Peripheral frame body for spacing photomask box

Abstract

A spacer for portions of a reticle cartridge includes spacer contacts configured to contact alignment features of a cover and a base plate of the reticle cartridge such that the cover and the base plate are separated by a gap. The spacer includes a frame connecting at least two of the spacer contacts. The frame may include spring arms that allow deformation such that the spacer contacts may move relative to each other to facilitate interfacing with the alignment feature. The spacer contact may be configured to surround a pin included in the alignment feature. The spacer contact may be configured to be inserted into an introduction portion of a channel included in the alignment feature.

Description

Technical Field

[0001] The present disclosure relates to a reticle box including a spacer and the spacers connected by a frame to separate sealing surfaces of the reticle box from each other. Background Art

[0002] The reticle container may include hard sealing surfaces. When the reticle container is shipped, it is typically shipped in its fully assembled state. During shipping, the sealing surfaces may be subjected to shock and / or vibration beyond the normal handling and operation of the reticle box to cause wear, damage, and particle generation, which may affect the cleanliness or other performance of the reticle box. Summary of the invention

[0003] The present disclosure relates to a reticle box including a spacer and the spacers connected by a frame to separate sealing surfaces of the reticle box from each other.

[0004] When transporting the reticle box in an assembled state, a gap can be maintained between the sealing surfaces by providing a spacer that interfaces with the alignment features of the reticle container (e.g., the inner box of the reticle box). The presence of this gap can reduce or eliminate wear or damage caused by shock or vibration experienced during transportation of the reticle container. The gap can be sized so that the reticle container can still be fully assembled, such as with the inner box contained within the outer box of the complete reticle container during this transportation. This allows the reticle container to be transported with a reduced risk of damage or particle generation, even when transported as a complete container. In addition, the contacts of the spacer can be connected by a frame to facilitate handling. This frame can be configured so that it extends outside the perimeter of the sealing surface of the reticle container to reduce the possibility of wear particles from the spacer causing cleanliness issues for the reticle box.

[0005] In an embodiment, a spacer for a reticle box includes a plurality of spacer contacts. Each of the spacer contacts is configured to contact a first reticle box segment at a first reticle box alignment feature and to contact a second reticle box segment at a second reticle box alignment feature. The first reticle box alignment feature is separated from a first sealing surface of the first reticle box segment, and the second reticle box alignment feature is separated from a second sealing surface of the second reticle box segment. The spacer includes a frame connecting at least two of the plurality of spacer contacts. The frame is configured to be outside the first sealing surface and the second sealing surface in a plan view of the reticle box. The spacer contacts are configured to contact the first reticle box segment and the second reticle box segment such that the first reticle box segment and the second reticle box segment are separated by a gap.

[0006] In an embodiment, the plurality of spaced contacts includes at least three of the spaced contacts.

[0007] In an embodiment, the frame connects all the spacer contacts of the plurality of spacer contacts.

[0008] In an embodiment, the frame includes at least one spring arm configured to allow the frame to deflect such that a distance between the plurality of spaced contacts varies.

[0009] In an embodiment, each of the spaced contacts includes an inner surface defining an opening configured to receive the first reticle pod alignment feature and an outer surface configured to be received within the second reticle pod alignment feature.

[0010] In an embodiment, the gap has a width in the range from 20 μm to 1 mm.

[0011] In an embodiment, the spacer comprises at least one of polycarbonate and polyolefin.

[0012] In an embodiment, a reticle box includes an inner box, which includes a cover and a bottom plate. The cover includes a cover sealing surface and a plurality of cover alignment features separated from the cover sealing surface. The bottom plate includes a bottom plate sealing surface and a plurality of bottom plate alignment features separated from the bottom plate sealing surface. The reticle box includes a spacer. The spacer includes a plurality of spacer contacts. Each of the spacer contacts is configured to contact one of the plurality of cover alignment features and to contact one of the plurality of bottom plate alignment features. The spacer includes a frame connecting at least two of the plurality of spacer contacts, the frame being configured to be outside the cover sealing surface and the bottom plate sealing surface in a plan view of the reticle box. The spacer contacts are configured to contact the cover and the bottom plate so that the cover and the bottom plate are separated by a gap.

[0013] In an embodiment, the plurality of spaced contacts includes at least three of the spaced contacts.

[0014] In an embodiment, the frame connects all the spacer contacts of the plurality of spacer contacts.

[0015] In an embodiment, the frame comprises at least one spring arm configured to allow deflection of the frame.

