A chamber door rotating device for supporting and rotating a vacuum chamber arranged side by side

Abstract

The application discloses a cavity door rotating device for supporting and placing vacuum cavities side by side, relates to the technical field of vacuum cavity door rotation, and comprises left vacuum cavities, right vacuum cavities and a rotating mechanism; a left cavity door is rotationally arranged on the left vacuum cavity; a right cavity door is rotationally arranged on the right vacuum cavity; the rotating mechanism comprises first rotating components, second rotating components, a driving device and a vacuumizing mechanism; adjacent two groups of control valves are fixed by electric telescopic rods, fixed rods, fixed blocks and fixed seats; a rotary clamping air cylinder and a contact block are used for tensioning or relaxing the left cavity door or the right cavity door; a rotating motor, a speed reducer, first rotating shaft pieces, first rotating shaft supports, second rotating shaft pieces and second rotating shaft supports are used for rotating the left cavity door or the right cavity door by 180 degrees, so that space is saved in the open state of the cavity door, a plurality of groups of vacuum cavities are three-dimensionally stacked, and the space utilization rate and the production capacity of a semiconductor clean room space are improved.

Description

Technical Field

[0001] This invention belongs to the field of vacuum cavity door rotation technology, specifically a cavity door rotation device that supports side-by-side placement of vacuum cavities. Background Technology

[0002] A vacuum chamber is a sealed container that can maintain a certain degree of vacuum. Its internal space can be evacuated to a vacuum state. A vacuum chamber provides an environment free from gas interference for conducting various physical, chemical, or biological experiments. Vacuum chambers are widely used in semiconductor manufacturing, vacuum coating, material processing, and other fields. The cleanroom space in semiconductor manufacturing is a crucial component of the semiconductor manufacturing process. It provides a highly controlled environment to ensure the production quality of semiconductor chips. Vacuum chambers are required in cleanroom spaces during semiconductor manufacturing.

[0003] In existing semiconductor cleanrooms, vacuum chambers are typically used in conjunction with robots for handling. However, due to the limited space in semiconductor cleanrooms, and the fact that the number of vacuum chambers is directly linked to production capacity (more vacuum chambers mean more samples or products can be processed simultaneously, thus directly increasing overall production capacity), the use of multiple vacuum chambers placed vertically with door opening angles of 90-180 degrees, or horizontally with door opening angles of ≤90 degrees, results in a large space occupied by the vacuum chambers when the doors are open. This reduces the utilization rate of semiconductor cleanroom space and fails to meet the needs of users. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art; to this end, the present invention proposes a cavity door rotation device that supports side-by-side placement of vacuum cavities.

[0005] A cavity door rotation device for supporting side-by-side placement of vacuum chambers includes several sets of left vacuum chambers, a right vacuum chamber arranged side-by-side with the left vacuum chambers, and a rotation mechanism. The sets of left and right vacuum chambers are arranged in rows on a support frame. Both the left and right vacuum chambers are sealed metal containers used to bear negative pressure. A left cavity door is rotatably mounted on each left vacuum chamber, and a right cavity door is rotatably mounted on each right vacuum chamber. The rotation mechanism includes a first rotation component mounted on one side of the left vacuum chamber, a second rotation component mounted on one side of the right vacuum chamber, and two sets of rotating components positioned between the left and right vacuum chambers, respectively controlling the rotation of the first and second rotation components. A driving device for the operation of the components; the first rotating component and the second rotating component are offset, the first rotating component is detachably connected to the left cavity door, and the second rotating component is detachably connected to the right cavity door. The driving device controls the left cavity door to rotate 180 degrees on the left vacuum cavity through the first rotating component and controls the right cavity door to rotate 180 degrees on the right vacuum cavity through the second rotating component, so that the staff can easily access the inside of the cavity from various angles, which is convenient for various complex operations and maintenance work; both the left vacuum cavity and the right vacuum cavity are provided with a vacuum pumping mechanism, which can perform vacuum pumping operation on the left vacuum cavity or the right vacuum cavity.

