High-resolution spectrometer optical system for Raman spectrum detection

Abstract

The invention discloses a high-resolution spectrometer optical system for Raman spectrum detection, and solves the problems that the existing spectrometer optical system is high in cost and complex in structure and the utilization rate of an image enhancement target surface is too low. The slit, the collimating lens group, the spectroscope group, the focusing lens group and the image sensor are sequentially arranged on a light path where to-be-detected light is located in the emergent direction of the to-be-detected light; the slit is used for receiving to-be-detected light and limiting the spot size of the to-be-detected light in the spectral dimension direction; the collimating lens group is used for collimating the to-be-detected light penetrating through the slit into parallel light; the spectroscope group is used for dispersing the collimated parallel light according to the wavelength; the focusing lens group is used for focusing the dispersed light to be detected to the image sensor; the target surface of the image sensor is located at the focus of the focus lens group so as to receive the focused light to be detected; the distance TTL from the slit to the target surface of the image sensor satisfies 0.3 < = f / TTL < = 0.6, wherein f is the focal length of the focus lens group.

Description

Technical Field

[0001] The invention relates to a spectrometer optical system, in particular to a high-resolution spectrometer optical system for Raman spectrum detection. Background Art

[0002] There is a contradiction between the wide spectral range and the effective size of the detector in the spectrometer system, that is, when the spectral resolution remains unchanged, the wide spectral range requires a larger detector size. In order to obtain a wide-band and high-spectral resolution ultraviolet spectrometer, the existing technology usually adopts methods such as detector splicing and multi-channel combination, but these methods have some disadvantages: the use of detector splicing will increase the system cost, the multi-channel combination will increase the overall complexity of the system, and the overall optical path volume is large, which is not suitable for scenes with high requirements for compactness and economy.

[0003] Raman spectrometers use Raman scattered light to obtain sample information, but the intensity of Raman scattering is extremely weak, generally only 10% of the incident light. -6 ~10 -12 Therefore, the Raman spectrometer needs to add an image intensifier to the front end of the CCD to amplify the weak signal. The target surface of the image intensifier is a circular area, while the traditional spectrometer only uses a linear array CCD, resulting in too low utilization of the image intensification target surface. Summary of the invention

[0004] In order to solve the technical problems of high cost, complex structure and low utilization rate of image enhancement target surface of existing spectrometer optical system, the present invention provides a high-resolution spectrometer optical system for Raman spectrum detection.

[0005] In order to achieve the above object, the present invention adopts the following technical solution:

[0006] A high-resolution spectrometer optical system for Raman spectrum detection, which is special in that it includes a slit, a collimator lens group, a beam splitter lens group, a focusing lens group and an image sensor which are sequentially arranged on the optical path of the light to be detected along its emission direction;

[0007] The slit is used to receive the light to be detected and to limit the size of its light spot in the spectral dimension;

[0008] The collimating lens group is used to collimate the light to be detected passing through the slit into parallel light;

[0009] The beam splitter group is used to disperse the collimated parallel light according to wavelength;

[0010] The focusing lens group is used to focus the dispersed light to be detected onto the image sensor;

[0011] The target surface of the image sensor is located at the focus of the focusing lens group to receive the focused light to be detected;

[0012] The distance TTL from the slit to the target surface of the image sensor satisfies 0.3≤f / TTL≤0.6, where f is the focal length of the focusing lens assembly.

[0013] Further, the beam splitter group includes a dichroic mirror F1, a reflector M1 and a grating G;

[0014] The dichroic mirror F1 is used to split the collimated parallel light according to wavelength to form transmitted light and reflected light;

[0015] The reflector M1 is arranged on the optical path of the reflected light, and the reflector M1 can rotate around the X-axis to reflect the reflected light at multiple angles; the X-axis is perpendicular to the optical path of the parallel light;

[0016] The grating G is arranged on the optical path of the transmitted light and the reflected light reflected again by the reflector M1.

