Multi-angle cleaner for magnetron sputtering vacuum chamber

Abstract

The application discloses a multi-angle cleaning device for a magnetron sputtering vacuum chamber in the field of cleaning brushes, which comprises a main shell, a transmission shaft rotatably arranged on the main shell and extending forward, a rotary drive mechanism in transmission connection with the transmission shaft, an extension rod connected to the front end of the transmission shaft, a brush head arranged at the front end of the extension rod, a grip handle arranged at the lower side of the main shell, a water pump shell arranged at the rear side of the main shell, a water pump liquid cavity arranged in the water pump shell, a piston arranged in the water pump liquid cavity, the water pump liquid cavity being connected with a water tank through a water supply pipeline, the piston being in transmission connection with the rotary drive mechanism through a clutch control mechanism, and a cleaning pipeline connected to the side of the water pump shell and corresponding to the brush head. The application has better cleaning capacity, smaller cleaning dead angle, wider cleaning use range and higher cleaning efficiency.

Description

Technical Field

[0001] This invention belongs to the field of cleaning brushes, and specifically relates to a multi-angle cleaner for a magnetron sputtering vacuum chamber. Background Technology

[0002] In existing technologies, multi-angle cleaners are widely used in various laboratories as a rigid requirement for cleaning experimental equipment. Large equipment is often difficult to clean and has many hard-to-reach areas; stubborn contaminants are poorly removed with ordinary brushes, failing to meet the requirements of demanding experiments. Magnetron sputtering vacuum chambers are generally wide cylinders with complex internal structures. During target bombardment experiments, ions move randomly within the vacuum chamber, contaminating surrounding compartments. Due to their special structure and wide chambers, cleaning with ordinary brushes is inefficient and ineffective, and ordinary cleaning methods are unsatisfactory for removing stubborn contaminants. Summary of the Invention

[0003] The purpose of this invention is to provide a multi-angle cleaner for magnetron sputtering vacuum chambers, which can achieve better cleaning capabilities for the inner walls of complex columnar structures and large instruments, smaller cleaning dead angles, a wider range of cleaning applications, and higher cleaning efficiency.

[0004] The objective of this invention is achieved as follows: A multi-angle cleaner for a magnetron sputtering vacuum chamber includes a main housing. A forward-extending drive shaft is rotatably mounted on the main housing and is connected to a rotary drive mechanism. A telescopic rod is connected to the front end of the drive shaft, and a brush head is provided at the front end of the telescopic rod. A gripping handle is provided on the lower side of the main housing, and a water pump housing is provided on the rear side of the main housing. A water pump liquid chamber is provided inside the water pump liquid chamber, and a piston is fitted inside the water pump liquid chamber. The water pump liquid chamber is connected to a water tank via a water supply pipe. The piston is also connected to the rotary drive mechanism via a clutch control mechanism. A cleaning pipe is connected to the side of the water pump housing, and the cleaning pipe is positioned corresponding to the brush head.

[0005] The method of using this invention is as follows: When the drive motor is in the off state, fill the water tank with cleaning solution, connect the power cord to the power source, press the motor switch button, the drive motor rotates, the motor drives the second spur gear to rotate, the second spur gear drives the first spur gear at the rear end of the telescopic arm to rotate, and the first spur gear drives the transmission shaft to rotate. When the pull rod is pressed down, the limit cap abuts against the front limit surface and the middle limit surface, and the limit plate presses against the limit cap to form a stable state. The lower coupling sleeve and the upper coupling sleeve merge. At this time, when the two bevel gears mesh and transmit power, they drive the lower rotating shaft to rotate synchronously through the upper rotating shaft. The two positioning pins are kept in place by inserting into the lower coupling sleeve. Inside the tank, the rotation of the lower coupling sleeve is not affected. The lower rotating shaft drives the transmission bolt to rotate, and the transmission bolt drives the piston to move back and forth in the water pump housing through the swing connecting rod. The piston's movement opens the one-way valve, and the cleaning fluid enters the water pump liquid chamber from the water tank, changing the volume of the water pump liquid chamber, drawing out the cleaning fluid, and pumping the cleaning fluid into the cleaning pipe. The cleaning fluid is sprayed out from the spray pipe and begins cleaning in conjunction with the brush head. When the pull rod is lifted upward, the limit cap abuts against the rear limit surface and the middle limit surface. The limit plate presses against the limit cap to form a stable state, the lower coupling sleeve separates from the upper coupling sleeve, and the spray pipe stops spraying water. The rotation speed of the transmission shaft is 950-1150 r / min. Compared with the prior art, the beneficial effects of the present invention are as follows: a multi-angle cleaner for magnetron sputtering vacuum chambers in the laboratory is made with an economical and practical structure, which can effectively target vacuum chambers with complex structures and has very few cleaning dead corners; the device has high applicability and is more adaptable to large machines and internal structures; after changing the rotating brush head, it is suitable for more large machines; the device has a stronger cleaning ability for large space vacuum chambers, the rotating brush head operates at multiple angles, the telescopic rod can adjust the distance, the cleaning dead corners are smaller, the application range is wider and the cleaning efficiency is higher.

[0006] As a further improvement of the present invention, the front end of the drive shaft extends out of the main housing, the drive shaft is perpendicular to the front side of the main housing, and a bevel gear and a spur gear are sequentially sleeved on the drive shaft at intervals, both the bevel gear and the spur gear being located inside the main housing.