[0006] As a further aspect of the present invention: the first rotating assembly includes two sets of first rotating shaft brackets disposed on the left vacuum chamber and a first rotating shaft component rotatably connected to the first rotating shaft brackets. The driving device is detachably installed on the lower end face of the upper first rotating shaft bracket and controls the first rotating shaft component to rotate 180 degrees.

[0007] As a further aspect of the present invention: the second rotating assembly includes two sets of second rotating shaft brackets disposed on the right cavity door and a second rotating shaft component rotatably disposed on the second rotating shaft brackets. The second rotating shaft brackets are disposed on the first rotating shaft brackets. The driving device is detachably installed on the upper end face of the lower second rotating shaft bracket and controls the second rotating shaft component to rotate 180 degrees. The outer surface of the left cavity door can fit against the outer surface of the right cavity door.

[0008] As a further aspect of the present invention: both the first rotating shaft bracket and the second rotating shaft bracket are in the shape of an "L"; the first rotating shaft bracket is provided with a first connecting member for connecting the first rotating shaft; the second rotating shaft bracket is provided with a second connecting member for connecting the second rotating shaft; and both the first rotating shaft and the second rotating shaft are in the shape of a "b".

[0009] As a further aspect of the present invention: the two sets of driving devices are symmetrically arranged between the left vacuum chamber and the right vacuum chamber. The driving device includes a rotary motor and a reducer connected to the rotary motor. The two sets of reducers are respectively mounted on the first rotating shaft support and the second rotating shaft support.

[0010] As a further aspect of the present invention: cylinder brackets can be detachably installed on the other side of the left vacuum chamber and the other side of the right vacuum chamber. Rotary clamping cylinders for closing the left and right chamber doors can be detachably installed on the cylinder brackets. The output shaft of the rotary clamping cylinder is detachably provided with a contact block. The rotary clamping cylinder is an actuating component capable of performing both forward and backward and rotational movements. The rotary clamping cylinder and the contact block cooperate to tighten the left and right chamber doors, so that the left chamber door is sealed to the left vacuum chamber and the right chamber door is sealed to the right vacuum chamber.

[0011] As a further aspect of the present invention: the vacuuming mechanism includes a vacuuming device disposed on the rear side of the left vacuum chamber and the right vacuum chamber, a first suction branch pipe disposed on one side of the left vacuum chamber and one side of the right vacuum chamber respectively, a control valve connected to the first suction branch pipe, and a gas guide connecting the two sets of control valves. One set of control valves in the left vacuum chamber and the right vacuum chamber is initially open, and the other set is initially closed. Mounting components for fixing the control valves are disposed on both the left and right vacuum chambers. The gas guide consists of a first gas guide pipe and two sets of second gas guide pipes. The second gas guide pipe sets are L-shaped. One end of the second gas guide pipe is connected to the lower end of the control valve, and the other end of the second gas guide pipe is connected to the first gas guide pipe. The vacuuming device is provided with a second suction branch pipe and a main suction pipe connected to the second suction branch pipe. One end of the gas guide is vertically provided with a connecting pipe detachably connected to the main suction pipe.

[0012] As a further aspect of the present invention: the vacuuming mechanism further includes a fixed seat disposed on one set of control valves, a fixed block disposed on another set of control valves, and an electric telescopic rod detachably mounted on one side of the fixed seat. A fixing rod for fixing or removing the fixed block is mounted on the output shaft of the electric telescopic rod. One side of the fixed block and one side of the fixed seat are respectively in contact with the outer walls of the two sets of control valves. The end of the fixed block near the fixed seat is cylindrical. The fixed seat has a fixing groove that matches the fixed block. The fixed block has a fixing hole that connects to the fixing rod. The fixed seat and the fixed block cooperate to enable a stable connection between the two sets of control valves and to stably position the left vacuum chamber and the right vacuum chamber, preventing the left vacuum chamber and the right vacuum chamber from shifting when subjected to external forces, thereby preventing damage to the rotating mechanism.

