Ferrite ceramic welding method

Abstract

The invention discloses a ferrite ceramic welding method, and relates to the technical field of welding of microwave devices. The ferrite ceramic welding method comprises the following steps: pretreating a ferrite ceramic material; injecting metal ions into the shallow surface layer of the ferrite ceramic material to form a transition layer; depositing a metal layer on the transition layer; depositing a barrier layer on the metal layer; and placing a solder between the barrier layer and the metal substrate for welding. The metal ions are injected into the shallow surface layer of the ferrite ceramic material through the ion injection method, and then the metal layer and the barrier layer are deposited on the surface through the magnetron sputtering method, so that compared with a traditional silver coating method (silver is coated on the surface of the ferrite for sintering to form a silver layer), the bonding strength between the ferrite and a metal matrix can be improved, and the service life of the ferrite is prolonged. And the vacuum brazing temperature and the welding strength are effectively improved.

Description

Technical Field

[0001] The invention relates to the technical field of welding of microwave devices, and in particular to a ferrite ceramic welding method. Background Art

[0002] Ferrite, as a non-metallic magnetic material, plays an important role in the processing of microwave signals due to its unique electromagnetic properties. It can effectively isolate, change the direction or modulate the frequency of microwave signals, so it has been widely used in microwave systems such as radar, communication, radio navigation, electronic countermeasures, remote control, and telemetry. In these microwave devices, ferrite materials usually need to be connected to metal to realize their microwave functions and fix the materials.

[0003] However, brazing of ceramics (including ferrites) and metals has always been a technical problem. Due to the surface characteristics of ceramic materials, most brazing materials are difficult to effectively wet on their surfaces, making the brazing process difficult. Even if some brazing materials can wet the ceramic surface, a variety of brittle compounds are easily formed at the interface during the brazing process. These brittle compounds will seriously affect the mechanical properties of the brazed joint, making it difficult to ensure the strength and reliability of the brazed joint.

[0004] In order to solve the problem of brazing between ceramics and metals, a ceramic metallization method is proposed in the prior art. This method is to add a metal film layer on the surface of ceramics (such as ferrite) that is firmly bonded to the ceramics and not easily melted. Through this metal film layer, the metallized ceramics and metals are welded using solder, thereby achieving a reliable connection between ceramics and metals.

[0005] Although the ceramic metallization method has solved the brazing problem between ceramics and metals to a certain extent, there are still some problems with the metal layer obtained by the existing process. For example, the vacuum brazing temperature is low, which may cause the brazed joint to crack during subsequent use. In addition, the mechanical properties and reliability of the brazed joints obtained by the existing process are still difficult to meet the actual needs when subjected to the working requirements of high-power microwave devices. There is also a ferrite and metal welding method disclosed in CN 107225336 A, which uses silver ions to be coated with silver on the surface of the ferrite by silvering to form a silver layer, and then deposits a barrier layer to prepare a ferrite metallization layer. However, this method still has the problems of low bonding strength and low welding strength.

[0006] Therefore, how to improve the ceramic metallization process, increase the bonding strength of the metal layer, avoid blistering / peeling of the metal layer, and improve the mechanical properties of the brazed joint to meet the working requirements of high-power microwave devices has become a technical problem that needs to be solved urgently. Summary of the invention

[0007] The technical problem to be solved by the present invention is the lack of a ceramic welding method with high bonding strength, easy bubbling / peeling of the metal layer and good mechanical properties of the brazed joint. The purpose is to provide a ferrite ceramic welding method, which solves the problems of low bonding strength of the metal layer welding, easy bubbling / peeling of the metal layer and poor mechanical properties of the brazed joint in the prior art.

[0008] The present invention is achieved through the following technical solutions:

[0009] A ferrite ceramic welding method comprises the following steps:

[0010] Pre-treating the ferrite ceramic material;

[0011] Implanting metal ions into the shallow surface layer of the ferrite ceramic material to form a transition layer;

[0012] depositing a metal layer on the transition layer;

[0013] depositing a barrier layer on the metal layer;

[0014] Solder is placed between the barrier layer and the metal substrate to perform welding.

[0015] As a possible design, the pretreatment includes: washing the ferrite ceramic material with acid, deionized water and anhydrous ethanol in sequence, and then drying.