[0007] As a further improvement of the present invention, the rotary drive mechanism includes a drive motor disposed on the upper rear side of the main housing. The output shaft of the drive motor is parallel to the transmission shaft. The output shaft of the drive motor extends forward into the main housing and is fitted with a second spur gear, which meshes with the first spur gear. The drive motor drives the two spur gears to rotate in mesh.

[0008] As a further improvement of the present invention, the main housing includes a vertical front side plate and a rear side plate that are parallel to each other, and a left side plate and a right side plate that are symmetrical to each other are respectively provided between the front side plate and the rear side plate. The upper and lower parts of the front side plate, the rear side plate, the left side plate and the right side plate are respectively provided with horizontal upper side plate and lower side plate.

[0009] As a further improvement of the present invention, the clutch control mechanism includes a front reinforcing plate and a rear reinforcing plate respectively disposed on the inner wall of the front side plate and the inner wall of the rear side plate. A horizontal base plate is disposed between the upper part of the front and rear reinforcing plates. A vertical through hole is provided on the base plate. A vertical lower rotating shaft is fitted through the through hole. A transmission bolt is fixed to the lower end of the lower rotating shaft. A swing connecting rod is hinged to the end of the transmission bolt. The water pump housing is cylindrical, and the axis of the water pump housing is perpendicular to the rear side plate. The water pump housing is internally connected to the main housing. The piston is cylindrical, and a fixed shaft is vertically disposed inside the piston. The other end of the swing connecting rod is hinged to the fixed shaft. A second through hole is provided on the rear side plate to allow the swing connecting rod to pass through. When the lower rotating shaft rotates, it drives the transmission bolt to rotate. The transmission bolt drives the piston to move back and forth inside the water pump housing through the swing connecting rod. The clutch control mechanism can control whether the upper and lower rotating shafts rotate synchronously or separately.

[0010] As a further improvement of the present invention, a horizontal mounting plate is correspondingly provided above the base plate. The length of the mounting plate is less than the length of the base plate. A bearing seat is provided on the mounting plate, and a bearing is vertically mounted inside the bearing seat. A vertical upper rotating shaft is rotatably mounted on the bearing. The upper end of the upper rotating shaft extends upward and is fitted with a bevel gear two that meshes with bevel gear one. The lower end of the upper rotating shaft extends downward and is provided with an upper coupling sleeve. Several circumferentially spaced upper coupling oblique grooves are formed on the outer periphery of the lower end of the upper coupling sleeve. The lower rotating shaft includes shaft body one, shaft body two, and shaft body three, which are distributed sequentially from top to bottom and connected as a single unit. Shaft body one, shaft body two, and shaft body three... The central axes of shafts one and three coincide. Shafts one and three are square shafts, while shaft two is a round shaft. The outer circumference of shaft two corresponds to and is movably connected to the inner wall of through hole one. A lower connecting sleeve is fitted around the outer circumference of shaft one. The lower connecting sleeve includes a sleeve one and a sleeve two that are corresponding and coaxial. Sleeve two is fitted onto shaft one and movably connected to it. The outer diameter of sleeve one is larger than the outer diameter of sleeve two. Several circumferentially spaced lower connecting shaft grooves are formed on the outer circumference of the upper end of sleeve one. Each upper connecting shaft groove corresponds to each lower connecting shaft groove. The upper connecting sleeve and the lower connecting sleeve are corresponding to each other. An annular groove is formed around the outer circumference of sleeve two. The lower connecting sleeve can move upward along shaft one to assemble with the upper connecting sleeve, so that the upper and lower rotating shafts can rotate synchronously. The lower connecting sleeve can move downward along shaft one to separate from the upper connecting sleeve, so that the upper and lower rotating shafts can rotate separately.

[0011] As a further improvement of the present invention, two symmetrical reinforcing connecting plates are vertically arranged between the mounting plate and the base plate. A limiting plate is vertically arranged between the upper parts of the two reinforcing connecting plates, parallel to the front side plate. The lower part of the limiting plate is V-shaped, and the V-shaped surface of the limiting plate forms a front limiting surface and a rear limiting surface, respectively. A middle limiting surface is provided between the front limiting surface and the rear limiting surface of the limiting plate. A mounting shaft is horizontally arranged between the two reinforcing connecting plates, and a pull rod is rotatably connected to the mounting shaft. The pull rod has a rotating hole that allows the mounting shaft to pass through. The pull rod is perpendicular to the mounting shaft, and the front end of the pull rod extends out of the front side plate. A U-shaped connecting frame is provided at the rear end of the pull rod. Horizontal positioning pins are provided on the inner sides of the left and right side plates of the connecting frame. The left and right side plates of the connecting frame are located on the left and right sides of the sleeve body two, respectively. Both locating pins are inserted into the annular groove. A vertical rod is provided on the upper side of the pull rod, and a movable limiting cap is connected to the vertical rod. The lower part of the limiting cap has an insertion hole for the vertical rod to be inserted. The upper end of the limiting cap has a hemispherical surface. The outer diameter of the limiting cap is larger than the outer diameter of the vertical rod. A compression spring is sleeved on the outer circumference of the vertical rod. The upper and lower ends of the compression spring elastically abut against the lower end face of the limiting cap and the upper side of the pull rod, respectively. The hemispherical surface of the limiting cap is corresponding to the front limiting surface, middle limiting surface, and rear limiting surface of the limiting plate. A limiting hole for the pull rod to pass through is provided on the front side plate, and the pull rod is set corresponding to the limiting hole. A symmetrical arc-shaped protective plate one and a protective plate two are provided between the mounting plate and the base plate. The protective plate one and the protective plate two are respectively set on the left and right sides of the upper coupling sleeve and the lower coupling sleeve. The front and rear limiting surfaces are flat, while the middle limiting surface is curved. When the pull rod is pressed down, the limiting cap abuts against the front and middle limiting surfaces, and the limiting plate presses down on the limiting cap to form a stable state, and the lower coupling sleeve merges with the upper coupling sleeve. When the pull rod is lifted up, the limiting cap abuts against the rear and middle limiting surfaces, and the limiting plate presses down on the limiting cap to form a stable state, the lower coupling sleeve separates from the upper coupling sleeve, and the nozzle stops spraying water.

