A silicon rod electrical performance detection device and a silicon rod electrical performance detection method

Abstract

The application discloses a kind of silicon rod electric performance detection equipment and detection method, detection equipment includes visual acquisition module, determines the diameter and center point position of silicon rod end face;End face detection module, according to end face point position information, multiple point detection is obtained to obtain the state of silicon rod end face;Electric performance detection module, according to the state of silicon rod end face, adjusts detection posture, to fit silicon rod end face and complete detection.The application subject of detection method is the above-mentioned detection equipment, including: step A: visual acquisition module obtains silicon rod image to determine silicon rod end face point position;Step B: end face detection module is detected according to end face point position to silicon rod end face multiple point, obtains end face slope;Step C: the detection end of electric performance detection module can be fitted with silicon rod end face, by obtaining the lifetime information of silicon single crystal minority carrier in silicon rod, to determine the resistivity of single crystal silicon rod.The equipment provided by the application is suitable for a variety of silicon rod detection, high universality, and the resistivity detection precision of single crystal silicon rod is high.

Description

Technical Field

[0001] This invention relates to the field of silicon rod production technology, and in particular to a silicon rod electrical performance testing device and a silicon rod electrical performance testing method. Background Technology

[0002] Currently, with the rapid development of the solar photovoltaic industry, the demand for monocrystalline silicon rods, which are the main raw materials, has increased significantly.

[0003] In the process of manufacturing silicon rods, quality inspection is crucial. One important inspection involves electrical testing to determine the presence of heavy metal impurities and defects within the single crystal. Currently, methods generally involve manual inspection or traditional automated equipment. Manual inspection involves placing the silicon rod on a simple platform and inspecting it manually. However, manual measurement is prone to errors, leading to inaccurate data. Furthermore, manual inspection is inefficient, resulting in low production capacity. Traditional automated equipment inspection suffers from significant errors because the silicon rod rotates during transport, and the varying end-face cutting patterns of each rod prevent the electrical testing equipment from obtaining accurate end-face information before testing.

[0004] Therefore, this application proposes a technical solution to address the problems of low efficiency and difficulty in guaranteeing accuracy in the electrical performance testing of silicon rods in the prior art. Summary of the Invention

[0005] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes a silicon rod electrical performance testing device, which can achieve fully automated testing of silicon rod electrical performance, improving not only the testing efficiency but also the testing accuracy. Furthermore, this application also provides a silicon rod electrical performance testing method, applied to the aforementioned silicon rod electrical performance testing device, which can effectively improve the testing efficiency and accuracy of single-crystal silicon rod electrical performance.

[0006] In a first aspect, according to an embodiment of the present invention, a silicon rod electrical performance testing device includes: The vision acquisition module determines the diameter and center point position of the silicon rod end face by acquiring images of the silicon rod. The end face detection module detects the positions of multiple points on the end face of the silicon rod based on the diameter and center point position information, and obtains the end face status of the silicon rod from the position information of the multiple points. The electrical performance testing module adjusts its testing posture according to the condition of the silicon rod end face to fit the silicon rod end face and complete the testing.

[0007] According to an embodiment of the present invention, a silicon rod electrical performance testing device has at least the following beneficial effects: The specific working principle of the silicon rod electrical performance testing device provided in this application is as follows: When the silicon rod is transported to the testing station, the slope information of the end face of the silicon rod to be tested is obtained through the joint cooperation of the vision acquisition module and the end face detection module. After obtaining the slope information of the end face of the silicon rod to be tested, the electrical performance testing module adjusts its posture. That is, the electrical performance testing module adjusts the position of the detection end relative to the end face of the silicon rod according to the angle between the end face of the silicon rod and the central axis of the silicon rod, so that the detection end is parallel to the end face of the silicon rod, so that the detection end can better fit with the end face of the silicon rod, reduce the gap error between the detection end and the end face of the silicon rod, and ensure the testing accuracy of the silicon rod.

