opening of the first expansion valve 106 is reduced, the cooling capacity is reduced, and the saturated temperature value is increased, so that the value of Y is reduced; when Y is less than the preset range, it means that the actual temperature value is high. At this time, by adjusting the opening of the first expansion valve 106, the opening of the first expansion valve 106 is increased, so that the saturated temperature value is reduced, so that the value of Y is increased, and finally the value of Y is stabilized within the preset range.

[0142] In the case where e≤U≤f, the method further comprises:

[0143] Acquire in real time a second temperature measurement value PV5 of the second temperature sensor 118 and a second pressure measurement value PV6 of the second pressure sensor 119;

[0144] Convert the second pressure measurement value PV6 into a saturation temperature value PV6' according to the pressure-enthalpy diagram;

[0145] Calculate the difference V between the saturation temperature value PV6' and the second temperature measurement value PV5;

[0146] If s≤V<s+S, the opening degree of the third expansion valve 112 increases by P%;

[0147] If s+S≤V<s+T, the opening degree of the third expansion valve 112 increases by Q%;

[0148] If s+T≤V≤tT, the opening degree of the third expansion valve 112 remains unchanged;

[0149] If tT<V≤tS, the opening degree of the third expansion valve 112 is reduced by Q%;

[0150] If tS<V≤t, the opening degree of the third expansion valve 112 is reduced by P%;

[0151] If V<s, the opening degree of the third expansion valve 112 increases by 0%;

[0152] If V>t, the opening degree of the third expansion valve 112 is reduced by 0%; wherein, s<S<T<t.

[0153] Specifically, s=3, t=9, S=2, T=2.5, P=2, Q=1, O=5, that is:

[0154] If 3≤V<5, the opening of the third expansion valve 112 increases by 2%;

[0155] If 5≤V<5.5, the opening of the third expansion valve 112 increases by 1%;

[0156] If 5.5≤V≤6.5, the opening of the third expansion valve 112 remains unchanged;

[0157] If 7<V≤9, the opening degree of the third expansion valve 112 is reduced by 1%;

[0158] If 6.5<V≤7, the opening of the third expansion valve 112 is reduced by 2%;

[0159] If V<3, the opening of the third expansion valve 112 increases by 5%;

[0160] If V>9, the opening of the third expansion valve 112 is reduced by 5%.

[0161] It can be understood that V is the difference between the set temperature value and the measured temperature value. When V is greater than the preset range, it means that the actual temperature value is low. At this time, by adjusting the opening of the third expansion valve 112, the opening of the third expansion valve 112 is reduced, the cooling capacity is reduced, and the saturated temperature value is increased, so that the value of V is reduced; when V is less than the preset range, it means that the actual temperature value is high. At this time, by adjusting the opening of the third expansion valve 112, the opening of the third expansion valve 112 is increased, so that the saturated temperature value is reduced, so that the value of V is increased, and finally the value of V is stabilized within the preset range.

[0162] Furthermore, the temperature control method of this embodiment also includes:

[0163] When X<a, the rotation speed of the first compressor 103 decreases; when X>b, the rotation speed of the first compressor 103 increases; when U<e, the rotation speed of the second compressor 110 decreases; when U>f, the rotation speed of the second compressor 110 increases.

[0164] Furthermore, the temperature control method of this embodiment also includes:

[0165] Acquire the seventh temperature setting value SV3 of the seventh temperature sensor 215 and the seventh temperature measurement PV3 of the seventh temperature sensor 215;

[0166] Calculate the difference between the seventh temperature setting value SV3 and the seventh temperature measurement PV3 as Z, that is, Z = SV3 - PV3;

[0167] According to the difference Z, the output percentage of the power of the first heater 205 is controlled; the greater the absolute value of the difference Z, the greater the output percentage of the power of the first heater 205;

[0168] Acquire the eighth temperature setting value SV7 of the eighth temperature sensor 216 and the eighth temperature measurement PV7 of the eighth temperature sensor 216;

[0169] The difference between the eighth temperature setting value SV7 and the eighth temperature measurement PV7 is calculated as W, that is, W=SV7-PV7;

[0170] According to the difference W, the output percentage of the power of the second heater 213 is controlled; the larger the absolute value of the difference W is, the larger the output percentage of the power of the second heater 213 is.

[0171] The temperature control system 100 and the temperature control method provided by the embodiments of the present invention have the following beneficial effects:

[0172] The temperature control system 100 of the present invention is achieved by setting the refrigeration system 10 as a first refrigeration system 101 and a second refrigeration system 102. Among them, by setting the first heat exchanger 109 in the first refrigeration system 101, the refrigerant in the second refrigeration system 102 can be cooled in turn through the second condenser 111 and the first heat exchanger 109, so that the refrigerant at a lower temperature can cool the circulating liquid, thereby providing a circulating liquid at a lower temperature. By cooling the two circulating systems 20 separately by two refrigeration systems 10, two liquid supply temperatures can be provided at the same time. At the same time, by setting a three-way valve in the circulating system 20, the two circulating loops can be switched with each other to achieve a variety of refrigeration modes. The temperature control system 100 of the present invention can achieve a lower liquid supply temperature while flexibly switching the working mode to cope with various load changes and improve production efficiency and product quality.