[0017] Further, the wavelength range of the transmitted light is 260nm-330nm;

[0018] The wavelength range of the reflected light is 330nm-400nm.

[0019] Furthermore, the collimating lens group includes a negative power lens L1, a negative power lens L2 and a positive power lens L3 which are sequentially arranged on the optical path of the light to be detected along the emission direction thereof;

[0020] The focusing lens group includes a negative power lens E1, a positive power lens E2, a positive power lens E3, a negative power lens E4, a negative power lens E5 and a positive power lens E6 which are sequentially arranged on the optical path of the light to be detected along the emission direction thereof.

[0021] Furthermore, the curvature radius R1 of the near object surface S1 of the negative power lens L1 and the curvature radius R2 of the near image surface S2 thereof satisfy: -4<(R1+R2) / (R1-R2)<0.4;

[0022] The curvature radius R3 of the near object surface S3 of the negative power lens L2 and the curvature radius R4 of the near image surface S4 thereof satisfy: 2<(R3+R4) / (R3-R4)<6;

[0023] The curvature radius R5 of the near object surface S5 of the positive power lens L3 and the curvature radius R6 of the near image surface S6 thereof satisfy: -1<(R5+R6) / (R5-R6)<1;

[0024] The curvature radius R9 of the near object surface S9 of the negative power lens E1 and the curvature radius R10 of the near image surface S10 thereof satisfy: 0<(R9+R10) / (R9-R10)<6;

[0025] The curvature radius R11 of the near object surface S11 of the positive power lens E2 and the curvature radius R12 of the near image surface S12 thereof satisfy: -3<(R11+R12) / (R11-R12)<0;

[0026] The curvature radius R13 of the near object surface S13 of the positive power lens E3 and the curvature radius R14 of the near image surface S14 thereof satisfy: -2<(R13+R14) / (R13-R14)<0;

[0027] The curvature radius R15 of the near object surface S15 of the negative power lens E4 and the curvature radius R16 of the near image surface S16 thereof satisfy: -5<(R15+R16) / (R15-R16)<-2;

[0028] The curvature radius R17 of the near object surface S17 of the negative power lens E5 and the curvature radius R18 of the near image surface S18 thereof satisfy: -10<(R17+R18) / (R17-R18)<-5;

[0029] The curvature radius R19 of the near object surface S19 of the positive power lens E6 and the curvature radius R20 of the near image surface S20 thereof satisfy: -1<(R19+R20) / (R19-R20)<1.

[0030] Furthermore, R1=-3.738mm, R2=-8.457mm; R3=36.620mm, R4=24.165mm; R5=4147.889mm, R6=-26.632mm; R7=INF, R8=INF; R9=68.798mm, R10=44.492mm; R11=38.055mm, R12=167.152mm; R13=65.878mm, R14=3969.037mm; R15=-36.666mm, R16=-63.804mm; R17=-21.628mm, R18=-27.199mm; R19=20.734mm, R20=-197.931mm.

[0031] Further, the negative power lens L1, the positive power lens L3, the negative power lens E1, the positive power lens E2, the positive power lens E3, the negative power lens E5, and the positive power lens E6 are all made of glass materials, and their d-line Abbe numbers are greater than 90;

[0032] The negative power lens L2 and the positive power lens E4 are both made of glass, and the d-line Abbe numbers of the glass are less than 35.