[0008] By coordinating the visual acquisition module, end-face inspection module, and electrical performance testing module, automated testing of the electrical properties of silicon rods is achieved, significantly improving testing efficiency. Simultaneously, employing a high-resolution camera and image processing technology, the position of the silicon rod's end face can be accurately measured; multi-point detection can accurately acquire the state information of the silicon rod's end face; and by acquiring the minority carrier lifetime information of the silicon single crystal, the resistivity of the single-crystal silicon rod can be accurately determined. The equipment provided by this invention is suitable for testing silicon rods of different specifications and models, possessing strong versatility and adaptability.

[0009] According to an embodiment of the present invention, a silicon rod electrical performance testing device includes an end face testing module comprising a first detector, wherein the testing end of the first detector is capable of contacting multiple points on the end face of the silicon rod.

[0010] According to an embodiment of the present invention, a silicon rod electrical performance testing device includes an end face testing module comprising at least three first detectors, one of which is in contact with the center point of the silicon rod end face, and two of the three first detectors are arranged circumferentially around the center point.

[0011] According to an embodiment of the present invention, an electrical performance testing device for silicon rods includes an electrical performance testing module comprising a second detector. The detection posture of the second detector is adjusted according to the state of the silicon rod end face. The detection position of the silicon rod end face is determined according to the diameter of the silicon rod and the position of the center point of the end face. The second detector contacts the detection position and completes the detection.

[0012] According to an embodiment of the present invention, a silicon rod electrical performance testing device has multiple test positions on the end face of the silicon rod, which are circumferentially distributed around a center point.

[0013] According to an embodiment of the present invention, a silicon rod electrical performance testing device further includes a switching module, which sequentially switches the usage status of the vision acquisition module, the end face inspection module, and the electrical performance testing module on the silicon rod according to the process flow.

[0014] According to an embodiment of the present invention, a silicon rod electrical performance testing device further includes an identification module, which is used to acquire product model information of the silicon rod to be tested, and the identification module is disposed upstream of the vision acquisition module; And / or, The recognition module is located between the vision acquisition module and the end face detection module.

[0015] Secondly, according to an embodiment of the present invention, a method for testing the electrical properties of a silicon rod, using the aforementioned silicon rod electrical property testing equipment, includes the following steps: Step A: The vision acquisition module acquires an image of the silicon rod, and the control module analyzes the image information to determine the diameter and center point position of the silicon rod end face; Step B: The end face detection module performs multi-point detection on the end face of the silicon rod based on the diameter and center point position information of the silicon rod end face, and the control module analyzes the point position data to obtain the slope information of the silicon rod end face. Step C: The electrical performance testing module adjusts its testing posture according to the slope information of the silicon rod end face so that the testing end of the electrical performance testing module can fit in contact with the silicon rod end face. The electrical performance testing module determines the resistivity of the single crystal silicon rod by obtaining the minority carrier lifetime information of the silicon single crystal in the silicon rod.

[0016] According to an embodiment of the present invention, a method for testing the electrical properties of a silicon rod has at least the following beneficial effects: By cooperating with a vision acquisition module and an end-face detection module, the slope information of the end face of the silicon rod to be tested is obtained. After obtaining the slope information of the end face of the silicon rod to be tested, the electrical performance detection module adjusts its posture. That is, based on the angle between the end face of the silicon rod and the central axis of the silicon rod, the electrical performance detection module adjusts the position of the detection end relative to the end face of the silicon rod, making the detection end parallel to the end face of the silicon rod. This allows the detection end to better fit with the end face of the silicon rod, reducing the gap error between the detection end and the end face of the silicon rod, and ensuring the testing accuracy of the silicon rod.

[0017] By coordinating the visual acquisition module, end-face inspection module, and electrical performance testing module, automated testing of the electrical properties of silicon rods is achieved, significantly improving testing efficiency. Simultaneously, employing a high-resolution camera and image processing technology, the position of the silicon rod's end face can be accurately measured; multi-point detection allows for accurate acquisition of the state information of the silicon rod's end face; and by acquiring the minority carrier lifetime information of the silicon single crystal, the resistivity of the single-crystal silicon rod can be accurately determined. The equipment and method provided by this invention are applicable to the testing of silicon rods of different specifications and models, exhibiting strong versatility and adaptability.

