A device and method for recycling tetramethylammonium hydroxide

Abstract

The present application relates to the technical field of tetramethylammonium hydroxide recycling, and particularly relates to a tetramethylammonium hydroxide recycling device and method, which comprises a tank body and a partition plate arranged in the tank body; further comprises a conveying device, a cleaning device, a collecting device, a screen drum, a storage drum, a flow guide plate, a plurality of first conveying pipes and a plurality of first discharge outlets, the upper and lower ends of the screen drum are rotatably arranged between the tank body and the partition plate, the top end of the storage drum is connected with the bottom end of the partition plate, the flow guide plate is arranged between the storage drum and the tank body, the top ends of the plurality of first conveying pipes are communicatively arranged on the partition plate, the bottom ends of the plurality of first conveying pipes are in communication with the storage drum, the plurality of first discharge outlets are all communicatively arranged on the outer sidewall of the storage drum, and the plurality of first discharge outlets are provided with intercepting nets; the device can remove impurities in the tetramethylammonium hydroxide, improve the filtering efficiency, realize the purification and recycling of the tetramethylammonium hydroxide, and reduce the labor intensity of personnel in cleaning.

Description

Technical Field

[0001] This invention relates to the technical field of tetramethylammonium hydroxide recycling, and in particular to an apparatus and method for recycling tetramethylammonium hydroxide. Background Technology

[0002] Tetramethylammonium hydroxide is an important organic base widely used in semiconductor manufacturing, liquid crystal display production and other fields. However, tetramethylammonium hydroxide can become ineffective due to contamination by impurities during use. In order to save costs and reduce environmental pollution, it is of great significance to develop a device and method that can extract and purify tetramethylammonium hydroxide.

[0003] Currently, among existing equipment, such as the patent with announcement number CN202983247U, this utility model discloses a tetramethylammonium hydroxide waste liquid concentration device, including a feed pump, a flow meter, three sets of heating and evaporation devices, a discharge pump, and a finished product tank. The three sets of heating and evaporation devices include three sets, each set consisting of a preheater, a heater, and an evaporator. The preheater is connected to the heater, and the heater is connected to the evaporator. The preheaters in each of the three sets are interconnected, and the first-effect evaporator in one set is connected to the second-effect heater in the second set.

[0004] However, during the use of the equipment, it was found that it was not convenient to filter tetramethylammonium hydroxide, which increased the contamination of tetramethylammonium hydroxide with impurities and reduced the purification and recovery efficiency. Summary of the Invention

[0005] To solve the above-mentioned technical problems, the present invention provides a device and method for recycling tetramethylammonium hydroxide, which achieves the effect of removing impurities from tetramethylammonium hydroxide, improves the filtration efficiency, achieves the effect of purifying and reusing tetramethylammonium hydroxide, and reduces the labor intensity of personnel cleaning it.

[0006] This invention discloses a device for recycling tetramethylammonium hydroxide, comprising a tank and a baffle plate, the baffle plate being disposed inside the tank; it also includes a conveying device, a cleaning device, a collecting device, a screen cylinder, a storage cylinder, a guide plate, multiple sets of first conveying pipes, and multiple sets of first discharge outlets. The upper and lower ends of the screen cylinder are rotatably mounted between the tank and the baffle plate. The top end of the storage cylinder is connected to the bottom end of the baffle plate. The guide plate is disposed between the storage cylinder and the tank. The top ends of the multiple sets of first conveying pipes are connected to the baffle plate, and the bottom ends of the multiple sets of first conveying pipes are connected to the storage cylinder. The multiple sets of first discharge outlets are all connected to the outer wall of the storage cylinder, and intercepting nets are disposed inside the multiple sets of first discharge outlets. The conveying device and the cleaning device are respectively disposed on the tank. The conveying device is used to convey the material into the screen cylinder, and the cleaning device is used to... The screen cylinder is cleaned, and the collection device is connected to the tank. The collection device is used to evaporate and purify the material. By rotating the screen cylinder, the tetramethylammonium hydroxide inside is centrifugally filtered and separated. The filtered tetramethylammonium hydroxide is then transported to the storage cylinder through a partition and multiple sets of first conveying pipes. Impurities remain inside the screen cylinder, thus achieving the effect of removing impurities from the tetramethylammonium hydroxide and improving the filtration efficiency. By filling the storage cylinder with ion exchange resin, when the tetramethylammonium hydroxide flows through the ion exchange resin, it removes ionic impurities from the tetramethylammonium hydroxide, further improving the impurity removal effect. Then, the tetramethylammonium hydroxide is transported to the collection device, where it is evaporated and concentrated, achieving the effect of purifying and reusing the tetramethylammonium hydroxide.