[0013] As a further aspect of the present invention: the control valve is provided with a handle block for controlling the rotation of the valve core, and the vacuuming mechanism further includes a drive motor detachably mounted on the other side of the fixed base, a first gear detachably connected to the output shaft of the drive motor, and a second gear detachably mounted on the handle block. The first gear meshes with two sets of second gears respectively, and the drive motor controls the rotation of the handle block through the first gear and the second gear, thereby controlling the opening and closing of the control valve.

[0014] As a further aspect of the present invention: pneumatic valves can be detachably installed on the rear side of both the left vacuum chamber and the rear side of the right vacuum chamber. The pneumatic valves enable the left vacuum chamber or the right vacuum chamber to communicate with the outside. Several sets of left vacuum chambers and several sets of right vacuum chambers are aligned from top to bottom, and the length of several sets of connecting pipes gradually decreases from top to bottom.

[0015] Compared with the prior art, the beneficial effects of the present invention are:

[0016] (1) The present invention, through the set rotation mechanism, electric telescopic rod, fixed rod, fixed block and fixed seat can fix two adjacent control valves, the rotation clamping cylinder and contact block can tighten or loosen the left cavity door or the right cavity door, the rotation motor, reducer, first rotating shaft, first rotating shaft support, second rotating shaft and second rotating shaft support can make the left cavity door or the right cavity door rotate 180 degrees to open, thereby saving space when the cavity door is open, thereby enabling several vacuum cavities to be stacked three-dimensionally, improving the space utilization rate of semiconductor cleanroom space, and improving the production capacity of semiconductor cleanroom space;

[0017] (2) The present invention, through the vacuuming mechanism, the fixed seat, the fixed block, the electric telescopic rod and the fixed rod can fix two adjacent sets of control valves together, so that the left vacuum chamber and the right vacuum chamber are stably placed, avoiding the displacement of the left vacuum chamber and the right vacuum chamber when subjected to external forces, thereby causing damage to the rotating mechanism. The drive motor, the first gear, the second gear and the handle block can open and close the control valve. The vacuuming equipment, the first suction branch pipe, the control valve, the air guide, the connecting pipe, the main suction pipe and the second suction branch pipe can perform vacuuming work on either the left vacuum chamber and the right vacuum chamber without the need to connect or disconnect the vacuuming equipment from the left vacuum chamber or the right vacuum chamber, thereby improving the vacuuming efficiency of the vacuum chamber. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0019] Figure 2 This is a partial structural diagram of the rotating mechanism in this invention.

[0020] Figure 3 In this invention Figure 2 Enlarged view of point A in the middle.

[0021] Figure 4 This is a top view of the left vacuum chamber, right vacuum chamber, and vacuum pumping mechanism in this invention.

[0022] Figure 5 This is a partial structural diagram of the vacuum pumping mechanism in this invention.

[0023] Figure 6 This is a partial structural diagram of the fixed base and the first gear in this invention.

[0024] Figure 7 This is a partial structural diagram of the fixed base and the electric telescopic rod in this invention.

[0025] In the diagram: 1. Left vacuum chamber; 2. Right vacuum chamber; 3. Left chamber door; 4. Right chamber door; 5. First rotating shaft support; 6. First rotating shaft; 7. Second rotating shaft support; 8. Second rotating shaft; 9. Rotary motor; 10. Reducer; 11. Cylinder support; 12. Rotary clamping cylinder; 13. Contact block; 14. Vacuum pumping equipment; 15. First suction branch pipe; 16. Control valve; 17. Air guide; 18. Second suction branch pipe; 19. Main suction pipe; 20. Fixed base; 21. Fixed block; 22. Electric telescopic rod; 23. Fixed rod; 24. Handle block; 25. Drive motor; 26. First gear; 27. Second gear; 28. Pneumatic valve; 29. ​​Connecting pipe. Detailed Implementation

