In-situ soft x-ray fluorescence absorption spectroscopy acquisition system

Abstract

This invention relates to the field of soft X-ray measurement technology, specifically to an in-situ soft X-ray fluorescence absorption spectroscopy acquisition system. It includes a synchrotron radiation source, a beamline monochromator, a beam current monitoring device, and a sample stage arranged linearly in sequence. Synchrotron radiation emitted by the synchrotron radiation source is monochromated by the beamline monochromator and projected onto a sample at the sample stage with a specific energy. The beam current monitoring device measures the intensity of the synchrotron radiation beam current in real time and generates a first current signal fed back to a numerical control terminal. A fluorescence signal acquisition device is installed around the sample stage to capture the fluorescence signal emitted from the sample after synchrotron radiation irradiation and generates a second current signal fed back to the numerical control terminal. The numerical control terminal is configured to control the beamline monochromator to perform energy scanning on the sample and to combine the first and second current signals received in real time to generate a soft X-ray fluorescence absorption spectrum result.

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