[0007] Preferably, the conveying device includes a conveying box, a second conveying pipe, a conveying tank, a one-way inlet valve, a one-way outlet valve, a piston, a reciprocating screw, a slider, and a guide column. The conveying box is installed at the top of the tank. The bottom end of the second conveying pipe is connected to the bottom of the inner wall of the screen cylinder, and the upper part of the second conveying pipe is rotatably installed inside the conveying box. The second conveying pipe has an opening for communicating with the inside of the screen cylinder. The bottom end of the conveying tank is connected to the top end of the conveying box, and a vent is provided at the bottom of the conveying tank. The one-way inlet valve and the one-way outlet valve are respectively connected to the conveying tank. The output end of the one-way outlet valve is connected to the conveying box. The piston is slidably installed inside the conveying tank. The reciprocating screw is rotatably installed on the inner wall of the conveying tank, and the bottom end of the reciprocating screw is connected to the top end of the second conveying pipe. The slider is fitted onto the guide column. On the reciprocating screw, the top of the slider is connected to the bottom of the guide column, which is slidably mounted on the conveying tank and connected to the bottom of the piston. When the screen cylinder rotates, it drives the second conveying pipe to rotate. After the second conveying pipe rotates, it drives the reciprocating screw to rotate. After the reciprocating screw rotates, it drives the slider to move up and down repeatedly, thereby causing the slider to drive the piston to move up and down. When the piston moves downward, it conveys the tetramethylammonium hydroxide that needs to be reused into the conveying tank through the one-way inlet valve. When the piston moves upward, it conveys the tetramethylammonium hydroxide in the conveying tank into the conveying box through the one-way outlet valve. The conveying box conveys the tetramethylammonium hydroxide into the screen cylinder through the second conveying pipe, thereby causing the screen cylinder to rotate and centrifugally filter the tetramethylammonium hydroxide while conveying it, improving the working efficiency and ease of use of the equipment.

[0008] Preferably, the cleaning device includes a collection tank, a first discharge valve, a vent valve, a third conveying pipe, a collection trough, and a suction pump. The collection tank is installed on the outer wall of the tank body. The first discharge valve and the vent valve are respectively connected to the collection tank. The top end of the third conveying pipe is connected to the collection tank, and the bottom end of the third conveying pipe is connected to the collection trough. The top end of the collection trough is installed on the inner wall of the tank body. The outer wall of the collection trough is provided with an absorption port, and the absorption port of the collection trough contacts the inner wall of the screen cylinder. The suction pump is installed on the outer wall of the tank body, and the input end of the suction pump is connected to the collection tank. When the screen cylinder rotates... Impurities adhering to the inner wall of the screen cylinder are scraped off and cleaned through the absorption port of the collection tank, thus collecting the impurities in the collection tank. The suction pump is started to draw air into the collection tank, thereby creating negative pressure inside the collection tank. The impurities collected in the collection tank are then transported to the collection tank for storage through the third conveying pipe. When it is necessary to discharge the impurities in the collection tank, the vent valve and the first discharge valve are opened. After the vent valve is opened, outside air enters the collection tank. After the pressure inside the collection tank is balanced, the internal impurities are discharged through the first discharge valve, improving the convenience of use.

[0009] Preferably, the collection device includes a heating box, a second discharge valve, a condenser, and a return pipe. The heating box is connected to the tank body, the second discharge valve is connected to the heating box, the condenser is connected to the top of the heating box, the inlet of the return pipe is connected to the condenser, and the outlet of the return pipe is connected to the tank body. The purified tetramethylammonium hydroxide discharged from the storage tank is transported to the heating box through a guide plate. The tetramethylammonium hydroxide is heated and evaporated in the heating box, thereby concentrating and purifying the tetramethylammonium hydroxide. The evaporated vapor is cooled and condensed into water by the condenser and then transported to the lower part of the tank body through the return pipe, improving the convenience of condensate recycling.