[0016] In an embodiment, the cover alignment feature is a pin and the base plate alignment feature is a channel configured to receive the pin, the channel including a lead-in end.

[0017] In an embodiment, each of the spacer contacts includes an inner surface defining an opening configured to receive the pin and an outer surface configured to be received within the lead-in end.

[0018] In an embodiment, the gap has a width in the range from 20 μm to 1 mm.

[0019] In an embodiment, the reticle box further includes an outer box including a box top and a box door, the outer box being configured to accommodate the inner box.

[0020] In an embodiment, a method of preparing a reticle box for shipping includes assembling an inner box, the inner box including a cover, a bottom plate, and a spacer disposed between the cover and the bottom plate. The spacer includes a plurality of spacer contacts that contact the cover at a cover alignment feature. The spacer contacts the bottom plate at a bottom plate alignment feature. The spacer includes a frame that connects at least two of the plurality of spacer contacts. The cover and the bottom plate are separated by a gap.

[0021] In an embodiment, the frame includes a deflection arm, and assembling the inner box includes deflecting the frame at the deflection arm to align at least one of the plurality of spaced contacts with one of the lid alignment features or one of the base plate alignment features.

[0022] In an embodiment, the gap has a width in the range from 20 μm to 1 mm.

[0023] In an embodiment, the cover alignment features are each a pin, the base plate alignment features are each a channel including a lead-in end, and assembling the inner box includes passing each of the pins through one of the spacer contacts and inserting each of the spacer contacts into one of the lead-in ends.

[0024] In an embodiment, the method further includes: placing the inner box into an outer box, the outer box including a box top and a box door; coupling the box top to the box door to enclose the inner box; and transporting the reticle box from a packing location to a destination location when the box top is coupled to the box door. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 A reticle container according to an embodiment is shown.

[0026] Figure 2A A cross-sectional view of an inner box of a reticle container according to an embodiment is shown.

[0027] Figure 2B exhibit Figure 2A A plan view of the cover and spacer.

[0028] Figure 3 A spacer according to an embodiment is shown.

[0029] Figure 4 A spacer according to an embodiment is shown.

[0030] Figure 5 A reticle pod according to an embodiment is shown. DETAILED DESCRIPTION

[0031] The present disclosure relates to a reticle box including a spacer and the spacers connected by a frame to separate sealing surfaces of the reticle box from each other.

[0032] Figure 1 A reticle container according to an embodiment is shown. The reticle container 100 includes an outer box 102, which includes a box top 104 and a box door 106. The reticle container 100 also includes an inner box 108, which includes a cover 110 and a bottom plate 112. The reticle container 100 further includes a spacer 114.

[0033] The outer box 102 forms the exterior of the reticle container 100. The outer box 102 is configured to accommodate the inner box 108. When the reticle container 100 is transported to a destination or stored at a location, the reticle container may be assembled so that the inner box 108 is accommodated within the outer box 102. The outer box 102 may be composed of a box top 104 and a box door 106.

[0034] The inner box 108 is an inner box of the reticle container 100 configured to accommodate the reticle. The inner box includes a cover 110 and a bottom plate 112. The cover 110 and the bottom plate 112 may be configured to contact each other during typical use, for example, at corresponding sealing surfaces provided on each of the cover 110 and the bottom plate 112. The cover 110 and the bottom plate 112 may be made of a metal material and may further have a metal plating, for example, at least at some of the sealing surfaces. The cover 110 and the bottom plate 112 may be separated from each other at other times, for example, during storage or transportation, for example, using one or more spacers 114.

[0035] When the inner box 108 is assembled, a spacer 114 may be included in the photomask container 100 to space the cover 110 and the bottom plate 112 from each other. The spacer 114 may include one or more spacer contacts configured to engage with features included in the cover 110 and the bottom plate 112. The feature may be any suitable feature disposed outward from the sealing surface included in the cover 110 and the bottom plate 112. The feature may be between the outer periphery of the sealing surface and the outer periphery of the corresponding cover 110 or bottom plate 112. Non-limiting examples of such features include alignment features, lugs, shelves, protrusions, flanges, combinations thereof, and the like disposed on the cover 110 and the bottom plate 112. The feature with which the spacer 114 engages is disposed on a portion of the cover 110 and / or the bottom plate 112 that is outside the sealing surface. Outside the sealing surface means that when the spacer 114 is used to assemble the cover 110 and the bottom plate 112, the features engaged with the frame of the spacer 114 and the position of the frame of the spacer 114 in the plan view do not overlap with the sealing surface of the cover 110 or the bottom plate 112. The spacer 114 can contact the cover 110 and the bottom plate 112 so that the corresponding sealing surfaces remain separated by the gap. In an embodiment, when the cover 110 and the bottom plate 112 are assembled and placed in the outer box 102 with the spacer 114 in the appropriate position, the gap can be maintained. When the inner box 108 is placed in the outer box 102 and the outer box 102 is closed, the gap can have a size between 20 microns (μm) and 1 millimeter (mm). In an embodiment, the spacer 114 may include one or more spring members, which are configured to increase the size of the gap when the inner box 108 is not accommodated in the outer box 102 relative to the size of the gap maintained when the inner box 108 is accommodated in the outer box 102.

