Resonant filter and manufacturing method thereof

Abstract

The embodiment of the invention discloses a resonant filter and a manufacturing method thereof. The manufacturing method comprises the step of sequentially manufacturing a first electrode structure, a piezoelectric structure and a second electrode structure in a stacked mode. A first gap is formed in the second electrode structure. First supporting blocks and second supporting blocks are manufactured on the second electrode structures, the first supporting blocks are located on the second electrodes, and the second supporting blocks are located between the two adjacent second electrodes. An etching resistance structure is manufactured on the side, away from the piezoelectric structure, of the supporting block, the piezoelectric structure and the etching resistance structure are made of different materials, the first electrode structure and the etching resistance structure are made of different materials, and the etching resistance structure is made of a non-metal material. And forming a second gap in the first electrode structure. A groove penetrating through the piezoelectric structure is manufactured on the piezoelectric structure, the groove is located between the two adjacent first electrodes, in the stacking direction of the resonant filter, the projection of the groove is located in the interval projection of the two adjacent second supporting blocks, and the etching resistance structure located at the interval is exposed out of the groove.

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