[0010] Preferably, the device also includes a second outlet, cylinders, a plug, a feeding pipe, and a guide platform. The second outlet is connected to the lower part of the outer wall of the tank. Multiple sets of cylinders are installed on the inner wall of the tank, and the moving ends of the cylinders are connected to the bottom of the plug. The plug is located at the bottom opening of the storage cylinder. The guide platform is located at the bottom of the tank. The feeding pipe is connected to the outer wall of the storage cylinder. The return pipe transports condensate to the tank above the guide platform. After the ion exchange resin in the storage cylinder has been used for a period of time, the multiple sets of cylinders are controlled to move the plug downward, causing the ion exchange resin in the storage cylinder to be discharged downward into the condensate. The condensate then cleans the ion exchange resin. The cleaned ion exchange resin and condensate are discharged through the second outlet, thereby improving the convenience of cleaning before ion exchange resin regeneration and improving energy utilization. After ion exchange resin regeneration, the ion exchange resin is put back into the storage cylinder for reuse through the feeding pipe, improving the ease of use of the equipment.

[0011] Preferably, the device also includes a motor, a first gear, a gear ring, and a second gear. The motor is mounted on the outer wall of the tank, the first gear is located at the output end of the motor, the gear ring is mounted on the outer wall of the screen cylinder and meshes with the first gear, and the second gear is mounted on the power input end of the suction pump and meshes with the gear ring. The motor drives the gear ring to rotate through the first gear, which in turn drives the second gear and the screen cylinder to rotate, thereby improving the linkage effect of the equipment, increasing work efficiency, and reducing power drive costs.

[0012] Preferably, it also includes a spiral blade, which is rotatably installed on the upper part of the inner side wall of the storage cylinder, and the top of the spiral blade is connected to the bottom of the screen cylinder; after the screen cylinder rotates, it drives the spiral blade to rotate, thereby causing the spiral blade to convey the tetramethylammonium hydroxide entering the storage cylinder downward, thereby improving the flowability of the tetramethylammonium hydroxide when passing through the ion exchange resin.

[0013] Preferably, it also includes a baffle plate, which is installed on the inner wall of the screen cylinder; when the screen cylinder rotates, it drives the baffle plate to rotate, so that the baffle plate drives the tetramethylammonium hydroxide in the screen cylinder to flow, thereby improving the centrifugal separation effect of tetramethylammonium hydroxide.

[0014] A preferred method for recycling tetramethylammonium hydroxide includes the following steps: S1. Adjust the pH value of the tetramethylammonium hydroxide to neutral or weakly alkaline by adding an appropriate amount of acid as needed to determine the pH value of the reusable tetramethylammonium hydroxide. S2. The tetramethylammonium hydroxide material that needs to be reused is conveyed into the screen cylinder. By rotating the screen cylinder, the tetramethylammonium hydroxide inside is centrifuged, filtered, and separated to remove impurities. S3. The centrifuged and filtered tetramethylammonium hydroxide is transported through an ion exchange resin. As the tetramethylammonium hydroxide flows through the ion exchange resin, it removes ionic impurities and releases H⁺ ions, further purifying it and improving the removal of further impurities. S4. Tetramethylammonium hydroxide is transported to a collection device, where it is evaporated and concentrated. S5. The evaporated and concentrated tetramethylammonium hydroxide is then concentrated using membrane technology to increase its concentration to industrial use standards.