[0018] According to an embodiment of the present invention, a method for testing the electrical properties of a silicon rod includes step B: the end face detection module determines at least three detection point positions on the end face of the silicon rod based on the position information of the end face of the silicon rod, one of which is the center point of the end face of the silicon rod, and the remaining detection point positions are arranged circumferentially around the center line. The control module analyzes the detection point position data to obtain the slope information of the end face of the silicon rod.

[0019] According to an embodiment of the present invention, a method for testing the electrical properties of a silicon rod includes step A: an identification module identifies the product specification information of the silicon rod to be tested, a vision acquisition module acquires an image of the silicon rod, and a control module analyzes the image information to determine the diameter of the end face and the position of the center point of the silicon rod. And / or, Step A: The vision acquisition module acquires an image of the silicon rod, the control module analyzes the image information to determine the position of the silicon rod end face, and the recognition module identifies the product specification information of the silicon rod to be inspected.

[0020] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0021] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of the structure of a silicon rod electrical performance testing device according to an embodiment of the present invention; Figure 2 This is a first image schematic diagram of a first embodiment of obtaining the center point position according to an embodiment of the present invention; Figure 3 This is a second image schematic diagram of a second embodiment of the present invention for obtaining the center point position; Figure 4 This is a schematic diagram of the image obtained when three detection points are present. Figure 5 This is a schematic diagram of the image obtained when five detection points are present. Figure 6 This is a schematic diagram of the structure of the first embodiment of the conveying module of the present invention; Figure 7 This is a schematic diagram of the structure of a second embodiment of the conveying module of the present invention; Figure 8 This is a flowchart of a method for testing the electrical properties of a silicon rod according to an embodiment of the present invention.

[0022] Explanation of reference numerals in the attached figures: Conveying module 1; Visual acquisition module 2; End face detection module 3; Electrical performance testing module 4; Identification module 5; Switch to module 6; Lifting mechanism 7. Detailed Implementation

[0023] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0024] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0025] In the description of the invention, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. If the terms "first" and "second" are used, they are only for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0026] In the description of this invention, unless otherwise explicitly defined, terms such as "set up," "install," and "connect" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.

[0027] Reference Figure 1 This invention provides a device for testing the electrical properties of silicon rods.

[0028] Specifically, such as Figure 1 As shown, the silicon rod electrical performance testing equipment includes a conveying module 1 and a vision acquisition module 2, an end face inspection module 3, and an electrical performance testing module 4 arranged along the silicon rod conveying direction.

[0029] The conveying module 1 is equipped with a detection station. The vision acquisition module 2, the end face detection module 3, and the electrical performance detection module 4 are all detection stations for performing corresponding processes on the silicon rod. Specifically, the vision acquisition module 2 is used to acquire images of the silicon rod and determine the position of the end face of the silicon rod to be detected by using the images of the silicon rod.

[0030] Understandably, the vision acquisition module 2 uses a camera to take a top-down image of the silicon rod to obtain an image of the silicon rod to be inspected at the inspection station of the conveying module 1, thus obtaining the specific position of the silicon rod to be inspected relative to the inspection station. After the image is transmitted to the control module, the control module obtains the diameter and length of the silicon rod to be inspected after data analysis. The diameter of the silicon rod is used to determine the area of ​​the end face of the silicon rod to be inspected. The end face detection module performs multi-point contact detection on the end face of the silicon rod based on the position information and area information of the end face. The slope of the end face of the silicon rod to be inspected is calculated based on the data fed back by each detection point during the detection.

[0031] Optionally, this application provides a first embodiment for obtaining the center point location. For example... Figure 2 As shown, the camera can directly capture an image of the end face of the silicon rod to be inspected to obtain a first image. When the acquired first image is circular, a rectangular frame tangent to the perimeter of the circle can be set outside the first image, and the center point position is determined by the intersection of the diagonals of the rectangle. When the acquired first image is rectangular, the center point position is determined by the intersection of the diagonals of the rectangle. The control module uses the center point position as a reference to determine the positions of the remaining detection points on the end face of the silicon rod.

