提升UV激光钻孔加工工艺的激光钻孔设备

By introducing an acousto-optic modulator and a polarization converter into the optical path of a UV laser drilling device, the problems of over-etching of hole edges and irregularly shaped small holes caused by excessive initial energy in UV laser drilling are solved, thereby improving processing quality and efficiency.

CN119794623BActive Publication Date: 2026-07-17HEFEI CHIP FOUND MICROELECTRONICS EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HEFEI CHIP FOUND MICROELECTRONICS EQUIP CO LTD
Filing Date
2025-01-14
Publication Date
2026-07-17

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Abstract

本发明涉及提升UV激光钻孔加工工艺的激光钻孔设备，提升UV激光钻孔加工工艺的激光钻孔设备包括激光器以及镜头，由激光器产生的激光经镜头处理后作用于待加工件，其特征在于，在所述激光器与所述镜头之间的激光光路上还设置有声光调制器；所述声光调制器能够受控地于所述激光能量异常时关断所述激光。提升UV激光钻孔加工工艺的激光钻孔设备通过在光路中额外增加的声光调制器可以选择性地关断激光光路，因此可以在激光能量异常，比如首发激光能量过强时主动关断激光从而避免由于激光能量过强带来的加工缺陷。
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