[0036] The cover 110 may optionally include a cover flange 116. The cover flange 116 protrudes outward from the side of the cover 110. The cover flange 116 may provide a point where the spring member included in the spacer 114 may contact the cover 110 to provide an increase in the size of the gap when the cover 110 and the bottom plate 112 are not accommodated in the outer box 102.

[0037] Figure 2A A cross-sectional view of an inner box of a reticle container according to an embodiment is shown. The inner box 200 includes a lid 202 including a lid alignment feature 204 and a lid sealing surface 206. The inner box 200 also includes a bottom plate 208 including a bottom plate alignment feature 210 and a bottom plate sealing surface 212. The spacer 214 includes a spacer contact 216 and a frame 218.

[0038] The cover 202 is the cover of the inner box 200. The cover 202 is configured to be combined with the bottom plate 208 to define an interior space capable of accommodating a photomask. The cover 202 can be configured to form an upper portion of the inner box 200. The cover 202 includes a cover alignment feature 204. The cover alignment feature can be any suitable feature provided in the cover 204 to provide alignment of the cover 202 with the bottom plate 208, for example, by engagement between the cover alignment feature 204 and a suitable bottom plate alignment feature 210. In the embodiment shown in FIG. 2, the cover alignment feature 204 includes a plurality of pins protruding from the cover 202. In an embodiment, the cover alignment feature can alternatively be a groove or opening configured to receive a pin provided as the bottom plate alignment feature 210 or any other suitable structure for guiding and / or maintaining the alignment of the cover 202 with the bottom plate 208. The cover 202 also includes a cover sealing surface 206. The lid sealing surface 206 is a surface of the lid 202 configured to contact the bottom plate 208 when the inner box 200 is assembled for typical use (such as housing a photomask). The lid sealing surface 206 can be one or more surfaces positioned to correspond to the bottom plate sealing surface 212 when the inner box 200 is assembled.

[0039] The bottom plate 208 forms another portion of the inner box 200. The bottom plate 208 is configured to define an interior space capable of accommodating a photomask when combined with the cover 202. The bottom plate 208 includes a bottom plate alignment feature 210. In the embodiment shown in FIG. 2 , the bottom plate alignment feature 210 is a hole formed in the bottom plate 208 that is configured to receive a pin, which is the cover alignment feature 204. The hole includes a lead-in end having a diameter greater than the diameter of the pin. The bottom plate 208 further includes a bottom plate sealing surface 212. The bottom plate sealing surface 212 is configured to contact the cover sealing surface 206 when assembling the inner box 200, for example, for accommodating a photomask. The bottom plate sealing surface 212 may be opposite to the corresponding cover sealing surface 206.