[0012] As a further improvement of the present invention, the water supply pipe is coaxially arranged at the rear end of the water pump housing. The water pump liquid chamber is connected to the inside of the water tank via the water supply pipe. An installation bracket is provided inside the water supply pipe, and a one-way valve is installed on the installation bracket. The cleaning pipe includes a main pipe and a spray pipe. The main pipe is vertically installed on the upper side of the water supply pipe. An installation bracket is also provided inside the main pipe, and a one-way valve is also installed on the installation bracket. The spray pipe passes through the upper side plate, extends downward into the main housing, and then extends forward through the front side plate. The extended end of the spray pipe corresponds to the brush head. The spray pipe is connected to the inside of the water supply pipe via the main pipe. The transmission bolt is installed on the shaft. The one-way valve opens due to the movement of the piston, allowing cleaning fluid to enter the water pump liquid chamber from the water tank, changing the volume of the water pump liquid chamber, drawing out the cleaning fluid, and pumping the cleaning fluid into the cleaning pipe. The cleaning fluid is sprayed out from the spray pipe, cooperating with the brush head to begin cleaning.

[0013] As a further improvement of the present invention, the drive shaft is a hollow shaft, with a mounting sleeve coaxially provided at the front end of the drive shaft and the rear end of the drive shaft closed. The inner diameter of the mounting sleeve is larger than the inner diameter of the hollow drive shaft. The telescopic rod is coaxially inserted into the hollow drive shaft and movably connected to the drive shaft. The front end of the telescopic rod extends out of the mounting sleeve. A telescopic spring is coaxially provided inside the hollow drive shaft, with one end of the telescopic spring connected to the inner wall of the rear end of the hollow drive shaft. The telescopic rod is a hollow rod with a closed front end. The other end of the telescopic spring extends into the telescopic rod and connects to the inner wall of the front end of the telescopic rod. A controller is provided inside the mounting sleeve. The controller includes a top cover, with corresponding U-shaped extrusion parts and annular guide parts on the lower side of the top cover. The upper inner wall of the mounting sleeve has an opening corresponding to the top cover. Mounting slot one; mounting slot two and mounting slot three are respectively provided on the inner wall of the mounting sleeve corresponding to the extrusion component and the guide component. The lower part of mounting slot three is set through the lower side wall of the mounting sleeve. The upper cover is set in mounting slot one, and a pressing button is provided on the upper side of the upper cover. The pressing button extends out of the mounting sleeve. A control spring is provided at the bottom of mounting slot two. An extrusion part is provided at the bottom of the extrusion component, which presses down on the control spring below. The guide component is installed in mounting slot three. A limit groove is provided on the lower side wall of the telescopic rod. A stop block is provided on the extrusion component that extends into the limit groove. An inclined guide surface one is provided on the upper side of the stop block. A reset guide block is provided on the lower side of the telescopic rod. The reset guide block is attached to the extrusion component. An inclined guide surface two is provided on the lower side of the reset guide block corresponding to guide surface one. The brush head includes multiple bristles connected to the telescopic rod. Press the button down, and the extrusion spring will press down, the stop will descend, and the telescopic rod will extend forward. When you need to retract the telescopic rod, push the telescopic rod backward. The guide surface two of the reset guide block will cooperate with the guide surface one of the stop, so that the extrusion spring will press down when it descends. The reset guide block of the telescopic rod will return to the rear side of the extrusion, and the stop will block the telescopic rod, causing the telescopic rod to retract.

[0014] As a further improvement of the present invention, the grip handle is provided with a switch button for controlling the drive motor. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0016] Figure 2 This is a three-dimensional structural diagram of the left side of the present invention.

[0017] Figure 3 This is a diagram of the internal structure of the present invention.

[0018] Figure 4 for Figure 3 A magnified view of a portion of the image.

[0019] Figure 5 This is a schematic diagram of the main housing of the present invention.

[0020] Figure 6 This is a structural diagram of the protective plates 1 and 2 on the left and right sides of the upper and lower coupling sleeves.

[0021] Figure 7 This is a structural diagram of the two reinforcing connecting plates on the left and right sides of the limit cap.

[0022] Figure 8 This is a schematic diagram of the upper coupling sleeve of the upper rotating shaft.

[0023] Figure 9 This is a schematic diagram of the lower coupling sleeve of the lower rotating shaft.

[0024] Figure 10 This is a structural schematic diagram of the connecting frame.

[0025] Figure 11 This is a structural diagram of the upper rotating shaft, upper coupling sleeve, lower rotating shaft, and lower coupling sleeve.

[0026] Figure 12 This is a schematic diagram showing the separation of the upper and lower coupling sleeves.

[0027] Figure 13 for Figure 12 Enlarged view of point A in the middle.

[0028] Figure 14 This is a structural schematic diagram of the drive shaft and telescopic rod.