[0015] Preferably, in step S1, the pH of tetramethylammonium hydroxide is adjusted to 7-9 by using hydrochloric acid or sodium hydroxide.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. The method of combining centrifugal filtration to separate particulate impurities with ion exchange resin to remove ionic impurities improves the impurity removal efficiency. 2. The evaporated steam is cooled and condensed into water for recycling, which improves the convenience of cleaning treatment before the regeneration of ion exchange resin and improves energy utilization. 3. The cleaning device removes impurities from the screen cylinder, thereby reducing the labor intensity of manual cleaning. 4. Improve the linkage effect of equipment, increase work efficiency, and reduce power drive costs. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the isometric structure of the present invention; Figure 2 This is an isometric structural diagram of the connection between the tank body and the baffles, etc. Figure 3 This is a partial isometric structural diagram of the connection between the storage cylinder and the first delivery pipe, etc. Figure 4 This is a partial isometric structural diagram of the connection between the conveyor box and the conveyor tank, etc. Figure 5 This is a partial isometric structural diagram of the connection between the screen cylinder and the toothed ring, etc. Figure 6 This is a partial isometric structural diagram of the connection between the collection tank and the vent valve, etc. Figure 7 This is a partial isometric structural diagram of the connection between the storage cylinder and the feeding pipe, etc. Figure 8 This is a partial isometric structural diagram of the connection between the screen cylinder and the spiral blades, etc. Figure 9 This is a partial isometric structural diagram of the connection between the second delivery pipe and the spoiler, etc. Figure 10 This is a partial isometric structural diagram showing the connection between the heating box and the second discharge valve, etc.

[0018] In the attached diagram, the following are labeled: 101, tank body; 102, baffle plate; 103, screen cylinder; 104, storage cylinder; 105, guide plate; 106, first conveying pipe; 107, first discharge outlet; 201, conveying box; 202, second conveying pipe; 203, conveying tank; 204, one-way inlet valve; 205, one-way outlet valve; 206, piston; 207, reciprocating screw; 208, slider; 209, guide column; 301, collection tank; 302, first discharge valve. ; 303, Vent valve; 304, Third conveying pipe; 305, Collection tank; 306, Suction pump; 401, Heating box; 402, Second discharge valve; 403, Condenser; 404, Return pipe; 501, Second discharge outlet; 502, Cylinder; 503, Plug; 504, Feeding pipe; 505, Guide platform; 601, Motor; 602, First gear; 603, Gear ring; 604, Second gear; 701, Spiral blade; 801, Baffle plate. Detailed Implementation

[0019] To facilitate understanding of the present invention, a more complete description will be given below with reference to the accompanying drawings. The present invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete. Example 1