[0016] As a possible design, the metal ions are injected into the shallow surface layer of the ferrite ceramic material by an ion implanter; the metal ions include silver ions and / or copper ions; the metal ion implantation dose is 1×10 15 ~1×10 20 / cm 2 .

[0017] As a possible design, the metal layer is deposited by magnetron sputtering; and the material of the metal layer is silver.

[0018] As a possible design, the barrier layer is deposited by magnetron sputtering, and the barrier layer is made of nickel.

[0019] As a possible design, the thickness of the metal layer is 1 to 20 μm; the thickness of the barrier layer is 1 to 20 μm.

[0020] As a possible design, the welding is brazing, the welding is vacuum welding, and the welding temperature is 800-900°C.

[0021] As a possible design, the solder is AgCu, AgCuNi or AgCuTi.

[0022] As a possible design, the solder is AgCu.

[0023] As a possible design, the metal substrate is an oxygen-free copper substrate.

[0024] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0025] Since ferrite ceramic material and oxygen-free copper cannot be directly welded, the present invention injects metal ions into the shallow surface layer of ferrite ceramic material by ion implantation, and then deposits metal layer and barrier layer on the surface by magnetron sputtering. Compared with the traditional silver method (silver is coated on the surface of ferrite to form a silver layer), the bonding strength between ferrite and metal matrix can be improved, and the vacuum brazing temperature and welding strength can be effectively improved. In the present invention, during the ion implantation process, after the ion beam is shot to the ferrite ceramic material, it will collide with the material atoms, gradually lose energy and eventually stay in the material to form an implantation layer, and the implantation layer will be combined with subsequent coating technology to form a metal bond at the contact interface. The bonding strength of the coating and the substrate can be significantly improved by this bonding action. Moreover, during the ion implantation process, the doping concentration and depth can be accurately controlled by adjusting the energy and dosage of the implantation, which makes the doping process more flexible and accurate, and the uniformity and repeatability of the ion implantation are better, making the welding more reliable. In addition, the processing of the present invention will not cause damage and pollution to the material, and can improve the utilization rate of the material and reduce the scrap rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the exemplary embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and should not be regarded as limiting the scope. For those of ordinary skill in the art, other relevant drawings can be obtained based on these drawings without creative work. In the drawings:

[0027] Figure 1 A flow chart of a ferrite ceramic welding method of the present invention;

[0028] Figure 2 This is a product picture after brazing according to Example 2 of the present invention;

[0029] Figure 3 This is a product picture of the nickel-plated sample of Comparative Example 1 of the present invention, in which the nickel layer falls off after brazing;

[0030] Figure 4 This is a product picture of Comparative Example 2 of the present invention after the silver layer and the nickel layer are partially peeled off. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention is further described in detail below in conjunction with examples and drawings. The illustrative embodiments of the present invention and their description are only used to explain the present invention and are not intended to limit the present invention. If specific conditions are not specified in the examples, they are carried out according to conventional conditions or conditions recommended by the manufacturer. If the manufacturer is not specified for the reagents or instruments used, they are all conventional products that can be purchased commercially.

[0032] Throughout the specification, references to "one embodiment," "an embodiment," "an example," or "an example" mean that a particular feature, structure, or characteristic described in conjunction with the embodiment or example is included in at least one embodiment of the present invention. Therefore, the phrases "one embodiment," "an embodiment," "an example," or "an example" appearing in various places throughout the specification do not necessarily all refer to the same embodiment or example. In addition, particular features, structures, or characteristics may be combined in one or more embodiments or examples in any suitable combination and / or sub-combination. In addition, it will be appreciated by those of ordinary skill in the art that the figures provided herein are for illustrative purposes and that the figures are not necessarily drawn to scale. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0033] The "range" disclosed in the present invention is defined in the form of a lower limit and an upper limit, and a given range is defined by selecting a lower limit and an upper limit, and the selected lower limit and upper limit define the boundaries of the particular range. The range defined in this way can be inclusive or exclusive of the end values, and can be arbitrarily combined, that is, any lower limit can be combined with any upper limit to form a range. For example, if a range of 60 to 120 and 80 to 110 is listed for a particular parameter, it is understood that a range of 60 to 110 and 80 to 120 is also expected. In addition, if the minimum range values ​​1 and 2 are listed, and if the maximum range values ​​3, 4 and 5 are listed, the following ranges can all be expected: 1 to 3, 1 to 4, 1 to 5, 2 to 3, 2 to 4 and 2 to 5. In the present invention, unless otherwise specified, the numerical range "a to b" represents an abbreviation of any real number combination between a and b, wherein a and b are both real numbers. For example, the numerical range "0-5" means that all real numbers between "0-5" are listed in this document, and "0-5" is just an abbreviation of these numerical combinations. In addition, when a parameter is expressed as an integer ≥ 2, it is equivalent to disclosing that the parameter is, for example, an integer of 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, etc.