[0029] Figure 15 This is a diagram showing the positional relationship between the controller and the telescopic pole.

[0030] Figure 16 This is a sectional view of the drive shaft and the telescopic rod.

[0031] Figure 17 for Figure 16 Enlarged view of point B in the middle.

[0032] The components include: 1. Main housing; 1a. Front side plate; 1b. Rear side plate; 1c. Left side plate; 1d. Right side plate; 1e. Upper side plate; 1f. Lower side plate; 2. Drive shaft; 2a. Mounting sleeve; 3. Telescopic rod; 4. Brush head; 5. Grip handle; 6. Water pump housing; 6a. Water pump liquid chamber; 7. Piston; 8. Water supply pipe; 9. Water tank; 10. Cleaning pipe; 10a. Main pipe; 10b. Spray nozzle; 11. Bevel gear one; 12. Spur gear one; 13. Drive motor; 14. Spur gear two; 15. Front reinforcing plate; 16. Rear reinforcing plate; 17. Base plate; 18. Through hole one; 19. Lower rotating shaft; 19a. Shaft body one; 19b. Shaft body two; 19c. Shaft body three; 20. Drive bolt; 21. Swinging connecting rod; 22. Fixed shaft; 23. Through hole two; 24. Mounting plate; 25. Bearing seat; 25a. Bearing; 26. Upper rotating shaft; 27. Bevel gear two; 28. Upper coupling sleeve; 28a. Upper coupling inclined groove. 29 Lower coupling sleeve, 2901 Sleeve body one, 2902 Sleeve body two, 29a Lower coupling inclined groove, 30 Annular groove, 31 Reinforcing connecting plate one, 32 Limiting plate, 32a Front limiting surface, 32b Rear limiting surface, 32c Middle limiting surface, 33 Mounting shaft, 34 Tie rod, 35 Connecting frame, 35a Positioning pin, 36 Upright rod, 37 Limiting cap, 38 Compression spring, 39 Limiting hole, 40 Protective plate one, 41 Protective plate two, 42 One-way valve, 42a Mounting bracket, 43 Telescopic spring, 44 Controller, 44a Top cover, 44a1 Press button, 44b Extrusion part, 44b1 Extrusion section, 44c Guide part, 45 Mounting groove one, 46 Mounting groove two, 47 Mounting groove three, 48 Control spring, 49 Limiting groove, 50 Stop block, 50a Guide surface one, 51 Reset guide block, 51a Guide surface two, 52 Switch button. Detailed Implementation

[0033] like Figure 1-17 As shown, a magnetron sputtering vacuum chamber multi-angle cleaner includes a main housing 1. A forward-extending drive shaft 2 is rotatably mounted on the main housing 1 and is connected to a rotary drive mechanism. A telescopic rod 3 is connected to the front end of the drive shaft 2, and a brush head 4 is provided at the front end of the telescopic rod 3. A gripping handle 5 is provided on the lower side of the main housing 1, and a switch button 52 for controlling the drive motor 13 is provided on the gripping handle 5. A water pump housing 6 is provided on the rear side of the main housing 1. A water pump liquid chamber 6a is provided inside the water pump liquid chamber 6a, and a piston 7 is fitted inside the water pump liquid chamber 6a. The water pump liquid chamber 6a is connected to a water tank 9 via a water supply pipe 8. The piston 7 is also connected to the rotary drive mechanism via a clutch control mechanism. A cleaning pipe 10 is connected to the side of the water pump housing 6, and the cleaning pipe 10 is provided corresponding to the brush head 4.

[0034] The front end of the drive shaft 2 extends out of the main housing 1. The drive shaft 2 is perpendicular to the front side of the main housing 1. A bevel gear 11 and a spur gear 12, spaced apart front to back, are sequentially mounted on the drive shaft 2. Both bevel gear 11 and spur gear 12 are located inside the main housing 1. The rotary drive mechanism includes a drive motor 13 located on the upper rear side of the main housing 1. The output shaft of the drive motor 13 is parallel to the drive shaft 2. The output shaft of the drive motor 13 extends forward into the main housing 1 and is fitted with a spur gear 14, which meshes with the spur gear 12. The drive motor 13 drives the two spur gears to rotate in mesh.

[0035] The main shell 1 includes a vertical front side plate 1a and a rear side plate 1b that are parallel to each other. A left side plate 1c and a right side plate 1d that are symmetrical to each other are respectively provided between the front side plate 1a and the rear side plate 1b. A horizontal upper side plate 1e and a lower side plate 1f are respectively provided on the upper and lower parts of the front side plate 1a, the rear side plate 1b, the left side plate 1c and the right side plate 1d. The clutch control mechanism includes a front reinforcing plate 15 and a rear reinforcing plate 16 respectively disposed on the inner wall of the front side plate 1a and the inner wall of the rear side plate 1b. A horizontal base plate 17 is disposed between the upper parts of the front reinforcing plate 15 and the rear reinforcing plate 16. A through hole 18 is vertically opened on the base plate 17. A vertical lower rotating shaft 19 is disposed through the through hole 18. A transmission bolt 20 is fixed at the lower end of the lower rotating shaft 19. A swing connecting rod 21 is hinged to the end of the transmission bolt 20. The water pump housing 6 is cylindrical. The axis of the water pump housing 6 is perpendicular to the rear side plate 1b. The water pump housing 6 is connected to the interior of the main housing 1. The piston 7 is cylindrical. A fixed shaft 22 is vertically disposed inside the piston 7. The other end of the swing connecting rod 21 is hinged to the fixed shaft 22. A through hole 23 is opened on the rear side plate 1b to allow the swing connecting rod 21 to pass through. When the lower rotating shaft 19 rotates, it drives the transmission bolt 20 to rotate. The transmission bolt 20 drives the piston 7 to move back and forth in the water pump housing 6 through the swing connecting rod 21. The upper rotating shaft 26 and the lower rotating shaft 19 can be controlled to rotate synchronously or separately through the clutch control mechanism.