[0020] An apparatus for recycling tetramethylammonium hydroxide according to the present invention includes a tank 101 and a partition 102, the partition 102 being disposed inside the tank 101; it also includes a conveying device, a cleaning device, a collecting device, a screen cylinder 103, a storage cylinder 104, a guide plate 105, multiple sets of first conveying pipes 106, and multiple sets of first discharge outlets 107. The upper and lower ends of the screen cylinder 103 are rotatably installed between the tank 101 and the partition 102, the top end of the storage cylinder 104 is connected to the bottom end of the partition 102, and the guide plate 105 is disposed between the storage cylinder 104 and the tank 101. Between 1, the top ends of multiple sets of first conveying pipes 106 are connected to the partition plate 102, the bottom ends of multiple sets of first conveying pipes 106 are connected to the storage cylinder 104, multiple sets of first discharge outlets 107 are all connected to the outer wall of the storage cylinder 104, and interception nets are provided inside the multiple sets of first discharge outlets 107. The conveying device and the cleaning device are respectively installed on the tank body 101. The conveying device is used to convey the material into the screen cylinder 103, the cleaning device is used to clean the inside of the screen cylinder 103, and the collecting device is connected to the tank body 101. The collecting device is used to evaporate and purify the material. The conveying device includes a conveying box 201, a second conveying pipe 202, a conveying tank 203, a one-way inlet valve 204, a one-way outlet valve 205, a piston 206, a reciprocating screw 207, a slider 208, and a guide column 209. The conveying box 201 is installed at the top of the tank 101. The bottom end of the second conveying pipe 202 is connected to the bottom of the inner wall of the screen cylinder 103. The upper part of the second conveying pipe 202 is rotatably installed inside the conveying box 201. The second conveying pipe 202 has an opening for communicating with the inside of the screen cylinder 103. The bottom end of the conveying tank 203 is connected to the top end of the conveying box 201, and the conveying... A vent is provided at the bottom of the conveying tank 203. A one-way inlet valve 204 and a one-way outlet valve 205 are respectively connected to the conveying tank 203. The output end of the one-way outlet valve 205 is connected to the conveying box 201. A piston 206 is slidably installed inside the conveying tank 203. A reciprocating screw 207 is rotatably installed on the inner side wall of the conveying tank 203. The bottom end of the reciprocating screw 207 is connected to the top end of the second conveying pipe 202. A slider 208 is fitted on the reciprocating screw 207. The top end of the slider 208 is connected to the bottom end of the guide column 209. The guide column 209 is slidably installed on the conveying tank 203 and connected to the bottom end of the piston 206. In this embodiment, the tetramethylammonium hydroxide material to be reused is conveyed to the inside of the screen cylinder 103 by a conveying device. By rotating the screen cylinder 103, the tetramethylammonium hydroxide inside is centrifugally filtered and separated. The filtered tetramethylammonium hydroxide is then conveyed to the inside of the storage cylinder 104 through the guide plate 102 and multiple sets of first conveying pipes 106. Impurities remain inside the screen cylinder 103, thereby achieving the impurity removal effect of tetramethylammonium hydroxide and improving the filtration efficiency. By filling the storage cylinder 104 with ion exchange resin, when tetramethylammonium hydroxide flows through the ion exchange resin, it removes ionic impurities from the tetramethylammonium hydroxide, further improving the impurity removal effect. Then, the tetramethylammonium hydroxide is conveyed to the collection device, where it is evaporated and concentrated to achieve the purification and reuse effect of tetramethylammonium hydroxide. The screen cylinder 103 is then cleaned by a cleaning device. The impurities inside the screen cylinder 103 are cleaned, thus reducing the labor intensity of personnel cleaning it. When the screen cylinder 103 rotates, it drives the second conveying pipe 202 to rotate. After the second conveying pipe 202 rotates, it drives the reciprocating screw 207 to rotate. After the reciprocating screw 207 rotates, it drives the slider 208 to move up and down reciprocally. This causes the slider 208 to drive the piston 206 to move up and down. When the piston 206 moves downward, it conveys the tetramethylammonium hydroxide that needs to be reused to the conveying tank 203 through the one-way inlet valve 204. When the piston 206 moves upward, it conveys the tetramethylammonium hydroxide in the conveying tank 203 to the conveying box 201 through the one-way discharge valve 205. The conveying box 201 conveys the tetramethylammonium hydroxide to the screen cylinder 103 through the second conveying pipe 202. This makes the screen cylinder 103 rotate, centrifugally filtering the tetramethylammonium hydroxide while conveying it, improving the working efficiency and ease of use of the equipment. Example 2