[0040] The spacer 214 includes a spacing contact 216 connected by a frame 218. In the embodiment shown in FIG. 2, the spacing contacts 216 are each configured to contact the lid 202 and the bottom plate 208 at the respective lid alignment features 204 and the bottom plate alignment features 210. It should be understood that the location and shape of the spacing contacts 216 can be any suitable configuration for engaging features of the lid 202 and the bottom plate 208 outside the respective lid sealing surfaces 206 and the bottom plate sealing surfaces 212 to space the sealing surfaces 206, 212 from each other. For example, in an embodiment that contacts the lid 202 and / or the bottom plate 208 at a lug or shelf, a tab that engages such a lug or shelf can be used as the spacing contact 216. The spacing contacts 216 are configured to contact the lid alignment features 204 and the bottom plate alignment features 210 so that the lid sealing surface 206 and the bottom plate sealing surface 212 are spaced apart from each other by a gap. 2, the spacing contacts 216 are each annular and include an inner surface that defines an inner hole configured to receive one of the pins of the cover alignment feature 204. The spacing contacts 216 each further include an outer surface that is configured to be received in one of the lead-in ends of the holes of the bottom plate alignment feature 210. The contact between the spacing contacts 216 and the cover and bottom plate alignment features 204, 210 can keep the cover 202 separated from the bottom plate 208 so that a gap separates the cover sealing surface 206 and the bottom plate sealing surface 212. In an embodiment, the number of spacing contacts 216 corresponds to the number of matching cover and bottom plate alignment features 204, 210 included in the inner box 200. In an embodiment, the number of spacing contacts 216 is less than the number of matching cover and bottom plate alignment features 204, 210 included in the inner box 200. The spacer 214 may be installed, for example, for use in shipping the inner box 200 to prevent contact between the lid and bottom plate sealing surfaces 206, 212 during such shipping or storage of the inner box 200. The spacer 214 may be configured to maintain separation between the lid 202 and the bottom plate 208 even if the inner box 200 is placed into an outer box (such as described above and Figure 1 206 and the outer box is closed. The spacer 214 may include a frame connecting two or more of the spacer contacts. The frame 218 may be configured to extend outside the lid sealing surface 206 and / or the bottom plate sealing surface 212 relative to the plan view of the inner box 200. The amount of particles generated by the spacer 214 and its contact with the lid 202 and / or the bottom plate 208 contacting the lid and bottom plate sealing surfaces 206, 212 and the internal space defined by the lid 202 and the bottom plate 208 can be reduced by avoiding the area corresponding to the lid and bottom plate sealing surfaces 206, 212.

[0041] 2, the cover alignment features 204 are shown as pins and the bottom plate alignment features 210 are shown as channels that receive the pins, it is understood that the pins may be provided as the bottom plate alignment features 210 and the channels that receive the pins may be provided as the cover alignment features 204. It is understood that the spacers 214 may be appropriately shaped and sized to maintain a gap between the cover and bottom plate sealing surfaces 206, 212 by engaging with the cover alignment features 204 and the bottom plate alignment features 210.

[0042] Figure 2B A plan view of the cover 202 is shown when the spacers 214 are mounted to the cover 202. The spacer contacts 216 each surround one of the cover alignment features 204. The frame 218 is Figure 2B The frame 218 surrounds the outer periphery of the cover sealing surface 206 in a plan view of FIG. 1 , and the entire frame 218 is outside the cover sealing surface 206, so that no part of the frame 218 overlaps the cover sealing surface 206. The bottom plate sealing surface 212 can be positioned to correspond to the cover sealing surface 206 and thus have the same relationship with the frame 218 as the bottom plate sealing surface 212.

[0043] Figure 3 A spacer according to an embodiment is shown. Spacer 300 includes spacer contacts 302 and a frame 304. Frame 304 includes spring arms 306. Spacer contacts 302 are configured to contact alignment features of a lid and a bottom plate of a reticle container, such as lid alignment features 204 and bottom plate alignment features 210 shown in FIG. 2 and described above. Spacer contacts 302 may be positioned relative to each other so that spacer contacts 302 are spaced approximately the same distance as the lid and bottom plate alignment features. Frame 304 may connect two or more of spacer contacts 302. When spacer 300 is installed into a reticle box and the reticle box is viewed in a plan view, frame 304 may be configured to be outside of a lid and / or bottom plate sealing surface (e.g., a sealing surface). Frame 304 may include spring arms 306. Spring arms 306 may be a feature of frame 304 that allows frame 304 to deflect so that the relative position of spacer contacts 302 is variable. The spring arms may be sections of varying thickness, include bends or other such features, and / or include a resilient material so that the frame may deflect at those spring arms 306. Any suitable number of spring arms 306 may be included in the frame 304. In an embodiment, a spring arm 306 is disposed in the frame 304 for each of the spacing contacts 302 included in the spacer 300. In an embodiment, the number of spacing contacts 302 included in the spacer 300 is greater than the number of spring arms included in the frame 304.