[0034] The prior art is to prepare a ferrite metallization layer by coating the surface of the ferrite with silver ions by silvering method, and then depositing a barrier layer. However, this method still has the problems of low bonding strength and low welding strength. The present invention adopts ion implantation-magnetron sputtering combined technology, selects to pre-treat and clean the ferrite ceramic, and then implants metal ions into the shallow surface layer of the ferrite ceramic by ion implantation, and combines the magnetron sputtering method to deposit silver (metal layer) and nickel (barrier layer) in sequence, which can effectively improve the bonding strength between the ferrite and the metal substrate, and improve the vacuum brazing temperature and welding strength.

[0035] A ferrite ceramic welding method, referring to Figure 1 , including the following steps:

[0036] S1. Pre-treating the ferrite ceramic material.

[0037] In some embodiments of the present invention, the pretreatment comprises: washing the ferrite ceramic material with acid, deionized water and anhydrous ethanol in sequence, and then drying.

[0038] By pre-treating the ferrite ceramic material in sequence, 1. impurities such as oil, rust, moisture and paint on the surface of the material can be removed to ensure the cleanliness of the weld area and improve the welding quality. 2. During the welding process, high temperature will cause the metal in the weld area to oxidize rapidly. If there are impurities on the surface of the material, this oxidation process will be accelerated and new pollutants may be introduced. Pre-cleaning can effectively reduce the presence of these impurities, thereby reducing the risk of weld oxidation and contamination. 3. Pre-cleaning can remove dirt and impurities on the surface of the material, making the welding process smoother, reducing failures and downtime caused by impurities during welding, improving welding efficiency and reducing production costs. 4. In some special cases, such as welding high-pressure, high-temperature, flammable and explosive pipelines such as oxygen pipelines, grease, dust or other organic residues on the surface of the material may cause fire or explosion accidents. Pre-cleaning can minimize these safety hazards and ensure the safety of the welding process.

[0039] Preferably, the drying method is blow drying.

[0040] S2. Inject metal ions into the shallow surface layer of the ferrite ceramic material to form a transition layer.

[0041] Preferably, the metal ion implantation pressure is 5×10 -4 ~5×10 -3 Pa, more preferably 3×10 -3 Pa.

[0042] Preferably, the thickness of the transition layer is 10 nm to 10 mm.

[0043] In some embodiments of the present invention, the metal ions are implanted into the superficial layer of the ferrite ceramic material by an ion implanter; the metal ions include silver ions and / or copper ions; the metal ion implantation dose is 1×10 15 ~1×10 20 / cm 2 .

[0044] Silver ions and copper ions can form strong metallic bonds with the metal layer.

[0045] The inventors have found that if the injection dose is too small, the effect of enhancing the membrane-based bonding strength is not obvious; if the injection dose is too large, it may cause atomic displacement and material damage, which in turn reduces the bonding strength.

[0046] S3. Depositing a metal layer on the transition layer.

[0047] The inventors have found that the welding of ferrite and oxygen-free copper can only be achieved after the ferrite surface is metallized (silver layer). The main function of the barrier layer is to prevent the metal layer from dissolving and improve the welding quality. Only the barrier layer cannot meet the welding requirements of ferrite and oxygen-free copper.

[0048] In some embodiments of the present invention, the metal layer is deposited by magnetron sputtering; and the metal layer is made of silver.

[0049] In some embodiments of the present invention, the thickness of the metal layer is 1-20 μm.

[0050] Under the action of solder, the metal layer can be well welded with the ferrite. If the metal layer is too thin, it will affect the welding effect and cause the metal layer to fall off the surface of the ferrite; if the metal layer is too thick, the weld thickness at the welding point will be too large, and the mechanical properties and signal transmission performance will deteriorate.

[0051] S4. Depositing a barrier layer on the metal layer.