[0021] Based on Example 1, the present invention provides a device for recycling tetramethylammonium hydroxide. The cleaning device includes a collection tank 301, a first discharge valve 302, a vent valve 303, a third conveying pipe 304, a collection trough 305, and a suction pump 306. The collection tank 301 is installed on the outer wall of the tank body 101. The first discharge valve 302 and the vent valve 303 are respectively connected to the collection tank 301. The top end of the third conveying pipe 304 is connected to the collection tank 301, and the bottom end of the third conveying pipe 304 is connected to the collection trough 305. The top end of the collection trough 305 is installed on the inner wall of the tank body 101. The outer wall of the collection trough 305 is provided with an absorption port, and the absorption port of the collection trough 305 is in contact with the inner wall of the screen cylinder 103. The suction pump 306 is installed on the outer wall of the tank body 101, and the input end of the suction pump 306 is connected to the collection tank 301. The collection device includes a heating box 401, a second discharge valve 402, a condenser 403, and a return pipe 404. The heating box 401 is connected to the tank 101. The second discharge valve 402 is connected to the heating box 401. The condenser 403 is connected to the top of the heating box 401. The input end of the return pipe 404 is connected to the condenser 403, and the output end of the return pipe 404 is connected to the tank 101. It also includes a second outlet 501, a cylinder 502, a plug 503, a feeding pipe 504, and a guide platform 505. The second outlet 501 is connected to the lower part of the outer wall of the tank 101. Multiple sets of cylinders 502 are installed on the inner wall of the tank 101. The moving ends of the multiple sets of cylinders 502 are connected to the bottom end of the plug 503. The plug 503 is located at the bottom opening of the storage cylinder 104. The guide platform 505 is located at the bottom of the tank 101. The feeding pipe 504 is connected to the outer wall of the storage cylinder 104. It also includes a motor 601, a first gear 602, a gear ring 603, and a second gear 604. The motor 601 is mounted on the outer wall of the tank 101, the first gear 602 is located on the output end of the motor 601, the gear ring 603 is mounted on the outer wall of the screen cylinder 103 and meshes with the first gear 602, and the second gear 604 is mounted on the power input end of the air pump 306 and meshes with the gear ring 603. It also includes a spiral blade 701, which is rotatably mounted on the upper part of the inner side wall of the storage cylinder 104, and the top end of the spiral blade 701 is connected to the bottom end of the screen cylinder 103. It also includes a baffle plate 801, which is installed on the inner wall of the screen cylinder 103; In this embodiment, when the screen cylinder 103 rotates, it drives the second conveying pipe 202 to rotate. After the second conveying pipe 202 rotates, it drives the reciprocating screw 207 to rotate. After the reciprocating screw 207 rotates, it drives the slider 208 to move up and down reciprocally. This causes the slider 208 to drive the piston 206 to move up and down. When the piston 206 moves downward, it conveys the tetramethylammonium hydroxide to be reused into the conveying tank 203 through the one-way inlet valve 204. When the piston 206 moves upward, it conveys the tetramethylammonium hydroxide in the conveying tank 203 into the conveying box 201 through the one-way outlet valve 205. The conveying box 201 conveys the tetramethylammonium hydroxide into the screen cylinder 103 through the second conveying pipe 202. This causes the screen cylinder 103 to rotate, centrifugally filtering the tetramethylammonium hydroxide while simultaneously conveying it. This improves the working efficiency and ease of use of the equipment. When the screen cylinder 103 rotates, the impurities attached to the inner wall of the screen cylinder 103 are scraped and cleaned through the absorption port of the collection tank 305, so that the collection tank 305 collects the impurities. The suction pump 306 is started to suck air into the collection tank 301, so that the collection tank 301 generates negative pressure and then sucks the collection tank 305 through the third conveying pipe 304, so that the impurities collected in the collection tank 305 are transported to the collection tank 301 for storage. When it is necessary to discharge the impurities in the collection tank 301, the vent valve 303 and the first discharge valve 302 are opened. After the vent valve 303 is opened, the outside air enters the collection tank 301. After the pressure in the collection tank 301 is balanced, the internal impurities are discharged through the first discharge valve 302, improving the ease of use. Example 3

[0022] A method for recycling tetramethylammonium hydroxide according to the present invention includes the following steps: S1. Adjust the pH value of the tetramethylammonium hydroxide to neutral or weakly alkaline by adding an appropriate amount of acid as needed to determine the pH value of the reusable tetramethylammonium hydroxide. S2. The tetramethylammonium hydroxide material that needs to be reused is conveyed into the screen cylinder 103. By rotating the screen cylinder 103, the tetramethylammonium hydroxide inside the screen cylinder 103 is centrifuged and filtered to separate and remove impurities. S3. The centrifuged and filtered tetramethylammonium hydroxide is transported through an ion exchange resin. As the tetramethylammonium hydroxide flows through the ion exchange resin, it removes ionic impurities and releases H⁺ ions, further purifying it and improving the removal of further impurities. S4. Tetramethylammonium hydroxide is transported to a collection device, where it is evaporated and concentrated. S5. The evaporated and concentrated tetramethylammonium hydroxide is then concentrated using membrane technology to increase its concentration to industrial use standards. In S1, the pH value of tetramethylammonium hydroxide is adjusted to 7-9 by using hydrochloric acid or sodium hydroxide.