[0036] A horizontal mounting plate 24 is provided above the base plate 17. The length of the mounting plate 24 is less than the length of the base plate 17. A bearing seat 25 is provided on the mounting plate 24. A bearing 25a is vertically installed in the bearing seat 25. A vertical upper rotating shaft 26 is rotatably installed on the bearing 25a. The upper end of the upper rotating shaft 26 extends upward and is fitted with a bevel gear 27 that meshes with the bevel gear 11. The lower end of the upper rotating shaft 26 extends downward and is provided with an upper coupling sleeve 28. Several circumferentially spaced upper coupling grooves 28a are opened on the outer periphery of the lower end of the upper coupling sleeve 28. The lower rotating shaft 19 includes shaft body 19a, shaft body 29b, and shaft body 39c, which are distributed sequentially from top to bottom and connected as a whole. The central axes of shaft body 19a, shaft body 29b, and shaft body 39c are concentric. The shaft body 19a and shaft body 19c are both square shafts, and shaft body 2 19b is a round shaft. The outer periphery of shaft body 2 19b corresponds to and is movably connected to the inner wall of through hole 18. A lower coupling sleeve 29 is fitted on the outer periphery of shaft body 19a. The lower coupling sleeve 29 includes a sleeve body 2901 and a sleeve body 2902 that are corresponding to each other and coaxial. The sleeve body 2902 is fitted on shaft body 19a and movably connected to it. The outer diameter of sleeve body 2901 is larger than the outer diameter of sleeve body 2902. Several lower coupling inclined grooves 29a are opened on the outer periphery of the upper end of sleeve body 2901, which are arranged circumferentially. Each upper coupling inclined groove 28a is arranged in a one-to-one correspondence with each lower coupling inclined groove 29a. The upper coupling sleeve 28 and the lower coupling sleeve 29 are arranged in a corresponding manner. An annular groove 30 is opened around the outer periphery of sleeve body 2902. The lower coupling sleeve 29 can move upward along the shaft body 19a and be assembled with the upper coupling sleeve 28 to realize the synchronous rotation of the upper rotating shaft 26 and the lower rotating shaft 19; the lower coupling sleeve 29 can move downward along the shaft body 19a and be separated from the upper coupling sleeve 28, so that the upper rotating shaft 26 and the lower rotating shaft 19 can rotate separately.

[0037] Two symmetrical reinforcing connecting plates 31 are vertically arranged between the mounting plate 24 and the base plate 17. A limiting plate 32 is vertically arranged between the upper parts of the two reinforcing connecting plates 31. The limiting plate 32 is parallel to the front side plate 1a. The lower part of the limiting plate 32 is V-shaped, and the V-shaped surface of the limiting plate 32 forms a front limiting surface 32a and a rear limiting surface 32b. A middle limiting surface 32c is provided between the front limiting surface 32a and the rear limiting surface 32b of the limiting plate 32. A mounting shaft 33 is horizontally arranged between the two parts 31. A pull rod 34 is rotatably connected to the mounting shaft 33. The pull rod 34 has a rotating hole through which the mounting shaft 33 can pass. The pull rod 34 is perpendicular to the mounting shaft 33. The front end of the pull rod 34 extends out of the front side plate 1a. A U-shaped connecting frame 35 is provided at the rear end of the pull rod 34. A transverse positioning pin 35a is provided on the inner side of both the left and right side plates of the connecting frame 35. The left and right side plates of the connecting frame 35 are located on the left and right sides of the sleeve 2902, respectively. Pins 35a are inserted into the annular grooves 30 inward. A vertical rod 36 is provided on the upper side of the pull rod 34. A movable limiting cap 37 is connected to the vertical rod 36. The lower part of the limiting cap 37 has an insertion hole for the vertical rod 36 to be inserted. The upper end of the limiting cap 37 has a hemispherical surface. The outer diameter of the limiting cap 37 is larger than the outer diameter of the vertical rod 36. A compression spring 38 is fitted around the outer circumference of the vertical rod 36. The upper and lower ends of the compression spring 38 elastically abut against the lower end face of the limiting cap 37 and the upper side of the pull rod 34, respectively, limiting the movement. The hemispherical surface of the cap 37 is correspondingly set with the front limiting surface 32a, the middle limiting surface 32c and the rear limiting surface 32b of the limiting plate 32. A limiting hole 39 is opened on the front side plate 1a to allow the pull rod 34 to pass through, and the pull rod 34 is set with the limiting hole 39. A left-right symmetrical arc-shaped protective plate 40 and a protective plate 41 are provided between the mounting plate 24 and the base plate 17. The protective plate 40 and the protective plate 41 are respectively set with the left and right sides of the upper coupling sleeve 28 and the lower coupling sleeve 29. The front limiting surface 32a and the rear limiting surface 32b are flat, while the middle limiting surface 32c is an arc-shaped surface. When the pull rod 34 is pressed down, the limiting cap 37 abuts against the front limiting surface 32a and the middle limiting surface 32c, and the limiting plate 32 presses down on the limiting cap 37 to form a stable state, and the lower coupling sleeve 29 and the upper coupling sleeve 28 merge. When the pull rod 34 is lifted up, the limiting cap 37 abuts against the rear limiting surface 32b and the middle limiting surface 32c, and the limiting plate 32 presses down on the limiting cap 37 to form a stable state, and the lower coupling sleeve 29 and the upper coupling sleeve 28 separate, and the nozzle 10b stops spraying water.