[0173] The above description is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by a technician familiar with the technical field within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention.

Claims

1. A temperature control system (100), characterized in that: include: A first refrigeration system (101), the first refrigeration system (101) comprising a first compressor (103), a first condenser (104), a first liquid reservoir (105), a first expansion valve (106), a second expansion valve (107), a first evaporator (108) and a first heat exchanger (109), the first compressor (103), the first condenser (104) and the first liquid reservoir (105) being connected in sequence, the outlet of the first liquid reservoir (105) being connected to a first side inlet of the first evaporator (108) and a first side inlet of the first heat exchanger (109) respectively, the first side outlet of the first evaporator (108) and the first side outlet of the first heat exchanger (109) being both connected to the inlet of the first compressor (103), the first expansion valve (106) being arranged between the first liquid reservoir (105) and the first evaporator (108), and the second expansion valve (107) being arranged between the first liquid reservoir (105) and the first heat exchanger (109); A second refrigeration system (102), wherein the second refrigeration system (102) comprises a second compressor (110), a second condenser (111), a second liquid reservoir (126), a third expansion valve (112) and a second evaporator (113), wherein the second compressor (110), the second condenser (111) and the second liquid reservoir (126) are connected in sequence, the first side outlet of the second condenser (111) is connected to the second side inlet of the first heat exchanger (109), the second side outlet of the first heat exchanger (109) is connected to the inlet of the second liquid reservoir (126), the outlet of the second liquid reservoir (126) is connected to the inlet of the second evaporator (113), the outlet of the second evaporator (113) is connected to the inlet of the second compressor (110), and the third expansion valve (112) is arranged between the second liquid reservoir (126) and the second evaporator (113); A circulation system (20), wherein the circulation system (20) comprises a first circulation loop (201), a second circulation loop (202), a first three-way valve (208) and a second three-way valve (209); The first circulation loop (201) comprises a first expansion tank (203), a first circulation pump (204), a first heater (205) and a first load (207) connected in sequence; the second circulation loop (202) comprises a second expansion tank (210), a second circulation pump (211), a second heater (213) and a second load connected in sequence; the first three-way valve (208) comprises a first valve port (2081), a second valve port (2082) and a third valve port (2083); the second three-way valve (209) comprises a fourth valve port (2091), a fifth valve port (2092) and a sixth valve port (2093); an outlet of the first load (207) is connected to the first valve port (2 081), the third valve port (2083) is connected to the second side inlet of the first evaporator (108), the second side outlet of the first evaporator (108) is connected to the inlet of the first expansion tank (203), the second valve port (2082) is connected to the second side inlet of the second evaporator (113), the second side outlet of the second evaporator (113) is connected to the fourth valve port (2091), the fifth valve port (2092) is connected to the inlet of the first expansion tank (203); the outlet of the second load is connected to the second side inlet of the second evaporator (113), and the sixth valve port (2093) is connected to the inlet of the second expansion tank (210).

2. The temperature control system (100) according to claim 1, characterized in that: The first refrigeration system (101) further includes a fourth expansion valve (114), and the outlet of the first liquid accumulator (105) is connected to the inlet of the first compressor (103) through the fourth expansion valve (114); the second refrigeration system (102) further includes a fifth expansion valve (115), and the outlet of the second liquid accumulator (126) is connected to the inlet of the second compressor (110) through the fifth expansion valve (115).

3. The temperature control system (100) according to claim 1, characterized in that: A first pressure sensor (117) and a first temperature sensor (116) are provided at the inlet of the first compressor (103), and a second pressure sensor (119) and a second temperature sensor (118) are provided at the inlet of the second compressor (110).

4. The temperature control system (100) according to claim 1, characterized in that: A third temperature sensor (206) is provided between the first expansion tank (203) and the first circulation pump (204), and a fourth temperature sensor (214) is provided between the second expansion tank (210) and the second circulation pump (211).

5. The temperature control system (100) according to claim 1, characterized in that: The outlet of the first compressor (103) is also provided with a fifth temperature sensor (120) and a third pressure sensor (121); the outlet of the second compressor (110) is also provided with a sixth temperature sensor (122) and a fourth pressure sensor (123).