[0044] Figure 4A cover and spacer according to an embodiment are shown. The cover 400 includes a cover flange 402. The spacer 404 includes a spacer contact (not shown) and a lift arm 408 connected by a frame 406. The spacer contact may be any of the spacer contacts described above. The frame 406 may connect two or more of the spacer contacts. When the spacer 404 is installed into a reticle box including the cover 400 and the reticle box is viewed in a plan view, the frame 406 may be configured to be outside the cover and / or bottom plate sealing surface. The lift arm 408 may be disposed on the spacer 402, for example, extending from the frame 406. The lift arm 408 is positioned so that when the spacer 400 is installed into the reticle box, the lift contact 410 may contact the cover or bottom plate of the reticle box. The lift contact 410 may, for example, contact the cover 400 at the cover flange 402. The lift contact 410 may be on a flexible arm 412 included in the lift arm 408. The flexible arms 412 can have a flexibility selected so that when the spacer 404 is installed alone in the inner box of the reticle box, the lifting arms 408 can support the cover 400 and the bottom plate apart. The flexible arms can be configured to be able to separate the cover 400 from the bottom plate when the cover and the bottom plate are pressed together (e.g., when the cover and the bottom plate are placed in the outer box (e.g., as described above and Figure 1 400 and the bottom plate are held together. The flexible arms can cause a first gap to exist between the sealing surface of the cover 400 and the bottom plate when the inner box with the spacer 404 installed is housed in the outer box of the reticle box and a second gap that is larger than the first gap when the inner box with the spacer 404 installed is removed from the outer box but the cover 400 and the bottom plate are kept together. The larger second gap can reduce the possibility of contact between the cover 400 and the bottom plate sealing surface during disassembly of the inner box and removal of the spacer 404 (for example, after shipping the reticle box, where the spacer 404 is used to separate the cover 400 and the bottom plate during shipping).

[0045] Figure 5 A reticle box according to an embodiment is shown. The reticle box 500 includes an outer box 502, which includes a box top 504 and a box door 506. The reticle box 500 further includes an inner box 508, which includes a lid 510 and a bottom plate 512. The lid 510 includes a lid sealing surface 514 and a lid flange 518. The bottom plate 512 includes a bottom plate sealing surface 516. A spacer 520 can be installed into the outer box 502 and engage with the inner box 508 to provide a gap between the lid sealing surface 514 and the bottom plate sealing surface 516. The spacer 520 can include a first spacer frame 522, a second spacer frame 524, an anchor 526, and a lid support 528. The anchor 526 can be attached to a support column 530 included in the box door 506.

[0046] The outer box 502 is an outer box of the reticle box 500 configured to define an interior space capable of accommodating the inner box 508. The outer box 502 includes a box top 504 and a box door 506 that combine to define the interior space. The box door 506 can be connected to the box top 504 by any suitable connection, such as a latch mechanism or the like. The box door 506 can include support posts 530. The support posts 530 can be configured to contact the inner box 508, such as at the bottom plate 512, to position the inner box 508 within the interior space of the outer box 502.

[0047] Inner box 508 is an inner box of reticle box 500 configured to accommodate a reticle. Inner box 508 includes a cover 510 and a bottom plate 512. Cover 510 and bottom plate 512 may include any suitable features of covers and bottom plates included therein, such as (as non-limiting examples) discussed above and Figure 2A and 2B 500. The lid and bottom plate alignment features 204, 210 shown in FIG. The lid 510 and bottom plate 512 include a lid sealing surface 514 and a bottom plate sealing surface 516, respectively. The lid sealing surface 514 and the bottom plate sealing surface 516 are surfaces disposed on the lid 510 and the bottom plate 512, respectively, to form a seal when the inner box 508 is assembled in the absence of the spacer 520 (e.g., when the inner box 508 contains a reticle). The seal may be a seal based on contact between the lid and bottom plate sealing surfaces 514, 516, a close proximity that allows a pressure differential to be created between the interior and exterior of the inner box 508, or any other suitable seal for the inner box 508. When the spacer 520 is used in the reticle box 500, the lid sealing surface 514 and the bottom plate sealing surface 516 may separate a gap. The gap may be maintained by the presence of the spacer 520 and its engagement with portions of the reticle box 500 (e.g., the box top 504, the box door 506, the lid 510, and / or the bottom plate 512). The gap may be of any size suitable for reducing or eliminating contact between the lid and bottom plate sealing surfaces 514, 516 while allowing the inner box 508 to remain contained within the outer box 502. In an embodiment, the gap may be of a size between 20 micrometers (μm) and 1 millimeter (mm). The spacer 520 may be installed into the reticle box 500 to provide and maintain the gap, for example, during transportation and / or storage of the reticle box 500. Maintaining the gap may reduce or eliminate sliding friction and in turn reduce wear and concomitant particle generation at the inner box 508. Maintaining the gap may also reduce the likelihood or extent of damage caused by contact between the lid 510 and the bottom plate 512 due to vibrations occurring during transportation or storage of the reticle box 500.