[0032] like Figure 4 As shown, the center point can be the first detection point position, and two second detection points can be set on both sides of the center point position, and the two second detection points and the center point position are on the same straight line. The first detector of the end face detection module 3 can sequentially contact the center point position and the second detection point position. The displacement generated by the first detector from the initial position to different detection point positions is used to obtain the slope of the end face after data analysis by the control module.

[0033] Specifically, a first detector can be set up, and displacement data can be obtained by sequentially contacting the center point and the second detection point with the first detector.

[0034] Alternatively, three detectors can be set up. During detection, the three detectors can simultaneously make contact with the center point and the second detection point to obtain displacement data, thereby improving detection efficiency.

[0035] The second detection point is located at the midpoint of the line connecting the center point and the edge of the silicon rod end face.

[0036] like Figure 5As shown, the center point is the first detection point position. Simultaneously, using the center point as a reference, at least four second detection points are arranged circumferentially around the center point on the end face of the silicon rod. Two of the diagonally positioned second detection points are located on the same plane as the center point. The first detector of the end face detection module 3 can sequentially contact the center point position and the second detection point positions. The displacement generated by the first detector from its initial position to different detection point positions is used to obtain the slope of the end face through data analysis by the control module.

[0037] Specifically, a first detector can be set up, and displacement data can be obtained by sequentially contacting the center point and the second detection point with the first detector.

[0038] Alternatively, three first detectors can be set. During detection, the three detectors can first make contact with a set of center points and a second detection point to obtain a first set of displacement data. Then, they can rotate by a preset angle and make contact with another set of center points and a second detection point to obtain a second set of displacement data. The control module obtains the slope of the end face after analyzing the two sets of displacement data. Optionally, the end face detection module 3 is equipped with a rotating device, and the three first detectors are mounted on the rotating device, and the three first detectors are on the same straight line.

[0039] Alternatively, five first detectors can be set. During detection, all five first detectors can simultaneously contact the center point and four second detection points to obtain displacement data. The control module then analyzes the data to obtain the slope of the end face.

[0040] The second detection point is located 5-10 mm from the edge of the silicon rod end face.

[0041] It should be noted that the number and location of the second detection points can be determined based on the actual specifications of the silicon rod to be tested.

[0042] The electrical performance testing module 4 adjusts the position of the testing end relative to the end face of the silicon rod based on the end face slope information, so that the testing end is parallel to the end face of the silicon rod. This allows the testing end to fit better with the end face of the silicon rod, reducing the gap error between the testing end and the end face of the silicon rod, and ensuring the testing accuracy of the silicon rod.

[0043] After the position adjustment of the detection end of the electrical performance testing module 4 is completed, the detection end of the electrical performance testing module 4 performs multi-point testing on the silicon rod end face, using the center point position and diameter of the silicon rod end face as a reference. The detection end of the electrical performance testing module 4 can simultaneously abut against three or more test points on the silicon rod end face to perform electrical performance testing, or the detection end of the electrical performance testing module 4 can sequentially abut against three or more test points on the silicon rod end face to perform electrical performance testing.

[0044] Specifically, when there are three detection points, one of the detection points is the center point, which is the center of the circle on the end face of the silicon rod. The other two detection points are on the same straight line as the center point and are located at the midpoint of the radius. When there are more than three detection points, one of the detection points is the center point, which is the center of the circle on the end face of the silicon rod. The remaining detection points are arranged around the center point and are located 5-10 mm away from the edge of the end face of the silicon rod.

[0045] Optionally, this application provides a second embodiment for obtaining the center point location. For example... Figure 3 As shown, the camera can directly capture images of the silicon rod in a direction perpendicular to the outer circumference of the rod to be inspected, thereby obtaining a second image of the silicon rod. The second image is rectangular, and the width of the rectangle determines the position of the center point; that is, the center point is located on a straight line passing through the midpoint of the wide side of the rectangle. Using the midpoint as a reference, two reference lines are set vertically, parallel to the line passing through the midpoint of the wide side. These reference lines are tangent to the edge of the silicon rod. A detection path is generated by connecting the two tangent points, with one tangent point being the initial position and the other the terminal position. Driven by the displacement device, the first detector sequentially acquires displacement data at at least three points along the detection path. After acquiring the displacement data, the control module analyzes the data to derive the end face slope information.

