基于智能传感器的研磨液喷液监测系统及方法

By analyzing the coverage status of the polishing slurry and abnormal contact status of the equipment using intelligent sensors, the problem of low efficiency in polishing slurry spray monitoring has been solved, resulting in improved workpiece surface quality, equipment protection, and optimized use of polishing slurry.

CN119871204BActive Publication Date: 2026-07-17QINGDAO HUAXIN JINGDIAN TECH CO LTD +1

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
QINGDAO HUAXIN JINGDIAN TECH CO LTD
Filing Date
2025-03-21
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing technologies fail to effectively consider the interaction mechanism between the grinding slurry, the workpiece surface, and the grinding head in the monitoring of grinding slurry spray, resulting in low grinding efficiency and excessive equipment wear, and lack of precise control over the amount and coverage angle of the grinding slurry spray.

Method used

By acquiring workpiece surface feature data and grinding equipment parameters through intelligent sensors, analyzing the grinding slurry coverage and abnormal equipment contact conditions, assessing grinding quality risks, and optimizing and providing early warnings for the spraying device, precise control of grinding slurry spraying is achieved.

Benefits of technology

It improves grinding efficiency, reduces excessive wear on workpieces and equipment, optimizes the use of grinding fluid, and ensures workpiece surface quality and stable equipment operation.

✦ Generated by Eureka AI based on patent content.

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Abstract

本发明涉及研磨液监测技术领域,尤其涉及基于智能传感器的研磨液喷液监测系统及方法,包括:基于研磨点特征数据和研磨液喷液设置数据,对工件表面的研磨液覆盖状态进行分析;基于研磨点特征数据和研磨设备的参数控制数据,对研磨设备与工件表面的接触异常状态进行分析;根据工件表面的研磨液覆盖状态分析结果和研磨设备与工件表面的接触异常状态分析结果,对工件表面研磨质量风险进行评估;根据工件表面研磨质量风险评估结果,对研磨液喷射装置进行优化预警,从而提高了工件的研磨效率,避免工件和研磨设备的过度加工损耗,减少了研磨液的过度消耗。
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