[0026] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] Example 1

[0028] Please see Figure 1 - Figure 4This application provides a door rotation device for supporting side-by-side placement of vacuum chambers, including several sets of left vacuum chambers 1, right vacuum chambers 2 arranged side-by-side with the left vacuum chambers 1, and a rotation mechanism. The sets of left vacuum chambers 1 and right vacuum chambers 2 are arranged in rows on a support frame. Both the left vacuum chambers 1 and right vacuum chambers 2 are sealed metal containers used to bear negative pressure. A left door 3 is rotatably mounted on the left vacuum chamber 1, and a right door 4 is rotatably mounted on the right vacuum chamber 2. The rotation mechanism includes a first rotation component disposed on one side of the left vacuum chamber 1, a second rotation component disposed on one side of the right vacuum chamber 2, and two sets of rotating components disposed between the left vacuum chamber 1 and the right vacuum chamber 2, each controlling the first rotation. The first and second rotating components are driven by a drive device. The first and second rotating components are offset from each other. The first rotating component is detachably connected to the left cavity door 3, and the second rotating component is detachably connected to the right cavity door 4. The drive device controls the left cavity door 3 to rotate 180 degrees on the left vacuum cavity 1 through the first rotating component and controls the right cavity door 4 to rotate 180 degrees on the right vacuum cavity 2 through the second rotating component. This allows the staff to easily access the interior of the cavity from various angles, facilitating various complex operations and maintenance. Both the left vacuum cavity 1 and the right vacuum cavity 2 are equipped with a vacuum pumping mechanism, which can perform vacuum pumping operations on either the left vacuum cavity 1 or the right vacuum cavity 2.

[0029] In this invention, the first rotating component includes two sets of first rotating shaft brackets 5 disposed on the left vacuum chamber 1 and first rotating shaft members 6 rotatably connected to the first rotating shaft brackets 5. One of the two sets of first rotating shaft members 6 is driven by a drive device that can be detachably installed on the lower end face of the upper first rotating shaft bracket 5 and controls the first rotating shaft member 6 to rotate 180 degrees.

[0030] In this invention, the second rotating component includes two sets of second rotating shaft brackets 7 disposed on the right cavity door 4 and a second rotating shaft 8 rotatably disposed on the second rotating shaft brackets 7. The second rotating shaft brackets 7 are disposed on the first rotating shaft brackets 5. The driving device is detachably installed on the upper end face of the lower second rotating shaft brackets 7 and controls the second rotating shaft 8 to rotate 180 degrees. The outer surface of the left cavity door 3 can fit against the outer surface of the right cavity door 4.

[0031] In this invention, both the first rotating shaft support 5 and the second rotating shaft support 7 are L-shaped structures. The first rotating shaft support 5 is provided with a first connecting member for connecting the first rotating shaft 6, and the second rotating shaft support 7 is provided with a second connecting member for connecting the second rotating shaft 8. Both the first rotating shaft 6 and the second rotating shaft 8 are b-shaped structures.

[0032] In this invention, two sets of driving devices are symmetrically arranged between the left vacuum chamber 1 and the right vacuum chamber 2. The driving device includes a rotary motor 9 and a reducer 10 connected to the rotary motor 9. The two sets of reducers 10 are respectively installed on the first rotating shaft support 5 and the second rotating shaft support 7.

[0033] In this invention, cylinder brackets 11 can be detachably installed on the other side of the left vacuum chamber 1 and the other side of the right vacuum chamber 2. Rotary clamping cylinders 12 for closing the left chamber door 3 and the right chamber door 4 can be detachably installed on the cylinder brackets 11. The output shaft of the rotary clamping cylinder 12 is detachably provided with a contact block 13. The rotary clamping cylinder 12 is an actuating component capable of performing both forward and backward and rotational actions. The rotary clamping cylinder 12 and the contact block 13 cooperate to tighten the left chamber door 3 and the right chamber door 4, so that the left chamber door 3 is sealed to the left vacuum chamber 1 and the right chamber door 4 is sealed to the right vacuum chamber 2.