[0046] The electrical performance testing module 4 adjusts the position of the testing end relative to the end face of the silicon rod based on the end face slope information, so that the testing end is parallel to the end face of the silicon rod. This allows the testing end to fit better with the end face of the silicon rod, reducing the gap error between the testing end and the end face of the silicon rod, and ensuring the testing accuracy of the silicon rod.

[0047] After the position adjustment of the detection end of the electrical performance testing module 4 is completed, the detection end of the electrical performance testing module 4 performs multi-point testing on the silicon rod end face, using the center point position and diameter of the silicon rod end face as a reference. The detection end of the electrical performance testing module 4 can simultaneously abut against three or more test points on the silicon rod end face to perform electrical performance testing, or the detection end of the electrical performance testing module 4 can sequentially abut against three or more test points on the silicon rod end face to perform electrical performance testing.

[0048] Specifically, when there are three detection points, one of the detection points is the center point, which is the center of the circle on the end face of the silicon rod. The other two detection points are on the same straight line as the center point and are located at the midpoint of the radius. When there are more than three detection points, one of the detection points is the center point, which is the center of the circle on the end face of the silicon rod. The remaining detection points are arranged around the center point and are located 5-10 mm away from the edge of the end face of the silicon rod.

[0049] According to some embodiments of this application, an identification module 5 for acquiring specific product model information of the silicon rod to be inspected is also provided along the conveying direction of the silicon rod. The number of inspection point locations acquired by the end-face inspection module 3 is determined by acquiring the specific product model information. The identification module 5 can be located upstream of the vision acquisition module 2, or it can be located between the vision acquisition module 2 and the end-face inspection module 3.

[0050] Specifically, the identification module 5 includes a barcode scanning device and a marking device. When the conveying module 1 transports the silicon rod to be inspected to the corresponding position of the identification module 5, the marking device, after obtaining the length and weight of the silicon rod, can attach a label with corresponding specification information to the surface of the silicon rod, or laser-etch an identification code with corresponding specification information. Simultaneously, the control system records the specification information. The barcode scanning device can read the label or identification code on the silicon rod to determine the specific information of the silicon rod being inspected. Furthermore, after subsequent end-face slope detection and electrical performance testing, the acquired information can be integrated with the corresponding specification information, so that in subsequent processes, technicians can obtain the specific information of the silicon rod simply by scanning the barcode.

[0051] According to some embodiments of this application, such as Figure 6 As shown, the conveying module 1 includes a conveying mechanism and multiple lifting mechanisms 7. The conveying mechanism is a V-shaped roller conveyor belt, which can fix the silicon rod during the conveying process, preventing the silicon rod from rolling randomly and affecting the detection efficiency and accuracy.

[0052] Furthermore, an identification station and an inspection station are set along the conveying direction of the conveying module 1. Specifically, the identification module 5 is set at the identification station, and the switching module 6 is set at the inspection station. The switching module 6 is a six-degree-of-freedom robot. The vision acquisition module 2, the end face inspection module 3, and the electrical performance inspection module 4 are set within the grasping range of the six-degree-of-freedom robot. By setting up a six-degree-of-freedom robot, the vision acquisition module 2, the end face inspection module 3, and the electrical performance inspection module 4 can be quickly and accurately switched according to process instructions. At the same time, the position and attitude of the end effector can be precisely adjusted to ensure inspection accuracy.