[0052] In some embodiments of the present invention, the barrier layer is deposited by magnetron sputtering, and the barrier layer is made of nickel.

[0053] In some embodiments of the present invention, the barrier layer has a thickness of 1-20 μm.

[0054] The function of the barrier layer is to prevent the metal layer from dissolving. When the ferrite is welded to the metal, the solder will dissolve the metal layer, resulting in the separation of the metal layer and the ferrite. Nickel is selected as the barrier layer. Nickel has good anti-oxidation properties and can effectively prevent the metal layer from reacting with oxygen in the air at high temperatures, thereby protecting the welding surface from oxidation; it can also prevent the solder from flowing out and avoid the formation of solder bridges; it inhibits the mutual diffusion between metals through alloying and improves the welding quality. If it is too thin, the barrier effect is not obvious, and if it is too thick, it will affect the welding performance.

[0055] S5. Place solder between the barrier layer and the metal substrate for welding.

[0056] In some embodiments of the present invention, the welding is brazing, the welding is vacuum welding, and the welding temperature is 800-900°C.

[0057] During the welding process, ferrite usually needs to be preheated to above 800℃ to ensure that its initial magnetic permeability and thermal sensitivity meet the design requirements. Subsequent welding at this temperature is the key to ensure its stable performance under high temperature conditions.

[0058] In some embodiments of the present invention, the solder is AgCu, AgCuNi or AgCuTi.

[0059] In some embodiments of the present invention, the solder is AgCu.

[0060] In some embodiments of the present invention, the metal matrix is ​​an oxygen-free copper matrix. Oxygen-free copper has high purity, excellent electrical conductivity, thermal conductivity, hot and cold processing performance and good welding performance, and can ensure the normal operation of aerospace equipment.

[0061] Example 1

[0062] A ferrite ceramic welding method comprises the following steps:

[0063] S1, using acid, deionized water, and anhydrous ethanol to degrease and clean the ferrite ceramic matrix material, and then using dry gas to blow it dry for standby use;

[0064] S2, use ion implantation machine to implant silver ions into the shallow surface layer of ferrite ceramic material, the injection dose is 5×10 18 / cm 2 , forming a transition layer;

[0065] S3, depositing a silver metal layer with a thickness of 20 μm on the transition layer by magnetron sputtering;

[0066] S4, depositing a nickel barrier layer with a thickness of 20 μm on the metal layer by magnetron sputtering;

[0067] S5. Place the brazing solder (AgCu) between the barrier layer and the oxygen-free copper substrate for vacuum welding at a welding temperature of 850°C.

[0068] Example 2

[0069] A ferrite ceramic welding method comprises the following steps:

[0070] S1, using acid, deionized water, and anhydrous ethanol to degrease and clean the ferrite ceramic matrix material, and then using dry gas to blow it dry for standby use;

[0071] S2, use ion implantation machine to implant silver ions into the shallow surface layer of ferrite ceramic material, the injection dose is 5×10 17 / cm 2 , forming a transition layer;

[0072] S3, depositing a silver metal layer with a thickness of 10 μm on the transition layer by magnetron sputtering;

[0073] S4, depositing a nickel barrier layer with a thickness of 10 μm on the metal layer by magnetron sputtering;

[0074] S5. Place the brazing solder (AgCu) between the barrier layer and the oxygen-free copper substrate for vacuum welding at a welding temperature of 850°C.

[0075] Figure 2 This is a picture of the product after brazing. The product was inspected by X-ray inspection system X-Ray, and the brazing rate was 100%, which shows that the brazing material and the welding surface are tightly combined. The tighter the combination, the greater the welding strength and the better the welding quality.

[0076] Example 3

[0077] A ferrite ceramic welding method comprises the following steps:

[0078] S1, using acid, deionized water, and anhydrous ethanol to degrease and clean the ferrite ceramic matrix material, and then using dry gas to blow it dry for standby use;

[0079] S2, use ion implantation machine to implant silver ions into the shallow surface layer of ferrite ceramic material, the injection dose is 5×10 16 / cm 2 , forming a transition layer;

[0080] S3, depositing a silver metal layer with a thickness of 5 μm on the transition layer by magnetron sputtering;

[0081] S4, depositing a nickel barrier layer with a thickness of 5 μm on the metal layer by magnetron sputtering;

[0082] S5. Place the brazing solder (AgCu) between the barrier layer and the oxygen-free copper substrate for vacuum welding at a welding temperature of 850°C.