[0034] In summary, the left vacuum chamber 1 and the right vacuum chamber 2 are placed side by side. When the left vacuum chamber 1 needs to be opened, the rotary clamping cylinder 12 is activated, which moves the contact block 13, causing the contact block 13 to separate from the left chamber door 3. The rotary motor 9 is then activated, which drives the first rotating shaft 6 to rotate on the first rotating shaft support 5 via the reducer 10. This causes the first rotating shaft 6 to rotate the left chamber door 3, which in turn drives another set of first rotating shafts 6 to rotate on the first rotating shaft support 5, rotating the left chamber door 3 to 180 degrees. This causes the left chamber door 3 to fit with the right chamber door 4, opening the left vacuum chamber 1. Similarly, when the right vacuum chamber 2 needs to be opened, the rotary clamping cylinder 12 and the rotary motor 9 are activated, and the second rotating shaft 8 rotates on the second rotating shaft support 7, causing the right chamber door 4 to rotate to 180 degrees and fit with the left chamber door 3.

[0035] Example 2

[0036] Reference Figure 4 - Figure 7 This is the second embodiment of the present invention. The vacuuming mechanism includes a vacuuming device 14 disposed on the rear side of the left vacuum chamber 1 and the right vacuum chamber 2, a first suction branch pipe 15 disposed on one side of the left vacuum chamber 1 and one side of the right vacuum chamber 2 respectively, a control valve 16 connected to the first suction branch pipe 15, and a guide gas member 17 connecting the two sets of control valves 16. Initially, one set of control valves 16 in the left vacuum chamber 1 and the right vacuum chamber 2 is open, while the other set is initially closed. The vacuum chamber 1 and the right vacuum chamber 2 are both equipped with mounting parts for fixing the control valve 16. The air guide 17 consists of a first air guide pipe and two sets of second air guide pipes. The second air guide pipe sets are L-shaped. One end of the second air guide pipe is connected to the lower end of the control valve 16, and the other end of the second air guide pipe is connected to the first air guide pipe. The vacuum pumping device 14 is equipped with a second air extraction branch pipe 18 and an air extraction main pipe 19 connected to the second air extraction branch pipe 18. One end of the air guide 17 is vertically provided with a connecting pipe 29 that is detachably connected to the air extraction main pipe 19.

[0037] The vacuum mechanism of this invention further includes a fixed seat 20 mounted on a set of control valves 16, a fixed block 21 mounted on another set of control valves 16, and an electric telescopic rod 22 detachably mounted on one side of the fixed seat 20. A fixing rod 23 for fixing or removing the fixed block 21 is mounted on the output shaft of the electric telescopic rod 22. The fixed seat 21 has a through hole corresponding to the output shaft of the electric telescopic rod 22. The diameter of the output shaft of the electric telescopic rod 22 is larger than the diameter of the fixing rod 23. One side of the fixed block 21 and one side of the fixed seat 20... The sides are respectively attached to the outer walls of the two sets of control valves 16. The end of the fixing block 21 near the fixing seat 20 is cylindrical. The fixing seat 20 has a fixing groove that matches the fixing block 21. The fixing block 21 has a fixing hole that connects to the fixing rod 23. The fixing seat 20 and the fixing block 21 cooperate to make the two sets of control valves 16 stably connected and to make the left vacuum chamber 1 and the right vacuum chamber 2 stably placed, so as to avoid the left vacuum chamber 1 and the right vacuum chamber 2 from shifting when subjected to external forces, thereby causing damage to the rotating mechanism.

[0038] In this invention, the control valve 16 is provided with a handle block 24 for controlling the rotation of the valve core. The vacuuming mechanism also includes a drive motor 25 detachably mounted on the other side of the fixed base 20, a first gear 26 detachably connected to the output shaft of the drive motor 25, and a second gear 27 detachably mounted on the handle block 24. The first gear 26 meshes with two sets of second gears 27 respectively. The drive motor 25 controls the handle block 24 to rotate through the first gear 26 and the second gear 27, thereby controlling the opening and closing of the control valve 16.

[0039] In this invention, pneumatic valves 28 can be detachably installed on the rear side of the left vacuum chamber 1 and the rear side of the right vacuum chamber 2. Both the control valve 16 and the pneumatic valve 28 are Neway valves. The pneumatic valve 28 enables the left vacuum chamber 1 or the right vacuum chamber 2 to communicate with the outside. Several sets of left vacuum chambers 1 and several sets of right vacuum chambers 2 are aligned from top to bottom. The length of several sets of connecting pipes 29 gradually decreases from top to bottom.

