一种晶锭整形加工装备

CN119871158BActive Publication Date: 2026-07-17SHANGHAI MACHINE TOOL WORK

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI MACHINE TOOL WORK
Filing Date
2025-03-18
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing ingot processing technologies suffer from inaccurate positioning, inefficient crystal orientation detection and angle adjustment, lack of processing flexibility, and poor equipment compatibility, which affect wafer processing quality and production efficiency, and fail to meet the demands for high precision, high efficiency, and diversity.

Method used

Employing a dedicated workpiece clamping module, vacuum adsorption positioning, crystal orientation detector, and modular design, combined with end face grinding wheel, outer cylindrical grinding wheel, and slotted grinding wheel modules, it achieves high-precision positioning, rapid crystal orientation detection, and angle adjustment, adapting to the processing of various crystal ingot specifications.

Benefits of technology

It improves the precision of ingot processing and equipment compatibility, meets diverse needs, reduces scrap rates, enhances production efficiency and product quality, and strengthens market competitiveness.

✦ Generated by Eureka AI based on patent content.

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Abstract

本发明关于一种晶锭整形加工装备,涉及半导体制造技术领域。包括头架、头架工件夹持模块、尾架工件夹持模块、尾架和砂轮架转台模块,头架工件夹持模块安装在头架一端,尾架工件夹持模块安装在尾架一端,尾架工件夹持模块与头架工件夹持模块相对设置,用于晶锭工件装夹定位和夹紧;晶向检测仪设于头架工件夹持模块一侧,用于检测晶锭工件的晶向并输出检测结果;砂轮架转台模块设于尾架工件夹持模块一侧,用于调整晶锭工件的加工角度;砂轮架转台模块上安装有端面砂轮模块、外圆砂轮模块及开槽砂轮模块,对晶锭工件进行加工。本发明提升了加工精度和设备兼容性,能够满足多样化加工需求,以提升半导体制造过程中晶锭加工环节的整体水平。
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