[0033] Further, the negative power lens L1 has a refractive index of 1.44 and a d-line Abbe number of 91.6;

[0034] The negative power lens L2 has a refractive index of 1.56 and a d-line Abbe number of 32.0;

[0035] The positive power lens L3 has a refractive index of 1.43 and a d-line Abbe number of 95.2;

[0036] The dichroic mirror F1 has a refractive index of 1.38 and a d-line Abbe number of 106.2;

[0037] The negative power lens E1 has a refractive index of 1.38 and a d-line Abbe number of 106.2;

[0038] The positive power lens E2 has a refractive index of 1.43 and a d-line Abbe number of 95.0;

[0039] The positive power lens E3 has a refractive index of 1.38 and a d-line Abbe number of 106.2;

[0040] The negative power lens E4 has a refractive index of 1.56 and a d-line Abbe number of 32.0;

[0041] The negative power lens E5 has a refractive index of 1.38 and a d-line Abbe number of 106.2;

[0042] The positive power lens E6 has a refractive index of 1.38 and a d-line Abbe number of 106.2.

[0043] Furthermore, the center distance between the near object plane S1 and the near image plane S2 is 9.232 mm;

[0044] The center distance between the near image plane S2 and the near object plane S3 is 15.219 mm;

[0045] The center distance between the near object surface S3 and the near image surface S4 is 10.124 mm;

[0046] The center distance between the near image plane S4 and the near object plane S5 is 9.690 mm;

[0047] The center distance between the near object surface S5 and the near image surface S6 is 20.266 mm;

[0048] The center distance between the near image surface S6 and the near object surface S7 of the dichroic mirror F1 is 15.000 mm;

[0049] The center distance between the near object surface S7 and the near image surface S8 of the dichroic mirror F1 is 5.000 mm;

[0050] The center distance between the near image surface S8 and the near object surface S9 of the dichroic mirror F1 is 16.000 mm;

[0051] The center distance between the near object surface S9 and the near image surface S10 is 37.001 mm;

[0052] The center distance between the near image plane S10 and the near object plane S11 is 2.999 mm;

[0053] The center distance between the near object surface S11 and the near image surface S12 is 17.980 mm;

[0054] The center distance between the near image plane S12 and the near object plane S13 is 3.581 mm;

[0055] The center distance between the near object surface S13 and the near image surface S14 is 20.642 mm;

[0056] The center distance between the near image plane S14 and the near object plane S15 is 9.458 mm;

[0057] The center distance between the near object surface S15 and the near image surface S16 is 25.002 mm;

[0058] The center distance between the near image plane S16 and the near object plane S17 is 45.001 mm;

[0059] The center distance between the near object surface S17 and the near image surface S18 is 6.999 mm;

[0060] The center distance between the near image plane S18 and the near object plane S19 is 3.000 mm;

[0061] The center distance between the near object surface S19 and the near image surface S20 is 7.000 mm;

[0062] The center distance between the near image plane S20 and the target surface of the image sensor is 16.973 mm.

[0063] Further, the image sensor is a CCD image sensor or a CMOS image sensor, with an effective size of 14.4 mm*14.4 mm, a numerical aperture of 0.125, and a magnification of 1; an image intensifier is provided in front of the target surface of the CCD image sensor or the CMOS image sensor;

[0064] The size of the slit is 0.6 mm×20 μm.

[0065] Beneficial effects of the present invention:

[0066] 1. A high-resolution spectrometer optical system for Raman spectrum detection provided by the present invention is provided with a beam splitter group, which can disperse the wavelength of the light to be detected so that light of different wavelength bands can be focused to different positions of the area array image sensor, thereby enhancing the utilization rate of its target surface.

[0067] 2. The present invention provides a high-resolution spectrometer optical system for Raman spectrum detection, which uses a dichroic mirror F1 to split the light to be detected in the wavelength range of 260nm-330nm and 330nm-400nm, and then reflects the reflected light to the grating G through the reflector M1, and then focuses it through the focusing lens group, thereby achieving a spectral resolution better than 0.1nm in the wavelength range of 260nm-400nm; compared with the optical system of 260nm-330nm, the spectral range is doubled without reducing the spectral resolution.