[0053] The vision acquisition module 2 uses an industrial camera to acquire high-precision images of the silicon rod. The first detector used in the end-face inspection module 3 is a contact position sensor to ensure the accuracy of end-face slope detection. The second detector used in the electrical performance inspection module 4 is a minority carrier lifetime meter, specifically a BCT-400 meter, which is suitable for measuring the minority carrier lifetime of P-type or N-type single-crystal or polycrystalline silicon blocks. It does not require surface passivation treatment, can accurately measure the minority carrier lifetime of the silicon rod, and can sensitively reflect the defects and contaminants inside the silicon block. Furthermore, both the identification station and the inspection station are equipped with a lifting mechanism 7. When the silicon rod to be inspected is transported to the identification station or the inspection station, the lifting mechanism 7 is activated, which can clamp or support the silicon rod and raise it to the acquisition range of the identification module 5, or raise the silicon rod to the focal length of the industrial camera, and prevent the conveying device from interfering with the inspection equipment when the silicon rod is being inspected.

[0054] Or, such as Figure 7 As shown, the conveying mechanism includes a conveyor belt, a lifting mechanism 7 mounted on the conveyor belt, and a tray mounted on the lifting mechanism 7, wherein the tray is used to place silicon rods. When the silicon rod to be inspected is conveyed to the identification station or the inspection station, the lifting mechanism 7 is activated, and can clamp or support the silicon rod and raise it to the acquisition range of the identification module 5, or raise the silicon rod to the focal length of the industrial camera, and prevent the conveying device from interfering with the inspection equipment when the silicon rod is being inspected.

[0055] Alternatively, the recognition module, vision acquisition module 2, end face inspection module 3, and electrical performance inspection module 4 are all integrated on the six-degree-of-freedom robot. The recognition station and the inspection station are located at the same position of the conveying module 1, and the six-degree-of-freedom robot is correspondingly set on the inspection station.

[0056] Reference Figure 8 This application also provides a testing method applicable to the aforementioned silicon rod electrical performance testing equipment, specifically including the following steps: Step A: When the identification station and the inspection station are in the same position, the conveying module 1 conveys the silicon rod to be inspected to the station. After the identification module 5 identifies the product specification information of the silicon rod to be inspected, the switching module 6 switches the identification module 5 to the vision acquisition module 2. The vision acquisition module 2 acquires the image of the silicon rod. The control module analyzes the image information to determine the position of the silicon rod end face. The control module matches the image information of the current silicon rod inspection with the product specification information and records it in the database. Alternatively, when the identification station and the detection station are in the same position, the conveying module 1 conveys the silicon rod to be detected to the station, the vision acquisition module 2 acquires the image of the silicon rod, the control module analyzes the image information to determine the position of the silicon rod end face, and the switching module 6 switches the vision acquisition module 2 to the identification module 5. The identification module 5 identifies the product specification information of the current silicon rod to be detected, and the control module matches the image information of the current silicon rod detection with the product specification information and records it in the database. When the identification station and the inspection station are set at different positions along the conveying direction in the conveying module 1, the conveying module 1 conveys the silicon rod to be inspected to the identification station or the inspection station. The identification module 5 and the vision acquisition module 2 respectively identify the product specification information of the silicon rod to be inspected and acquire the image of the silicon rod to determine the position of the silicon rod end face. The control module matches the analysis data of the image information of the current silicon rod inspection with the product specification information and records it in the database.

[0057] Step B: Switching module 6 switches vision acquisition module 2 to end face detection module 3. End face detection module 3 determines three or more detection point positions on the silicon rod end face based on the position information of the silicon rod end face. One of the detection point positions is the center point of the silicon rod end face, and the other detection point positions are set around the center line in the circumferential direction to perform multi-point detection on the silicon rod end face. The control module analyzes the point position data to obtain the slope information of the silicon rod end face. When there are three detection points, one of the detection points is the center point, which is the center of the circle on the end face of the silicon rod. The other two detection points are on the same straight line as the center point and are located at the midpoint of the radius. When there are three or more detection points, one of the detection points is the center point, which is the center of the silicon rod end face. The remaining detection points are arranged around the center point and located 5-10mm away from the edge of the silicon rod end face. The control module matches the end face slope information of the current silicon rod with the product specification information and records it in the database.