[0023] like Figures 1 to 10 As shown, the present invention discloses a device and method for recycling tetramethylammonium hydroxide. During operation, the tetramethylammonium hydroxide material to be recycled is conveyed to the inside of a screen cylinder 103 via a conveying device. By rotating the screen cylinder 103, the tetramethylammonium hydroxide inside is centrifugally filtered and separated. The filtered tetramethylammonium hydroxide is then guided to the inside of a storage cylinder 104 through a partition 102 and multiple sets of first conveying pipes 106. Impurities remain inside the screen cylinder 103, thereby achieving the effect of removing impurities from the tetramethylammonium hydroxide. By filling the storage cylinder 104 with ion exchange resin, when the tetramethylammonium hydroxide flows through the ion exchange resin, it removes ionic impurities from the tetramethylammonium hydroxide. The tetramethylammonium hydroxide is then conveyed to a collection device, where it is evaporated and concentrated, achieving the effect of purifying and reusing the tetramethylammonium hydroxide.

[0024] The main functions achieved by this invention are: 1. The method of combining centrifugal filtration to separate particulate impurities with ion exchange resin to remove ionic impurities improves the impurity removal efficiency. 2. The evaporated steam is cooled and condensed into water for recycling, which improves the convenience of cleaning treatment before the regeneration of ion exchange resin and improves energy utilization. 3. The cleaning device cleans the impurities inside the screen cylinder 103, thereby reducing the labor intensity of personnel cleaning it; 4. Improve the linkage effect of equipment, increase work efficiency, and reduce power drive costs.

[0025] The air pump 306, heating box 401, condenser 403, cylinder 502 and motor 601 of the device and method for recycling tetramethylammonium hydroxide of the present invention are commercially available. Those skilled in the industry only need to install and operate them according to the accompanying instruction manual, without requiring any creative work from those skilled in the art.

[0026] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A device for recycling tetramethylammonium hydroxide, comprising a tank (101) and a partition (102), the partition (102) being disposed inside the tank (101); characterized in that, It also includes a conveying device, a cleaning device, a collecting device, a screen cylinder (103), a storage cylinder (104), a guide plate (105), multiple sets of first conveying pipes (106), and multiple sets of first discharge outlets (107). The upper and lower ends of the screen cylinder (103) are rotatably installed between the tank body (101) and the partition plate (102). The top end of the storage cylinder (104) is connected to the bottom end of the partition plate (102). The guide plate (105) is disposed between the storage cylinder (104) and the tank body (101). The top ends of the multiple sets of first conveying pipes (106) are connected to the... On the partition (102), the bottom ends of multiple sets of first conveying pipes (106) are connected to the storage cylinder (104), and multiple sets of first outlets (107) are connected and set on the outer wall of the storage cylinder (104). An intercepting net is set inside the multiple sets of first outlets (107). The conveying device and the cleaning device are respectively set on the tank body (101). The conveying device is used to convey the material to the screen cylinder (103), and the cleaning device is used to clean the inside of the screen cylinder (103). The collecting device is connected to the tank body (101) and is used to evaporate and purify the material. The cleaning device includes a collection tank (301), a first discharge valve (302), a vent valve (303), a third conveying pipe (304), a collection trough (305), and a suction pump (306). The collection tank (301) is installed on the outer wall of the tank body (101). The first discharge valve (302) and the vent valve (303) are respectively connected to the collection tank (301). The top end of the third conveying pipe (304) is connected to the collection tank (301), and the bottom end of the third conveying pipe (304) is connected to the collection trough (305). The top end of the collection trough (305) is installed on the inner wall of the tank body (101). An absorption port is provided on the outer wall of the collection trough (305), and the absorption port of the collection trough (305) is in contact with the inner wall of the screen cylinder (103). The suction pump (306) is installed on the outer wall of the tank body (101), and the input end of the suction pump (306) is connected to the collection tank (301). It also includes a second outlet (501), a cylinder (502), a plug (503), a feeding pipe (504), and a guide platform (505). The second outlet (501) is connected to the lower part of the outer wall of the tank (101). Multiple sets of cylinders (502) are installed on the inner wall of the tank (101). The moving end of the multiple sets of cylinders (502) is connected to the bottom end of the plug (503). The plug (503) is located at the bottom opening of the storage cylinder (104). The guide platform (505) is located at the bottom of the tank (101). The feeding pipe (504) is connected to the outer wall of the storage cylinder (104).