[0068] 3. The present invention provides a high-resolution spectrometer optical system for Raman spectrum detection, which expands the spectral range by adding only a dichroic mirror for splitting and a reflector, so that two paths of light pass through the same grating and focus on the same detector. The optical path is simple, the volume is small, and the cost is low. BRIEF DESCRIPTION OF THE DRAWINGS

[0069] Figure 1 1 is a schematic diagram of the structure of an embodiment of an optical system of a high-resolution spectrometer for Raman spectrum detection according to the present invention; wherein (a) is a schematic diagram of the structure along the YZ plane, and (b) is a schematic diagram of the structure along the XZ plane;

[0070] Figure 2 is a light trace image received by the image sensor in an embodiment of the present invention;

[0071] Figure 3 is the MTF (260-330nm) at a wavelength of 260nm in the embodiment of the present invention;

[0072] Figure 4 is the MTF (260-330nm) at a wavelength of 295nm in the embodiment of the present invention;

[0073] Figure 5 is the MTF (260-330nm) at a wavelength of 330nm in the embodiment of the present invention;

[0074] Figure 6 is the MTF (330-400nm) at a wavelength of 330nm in the embodiment of the present invention;

[0075] Figure 7 is the MTF (330-400nm) at a wavelength of 365nm in the embodiment of the present invention;

[0076] Figure 8 It is the MTF (330-400nm) at a wavelength of 400nm in the embodiment of the present invention. DETAILED DESCRIPTION

[0077] The technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings and embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0078] The embodiment of the present invention provides a high-resolution spectrometer optical system for Raman spectrum detection, which can simultaneously cover the two bands of 260-330nm and 330-400nm, and uses a common grating to achieve spectral splitting. The optical system has a spectral resolution better than 0.1nm, and its composition includes 9 lenses, 1 dichroic mirror, 1 plane reflector and 1 grating.

[0079] like Figure 1 As shown, the optical system of the spectrometer specifically includes a slit, a collimating lens group, a beam splitter group, a focusing lens group and an image sensor, which are sequentially arranged on the optical path of the light to be detected along its emission direction.

[0080] The size of the slit is 0.6 mm × 20 μm, and it is used to receive the light to be detected and to limit its spot size in the spectral dimension.

[0081] The collimator lens group comprises a negative power lens L1, a negative power lens L2 and a positive power lens L3 which are sequentially arranged on the optical path of the light to be detected along its emission direction. The collimator lens group is used to collimate the light to be detected passing through the slit into parallel light.

[0082] The beam splitter group includes a dichroic mirror F1, a reflector M1 and a grating G; the dichroic mirror F1 is used to split the collimated parallel light according to wavelength to form transmitted light and reflected light; the reflector M1 is arranged on the optical path where the reflected light is located, and the reflector M1 can rotate around the X-axis to reflect the reflected light at multiple angles; the X-axis is perpendicular to the optical path where the parallel light is located; the grating G is arranged on the optical path where the transmitted light and the reflected light reflected again by the reflector M1 are located.

[0083] The focusing lens group includes a negative power lens E1, a positive power lens E2, a positive power lens E3, a negative power lens E4, a negative power lens E5 and a positive power lens E6, which are sequentially arranged on the optical path of the light to be detected along its emission direction. The focusing lens group is used to focus the dispersed light to be detected onto the image sensor.

[0084] The image sensor is a CCD image sensor or a CMOS image sensor, with an effective size of 14.4 mm*14.4 mm, a numerical aperture of 0.125, and a magnification of 1; an image intensifier is arranged on the target surface of the CCD image sensor or the CMOS image sensor.

[0085] After the light to be detected with a wavelength range of 260nm-400nm is emitted through the slit, it is first collimated into parallel light by the collimating lens group, and then incident on the dichroic mirror F1. For the light to be detected with a wavelength range of 260nm-330nm, the dichroic mirror F1 transmits it completely, and the transmitted light is incident on the grating G; for the light to be detected with a wavelength range of 330nm-400nm, the dichroic mirror F1 reflects it completely, and the reflected light passes through the reflector M1 and is incident on the same grating G. The two light paths are split by the grating G and focused to the image sensor through the focusing lens group.