[0040] In summary, when the left vacuum chamber 1 and right vacuum chamber 2 are aligned and placed side by side, the fixing block 21 is inserted into the fixing slot. The electric telescopic rod 22 is activated, which moves the fixing rod 23 to insert it into the fixing hole. The fixing block 21 is then fixed to the fixing seat 20. The two adjacent sets of control valves 16 are fixedly connected. The first gear 26 is meshed with the two sets of second gears 27 respectively. The left chamber door 3 is sealed to the left vacuum chamber 1, and the right chamber door 4 is sealed to the right vacuum chamber 2. When it is necessary to evacuate the left vacuum chamber 1 or the right vacuum chamber 2, the drive is activated. Motor 25 drives the first gear 26 to rotate, the first gear 26 drives two sets of second gears 27 to rotate, and the second gears 27 drive the handle block 24 to rotate, thereby opening the control valve 16 to be evacuated and starting the vacuum equipment 14. This allows air to enter the control valve 16 from the first suction branch pipe 15, and then from the control valve 16 into the air guide 17. The air then enters the main suction pipe 19 through the connecting pipe 29, and enters the vacuum equipment 14 through the second suction branch pipe 18, thereby performing vacuum evacuation on either the left vacuum chamber 1 or the right vacuum chamber 2.

[0041] Example 3

[0042] Reference Figure 1 - Figure 7 This embodiment is obtained by combining Embodiment 1 and Embodiment 2.

[0043] The electric telescopic rod 22, fixed rod 23, fixed block 21, and fixed seat 20 can fix two adjacent sets of control valves 16 together. The rotary clamping cylinder 12 and contact block 13 can tighten or loosen the left cavity door 3 or the right cavity door 4. The rotary motor 9, reducer 10, first rotating shaft 6, first rotating shaft support 5, second rotating shaft 8, and second rotating shaft support 7 can make the left cavity door 3 or the right cavity door 4 rotate 180 degrees to open. The fixed seat 20, fixed block 21, electric telescopic rod 22, and fixed seat 20 can fix two adjacent sets of control valves 16 together. The rotary clamping cylinder 12 and contact block 13 can tighten or loosen the left cavity door 3 or the right cavity door 4. The fixing rod 23 can fix two adjacent sets of control valves in place. The drive motor 25, the first gear 26, the second gear 27 and the handle block 24 can open and close the control valves. The vacuum pumping device 14, the first vacuum branch pipe 15, the control valve 16, the air guide 17, the connecting pipe 29, the main vacuum pipe 19 and the second vacuum branch pipe 18 can perform vacuuming work on either the left vacuum chamber 1 and the right vacuum chamber 2 without needing to connect or disconnect the vacuum pumping device 14 from the left vacuum chamber 1 or the right vacuum chamber 2.

[0044] The above embodiments are only used to illustrate the technical methods of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical methods of the present invention without departing from the spirit and scope of the technical methods of the present invention.