[0083] Example 4

[0084] A ferrite ceramic welding method comprises the following steps:

[0085] S1, using acid, deionized water, and anhydrous ethanol to degrease and clean the ferrite ceramic matrix material, and then using dry gas to blow it dry for standby use;

[0086] S2, use ion implantation machine to implant copper ions into the shallow surface layer of ferrite ceramic material, the injection dose is 5×10 20 / cm 2 , forming a transition layer;

[0087] S3, depositing a silver metal layer with a thickness of 20 μm on the transition layer by magnetron sputtering;

[0088] S4, depositing a nickel barrier layer with a thickness of 20 μm on the metal layer by magnetron sputtering;

[0089] S5. Place the brazing material (AgCuTi) between the barrier layer and the oxygen-free copper substrate for vacuum welding at a welding temperature of 900°C.

[0090] Example 5

[0091] A ferrite ceramic welding method comprises the following steps:

[0092] S1, using acid, deionized water, and anhydrous ethanol to degrease and clean the ferrite ceramic matrix material, and then using dry gas to blow it dry for standby use;

[0093] S2, use ion implantation machine to implant copper ions into the shallow surface layer of ferrite ceramic material, the injection dose is 5×10 15 / cm 2 , forming a transition layer;

[0094] S3, depositing a silver metal layer with a thickness of 20 μm on the transition layer by magnetron sputtering;

[0095] S4, depositing a nickel barrier layer with a thickness of 20 μm on the metal layer by magnetron sputtering;

[0096] S5. Place the brazing solder (AgCuNi) between the barrier layer and the oxygen-free copper substrate for vacuum welding at a welding temperature of 800°C.

[0097] Example 6

[0098] This embodiment is basically the same as Embodiment 1, except that the material of the transition layer is copper.

[0099] A ferrite ceramic welding method comprises the following steps:

[0100] S1, using acid, deionized water, and anhydrous ethanol to degrease and clean the ferrite ceramic matrix material, and then using dry gas to blow it dry for standby use;

[0101] S2, use ion implantation machine to implant copper ions into the shallow surface layer of ferrite ceramic material, the injection dose is 5×10 18 / cm 2 , forming a transition layer;

[0102] S3, depositing a silver metal layer with a thickness of 20 μm on the transition layer by magnetron sputtering;

[0103] S4, depositing a nickel barrier layer with a thickness of 20 μm on the metal layer by magnetron sputtering;

[0104] S5. Place the brazing solder (AgCu) between the barrier layer and the oxygen-free copper substrate for vacuum welding at a welding temperature of 850°C.

[0105] Example 7

[0106] This embodiment is basically the same as the embodiment 1, except that the welding temperature is 1000°C.

[0107] A ferrite ceramic welding method comprises the following steps:

[0108] S1, using acid, deionized water, and anhydrous ethanol to degrease and clean the ferrite ceramic matrix material, and then using dry gas to blow it dry for standby use;

[0109] S2, use ion implantation machine to implant silver ions into the shallow surface layer of ferrite ceramic material, the injection dose is 5×10 18 / cm 2 , forming a transition layer;

[0110] S3, depositing a silver metal layer with a thickness of 20 μm on the transition layer by magnetron sputtering;

[0111] S4, depositing a nickel barrier layer with a thickness of 20 μm on the metal layer by magnetron sputtering;

[0112] S5. Place the brazing solder (AgCu) between the barrier layer and the oxygen-free copper substrate for vacuum welding at a welding temperature of 1000°C.

[0113] Example 8

[0114] This embodiment is basically the same as the embodiment 1, except that the welding temperature is 700°C.

[0115] A ferrite ceramic welding method comprises the following steps:

[0116] S1, using acid, deionized water, and anhydrous ethanol to degrease and clean the ferrite ceramic matrix material, and then using dry gas to blow it dry for standby use;

[0117] S2, use ion implantation machine to implant silver ions into the shallow surface layer of ferrite ceramic material, the injection dose is 5×10 18 / cm 2 , forming a transition layer;

[0118] S3, depositing a silver metal layer with a thickness of 20 μm on the transition layer by magnetron sputtering;

[0119] S4, depositing a nickel barrier layer with a thickness of 20 μm on the metal layer by magnetron sputtering;

[0120] S5. Place the brazing solder (AgCu) between the barrier layer and the oxygen-free copper substrate for vacuum welding at a welding temperature of 700°C.