[0086] Mirror M1 rotates around the x-axis ( Figure 1 (b) Rotating the grating by an appropriate angle (vertical to the paper) can change the position and angle of incidence of the light in the 330nm-400nm band incident on the grating G, thereby affecting the position where it is focused on the image sensor. The focusing effect after rotation is shown in Figure 1. Figure 2 As shown, by adjusting the rotation angle of the reflector around the x-axis, the spectral range can be expanded to twice the original without changing the size of the image sensor target surface, thereby improving the utilization rate of the detection target surface.

[0087] The total optical length of the optical system of the high-resolution spectrometer for Raman spectrum detection is TTL, that is, the distance from the slit to the target surface of the image sensor, which satisfies the relationship: 0.3≤f / TTL≤0.6, where f is the focal length of the focusing lens group. The focal length of the collimating lens group is almost equal to the focal length of the focusing lens group.

[0088] The negative power lens L1 satisfies: -4<(R1+R2) / (R1-R2)<0.4, -0.5≤f1 / f≤-0.1;

[0089] The negative power lens L2 satisfies: 2<(R3+R4) / (R3-R4)<6;

[0090] The positive power lens L3 satisfies: -1<(R5+R6) / (R5-R6)<1;

[0091] The negative power lens E1 satisfies: 0<(R9+R10) / (R9-R10)<6;

[0092] The positive power lens E2 satisfies: -3<(R11+R12) / (R11-R12)<0;

[0093] The positive power lens E3 satisfies: -2<(R13+R14) / (R13-R14)<0;

[0094] Negative power lens E4 satisfies: -5<(R15+R16) / (R15-R16)<-2;

[0095] Negative power lens E5 satisfies: -10<(R17+R18) / (R17-R18)<-5;

[0096] The positive power lens E6 satisfies: -1<(R19+R20) / (R19-R20)<1;

[0097] The d-line Abbe number of the glass material of the negative power lens L1, the positive power lens L3, the negative power lens E1, the positive power lens E2, the positive power lens E3, the negative power lens E5, and the positive power lens E6 is greater than 90; the d-line Abbe number of the glass material of the negative power lens L2 and the positive power lens E4 is less than 35.

[0098] The specific parameters of each lens in the 260nm-330nm transmission light path in this embodiment are shown in the following table:

[0099]

[0100]

[0101] Negative numbers in the radius of curvature indicate that the curvature is toward the image. For the positive and negative values ​​of the center distance, the symbol method of geometric optics stipulates that the length quantity is: the position of the intersection of the light ray and the principal axis is measured from the vertex, and the position to the right of the vertex is positive, and the position to the left of the vertex is negative.

[0102] Figure 3-Figure 5 They are the 260nm-330nm band respectively. The MTF (modulation transfer function) curves of the Raman spectrometer at 260nm, 295nm, and 330nm show that the transfer function curve of the Raman spectrometer at each wavelength is greater than 0.5, and the imaging quality is good.

[0103] Figure 6-Figure 8 The MTF (Modulation Transfer Function) curves of the Raman spectrometer at 330nm, 365nm and 400nm are in the 330-400nm band. It can be seen from the figure that the MTF curves of the Raman spectrometer at each wavelength are greater than 0.6, and the imaging quality is good.

[0104] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions within the technical scope disclosed by the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A high-resolution spectrometer optical system for Raman spectroscopy detection, characterized in that: It includes a slit, a collimating lens group, a beam splitter group, a focusing lens group and an image sensor which are sequentially arranged on the optical path of the light to be detected along the emission direction thereof; The slit is used to receive the light to be detected and to limit the size of its light spot in the spectral dimension; The collimating lens group is used to collimate the light to be detected passing through the slit into parallel light; The beam splitter group is used to disperse the collimated parallel light according to wavelength; The focusing lens group is used to focus the dispersed light to be detected onto the image sensor; The target surface of the image sensor is located at the focus of the focusing lens group to receive the focused light to be detected; The distance TTL from the slit to the target surface of the image sensor satisfies 0.3≤f / TTL≤0.6, where f is the focal length of the focusing lens assembly.