[0048] exist Figure 5In the illustrated embodiment, the lid 510 includes a lid flange 518. The lid flange 518 may protrude from opposite sides of the lid 510. The lid flange 518 may be contacted by one or more features of the spacer 520 so that the lid 510 may be held in a particular position within the outer box 502, such as supporting the lid 510 in a particular position to provide a gap between the lid sealing surface 514 and the bottom plate sealing surface 516.

[0049] The spacer 520 can be installed into the reticle box 500 to maintain a gap between the lid sealing surface 514 and the bottom plate sealing surface 516 to, for example, prevent the reticle box 500 from being worn or damaged during transportation and / or storage. The spacer 520 can engage with the lid 510 and the bottom plate 512 to hold the lid 510 and the bottom plate 512 to maintain the gap when assembling the reticle box 500. The spacer 520 can include one or more discrete structures. The spacer 520 or a portion thereof can be configured to engage with the box top 504 and / or the box door 506 to fix the position of the spacer 520.

[0050] The first spacer frame 522 is a frame configured to be outside the lid sealing surface 514 and the bottom plate sealing surface 516 when the reticle box 500 is assembled. The first spacer frame 522 can include features configured to engage therewith and configured to position the engagement features so that the engagement features can contact one of the lid 510 or the bottom plate 512 to position the lid 510 or the bottom plate 512 to maintain the gap when the spacer 520 is installed in the reticle box 500. The engagement features can be, for example, flanges, tabs, spacer contacts (such as those described above and Figure 2B ) or the like.

[0051] The second spacer frame 524 is a frame configured to be outside the lid sealing surface 514 and the bottom plate sealing surface 516 when the reticle box 500 is assembled. The second spacer frame 524 is configured to position the engagement features so that the engagement features can contact one of the lid 510 or the bottom plate 512 to position the lid 510 or the bottom plate 512 to maintain a gap when the spacer 520 is installed in the reticle box 500. Figure 5 In the embodiment shown, the engagement feature positioned by the second spacer frame 524 can be a lid support 528. The lid support 528 can be a protrusion configured to contact the lid flange 530 to support the lid 510 above the bottom plate 512 to maintain a gap between the lid sealing surface 514 and the bottom plate sealing surface 516. In other embodiments, the engagement feature can be, for example, a flange, a tab, a spacer contact (such as those described above and Figure 2B In an embodiment, the second spacer frame 524 is part of a structure that is continuous with the first spacer frame 522. In an embodiment, the second spacer frame 524 is part of a structure that is separate from the structure that includes the first spacer frame 522.

[0052] The anchor 526 is used to connect the spacer 520 or a portion thereof to at least one of the box top 504 or the box door 506. The anchor can be configured to engage with any suitable feature of the box top 504 or the box door 506 so that the position of the spacer 520 or a portion thereof (e.g., the first spacer frame 522 and / or the second spacer frame 524) can be maintained. Figure 5 In the illustrated embodiment, the anchor 526 is configured to engage with a support post 530 disposed on the box door 506. The anchor 526 may be configured to engage with features inherently included in the box top 504 or the box door 506 and / or features specifically included in the box top 504 or the box door 506 for engaging with the anchor 526. The features may include any mechanical engagement features, such as posts, flanges, grooves, lugs, shoulders, and the like. In an embodiment, the first one or more anchors 526 are configured to position the first spacer frame 522, and the second one or more anchors 526 are configured to position the second spacer frame 524.

[0053] aspect:

[0054] It should be understood that any of aspects 1 to 7 may be combined with any of aspects 8 to 15 or aspects 16 to 20. It should be understood that any of aspects 8 to 15 may be combined with any of aspects 16 to 20.

[0055] Aspect 1. A spacer for a reticle box, comprising:

[0056] a plurality of spaced contacts, each of the spaced contacts being configured to contact a first reticle pod segment at a first reticle pod feature and a second reticle pod segment at a second reticle pod feature, wherein the first reticle pod feature is external to a first sealing surface of the first reticle pod segment and the second reticle pod feature is external to a second sealing surface of the second reticle pod segment; and

[0057] a frame body connecting at least two of the plurality of spaced contacts, the frame body being configured to be outside the first sealing surface and the second sealing surface in a plan view of the reticle box,

[0058] Wherein the spacing contact is configured to contact the first reticle pod segment and the second reticle pod segment such that the first reticle pod segment and the second reticle pod segment are separated by a gap.