[0038] The water supply pipe 8 is coaxially arranged at the rear end of the water pump housing 6. The water pump liquid chamber 6a is connected to the water tank 9 via the water supply pipe 8. The water supply pipe 8 is equipped with a mounting bracket 42a, and a one-way valve 42 is installed on the mounting bracket 42a. The cleaning pipe 10 includes a main pipe 10a and a spray pipe 10b. The main pipe 10a is vertically installed on the upper side of the water supply pipe 8. The main pipe 10a is also equipped with a mounting bracket 42a, and a one-way valve 42 is also installed on the mounting bracket 42a. The spray pipe 10b passes through the upper side plate 1e, extends downward into the main housing 1, and extends forward through the front side plate 1a. The extended end of the spray pipe 10b is set corresponding to the brush head 4. The spray pipe 10b is connected to the water supply pipe 8 via the main pipe 10a. The transmission bolt 20 is installed on the shaft 19c. The movement of piston 7 opens one-way valve 42, allowing cleaning fluid to enter the water pump liquid chamber 6a from water tank 9, changing the volume of water pump liquid chamber 6a, drawing out cleaning fluid, and pumping cleaning fluid into cleaning pipe 10. The cleaning fluid is then sprayed out from nozzle 10b, and cleaning begins in conjunction with brush head 4.

[0039] The drive shaft 2 is a hollow shaft. A mounting sleeve 2a is coaxially mounted on the front end of the drive shaft 2. The rear end of the drive shaft 2 is closed. The inner diameter of the mounting sleeve 2a is larger than the inner diameter of the hollow drive shaft 2. A telescopic rod 3 is coaxially inserted into the hollow drive shaft 2 and movably connected to it. The front end of the telescopic rod 3 extends out of the mounting sleeve 2a. A telescopic spring 43 is coaxially mounted inside the hollow drive shaft 2. One end of the telescopic spring 43 is connected to the inner wall of the rear end of the hollow drive shaft 2. The telescopic rod 3 is a hollow rod with a closed front end. The other end of the telescopic spring 43 extends into the telescopic rod 3 and is connected to the inner wall of the front end of the telescopic rod 3. A controller 44 is installed inside the mounting sleeve 2a. The controller 44 includes a top cover 44a. The lower side of the top cover 44a is provided with corresponding U-shaped extrusion parts 44b and annular guide parts 44c. The upper inner wall of the mounting sleeve 2a has a mounting groove 45 corresponding to the top cover 44a. The inner wall of the mounting sleeve 2a has corresponding extrusion parts 44b. The guide member 44c has a second mounting groove 46 and a third mounting groove 47. The lower part of the third mounting groove 47 penetrates the lower side wall of the mounting sleeve 2a. The upper cover 44a is located inside the first mounting groove 45. A pressing button 44a1 is located on the upper side of the upper cover 44a and extends out of the mounting sleeve 2a. A control spring 48 is located at the bottom of the second mounting groove 46. The bottom of the pressing member 44b has a pressing part 44b1, which presses down on the control spring 48 below. Part 44c is installed in mounting groove 3 47. A limiting groove 49 is opened on the lower side wall of the telescopic rod 3. A stop block 50 is provided on the extrusion part 44b, which extends into the limiting groove 49. An inclined guide surface 50a is provided on the upper side of the stop block 50. A reset guide block 51 is provided on the lower side of the telescopic rod 3. The reset guide block 51 is attached to the extrusion part 44b. An inclined guide surface 51a is provided on the lower side of the reset guide block 51 corresponding to the guide surface 50a. The brush head 4 includes multiple bristles connected to the telescopic rod 3. Pressing down the button 44a1 causes the extruder 44b to press down the control spring 48, the stop block 50 to descend, and the telescopic rod 3 to extend forward. When it is necessary to retract the telescopic rod 3, push the telescopic rod 3 backward. The guide surface 51a of the reset guide block 51 and the guide surface 50a of the stop block 50 will cooperate, causing the extruder 44b to descend and press down the control spring 48. The reset guide block 51 of the telescopic rod 3 will return to the rear side of the extruder 44b, and the stop block 50 will block the telescopic rod 3, causing the telescopic rod 3 to retract.

[0040] The method of using this invention is as follows: When the switch state of the drive motor 13 is determined to be off, fill the water tank 9 with cleaning fluid, then connect the power cord to the power supply, press the motor switch button 52, the drive motor 13 rotates, the motor drives the second spur gear 14 to rotate, the second spur gear 14 drives the first spur gear 12 at the rear end of the telescopic arm to rotate, the first spur gear 12 drives the transmission shaft 2 to rotate, when the pull rod 34 is pressed down, the limit cap 37 abuts against the front limit surface 32a and the middle limit surface 32c, the limit plate 32 presses against the limit cap 37 to form a stable state, the lower coupling sleeve 29 and the upper coupling sleeve 28 merge, at this time when the two bevel gears mesh and drive, the upper rotating shaft 26 drives the lower rotating shaft 19 to rotate synchronously, the two positioning pins 35a are kept inserted into the annular groove 30 of the lower coupling sleeve 29. The rotation of the lower coupling sleeve 29 will not be affected. The lower rotating shaft 19 drives the transmission bolt 20 to rotate. The transmission bolt 20 drives the piston 7 to move back and forth in the water pump housing 6 through the swing connecting rod 21. The one-way valve 42 opens through the movement of the piston 7, and the cleaning fluid enters the water pump liquid chamber 6a from the water tank 9, changing the volume of the water pump liquid chamber 6a, drawing out the cleaning fluid, and the cleaning fluid is injected into the cleaning pipe 10. The cleaning fluid is sprayed out from the spray pipe 10b and starts cleaning in conjunction with the brush head 4. When the pull rod 34 is lifted upward, the limit cap 37 abuts against the rear limit surface 32b and the middle limit surface 32c. The limit plate 32 presses the limit cap 37 to form a stable state, the lower coupling sleeve 29 separates from the upper coupling sleeve 28, and the spray pipe 10b stops spraying water. The rotation speed of the transmission shaft 2 is 950~1150 r / min.