2. The high-resolution spectrometer optical system for Raman spectroscopy detection according to claim 1, characterized in that: The beam splitter group includes a dichroic mirror F1, a reflector M1 and a grating G; The dichroic mirror F1 is used to split the collimated parallel light according to wavelength to form transmitted light and reflected light; The reflector M1 is arranged on the optical path of the reflected light, and the reflector M1 can rotate around the X-axis to reflect the reflected light at multiple angles; the X-axis is perpendicular to the optical path of the parallel light; The grating G is arranged on the optical path of the transmitted light and the reflected light reflected again by the reflector M1.

3. The high-resolution spectrometer optical system for Raman spectroscopy detection according to claim 2, characterized in that: The wavelength range of the transmitted light is 260nm-330nm; The wavelength range of the reflected light is 330nm-400nm.

4. The high-resolution spectrometer optical system for Raman spectroscopy detection according to claim 2 or 3, characterized in that: The collimating lens group comprises a negative power lens L1, a negative power lens L2 and a positive power lens L3 which are sequentially arranged on the optical path of the light to be detected along the emission direction thereof; The focusing lens group includes a negative power lens E1, a positive power lens E2, a positive power lens E3, a negative power lens E4, a negative power lens E5 and a positive power lens E6 which are sequentially arranged on the optical path of the light to be detected along the emission direction thereof.

5. The high-resolution spectrometer optical system for Raman spectrum detection according to claim 4, characterized in that: The curvature radius R1 of the near object surface S1 of the negative power lens L1 and the curvature radius R2 of the near image surface S2 thereof satisfy: -4<(R1+R2) / (R1-R2)<0.4; The curvature radius R3 of the near object surface S3 of the negative power lens L2 and the curvature radius R4 of the near image surface S4 thereof satisfy: 2<(R3+R4) / (R3-R4)<6; The curvature radius R5 of the near object surface S5 of the positive power lens L3 and the curvature radius R6 of the near image surface S6 thereof satisfy: -1<(R5+R6) / (R5-R6)<1; The curvature radius R9 of the near object surface S9 of the negative power lens E1 and the curvature radius R10 of the near image surface S10 thereof satisfy: 0<(R9+R10) / (R9-R10)<6; The curvature radius R11 of the near object surface S11 of the positive power lens E2 and the curvature radius R12 of the near image surface S12 thereof satisfy: -3<(R11+R12) / (R11-R12)<0; The curvature radius R13 of the near object surface S13 of the positive power lens E3 and the curvature radius R14 of the near image surface S14 thereof satisfy: -2<(R13+R14) / (R13-R14)<0; The curvature radius R15 of the near object surface S15 of the negative power lens E4 and the curvature radius R16 of the near image surface S16 thereof satisfy: -5<(R15+R16) / (R15-R16)<-2; The curvature radius R17 of the near object surface S17 of the negative power lens E5 and the curvature radius R18 of the near image surface S18 thereof satisfy: -10<(R17+R18) / (R17-R18)<-5; The curvature radius R19 of the near object surface S19 of the positive power lens E6 and the curvature radius R20 of the near image surface S20 thereof satisfy: -1<(R19+R20) / (R19-R20)<1.

6. The high-resolution spectrometer optical system for Raman spectrum detection according to claim 5, characterized in that: The R1=-3.738mm, R2=-8.457mm; R3=36.620mm, R4=24.165mm; R5=4147.889mm , R6=-26.632mm; R7=INF, R8=INF; R9=68.798mm, R10=44.492mm; R11=38.055m m, R12=167.152mm; R13=65.878mm, R14=3969.037mm; R15=-36.666mm, R16=-6 3.804mm; R17=-21.628mm, R18=-27.199mm; R19=20.734mm, R20=-197.931mm.