2. The equipment for recycling tetramethylammonium hydroxide as described in claim 1, characterized in that, The conveying device includes a conveying box (201), a second conveying pipe (202), a conveying tank (203), a one-way inlet valve (204), a one-way outlet valve (205), a piston (206), a reciprocating screw (207), a slider (208), and a guide column (209). The conveying box (201) is installed at the top of the tank (101). The bottom end of the second conveying pipe (202) is connected to the bottom of the inner wall of the screen cylinder (103). The upper part of the second conveying pipe (202) is rotatably installed inside the conveying box (201). An opening is provided on the second conveying pipe (202) to connect the conveying box (201) with the screen cylinder (103). The bottom end of the conveying tank (203) is connected to the top end of the conveying box (201). A vent is provided at the bottom of the conveying tank (203). A one-way inlet valve (204) and a one-way outlet valve (205) are respectively connected to the conveying tank (203). The output end of the one-way outlet valve (205) is connected to the conveying box (201). The piston (206) is slidably installed inside the conveying tank (203). The reciprocating screw (207) is rotatably installed on the inner side wall of the conveying tank (203). The bottom end of the reciprocating screw (207) is connected to the top end of the second conveying pipe (202). The slider (208) is fitted on the reciprocating screw (207). The top end of the slider (208) is connected to the bottom end of the guide column (209). The guide column (209) is slidably installed on the conveying tank (203) and connected to the bottom end of the piston (206).

3. The equipment for recycling tetramethylammonium hydroxide as described in claim 1, characterized in that, The collection device includes a heating box (401), a second discharge valve (402), a condenser (403), and a return pipe (404). The heating box (401) is connected to the tank (101). The second discharge valve (402) is connected to the heating box (401). The condenser (403) is connected to the top of the heating box (401). The input end of the return pipe (404) is connected to the condenser (403), and the output end of the return pipe (404) is connected to the tank (101).

4. The equipment for recycling tetramethylammonium hydroxide as described in claim 1, characterized in that, It also includes a motor (601), a first gear (602), a gear ring (603), and a second gear (604). The motor (601) is mounted on the outer wall of the tank (101). The first gear (602) is located on the output end of the motor (601). The gear ring (603) is mounted on the outer wall of the screen cylinder (103) and meshes with the first gear (602). The second gear (604) is mounted on the power input end of the air pump (306) and meshes with the gear ring (603).

5. The equipment for recycling tetramethylammonium hydroxide as described in claim 1, characterized in that, It also includes a spiral blade (701), which is rotatably installed on the upper part of the inner wall of the storage cylinder (104), and the top of the spiral blade (701) is connected to the bottom of the screen cylinder (103).

6. The equipment for recycling tetramethylammonium hydroxide as described in claim 1, characterized in that, It also includes a baffle plate (801), which is installed on the inner wall of the screen cylinder (103).

7. A method for recycling tetramethylammonium hydroxide, comprising using a device for recycling tetramethylammonium hydroxide as claimed in any one of claims 1-6, characterized in that, Includes the following steps: S1. Adjust the pH value of the tetramethylammonium hydroxide to neutral or weakly alkaline by adding an appropriate amount of acid as needed to determine the pH value of the reusable tetramethylammonium hydroxide. S2. The tetramethylammonium hydroxide material that needs to be reused is conveyed into the screen cylinder (103). By rotating the screen cylinder (103), the screen cylinder (103) centrifuges and filters the tetramethylammonium hydroxide inside to remove impurities. S3. The centrifuged and filtered tetramethylammonium hydroxide is transported through an ion exchange resin. As the tetramethylammonium hydroxide flows through the ion exchange resin, it removes ionic impurities and releases H⁺ ions, further purifying it and improving the removal of further impurities. S4. Tetramethylammonium hydroxide is transported to a collection device, where it is evaporated and concentrated. S5. The evaporated and concentrated tetramethylammonium hydroxide is then concentrated using membrane technology to increase its concentration to industrial use standards.

8. The method for recycling tetramethylammonium hydroxide as described in claim 7, characterized in that, In S1, the pH value of tetramethylammonium hydroxide is adjusted to 7-9 by using hydrochloric acid or sodium hydroxide.

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