[0041] The method of using this invention includes the following steps: (1) When the switch state of the geared motor is determined to be closed, add cleaning fluid to the water tank 9. When the clutch is pressed down, the cleaning fluid flows from the water tank 9 into the water pump. After being squeezed by the piston 7, the cleaning fluid is squeezed from the connecting pipe into the hose and then enters the spray pipe from the hose. When the clutch is lifted to its original position, the cleaning fluid stops entering the water pump cavity.

[0042] (2) After the cleaning solution is sprayed, press the switch on the telescopic arm to extend the telescopic arm. Align it with the hard-to-clean area and press the button on the wooden handle. The small motor drives the gear to rotate, the gear drives the transmission shaft 2 to rotate, and the transmission shaft 2 drives the multi-hole rotating brush head 4 to rotate. Align the multi-hole rotating brush head 4 with the area to be cleaned and clean it.

[0043] This invention presents a multi-angle cleaner for laboratory magnetron sputtering vacuum chambers, constructed with an economical and practical structure. It effectively targets vacuum chambers with complex structures and minimizes cleaning dead zones. The device is highly adaptable, suitable for large machines and with enhanced internal structure. After modifying the rotating brush head 4, it is applicable to even more large machines. The device has a stronger cleaning capability for large-space vacuum chambers, with the rotating brush head 4 operating at multiple angles and the telescopic rod 3 adjusting the distance, resulting in smaller cleaning dead zones, a wider range of applications, and higher cleaning efficiency.

[0044] This invention is not limited to the above embodiments. Based on the technical solutions disclosed in this invention, those skilled in the art can make some substitutions and modifications to some of the technical features without creative effort, and all such substitutions and modifications are within the protection scope of this invention.