7. The high-resolution spectrometer optical system for Raman spectrum detection according to claim 6, characterized in that: The negative power lens L1, the positive power lens L3, the negative power lens E1, the positive power lens E2, the positive power lens E3, the negative power lens E5 and the positive power lens E6 are all made of glass, and their d-line Abbe numbers are greater than 90; The negative power lens L2 and the positive power lens E4 are both made of glass, and the d-line Abbe numbers of the glass are less than 35.

8. The high-resolution spectrometer optical system for Raman spectrum detection according to claim 7, characterized in that: The negative power lens L1 has a refractive index of 1.44 and a d-line Abbe number of 91.6; The negative power lens L2 has a refractive index of 1.56 and a d-line Abbe number of 32.0; The positive power lens L3 has a refractive index of 1.43 and a d-line Abbe number of 95.2; The dichroic mirror F1 has a refractive index of 1.38 and a d-line Abbe number of 106.2; The negative power lens E1 has a refractive index of 1.38 and a d-line Abbe number of 106.2; The positive power lens E2 has a refractive index of 1.43 and a d-line Abbe number of 95.0; The positive power lens E3 has a refractive index of 1.38 and a d-line Abbe number of 106.2; The negative power lens E4 has a refractive index of 1.56 and a d-line Abbe number of 32.0; The negative power lens E5 has a refractive index of 1.38 and a d-line Abbe number of 106.2; The positive power lens E6 has a refractive index of 1.38 and a d-line Abbe number of 106.

2.

9. The high-resolution spectrometer optical system for Raman spectrum detection according to claim 8, characterized in that: The center distance between the near object surface S1 and the near image surface S2 is 9.232 mm; The center distance between the near image plane S2 and the near object plane S3 is 15.219 mm; The center distance between the near object surface S3 and the near image surface S4 is 10.124 mm; The center distance between the near image plane S4 and the near object plane S5 is 9.690 mm; The center distance between the near object surface S5 and the near image surface S6 is 20.266 mm; The center distance between the near image surface S6 and the near object surface S7 of the dichroic mirror F1 is 15.000 mm; The center distance between the near object surface S7 and the near image surface S8 of the dichroic mirror F1 is 5.000 mm; The center distance between the near image surface S8 and the near object surface S9 of the dichroic mirror F1 is 16.000 mm; The center distance between the near object surface S9 and the near image surface S10 is 37.001 mm; The center distance between the near image plane S10 and the near object plane S11 is 2.999 mm; The center distance between the near object surface S11 and the near image surface S12 is 17.980 mm; The center distance between the near image plane S12 and the near object plane S13 is 3.581 mm; The center distance between the near object surface S13 and the near image surface S14 is 20.642 mm; The center distance between the near image plane S14 and the near object plane S15 is 9.458 mm; The center distance between the near object surface S15 and the near image surface S16 is 25.002 mm; The center distance between the near image plane S16 and the near object plane S17 is 45.001 mm; The center distance between the near object surface S17 and the near image surface S18 is 6.999 mm; The center distance between the near image plane S18 and the near object plane S19 is 3.000 mm; The center distance between the near object surface S19 and the near image surface S20 is 7.000 mm; The center distance between the near image plane S20 and the target surface of the image sensor is 16.973 mm.

10. The high-resolution spectrometer optical system for Raman spectrum detection according to claim 8, characterized in that: The image sensor is a CCD image sensor or a CMOS image sensor, with an effective size of 14.4 mm*14.4 mm, a numerical aperture of 0.125, and a magnification of 1; an image intensifier is provided in front of the target surface of the CCD image sensor or the CMOS image sensor; The size of the slit is 0.6 mm×20 μm.

Images