6. The temperature control system (100) according to claim 1, characterized in that: The temperature control system (100) further comprises a cooling water system (30), the second side of the first condenser (104) and the second side of the second condenser (111) being respectively connected to the cooling water system (30), and an electromagnetic valve is provided between the second side of the second condenser (111) and the cooling water system (30).

7. The temperature control system (100) according to claim 1, characterized in that: A seventh temperature sensor (215) is provided between the first heater (205) and the first load (207); and an eighth temperature sensor (216) is provided between the second heater (213) and the second load.

8. The temperature control system (100) according to claim 1, characterized in that: A ninth temperature sensor (124) is disposed at the outlet of the first liquid reservoir (105); and a tenth temperature sensor (125) is disposed at the outlet of the second liquid reservoir (126).

9. A temperature control method, characterized in that: Applied to the temperature control system (100) according to claim 4, the method comprising: Acquire a third temperature setting value SV0 of the third temperature sensor (206); Acquiring in real time a third temperature measurement value PV0 of the third temperature sensor (206); Calculate the difference X between the third temperature setting value SV0 and the third temperature measurement value PV0, X=SV0-PV0; If a≤X<a+A, the opening of the first expansion valve (106) increases by M%; If a+A≤X<a+B, the opening of the first expansion valve (106) increases by N%; If a+B≤X≤bB, the opening degree of the first expansion valve (106) remains unchanged; If bB<X≤bA, the opening degree of the first expansion valve (106) is reduced by N%; If bA<X≤b, the opening degree of the first expansion valve (106) is reduced by M%; If X<a, the opening degree of the first expansion valve (106) increases by L%; If X>b, the opening degree of the first expansion valve (106) is reduced by L%; wherein a<0<A<B<b; The method further comprises: Acquiring a fourth temperature setting value SV4 of the fourth temperature sensor (214); Acquiring in real time a fourth temperature measurement value PV4 of the fourth temperature sensor (214); Calculating a difference U between the fourth temperature setting value SV4 and the fourth temperature measurement value PV4; If e≤U<e+E, the opening degree of the third expansion valve (112) increases by M%; If e+E≤U<e+F, the opening degree of the third expansion valve (112) increases by N%; If e+F≤U≤fF, the opening degree of the third expansion valve (112) remains unchanged; If fF<U≤fE, the opening degree of the third expansion valve (112) is reduced by N%; If fE<U≤f, the opening degree of the third expansion valve (112) is reduced by M%; If U<e, the opening degree of the third expansion valve (112) increases by L%; If U>f, the opening degree of the third expansion valve (112) is reduced by L%; wherein, e<0<E<F<f.

10. The temperature control method according to claim 9, characterized in that: A first pressure sensor (117) and a first temperature sensor (116) are provided at the inlet of the first compressor (103), and a second pressure sensor (119) and a second temperature sensor (118) are provided at the inlet of the second compressor (110). In the case where a≤X≤b, the method further comprises: Acquiring in real time a first temperature measurement value PV1 of the first temperature sensor (116) and a first pressure measurement value PV2 of the first pressure sensor (117); Converting the first pressure measurement value PV2 into a saturation temperature value PV2' according to the pressure-enthalpy diagram; Calculating a difference Y between the saturated temperature value PV2' and the first temperature measurement value PV1; If c≤Y<c+C, the opening of the first expansion valve (106) increases by P%; If c+C≤Y<c+D, the opening of the first expansion valve (106) increases by Q%; If c+D≤Y≤dD, the opening degree of the first expansion valve (106) remains unchanged; If dD<Y≤dC, the opening degree of the first expansion valve (106) is reduced by Q%; If dC<Y≤d, the opening degree of the first expansion valve (106) is reduced by P%; If Y<c, the opening degree of the first expansion valve (106) increases by 0%; If Y>d, the opening of the first expansion valve (106) is reduced by 0%; wherein c<C<D<d; In the case where e≤U≤f, the method further comprises: Acquiring in real time a second temperature measurement value PV5 of the second temperature sensor (118) and a second pressure measurement value PV6 of the second pressure sensor (119); Converting the second pressure measurement value PV6 into a saturation temperature value PV6' according to the pressure-enthalpy diagram; Calculating a difference V between the saturated temperature value PV6' and the second temperature measurement value PV5; If s≤V<s+S, the opening degree of the third expansion valve (112) is increased by P%; If s+S≤V<s+T, the opening degree of the third expansion valve (112) increases by Q%; If s+T≤V≤tT, the opening degree of the third expansion valve (112) remains unchanged; If tT<V≤tS, the opening degree of the third expansion valve (112) is reduced by Q%; If tS<V≤t, the opening degree of the third expansion valve (112) is reduced by P%; If V<s, the opening degree of the third expansion valve (112) increases by 0%; If V>t, the opening degree of the third expansion valve (112) is reduced by 0%; wherein s<S<T<t.

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