[0059] Aspect 2. The spacer according to aspect 1, wherein the plurality of spacer contacts includes at least three of the spacer contacts.

[0060] Aspect 3. The spacer according to any one of aspects 1 to 2, wherein the frame connects all of the plurality of spacer contacts.

[0061] Aspect 4. The spacer according to any one of aspects 1 to 3, wherein the frame includes at least one spring arm configured to allow the frame to deflect so that the distance between the plurality of spaced contacts varies.

[0062] Aspect 5. The spacer of any one of aspects 1 to 4, wherein each of the spacing contacts includes an inner surface defining an opening configured to receive the first reticle pod feature and an outer surface configured to be received within the second reticle pod feature.

[0063] Aspect 6. The spacer according to any one of aspects 1 to 5, wherein the gap has a width in the range from 20 μm to 1 mm.

[0064] Aspect 7. The spacer according to any one of aspects 1 to 6, wherein the spacer comprises at least one of polycarbonate and polyolefin.

[0065] Aspect 8. A reticle box comprising:

[0066] an inner box comprising a lid and a bottom panel, the lid comprising a lid sealing surface and a plurality of lid features external to the lid sealing surface, the bottom panel comprising a bottom panel sealing surface and a plurality of bottom panel features external to the bottom panel sealing surface; and

[0067] A spacer, the spacer comprising:

[0068] a plurality of spaced contacts, each of the spaced contacts being configured to contact one of the plurality of lid features and to contact one of the plurality of base features; and

[0069] a frame body connecting at least two of the plurality of spaced contacts, the frame body being configured to be outside the cover sealing surface and the base sealing surface in a plan view of the reticle box,

[0070] wherein the spacing contacts are configured to contact the cover and the base plate such that the cover and the base plate are separated by a gap.

[0071] Aspect 9. The reticle pod of aspect 8, wherein the plurality of spaced contacts includes at least three of the spaced contacts.

[0072] Aspect 10. The reticle pod according to any one of aspects 8 to 9, wherein the frame connects all of the plurality of spacer contacts.

[0073] Aspect 11. The reticle pod according to any one of aspects 8 to 10, wherein the frame comprises at least one spring arm configured to allow deflection of the frame.

[0074] Aspect 12. The reticle pod of any one of aspects 8 to 11, wherein the cover feature is a pin and the base plate feature is a channel configured to receive the pin, the channel including a lead-in end.

[0075] Aspect 13. The reticle pod of aspect 12, wherein each of the spaced contacts includes an inner surface defining an opening configured to receive the pin and an outer surface configured to be received within the lead-in end.

[0076] Aspect 14. The reticle pod according to any one of aspects 8 to 13, wherein the gap has a width in a range from 20 μm to 1 mm.

[0077] Aspect 15. The reticle box according to any one of aspects 8 to 14, further comprising an outer box including a box top and a box door, the outer box being configured to accommodate the inner box.

[0078] Aspect 16. A method of preparing a reticle pod for shipping, comprising:

[0079] Assembling an inner box, the inner box comprising a cover, a bottom plate, and a spacer disposed between the cover and the bottom plate, the spacer comprising a plurality of spacer contacts contacting the cover at a cover feature outside a cover sealing surface and the spacer contacting the bottom plate at a bottom plate feature outside a bottom plate sealing surface and a frame connecting at least two of the plurality of spacer contacts;

[0080] The cover and the bottom plate are separated by a gap.

[0081] Aspect 17. The method of aspect 16, wherein the frame includes a deflection arm, and assembling the inner box includes deflecting the frame at the deflection arm to align at least one of the plurality of spaced contacts with one of the cover features or one of the bottom plate features.

[0082] Aspect 18. The method according to any one of aspects 16 to 17, wherein the gap has a width in the range from 20 μm to 1 mm.

[0083] Aspect 19. A method according to any one of Aspects 16 to 18, wherein the cover features are each pins, the base features are each channels including an introduction end, and assembling the inner box includes passing each of the pins through one of the spacer contacts and inserting each of the spacer contacts into one of the introduction ends.

[0084] Aspect 20. The method according to any one of aspects 16 to 19, further comprising:

[0085] Put the inner box into the outer box, wherein the outer box includes a box top and a box door;

[0086] connecting the box top to the box door to enclose the inner box; and

[0087] When the cassette top is coupled to the cassette door, the reticle cassette is transported from a packing location to a destination location.