Claims

1. A cavity door rotation device for supporting side-by-side placement of vacuum chambers, characterized in that, It includes several sets of left vacuum chambers (1), a right vacuum chamber (2) arranged side by side with the left vacuum chambers (1), a rotating mechanism and a vacuum pumping mechanism; The left vacuum chamber (1) is rotatably provided with a left cavity door (3), and the right vacuum chamber (2) is rotatably provided with a right cavity door (4). The rotating mechanism includes a first rotating component disposed on one side of the left vacuum chamber (1), a second rotating component disposed on one side of the right vacuum chamber (2), and two sets of drive devices disposed between the left vacuum chamber (1) and the right vacuum chamber (2) and controlling the first rotating component and the second rotating component to work respectively; The first rotating component and the second rotating component are offset from each other. The first rotating component is detachably connected to the left cavity door (3), and the second rotating component is detachably connected to the right cavity door (4). Rotate the left cavity (3) to 180 degrees so that the left cavity (3) fits against the right cavity (4) or rotate the right cavity (4) to 180 degrees and fits against the left cavity (3); The vacuuming mechanism includes a vacuuming device (14) disposed on the rear side of the left vacuum chamber (1) and the right vacuum chamber (2), a first suction branch pipe (15) disposed on one side of the left vacuum chamber (1) and one side of the right vacuum chamber (2), a control valve (16) connected to the first suction branch pipe (15), and a guide pipe (17) connecting the two sets of control valves (16). The vacuuming device (14) is provided with a second suction branch pipe (18) and a main suction pipe (19) connected to the second suction branch pipe (18). One end of the guide pipe (17) is vertically provided with a connecting pipe (29) detachably connected to the main suction pipe (19). The vacuuming mechanism also includes a fixed seat (20) set on a set of control valves (16), a fixed block (21) set on another set of control valves (16), and an electric telescopic rod (22) detachably installed on one side of the fixed seat (20). The output shaft of the electric telescopic rod (22) is equipped with a fixing rod (23) for fixing or removing the fixed block (21). The control valve (16) is provided with a handle block (24) for controlling the valve core to rotate. The vacuuming mechanism also includes a drive motor (25) detachably mounted on the other side of the fixed base (20), a first gear (26) detachably connected to the output shaft of the drive motor (25), and a second gear (27) detachably mounted on the handle block (24). The first gear (26) meshes with two sets of second gears (27) respectively. Pneumatic valves (28) can be detachably installed on the rear side of the left vacuum chamber (1) and the rear side of the right vacuum chamber (2). Several sets of left vacuum chambers (1) and several sets of right vacuum chambers (2) are aligned from top to bottom, and the length of several sets of connecting pipes (29) gradually decreases from top to bottom.

2. The cavity door rotation device for supporting side-by-side placement of vacuum chambers according to claim 1, characterized in that, The first rotating assembly includes two sets of first rotating shaft brackets (5) disposed on the left vacuum chamber (1) and first rotating shafts (6) rotatably connected to the first rotating shaft brackets (5). The driving device is detachably installed on the lower end face of the upper first rotating shaft bracket (5) and controls the first rotating shaft (6) to rotate 180 degrees.

3. A cavity door rotation device for supporting side-by-side placement of vacuum chambers according to claim 2, characterized in that, The second rotating assembly includes two sets of second rotating shaft brackets (7) disposed on the right vacuum chamber (2) and a second rotating shaft (8) rotatably disposed on the second rotating shaft brackets (7). The second rotating shaft brackets (7) are disposed above the first rotating shaft brackets (5). The driving device is detachably installed on the upper end face of the lower second rotating shaft bracket (7) and controls the second rotating shaft (8) to rotate 180 degrees. The outer surface of the left cavity door (3) can fit with the outer surface of the right cavity door (4).

4. A cavity door rotation device for supporting side-by-side placement of vacuum chambers according to claim 3, characterized in that, The first rotating shaft bracket (5) and the second rotating shaft bracket (7) are both in the shape of an "L", and the first rotating shaft (6) and the second rotating shaft (8) are both in the shape of a "b".

5. A cavity door rotation device for supporting side-by-side placement of vacuum chambers according to claim 4, characterized in that, The two sets of drive devices are symmetrically arranged between the left vacuum chamber (1) and the right vacuum chamber (2). The drive device includes a rotary motor (9) and a reducer (10) connected to the rotary motor (9). The two sets of reducers (10) are respectively installed on the first rotating shaft support (5) and the second rotating shaft support (7).

6. A cavity door rotation device for supporting side-by-side placement of vacuum chambers according to claim 5, characterized in that, A cylinder bracket (11) can be detachably installed on the other side of the left vacuum chamber (1) and the other side of the right vacuum chamber (2). A rotary clamping cylinder (12) for closing the left chamber door (3) and the right chamber door (4) can be detachably installed on the cylinder bracket (11). A contact block (13) can be detachably provided on the output shaft of the rotary clamping cylinder (12).

Images