[0058] Step C: Switching module 6 switches end face detection module 3 to electrical performance detection module 4. Electrical performance detection module 4 adjusts its detection posture according to the slope information of the silicon rod end face so that the detection end of electrical performance detection module 4 can fit in contact with the silicon rod end face. Electrical performance detection module 4 determines the resistivity of the single crystal silicon rod by acquiring the minority carrier lifetime information of the silicon single crystal in the silicon rod. The control module matches the current electrical performance detection result data of the silicon rod with the product specification information and records it in the database so that technicians can obtain it by scanning the code.

[0059] The silicon rod electrical performance testing equipment provided in this application achieves automated testing of silicon rod electrical performance through the coordinated operation of a vision acquisition module 2, an end-face inspection module 3, and an electrical performance testing module 4, significantly improving testing efficiency. Simultaneously, employing a high-resolution camera and image processing technology, it can accurately measure the diameter and center point position of the silicon rod end face; through multi-point detection, it can accurately obtain the state information of the silicon rod end face; and by acquiring the minority carrier lifetime information of the silicon single crystal, it can accurately determine the resistivity of the single-crystal silicon rod. The equipment and method provided by this invention are applicable to the testing of silicon rods of different specifications and models, possessing strong versatility and adaptability.

[0060] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0061] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A method for testing the electrical properties of a silicon rod, characterized in that, The main application is a silicon rod electrical performance testing device, which includes: a vision acquisition module (2), which determines the diameter and center point position of the silicon rod end face by acquiring an image of the silicon rod; an end face detection module (3), which detects the position of multiple points on the silicon rod end face according to the diameter and center point position information of the silicon rod end face, and obtains the state of the silicon rod end face from the position information of the multiple points; and an electrical performance testing module (4), which includes a second detector, which adjusts the detection posture of the second detector, determines the position to be detected on the silicon rod end face according to the diameter and center point position of the silicon rod end face, and the second detector contacts the position to be detected and completes the detection. The method includes the following steps: Step A: The image of the silicon rod is acquired through the vision acquisition module (2), and the control module analyzes the image information to determine the position of the silicon rod end face; Step B: The end face detection module (3) determines at least three detection positions on the end face of the silicon rod based on the position information of the silicon rod end face. One of the detection positions is the center point of the silicon rod end face, and the other detection positions are set around the center point in the circumferential direction. The end face detection module (3) includes at least three first detectors, which simultaneously contact multiple points on the end face of the silicon rod. The control module analyzes the detection position data to obtain the slope information of the end face of the silicon rod. Step C: The electrical performance testing module (4) adjusts the testing posture according to the slope information of the silicon rod end face. There are multiple test positions on the silicon rod end face. One of the test positions is the center point, which is the center of the silicon rod end face. The other test positions are set around the center point. The testing end of the electrical performance testing module (4) can simultaneously contact three or more test positions on the silicon rod end face so that the testing end of the electrical performance testing module (4) can fit with the silicon rod end face. The electrical performance testing module (4) determines the resistivity of the silicon rod by obtaining the lifetime information of minority carriers in the silicon rod.

2. The method for testing the electrical properties of a silicon rod according to claim 1, characterized in that, The silicon rod electrical performance testing equipment also includes a switching module (6), which sequentially switches the vision acquisition module (2), the end face detection module (3), and the electrical performance testing module (4) according to the process flow.

3. The method for testing the electrical properties of a silicon rod according to claim 1, characterized in that, The silicon rod electrical performance testing equipment also includes an identification module (5), which is used to obtain the product model information of the silicon rod to be tested. The identification module (5) is located upstream of the vision acquisition module (2). And / or, The silicon rod electrical performance testing equipment also includes an identification module (5), which is located between the vision acquisition module (2) and the end face detection module (3).

4. The method for testing the electrical properties of a silicon rod according to claim 3, characterized in that, Step A: The identification module (5) identifies the product specification information of the silicon rod to be inspected, acquires the image of the silicon rod through the vision acquisition module (2), and the control module analyzes the image information to determine the position of the silicon rod end face; And / or, Step A: The image of the silicon rod is acquired by the vision acquisition module (2). After the control module analyzes the image information to determine the position of the silicon rod end face, the recognition module (5) identifies the product specification information of the silicon rod to be tested.

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