Claims

1. A multi-angle cleaner for a magnetron sputtering vacuum chamber, characterized in that, The device includes a main housing with a forward-extending drive shaft rotatably mounted on it. The drive shaft is connected to a rotary drive mechanism. A telescopic rod is connected to the front end of the drive shaft, and a brush head is located at the front end of the telescopic rod. A gripping handle is located on the lower side of the main housing. A water pump housing is located on the rear side of the main housing, containing a water pump liquid chamber. A piston is fitted inside the water pump liquid chamber, which is connected to a water tank via a water supply pipe. The piston is also connected to the rotary drive mechanism via a clutch control mechanism. A cleaning pipe is connected to the side of the water pump housing, corresponding to the brush head. The front end of the drive shaft extends out of the main housing and is perpendicular to the front side of the main housing. A bevel gear I and a spur gear I are sequentially mounted on the drive shaft at intervals, both located inside the main housing. The rotary drive mechanism includes a drive motor located on the upper rear side of the main housing. The output shaft of the drive motor is parallel to the drive shaft and extends forward into the main housing. Furthermore, a second spur gear is fitted, which meshes with the first spur gear; the main housing includes parallel vertical front and rear side plates, with a symmetrical left and right side plate respectively between the front and rear side plates, and horizontal upper and lower side plates corresponding to the upper and lower parts of the front, rear, left, and right side plates; the clutch control mechanism includes a front reinforcing plate and a rear reinforcing plate respectively disposed on the inner wall of the front and rear side plates, and a spacer between the upper parts of the front and rear reinforcing plates. A horizontal base plate has a vertical through hole 1 on it. A vertical lower rotating shaft is fitted through the through hole 1. A transmission bolt is fixed to the lower end of the lower rotating shaft. A swing connecting rod is hinged to the end of the transmission bolt. The water pump housing is cylindrical. The axis of the water pump housing is perpendicular to the rear side plate. The water pump housing is connected to the interior of the main housing. The piston is cylindrical. A fixed shaft is vertically installed inside the piston. The other end of the swing connecting rod is hinged to the fixed shaft. A second through hole is provided on the rear side plate to allow the swing connecting rod to pass through.A horizontal mounting plate is correspondingly provided above the base plate. The length of the mounting plate is less than the length of the base plate. A bearing seat is provided on the mounting plate, and a bearing is vertically installed in the bearing seat. A vertical upper rotating shaft is rotatably mounted on the bearing. The upper end of the upper rotating shaft extends upward and is fitted with a bevel gear two that meshes with bevel gear one. The lower end of the upper rotating shaft extends downward and is provided with an upper coupling sleeve. Several circumferentially spaced upper coupling grooves are formed on the outer periphery of the lower end of the upper coupling sleeve. The lower rotating shaft includes shaft body one, shaft body two, and shaft body three, which are distributed sequentially from top to bottom and connected as a whole. The central axes of shaft body one, shaft body two, and shaft body three coincide. Shaft body one and shaft body three are both square shafts. Shaft body two... The shaft is a circular shaft. The outer circumference of the shaft body two corresponds to and is movably connected to the inner wall of the through hole one. A lower coupling sleeve is fitted around the outer circumference of the shaft body one. The lower coupling sleeve includes a sleeve body one and a sleeve body two that are corresponding and coaxial. The sleeve body two is fitted onto the shaft body one and is movably connected to it. The outer diameter of the sleeve body one is larger than the outer diameter of the sleeve body two. Several circumferentially spaced lower coupling grooves are opened on the outer circumference of the upper end of the sleeve body one. Each upper coupling groove corresponds to each lower coupling groove. The upper coupling sleeve and the lower coupling sleeve are arranged correspondingly to each other. An annular groove is opened around the outer circumference of the sleeve body two. Two symmetrical reinforcing connecting plates one are vertically arranged between the mounting plate and the base plate. A vertical groove is provided between the upper parts of the two reinforcing connecting plates one. A limiting plate, parallel to the front side plate, has a V-shaped lower part. The V-shaped surface of the limiting plate forms a front limiting surface and a rear limiting surface. A middle limiting surface is located between the front and rear limiting surfaces. A mounting shaft is laterally positioned between the two reinforcing connecting plates. A pull rod is rotatably connected to the mounting shaft, and the pull rod has a rotating hole allowing the mounting shaft to pass through. The pull rod is perpendicular to the mounting shaft, with its front end extending out of the front side plate. A U-shaped connecting frame is located at the rear end of the pull rod. Lateral positioning pins are located on the inner sides of the left and right side plates of the connecting frame. The left and right side plates of the connecting frame are located on the left and right sides of the sleeve body two, respectively. Both positioning pins are inserted inward into an annular groove. A vertical rod is located on the upper side of the pull rod. A movable limiting cap is connected to the rod. The lower part of the limiting cap has an insertion hole for the insertion of the upright. The upper end of the limiting cap has a hemispherical surface. The outer diameter of the limiting cap is larger than the outer diameter of the upright. A compression spring is sleeved on the outer periphery of the upright. The upper and lower ends of the compression spring elastically abut against the lower end face of the limiting cap and the upper side of the pull rod, respectively. The hemispherical surface of the limiting cap corresponds to the front limiting surface, middle limiting surface, and rear limiting surface of the limiting plate. A limiting hole for the pull rod to pass through is opened on the front side plate. The pull rod is set corresponding to the limiting hole. A symmetrical arc-shaped protective plate one and a protective plate two are provided between the mounting plate and the base plate. The protective plate one and the protective plate two are respectively set on the left and right sides of the upper coupling sleeve and the lower coupling sleeve.The water supply pipe is coaxially mounted at the rear end of the water pump housing. The water pump's liquid chamber is connected to the water tank via the water supply pipe. An installation bracket is installed inside the water supply pipe, and a one-way valve is mounted on the bracket. The cleaning pipe includes a main pipe and a spray pipe. The main pipe is vertically mounted on the upper side of the water supply pipe. An installation bracket is also installed inside the main pipe, and a one-way valve is mounted on the bracket. The spray pipe passes through the upper side plate, extends downwards into the main housing, and then passes through the front side plate and extends forward. The extended end of the spray pipe corresponds to the brush head. The spray pipe is connected to the water supply pipe via the main pipe. The transmission bolt is mounted on shaft three.

2. The multi-angle cleaner for a magnetron sputtering vacuum chamber according to claim 1, characterized in that, The drive shaft is a hollow shaft, with a mounting sleeve coaxially mounted at its front end and a closed rear end. The inner diameter of the mounting sleeve is larger than the inner diameter of the hollow drive shaft. The telescopic rod is coaxially inserted into the hollow drive shaft and movably connected to it. The front end of the telescopic rod extends out of the mounting sleeve. A telescopic spring is coaxially mounted inside the hollow drive shaft, with one end connected to the inner wall of the rear end of the hollow drive shaft. The telescopic rod is also hollow, with a closed front end. The other end of the telescopic spring extends into the telescopic rod and connects to the inner wall of its front end. A controller is installed inside the mounting sleeve. The controller includes a top cover, with corresponding U-shaped extrusion parts and annular guide parts on the lower side of the top cover. The upper inner wall of the mounting sleeve has a mounting groove corresponding to the top cover. The inner wall of the sleeve has mounting grooves two and three corresponding to the extrusion component and guide component, respectively. The lower part of mounting groove three penetrates the lower side wall of the sleeve. The upper cover is set in mounting groove one, and a pressing button is provided on the upper side of the upper cover. The pressing button extends out of the sleeve. A control spring is provided at the bottom of mounting groove two. The extrusion component has an extrusion part at the bottom, which presses down on the control spring below. The guide component is installed in mounting groove three. A limit groove is provided on the lower side wall of the telescopic rod. A stop block is provided on the extrusion component that extends into the limit groove. An inclined guide surface one is provided on the upper side of the stop block. A reset guide block is provided on the lower side of the telescopic rod. The reset guide block is attached to the extrusion component. An inclined guide surface two is provided on the lower side of the reset guide block corresponding to guide surface one. The brush head includes multiple bristles connected to the telescopic rod.

3. A multi-angle cleaner for a magnetron sputtering vacuum chamber according to claim 1 or 2, characterized in that, The grip handle is equipped with a switch button for controlling the drive motor.

Images