[0088] The examples disclosed in this application should be considered in all respects as illustrative and not restrictive. The scope of the invention is indicated by the appended claims rather than the above description; and all changes within the equivalent meaning and range of the claims are intended to be included therein.

Claims

1. A spacer for a reticle box, comprising: a plurality of spaced contacts, each of the spaced contacts configured to contact a first reticle pod segment at a first reticle pod feature and a second reticle pod segment at a second reticle pod alignment, wherein the first reticle pod feature is external to a first sealing surface of the first reticle pod segment and the second reticle pod feature is external to a second sealing surface of the second reticle pod segment; and a frame connecting at least two of the plurality of spacer contacts, Wherein the spacing contact is configured to contact the first reticle pod segment and the second reticle pod segment such that the first reticle pod segment and the second reticle pod segment are separated by a gap. 2 . The spacer according to claim 1 , wherein the frame is configured to be outside the first sealing surface and the second sealing surface. 3 . The spacer according to claim 1 , wherein the frame connects all of the plurality of spacer contacts. 4 . The spacer of claim 1 , wherein the frame comprises at least one spring arm configured to allow the frame to deflect such that a distance between the plurality of spaced contacts varies.

5. The spacer of claim 1, wherein each of the spacer contacts comprises an inner surface defining an opening configured to receive the first reticle pod feature and an outer surface configured to be received within the second reticle pod feature.

6. The spacer of claim 1, further comprising a lift arm extending from the frame, wherein the lift arm comprises a flexible arm having a lift contact.

7. A mask box, comprising: an inner box including a lid and a bottom panel, the lid including a lid sealing surface and a plurality of lid features outside the lid sealing surface, the bottom panel including a bottom panel sealing surface and a plurality of bottom panel features outside the bottom panel sealing surface; and A spacer, the spacer comprising: a plurality of spaced contacts, each of the spaced contacts being configured to contact one of the plurality of lid features and to contact one of the plurality of base features; and a frame connecting at least two of the plurality of spacer contacts, wherein the spacing contacts are configured to contact the cover and the base plate such that the cover and the base plate are separated by a gap.

8. The reticle box according to claim 7, wherein the frame is configured to be outside the first sealing surface and the second sealing surface.

9. The reticle pod of claim 7, wherein the frame comprises at least one spring arm configured to allow the frame to deflect.

10. The reticle pod of claim 7, wherein the cover feature is a pin and the base plate alignment is a channel configured to receive the pin, the channel including a lead-in end.

11. The reticle pod of claim 10, wherein each of the spaced contacts comprises an inner surface defining an opening configured to receive the pin and an outer surface configured to be received within the lead-in end.

12. The reticle pod of claim 7, wherein the spacer comprises a lift arm extending from the frame.

13. The reticle pod of claim 12, wherein the lift arm comprises a flexible arm having a lift contact positioned so that the lift contact can contact the cover.

14. The reticle box of claim 7, further comprising an outer box including a box top and a box door, the outer box being configured to accommodate the inner box.

15. A method of preparing a reticle pod for shipping, comprising: Assembling an inner box, the inner box comprising a cover, a bottom plate, and a spacer disposed between the cover and the bottom plate, the spacer comprising a plurality of spacer contacts contacting the cover at a cover feature outside a cover sealing surface and the spacer contacting the bottom plate at a bottom plate feature outside a bottom plate sealing surface and a frame connecting at least two of the plurality of spacer contacts; The cover and the bottom plate are separated by a gap.

16. The method of claim 15, wherein the frame includes a deflection arm, and assembling the inner box includes deflecting the frame at the deflection arm to align at least one of the plurality of spaced contacts with one of the cover features or one of the floor features.

17. The method of claim 15, wherein the spacer comprises a lift arm extending from the frame.

18. The method of claim 17, wherein the lift arm comprises a flexible arm having a lift contact positioned so that the lift contact can contact the cover.

19. The method of claim 16, wherein the cover features are each a pin, the base features are each a channel including a lead-in end, and assembling the inner box includes passing each of the pins through one of the spacer contacts and inserting each of the spacer contacts into one of the lead-in ends.

20. The method of claim 16, further comprising: Put the inner box into the outer box, wherein the outer box includes a box top and a box door; connecting the box top to the box door to enclose the inner box; and When the cassette top is coupled to the cassette door, the reticle cassette is transported from a packing location to a destination location.

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