一种钡配合物及其制备方法和用途
By using a neutral nitrogen heterocyclic chelating ligand to form a stable barium complex with barium ions, the problems of insufficient volatility and high preparation cost of barium organic complexes are solved, realizing a high-efficiency and low-cost thin film deposition process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- GANJIANG INNOVATION ACAD CHINESE ACAD OF SCI
- Filing Date
- 2025-01-17
- Publication Date
- 2026-07-17
AI Technical Summary
Existing barium organic complexes have insufficient volatility during thin film deposition, high preparation costs, and complex processes, making it difficult to meet the requirements of efficient chemical vapor deposition.
A stable barium complex is formed by a neutral nitrogen heterocyclic chelating ligand with abundant coordination sites and barium ions. The complex is prepared by reacting the barium salt in an aqueous solution, avoiding the use of high-cost metallic barium raw materials. The simplified preparation method includes chelation reaction and recrystallization purification.
It significantly improves the volatility of barium complexes and reduces production costs, achieving an efficient and stable chemical vapor deposition process, and lowering the initial volatilization temperature and residual rate.
Smart Images
Figure CN119874727B_ABST