Tactile perception device for bionic body
CN119845453APending Publication Date: 2025-04-18BEIJING TASHAN TECHNOLOGY CO LTD
Patent Information
- Application Number
- CN202411739274.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-29
- Publication Date
- 2025-04-18
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Figure CN119845453A_ABST
Abstract
The invention provides a tactile sensing device for a bionic body. The tactile sensing device comprises a semiconductor wafer and a tactile sensing structure, the tactile sensing structure comprises a force transmission structure and a tactile sensing micro-nano structure array, and the tactile sensing micro-nano structure array comprises a plurality of tactile sensing micro-nano structures; a plurality of metal regions are formed on a top metal layer of the semiconductor wafer, a plurality of first metal regions of the plurality of metal regions serve as an electrode array, and the electrode array comprises a plurality of electrodes; each electrode of the plurality of electrodes corresponds to one of the plurality of tactile sensing micro-nano structures; the force transmission structure has a first contour, and the first contour enables the touch sensing device to have a bionic body or a local shape of the bionic body; the plurality of electrodes and the tactile sensing structure form a plurality of first capacitors.
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Citation Information
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