[0121] Comparative Example 1

[0122] This comparative example is basically the same as Example 1, except that only a barrier layer of nickel is plated on the surface of the ferrite.

[0123] S1, using acid, deionized water, and anhydrous ethanol to degrease and clean the ferrite ceramic matrix material, and then using dry gas to blow it dry for standby use;

[0124] S2, depositing a nickel barrier layer with a thickness of 10 μm on the metal layer by magnetron sputtering;

[0125] S3. Place the brazing solder (AgCu) between the barrier layer and the oxygen-free copper substrate for vacuum welding at a welding temperature of 850°C.

[0126] observe Figure 3 , Figure 3 This is a product picture of a nickel-plated sample with the nickel layer falling off after brazing (ferrite ceramic matrix material). Figure 3 It can be seen that only plating the nickel layer will result in poor bonding between the ferrite ceramic base material and the metal layer.

[0127] Comparative Example 2

[0128] This comparative example is basically the same as Example 1, except that: no ion implantation is performed on the ferrite surface, and a silver metal layer is plated first and then a barrier layer of nickel is plated.

[0129] S1, using acid, deionized water, and anhydrous ethanol to degrease and clean the ferrite ceramic matrix material, and then using dry gas to blow it dry for standby use;

[0130] S2, depositing a silver metal layer with a thickness of 10 μm on the transition layer by magnetron sputtering;

[0131] S3, depositing a nickel barrier layer with a thickness of 10 μm on the metal layer by magnetron sputtering;

[0132] S4. Place the brazing solder (AgCu) between the barrier layer and the oxygen-free copper substrate for vacuum welding at a welding temperature of 850°C.

[0133] observe Figure 4 , Figure 4 This is a product picture of a silver-plated and nickel-plated sample after brazing, with the silver layer and nickel layer partially falling off. Figure 4 It can be seen that only plating the silver layer and the nickel layer will result in poor bonding between the ferrite ceramic base material and the metal layer.

[0134] The present invention implants metal ions into the shallow surface layer of ferrite ceramic material by ion implantation, and then deposits a metal layer and a barrier layer on the surface by magnetron sputtering. Compared with the traditional silver coating method (coating silver on the ferrite surface and sintering to form a silver layer), the bonding strength between ferrite and metal matrix can be improved, and the vacuum brazing temperature and welding strength can be effectively improved.

[0135] The specific implementation methods described above further illustrate the objectives, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above description is only a specific implementation method of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A ferrite ceramic welding method, characterized in that: The steps include: pre-treating the ferrite ceramic material; Implanting metal ions into the shallow surface layer of the ferrite ceramic material to form a transition layer; depositing a metal layer on the transition layer; depositing a barrier layer on the metal layer; Solder is placed between the barrier layer and the metal substrate to perform welding.

2. A ferrite ceramic welding method according to claim 1, characterized in that: The pretreatment comprises: washing the ferrite ceramic material with acid, deionized water and anhydrous ethanol in sequence, and then drying.

3. A ferrite ceramic welding method according to claim 1, characterized in that: The metal ions are injected into the shallow surface layer of the ferrite ceramic material by an ion implanter; the metal ions include silver ions and / or copper ions; the metal ion implantation dose is 1×10 15 ~1×10 20 / cm 2 .

4. A ferrite ceramic welding method according to claim 1, characterized in that: The metal layer is deposited by magnetron sputtering; the metal layer is made of silver.

5. A ferrite ceramic welding method according to claim 1, characterized in that: The barrier layer is deposited by magnetron sputtering and is made of nickel.

6. A ferrite ceramic welding method according to claim 1, characterized in that: The thickness of the metal layer is 1 to 20 μm; the thickness of the barrier layer is 1 to 20 μm.

7. A ferrite ceramic welding method according to claim 1, characterized in that: The welding is brazing, the welding is vacuum welding, and the welding temperature is 800-900°C.

8. A ferrite ceramic welding method according to claim 1, characterized in that: The solder is AgCu, AgCuNi or AgCuTi.

9. A ferrite ceramic welding method according to claim 1 or 8, characterized in that: The solder is AgCu.

10. A ferrite ceramic welding method according to claim 1, characterized in that: The metal substrate is an oxygen-free copper substrate.

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